JPH0445646U - - Google Patents

Info

Publication number
JPH0445646U
JPH0445646U JP8580690U JP8580690U JPH0445646U JP H0445646 U JPH0445646 U JP H0445646U JP 8580690 U JP8580690 U JP 8580690U JP 8580690 U JP8580690 U JP 8580690U JP H0445646 U JPH0445646 U JP H0445646U
Authority
JP
Japan
Prior art keywords
stage
traveling device
magnetic levitation
levitation traveling
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8580690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8580690U priority Critical patent/JPH0445646U/ja
Publication of JPH0445646U publication Critical patent/JPH0445646U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Machine Tool Units (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
JP8580690U 1990-08-13 1990-08-13 Pending JPH0445646U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8580690U JPH0445646U (ko) 1990-08-13 1990-08-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8580690U JPH0445646U (ko) 1990-08-13 1990-08-13

Publications (1)

Publication Number Publication Date
JPH0445646U true JPH0445646U (ko) 1992-04-17

Family

ID=31817182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8580690U Pending JPH0445646U (ko) 1990-08-13 1990-08-13

Country Status (1)

Country Link
JP (1) JPH0445646U (ko)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01312072A (ja) * 1988-06-13 1989-12-15 Asahi Glass Co Ltd 真空処理装置
JPH02180535A (ja) * 1988-12-30 1990-07-13 Yamaha Corp ワークテーブル

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01312072A (ja) * 1988-06-13 1989-12-15 Asahi Glass Co Ltd 真空処理装置
JPH02180535A (ja) * 1988-12-30 1990-07-13 Yamaha Corp ワークテーブル

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