JPH0443395U - - Google Patents
Info
- Publication number
- JPH0443395U JPH0443395U JP8307590U JP8307590U JPH0443395U JP H0443395 U JPH0443395 U JP H0443395U JP 8307590 U JP8307590 U JP 8307590U JP 8307590 U JP8307590 U JP 8307590U JP H0443395 U JPH0443395 U JP H0443395U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- elastic body
- surface wave
- brazing
- soldering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005219 brazing Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 238000005476 soldering Methods 0.000 claims 1
- 238000003466 welding Methods 0.000 claims 1
Description
第１図は、本考案に使用する真空用表面波モー
ターの原理を示す側面図、第２図は、本考案の真
空用表面波モーターの側面図を示す。第３図は、
本考案の一実施例を示す側面図を示す。
FIG. 1 is a side view showing the principle of a vacuum surface wave motor used in the present invention, and FIG. 2 is a side view of the vacuum surface wave motor of the present invention. Figure 3 shows
1 shows a side view showing an embodiment of the present invention.
Claims (1)
、使用する回転のための駆動源として、圧電体の
弾性体への接合を樹脂接合でなく、圧電体を半田
付けや蝋付け又超音波溶接等によつて、弾性体に
溶接することにより、真空内で使用可能とした真
空用表面波モーター。 In vacuum equipment that performs various processes in a vacuum system, the piezoelectric body is joined to the elastic body by soldering, brazing, ultrasonic welding, etc. instead of resin bonding as the drive source for rotation used. A vacuum surface wave motor that can be used in a vacuum by being welded to an elastic body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8307590U JPH0443395U (en) | 1990-08-03 | 1990-08-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8307590U JPH0443395U (en) | 1990-08-03 | 1990-08-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0443395U true JPH0443395U (en) | 1992-04-13 |
Family
ID=31630446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8307590U Pending JPH0443395U (en) | 1990-08-03 | 1990-08-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0443395U (en) |
-
1990
- 1990-08-03 JP JP8307590U patent/JPH0443395U/ja active Pending
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