JPH0445646U - - Google Patents
Info
- Publication number
- JPH0445646U JPH0445646U JP8580690U JP8580690U JPH0445646U JP H0445646 U JPH0445646 U JP H0445646U JP 8580690 U JP8580690 U JP 8580690U JP 8580690 U JP8580690 U JP 8580690U JP H0445646 U JPH0445646 U JP H0445646U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- traveling device
- magnetic levitation
- levitation traveling
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005339 levitation Methods 0.000 claims description 3
Landscapes
- Jigs For Machine Tools (AREA)
- Machine Tool Units (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8580690U JPH0445646U (es) | 1990-08-13 | 1990-08-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8580690U JPH0445646U (es) | 1990-08-13 | 1990-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0445646U true JPH0445646U (es) | 1992-04-17 |
Family
ID=31817182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8580690U Pending JPH0445646U (es) | 1990-08-13 | 1990-08-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0445646U (es) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01312072A (ja) * | 1988-06-13 | 1989-12-15 | Asahi Glass Co Ltd | 真空処理装置 |
| JPH02180535A (ja) * | 1988-12-30 | 1990-07-13 | Yamaha Corp | ワークテーブル |
-
1990
- 1990-08-13 JP JP8580690U patent/JPH0445646U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01312072A (ja) * | 1988-06-13 | 1989-12-15 | Asahi Glass Co Ltd | 真空処理装置 |
| JPH02180535A (ja) * | 1988-12-30 | 1990-07-13 | Yamaha Corp | ワークテーブル |
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