JPH0445235Y2 - - Google Patents
Info
- Publication number
- JPH0445235Y2 JPH0445235Y2 JP10936986U JP10936986U JPH0445235Y2 JP H0445235 Y2 JPH0445235 Y2 JP H0445235Y2 JP 10936986 U JP10936986 U JP 10936986U JP 10936986 U JP10936986 U JP 10936986U JP H0445235 Y2 JPH0445235 Y2 JP H0445235Y2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- thin film
- tio
- infrared absorption
- absorption filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 18
- 238000010521 absorption reaction Methods 0.000 claims description 9
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 8
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 8
- 239000002131 composite material Substances 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 7
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 4
- 229910052753 mercury Inorganic materials 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 description 5
- 229910019142 PO4 Inorganic materials 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 235000021317 phosphate Nutrition 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 238000005728 strengthening Methods 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005499 meniscus Effects 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 2
- -1 phosphorus ions Chemical class 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000001506 calcium phosphate Substances 0.000 description 1
- 229910000389 calcium phosphate Inorganic materials 0.000 description 1
- 235000011010 calcium phosphates Nutrition 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000005365 phosphate glass Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- QORWJWZARLRLPR-UHFFFAOYSA-H tricalcium bis(phosphate) Chemical compound [Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O QORWJWZARLRLPR-UHFFFAOYSA-H 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10936986U JPH0445235Y2 (enrdf_load_stackoverflow) | 1986-07-18 | 1986-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10936986U JPH0445235Y2 (enrdf_load_stackoverflow) | 1986-07-18 | 1986-07-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6316438U JPS6316438U (enrdf_load_stackoverflow) | 1988-02-03 |
| JPH0445235Y2 true JPH0445235Y2 (enrdf_load_stackoverflow) | 1992-10-23 |
Family
ID=30987403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10936986U Expired JPH0445235Y2 (enrdf_load_stackoverflow) | 1986-07-18 | 1986-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0445235Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-07-18 JP JP10936986U patent/JPH0445235Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6316438U (enrdf_load_stackoverflow) | 1988-02-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3664174B2 (ja) | 光導波路およびその製造方法 | |
| US4168113A (en) | Glass lens with ion-exchanged antireflection coating and process for manufacture thereof | |
| JP7586180B2 (ja) | 光学フィルタ及びその製造方法、並びに殺菌装置 | |
| US7241559B2 (en) | Lens array and method for fabricating the lens array | |
| KR0151386B1 (ko) | 고투광성 방진체 및 그의 제조방법 | |
| WO2023042682A1 (ja) | 光学フィルタ、光学フィルタ部品、殺菌装置、及び光学フィルタの製造方法 | |
| JPH0445235Y2 (enrdf_load_stackoverflow) | ||
| JP2018526316A (ja) | 光学素子の作製方法 | |
| JPH07209516A (ja) | 光学多層膜フィルタ | |
| EP1312586A1 (en) | Optical coating for UV applications | |
| JPH07234315A (ja) | 光学多層膜フィルタ | |
| US20240369749A1 (en) | Optical filter and sterilization device | |
| JP7669866B2 (ja) | 光学フィルタ及び殺菌装置 | |
| JPH05341120A (ja) | 紫外線照射装置の多層膜フィルタ | |
| JP2733483B2 (ja) | 高光線透過性防塵体の製造方法 | |
| JPH07301703A (ja) | 高精度光学部品用反射防止膜 | |
| JPS6071547A (ja) | 熱線反射ガラス板の製造方法 | |
| JP3667260B2 (ja) | 反射防止膜および該反射防止膜を備えた光学系、ならびに該光学系を用いた露光装置やデバイス製造方法 | |
| KR102067290B1 (ko) | 마스크 블랭크의 제조 방법, 전사용 마스크의 제조 방법 및 반도체 디바이스의 제조 방법 | |
| TW202142949A (zh) | 極紫外光遮罩毛胚缺陷之減少 | |
| WO2023112940A1 (ja) | 光学フィルタ及び殺菌装置 | |
| WO2024135592A1 (ja) | 光学フィルタ、殺菌装置、及び紫外線検出装置 | |
| JPH05221693A (ja) | 複合型光学部品の製造方法 | |
| JPH03135562A (ja) | 合成石英加熱方法 | |
| JPH077122B2 (ja) | ランプ |