JPH0445867A - Coating method with lubricant - Google Patents
Coating method with lubricantInfo
- Publication number
- JPH0445867A JPH0445867A JP15307690A JP15307690A JPH0445867A JP H0445867 A JPH0445867 A JP H0445867A JP 15307690 A JP15307690 A JP 15307690A JP 15307690 A JP15307690 A JP 15307690A JP H0445867 A JPH0445867 A JP H0445867A
- Authority
- JP
- Japan
- Prior art keywords
- lubricant
- substrate
- coated
- solution
- lubricant solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000314 lubricant Substances 0.000 title claims abstract description 104
- 238000000576 coating method Methods 0.000 title description 13
- 239000000758 substrate Substances 0.000 claims abstract description 64
- 238000000034 method Methods 0.000 claims description 6
- 239000000428 dust Substances 0.000 abstract description 7
- 239000000356 contaminant Substances 0.000 abstract description 5
- 239000011248 coating agent Substances 0.000 description 10
- 239000010408 film Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 238000005461 lubrication Methods 0.000 description 6
- 239000003973 paint Substances 0.000 description 6
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 238000007598 dipping method Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- BOSAWIQFTJIYIS-UHFFFAOYSA-N 1,1,1-trichloro-2,2,2-trifluoroethane Chemical compound FC(F)(F)C(Cl)(Cl)Cl BOSAWIQFTJIYIS-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明は、例えば磁気記録媒体などの被塗物に潤滑油
等を塗布する潤滑剤塗布方法および装置に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a lubricant application method and apparatus for applying lubricant or the like to an object to be coated, such as a magnetic recording medium.
［従来の技術］
最近、めっき、蒸着、スパッタなどによって成膜される
薄膜磁気記録媒体の耐磨耗等の機械的耐久性改善の要求
が高まっている。この耐久性は、潤滑処理技術に大きく
左右され、たとえ優れた潤滑性能を有する潤滑剤を用い
て処理したとしても、その処理方法（条件）が適切でな
いと十分な性能を発揮しない。そのため潤滑性能の優れ
た材料開発も急がれていることは言うまでもないが、そ
の材料特性を十分活かしきるための最適処理方法を開発
することは、より重要なテーマと考えられる。[Prior Art] Recently, there has been an increasing demand for improved mechanical durability such as wear resistance of thin film magnetic recording media formed by plating, vapor deposition, sputtering, etc. This durability is greatly influenced by the lubrication treatment technology, and even if the treatment is performed using a lubricant with excellent lubrication performance, sufficient performance will not be exhibited unless the treatment method (conditions) are appropriate. Therefore, it goes without saying that there is an urgent need to develop materials with excellent lubrication performance, but an even more important theme is to develop optimal processing methods to fully utilize the material's properties.
第３図は例えば文献（Ｄｒ、Ｐｉｅｒ、Ｔｈｅ ｓｙｍ
ｐｏｓｉｕｍｏｎ ｍｅｍｏｒｙ ａｎｄ ａｄｖａｎ
ｃｅｄ ｒｅｃｏｒｄｉｎｇ ｔｅｃｈｎｏｌｏｇｉｅ
ｓ、Ｗｓ−３−Ｃ−１＜１９８６）） ＋：示さレタ従
来のディッヒング塗布装置の概略構成を示す斜視図であ
る。図において、（１）は潤滑剤溶液（２）を収容する
潤滑剤溶液槽、（３）は潤滑剤溶液（２）が塗布される
被塗物基板、〈４〉は被塗物基板（３）を支持する基板
ホルダ、り５）は基板ホルダ〈４〉を上下に動かすため
のアクチュエータである。Figure 3 shows, for example, the literature (Dr. Pier, The sym
posiumon memory and advan
ced recording technology
s, Ws-3-C-1<1986)) +: Letter 1 is a perspective view showing a schematic configuration of a conventional dishing coating device. In the figure, (1) is a lubricant solution tank containing a lubricant solution (2), (3) is a substrate to be coated on which the lubricant solution (2) is applied, and <4> is a substrate to be coated (3). 5) is an actuator for moving the substrate holder <4> up and down.
次にこの従来装置の作用について説明する。被塗物基板
（３〉を潤滑剤溶液槽（１＞の潤滑剤溶液く２）の中に
浸漬した後、アクチュエータク５）をゆっくり上方に移
動させ被塗物基板〈３を引き上げることにより潤滑剤溶
液を被塗物基板（３〉に塗布するものであり、このとき
溶液槽〈１）から被塗物基板（３〉を引き上げた場合に
は、被塗物基板（３〉に潤滑剤溶液＜２）が付着して持
ち上げられ、時間の経過とともに塗工溶液は重力によっ
て下方に流れ落ち、平衡状態になった残存塗液が最終的
には塗膜として被塗物基板（３）に固着し、潤滑膜の厚
さが決定される。これについては参考文献（日本潤滑学
会秋季大会予稿集（１９８７） Ｐ、４８５〜４８８）
に詳細に記載されている。Next, the operation of this conventional device will be explained. After immersing the substrate to be coated (3) in the lubricant solution tank (1> lubricant solution 2), the actuator 5) is slowly moved upward and the substrate to be coated (3) is lubricated. The lubricant solution is applied to the substrate to be coated (3). At this time, if the substrate to be coated (3) is pulled up from the solution tank (1), the lubricant solution is applied to the substrate to be coated (3). <2) is attached and lifted, and as time passes, the coating solution flows downward due to gravity, and the remaining coating solution, which has reached an equilibrium state, eventually adheres to the substrate to be coated (3) as a coating film. , the thickness of the lubricating film is determined.References regarding this (Proceedings of the Autumn Conference of the Japanese Society of Lubrication (1987) P, 485-488)
is described in detail.
第４図は特願 ＢＰＳＯＯ２３号明細書に示される別の
従来例である潤滑剤抜き取り型ディッピング装置の概略
構成を示す斜視図である。図においてく１１）は潤滑剤
溶液（１２）を収容する潤滑剤溶液槽、（１３〉は潤滑
剤溶液（１２〉が塗布される被塗物基板、（１４）は被
塗物基板〈１３〉を支持する基板ホルダー （１５）は
潤滑剤溶液抽入用バルブ、（１６）は潤滑剤溶液〈１２
）の液面位置わ調整するための潤滑剤溶液流出用バルブ
である。FIG. 4 is a perspective view showing a schematic structure of another conventional lubricant extraction type dipping device disclosed in Japanese Patent Application No. BPSOO23. In the figure, 11) is a lubricant solution tank containing a lubricant solution (12), (13> is a substrate to be coated with the lubricant solution (12), and (14) is a substrate to be coated (13). (15) is the valve for lubricant solution extraction, (16) is the lubricant solution (12)
) is a lubricant solution outflow valve for adjusting the liquid level position of the lubricant solution.
次にこの従来装置の作用について説明する。被塗物基板
〈１３〉を潤滑剤溶液槽（１１）の潤滑剤溶液〈１２〉
の中に浸漬した後、潤滑剤溶液流出用バルブ（１６）を
開放することにより潤滑剤溶液（１２）の液面位置を低
速で下げることにより、相対的に被塗物基板り１３）を
、液面位置から移動させ、潤滑剤を被塗物基板（１３〉
に塗布するものである。一般に塗膜の膜厚は溶料溶液槽
中の溶料溶液面と、被塗物基板との間の相対速度の関数
で表されることが知られている。 （これについては、
中村 孝−１友野信の材料 １４．２９４ （１９６５
） ； Ｂ、Ｖ、Ｄｅｒｙｃｉｇｉｎ、 Ｓ、ＭＬｅｖ
ｉ：Ｋｏｌｌｉｄ、 Ｚｈ １５．２４ （１９５３）
＋ Ｄｏｎ ５ＳＳＲ７９゜２８３０９４１） ； Ｇ
ｏｕｃｈｅｒ、 ＦＳ ｅｔｎ ； Ｐｈ１１．Ｍｎｙ
４４゜Ｐ １００２ （１９２２）等に詳述されてい
る。）［発明が解決しようとする課題］
上記のような従来のディッピング装置や潤滑剤抜き取り
型ディッピング装置では、潤滑剤溶液〈１２）中に、単
に被塗物基板（１３〉を浸漬するに留まるため、被塗物
基板＜１３）の表面と潤滑剤溶液（１２）との界面にお
いて、小さな気泡を巻き込んだり、あるいは、被塗物基
板＜１３）表面にダスＩ・が存在したりして、これが潤
滑剤溶液＜１２）と被塗物基板〈１３）との間の立体障
害になり、潤滑剤塗布時の残存溶液の平衡状態に悪影響
を及ぼしたり、また、ある部分のみ潤滑剤が塗られなか
ったりして、潤滑膜の膜厚が微妙に変わったり塗り残し
の要因となったりして、結果的に充分な潤滑処理になら
ず、被塗物基板である磁気記録媒体の耐磨耗性にたいし
て充分な信頼性を与えることができなかった。Next, the operation of this conventional device will be explained. The substrate to be coated (13) is transferred to the lubricant solution (12) in the lubricant solution tank (11).
After being immersed in the lubricant solution, by opening the lubricant solution outflow valve (16) and lowering the liquid level of the lubricant solution (12) at a low speed, the substrate to be coated (13) is relatively lowered. Move the lubricant from the liquid level to the target substrate (13)
It is applied to It is generally known that the thickness of a coating film is expressed as a function of the relative velocity between the surface of the solvent solution in the solvent solution tank and the substrate to be coated. (For this,
Takashi Nakamura-1 Makoto Tomono's Materials 14.294 (1965
); B, V, Derycigin, S, MLev
i: Kollid, Zh 15.24 (1953)
+ Don 5SSR79゜2830941); G
oucher, FS etn; Ph11. Mny
44°P 1002 (1922), etc. ) [Problems to be Solved by the Invention] In the conventional dipping device or lubricant extraction type dipping device as described above, the substrate to be coated (13) is simply immersed in the lubricant solution (12). , small air bubbles may be drawn in at the interface between the surface of the substrate <13) to be coated and the lubricant solution (12), or dust I. may be present on the surface of the substrate <13) to be coated. This may cause steric hindrance between the lubricant solution <12) and the substrate to be coated <13), which may adversely affect the equilibrium state of the remaining solution during lubricant application, or the lubricant may not be applied to certain areas. This may cause slight changes in the thickness of the lubricant film or cause uncoated areas, resulting in insufficient lubrication, which may affect the abrasion resistance of the magnetic recording medium, which is the substrate to be coated. could not provide sufficient reliability.
本発明はかかる課題を解決するためになされたもので、
被塗物基板に均一に潤滑剤を塗布することができる潤滑
剤塗布方法を得ることを目的とする。The present invention was made to solve such problems,
An object of the present invention is to obtain a lubricant application method that can uniformly apply a lubricant to a substrate to be coated.
［課題を解決するための手段］
この発明にかかる潤滑剤塗布方法は、被塗物基板を潤滑
剤溶液中に浸漬しながら超音波を印加する二とにより上
記被塗物基板に潤滑剤を塗布するものである。[Means for Solving the Problems] A lubricant application method according to the present invention includes applying an ultrasonic wave to the substrate to be coated while immersing the substrate in a lubricant solution. It is something to do.
［作用］
被塗物基板が潤滑剤溶液中に浸漬されている間に一定時
間超音波を印加すると、被塗物基板表面に存在した気泡
、ダスト、汚染物は被塗物基板から速やかに溶液中へ除
去されるとともに、代わって潤滑剤溶液中に存在する潤
滑剤分子が被塗物基板に移る。そのため、被塗物基板表
面は、完全に潤滑剤溶液に覆われる様になる。この様な
状態を確保した後に被塗物基板を潤滑剤溶液から引き上
げることにより、潤滑剤を被塗物基板上に均一に塗布で
きる様になる。そのため、結果として、被塗物基板であ
る磁気記録媒体の耐磨耗性は改善出来る様になる。[Function] When ultrasonic waves are applied for a certain period of time while the substrate to be coated is immersed in the lubricant solution, air bubbles, dust, and contaminants existing on the surface of the substrate to be coated are quickly removed from the solution. The lubricant molecules present in the lubricant solution are transferred to the substrate to be coated. Therefore, the surface of the substrate to be coated becomes completely covered with the lubricant solution. By lifting the substrate to be coated from the lubricant solution after securing such a state, the lubricant can be uniformly applied onto the substrate to be coated. As a result, the abrasion resistance of the magnetic recording medium, which is the substrate to be coated, can be improved.
［実施例］ 以下、二の発明の実施例を図について説明する。[Example] Embodiments of the second invention will be described below with reference to the drawings.
第１図は、この発明の一実施例にかかる潤滑剤塗布方法
を採用した潤滑剤塗布装置の概略構成を示す斜視図であ
る。図において、＜１１〉は潤滑剤溶液〈１２）を収容
する潤滑剤溶液槽、（１３）は潤滑剤溶液（１２）によ
って塗布される被塗物基板、（１４〉は潤滑剤溶液槽（
１１〉内に設けられ被塗物基板（１３）を支持する支持
基板である基板ホルダ、（１５）は潤滑剤溶液槽〈１１
）の−側面に設けられ潤滑剤溶液（１２）を潤滑剤溶液
槽（１１）内部に抽入するための潤滑剤溶液抽入用バル
ブ、（１６〉は潤滑剤溶液槽〈１１〉の−側面に設けら
れ潤滑剤溶液槽〈１１〉内部の潤滑剤溶液を外部に流出
させるための潤滑剤溶液流出用バルブである。潤滑剤溶
液流出用バルブク１６〉は、流量計付パ゛ルブであり、
特に潤滑剤溶液〈１２〉の液面の変位が被塗物基板（１
３）に対して一定の相対速度（降下速度）になるように
調整して潤滑剤溶液り１２）を外部に流出させるための
ものである。（１７）は潤滑剤溶液（１２）に超音波振
動を与えるための超音波振動発生装置である。FIG. 1 is a perspective view showing a schematic configuration of a lubricant coating device that employs a lubricant coating method according to an embodiment of the present invention. In the figure, <11> is a lubricant solution tank containing a lubricant solution (12), (13) is a substrate to be coated with the lubricant solution (12), and (14> is a lubricant solution tank (
A substrate holder (15) is a support substrate installed in a lubricant solution tank (11) and supports a substrate to be coated (13);
) is a lubricant solution inlet valve for injecting the lubricant solution (12) into the lubricant solution tank (11), (16> is the - side of the lubricant solution tank <11>) This is a lubricant solution outflow valve provided in the lubricant solution tank <11> for causing the lubricant solution inside the lubricant solution tank <11> to flow out to the outside.The lubricant solution outflow valve <16> is a valve with a flow meter;
In particular, the displacement of the liquid level of the lubricant solution <12> is
The lubricant solution 12) is adjusted to a constant relative speed (falling speed) with respect to the lubricant solution 12). (17) is an ultrasonic vibration generator for applying ultrasonic vibration to the lubricant solution (12).
次にこの潤滑剤塗布装置の作用について説明する。被塗
物基板り１３〉を基板ホルダ（１４〉に支持した１組
潤滑剤溶液抽入用バルブ（１５）から潤滑剤溶液（１２
〉を潤滑剤溶液槽〈１１）内に抽入し、被塗物基板（１
３）を潤滑剤溶液〈１２）に浸漬する。次に、超音波振
動発生装置り１７〉に通電を行ない所定時間潤滑剤溶液
（１２〉に超音波振動を与える。この時、被塗物基板〈
１３）表面に存在した気泡、ダストおよび汚染物は除去
されるため、被塗物基板（１３）は潤滑剤溶液（１２）
に完全に１夏われる。次に超音波振動発生装置（１７）
の通電を止めたｉＬ 潤滑剤溶液流出用バルブク１６
）を開、！ｉ−潤滑剤溶液（１２）を外部に流出する。Next, the operation of this lubricant application device will be explained. One set in which the substrate to be coated 13〉 is supported on the substrate holder (14〉)
The lubricant solution (12) is supplied from the lubricant solution inlet valve (15).
) into the lubricant solution tank <11), and place the substrate to be coated (1
3) is soaked in lubricant solution <12). Next, the ultrasonic vibration generator (17) is energized to apply ultrasonic vibration to the lubricant solution (12) for a predetermined period of time.
13) Air bubbles, dust, and contaminants present on the surface are removed, so that the substrate to be coated (13) is coated with the lubricant solution (12).
It lasts a full summer. Next, the ultrasonic vibration generator (17)
iL with the power turned off Valve 16 for lubricant solution outflow
) open,! i- Flow the lubricant solution (12) to the outside.
この流出課程において、潤滑剤溶液槽（１１）内の潤滑
剤溶液＜１２）の液面の位置変化を調整して潤滑剤溶液
り１２）を流出させる。即ち、被塗物基板（１３〉に対
する潤滑剤溶液＜１２）の液面の下方向移動の相対速度
を潤滑剤溶液流出用バルブク１６）の流量から調整し、
潤滑剤溶液〈１２〉を流出させる。このとき、被塗物基
板〈１３〉は静止したままで、潤滑剤溶液く１２）の液
面には何ら振動が生じないので、結果的に被塗物基板（
１３）上には塗りむらなく、潤滑剤を塗布することがで
きる。また被塗物基板〈１３）上には、気泡、ダスト、
汚染物が存在しないため、立体障害による塗り残しが無
くなる。In this outflow process, the lubricant solution 12) is caused to flow out by adjusting the position change of the liquid level of the lubricant solution <12) in the lubricant solution tank (11). That is, the relative velocity of the downward movement of the liquid level of the lubricant solution <12) with respect to the substrate to be coated (13>) is adjusted from the flow rate of the lubricant solution outflow valve 16),
Drain the lubricant solution <12>. At this time, the substrate to be coated (13) remains stationary and no vibration occurs on the liquid surface of the lubricant solution (12), so as a result, the substrate to be coated (13) remains stationary.
13) The lubricant can be applied evenly on the surface. In addition, on the substrate to be coated (13), air bubbles, dust,
Since there are no contaminants, there will be no unpainted areas due to steric hindrance.
次にこの実施例の潤滑剤塗布装置を用いて被塗物基板（
１３）に潤滑剤を塗布した場合の実験結果を参考として
述べておく。第２図は被塗物基板〈１３）に、フッ素系
潤滑剤ＫＲＹＴＯＸ １５７ ＦＳ （Ｍ）（デニボン
社製フッ素変成オイル）を本装置で塗布した場合の塗布
特性を示すグラフである。ただし塗布条件は塗料溶液〈
１２〉にＫＲＹＴＯＸ １５７ＦＳ（Ｍ）を トリフル
オロトリクロロエタンダイキン製フッ素変成希釈溶液）
の濃度を変えて塗料溶液面と被塗物基板間の相対速度が
０．２５（ｍ／分〕とするとともに、被塗物基板り１３
〉の潤滑剤溶液（１２）中での超音波振動発生装置り１
７〉の通電時間を変えて塗布している。図中、ムは通電
時間０秒、×は１０秒、・は２００秒である。なお、被
塗物基板（１３〉にＣｏ−Ｎｉ合金基板を用いた場合の
ＫＲＹＴＯＸ １ ５ ７ ＦＳ （Ｍ）０）分子式は
以下に示す型をとる。Next, using the lubricant applicator of this example, the substrate to be coated (
For reference, we will describe the experimental results when lubricant was applied to 13). FIG. 2 is a graph showing the coating characteristics when the fluorine-based lubricant KRYTOX 157 FS (M) (fluorine modified oil manufactured by Denibon Co., Ltd.) is coated on the substrate to be coated (13) using this apparatus. However, the application conditions are paint solution
12> KRYTOX 157FS (M) trifluorotrichloroethane Daikin fluorine modification diluted solution)
The relative velocity between the paint solution surface and the substrate to be coated is 0.25 (m/min) by changing the concentration of
> Ultrasonic vibration generator in lubricant solution (12) 1
7〉The energization time was changed during application. In the figure, mu indicates energization time of 0 seconds, x indicates 10 seconds, and 200 seconds. The molecular formula of KRYTOX 1 5 7 FS (M) 0 when a Co--Ni alloy substrate is used as the substrate to be coated (13) takes the form shown below.
ＦＩＣＦ（ＣＦ３＞ＣＦ２Ｏ ｎＣＦ（ＣＦ３）ＣＯＯ
Ｈ）（ただしｎはｌＯ〜６０の自然数である。）第２図
によれば、実験的に潤滑層膜厚は潤滑剤溶液濃度に比例
して厚く塗布されることが分かる。FICF(CF3>CF2O nCF(CF3)COO
H) (However, n is a natural number from lO to 60.) According to FIG. 2, it can be seen experimentally that the thickness of the lubricant layer increases in proportion to the concentration of the lubricant solution.
また、この時の塗布される膜厚は超音波振動発生装置く
１７〉の通電により数 程炭厚く塗布されることが分か
る。これは被塗物基板表面に形成されていたダストや気
泡が除去されたことによる効果と考えられる。It can also be seen that the coating thickness at this time is several times thicker than carbon due to the energization of the ultrasonic vibration generator (17). This is considered to be an effect due to the removal of dust and bubbles formed on the surface of the substrate to be coated.
上述したように、この実施例の潤滑剤塗布装置は数百
以下の膜厚制御も容易に行うことができる。なお、この
実験で用いた膜厚測定法はＦＴＩＲによる膜厚測定法で
あり、その詳細については文献（日本潤滑学会・秋季大
会・予稿集（１９８７））に説明されている。As mentioned above, the lubricant applicator of this embodiment has hundreds of
The following film thickness control can also be easily performed. The film thickness measurement method used in this experiment was a film thickness measurement method using FTIR, and its details are explained in the literature (Japan Society of Lubrication Society, Autumn Conference, Proceedings (1987)).
次表は、潤滑剤溶液濃度０．６ｇ／ｌ． １．ｏｇ／ｌ
で被塗物基板に潤滑剤を塗布した基板を用いて、コンタ
クト・スター１・・ストップ（ＣＳＳ）Ｋ験をフェトラ
イトヘッド
表面状態、および動摩擦係数が０８を超えるまでのＣＳ
Ｓ回数を示す。なお表面状態の評価は目視で行っている
。The following table shows lubricant solution concentration 0.6g/l. 1. og/l
A contact star 1...stop (CSS) K test was conducted using a substrate coated with lubricant to determine the surface condition of the fetrite head and the CSS until the coefficient of dynamic friction exceeded 08.
Indicates the S number of times. Note that the surface condition was evaluated visually.
また、ＣＳＳ試験方法については、文献（精密機械工学
会誌 ５４． ５． Ｐ７３〜７９（１９８８））等に
詳細に紹介されている。この表に示される結果から、潤
滑剤塗布時に被塗物基板および潤滑剤溶液に超音波を印
加することで大幅に機械特性が改善されたことがオ）か
る１。Further, the CSS test method is introduced in detail in the literature (Journal of the Japan Society of Precision Mechanical Engineers 54. 5. P73-79 (1988)). From the results shown in this table, it can be seen that the mechanical properties were significantly improved by applying ultrasonic waves to the substrate to be coated and the lubricant solution during lubricant application.1.
なお、上記実施例では第４図に示す従来例にこの発明を
適用した場合について説明したが、この発明は第３図に
示す従来例にも適用でき上記実施例と同様の効果が辱ら
れるのは明白である。In addition, in the above embodiment, the case where this invention is applied to the conventional example shown in FIG. 4 has been explained, but this invention can also be applied to the conventional example shown in FIG. is obvious.
［発明の効果］
以上のように、この発明によれば、被塗物基板を潤滑剤
溶液中に浸漬しながら超音波を印加することにより上記
被塗物基板に潤滑剤を塗布するので、被塗物基板表面に
存在する気泡、ダスト、汚染物を除去でき、被塗物基板
上に均一に潤滑剤が塗布できる効果がある。[Effects of the Invention] As described above, according to the present invention, the lubricant is applied to the substrate to be coated by applying ultrasonic waves while the substrate to be coated is immersed in a lubricant solution. Air bubbles, dust, and contaminants existing on the surface of the substrate to be coated can be removed, and the lubricant can be applied uniformly to the substrate to be coated.
第１図はこの発明の一実施例による潤滑剤塗布方法を採
用した塗布装置を示す斜視図、第２図は第１図に示す潤
滑剤塗布装置を用いて潤滑剤を塗布する場合のその塗布
特性を示す特性図、第３図、第４図はそれぞれ従来の方
法による塗料塗布装置を示す斜視図である。
図において（１１）は塗料溶液槽、〈１２）は塗料溶液
、〈１３）は被塗物基板、〈１４）は基板ホルダ（支持
部材）、 （１６）は塗料溶液流出用バルブ、〈１７）
は超音波振動発生装置である。
なお、各図中同一符号は同一または相当部分をホす。FIG. 1 is a perspective view showing a coating device that employs a lubricant coating method according to an embodiment of the present invention, and FIG. 2 is a perspective view showing how lubricant is applied when the lubricant coating device shown in FIG. 1 is used. Characteristic diagrams showing the characteristics, FIGS. 3 and 4 are perspective views showing a paint application device using a conventional method, respectively. In the figure, (11) is the paint solution tank, <12) is the paint solution, <13) is the substrate to be coated, <14) is the substrate holder (support member), (16) is the paint solution outflow valve, <17)
is an ultrasonic vibration generator. Note that the same reference numerals in each figure refer to the same or corresponding parts.
Claims (1)
することにより上記被塗物基板に潤滑剤を塗布する潤滑
剤塗布方法。A lubricant application method in which a lubricant is applied to a substrate to be coated by applying ultrasonic waves while the substrate to be coated is immersed in a lubricant solution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15307690A JPH0445867A (en) | 1990-06-11 | 1990-06-11 | Coating method with lubricant |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15307690A JPH0445867A (en) | 1990-06-11 | 1990-06-11 | Coating method with lubricant |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0445867A true JPH0445867A (en) | 1992-02-14 |
Family
ID=15554454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15307690A Pending JPH0445867A (en) | 1990-06-11 | 1990-06-11 | Coating method with lubricant |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0445867A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05273760A (en) * | 1992-03-26 | 1993-10-22 | Matsushita Electric Works Ltd | Formation of resist image |
-
1990
- 1990-06-11 JP JP15307690A patent/JPH0445867A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05273760A (en) * | 1992-03-26 | 1993-10-22 | Matsushita Electric Works Ltd | Formation of resist image |
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