JPH0445959B2 - - Google Patents

Info

Publication number
JPH0445959B2
JPH0445959B2 JP20389886A JP20389886A JPH0445959B2 JP H0445959 B2 JPH0445959 B2 JP H0445959B2 JP 20389886 A JP20389886 A JP 20389886A JP 20389886 A JP20389886 A JP 20389886A JP H0445959 B2 JPH0445959 B2 JP H0445959B2
Authority
JP
Japan
Prior art keywords
microwave
magnetron
bulb
microwaves
supply means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20389886A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6369198A (ja
Inventor
Jii Yuurii Maikeru
Rinchi Donarudo
Kamarei Mohamado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fusion Systems Corp
Original Assignee
Fusion Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fusion Systems Corp filed Critical Fusion Systems Corp
Priority to JP20389886A priority Critical patent/JPS6369198A/ja
Publication of JPS6369198A publication Critical patent/JPS6369198A/ja
Publication of JPH0445959B2 publication Critical patent/JPH0445959B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
JP20389886A 1986-09-01 1986-09-01 マイクロ波駆動型無電極光源装置 Granted JPS6369198A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20389886A JPS6369198A (ja) 1986-09-01 1986-09-01 マイクロ波駆動型無電極光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20389886A JPS6369198A (ja) 1986-09-01 1986-09-01 マイクロ波駆動型無電極光源装置

Publications (2)

Publication Number Publication Date
JPS6369198A JPS6369198A (ja) 1988-03-29
JPH0445959B2 true JPH0445959B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-28

Family

ID=16481540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20389886A Granted JPS6369198A (ja) 1986-09-01 1986-09-01 マイクロ波駆動型無電極光源装置

Country Status (1)

Country Link
JP (1) JPS6369198A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6369198A (ja) 1988-03-29

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