JPH0442289U - - Google Patents

Info

Publication number
JPH0442289U
JPH0442289U JP8527190U JP8527190U JPH0442289U JP H0442289 U JPH0442289 U JP H0442289U JP 8527190 U JP8527190 U JP 8527190U JP 8527190 U JP8527190 U JP 8527190U JP H0442289 U JPH0442289 U JP H0442289U
Authority
JP
Japan
Prior art keywords
vacuum pump
oil rotary
rotary vacuum
intake
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8527190U
Other languages
English (en)
Other versions
JP2521258Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990085271U priority Critical patent/JP2521258Y2/ja
Publication of JPH0442289U publication Critical patent/JPH0442289U/ja
Application granted granted Critical
Publication of JP2521258Y2 publication Critical patent/JP2521258Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Description

【図面の簡単な説明】
第１図は従来用いられる真空排気装置を備えた
システムブロツク図を示す。第２図は従来用いら
れる真空排気装置における油回転真空ポンプを示
す。第３図は本考案の実施例である油回転真空ポ
ンプ安全装置を示す。 ５……高真空ポンプ、６……フオアバルブ、７
……油回転真空ポンプ、８……ポンプリークバル
ブ、９……希釈ガスを混入させるバルブ、１０…
…吸気フランジ、１１……排気フランジ、１２…
…逆止弁。

Claims (1)

    【実用新案登録請求の範囲】
  1. 油回転真空ポンプの吸気部分と排気部分を吸気
    側から排気側への方向を順方向とした逆止弁を備
    えた継手によつて連結したことを特徴とする油回
    転真空ポンプ安全装置。
JP1990085271U 1990-08-10 1990-08-10 油回転真空ポンプ安全装置 Expired - Lifetime JP2521258Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990085271U JP2521258Y2 (ja) 1990-08-10 1990-08-10 油回転真空ポンプ安全装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990085271U JP2521258Y2 (ja) 1990-08-10 1990-08-10 油回転真空ポンプ安全装置

Publications (2)

Publication Number Publication Date
JPH0442289U true JPH0442289U (ja) 1992-04-09
JP2521258Y2 JP2521258Y2 (ja) 1996-12-25

Family

ID=31634314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990085271U Expired - Lifetime JP2521258Y2 (ja) 1990-08-10 1990-08-10 油回転真空ポンプ安全装置

Country Status (1)

Country Link
JP (1) JP2521258Y2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5835693U (ja) * 1981-08-31 1983-03-08 株式会社島津製作所 ２段式油回転真空ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5835693U (ja) * 1981-08-31 1983-03-08 株式会社島津製作所 ２段式油回転真空ポンプ

Also Published As

Publication number Publication date
JP2521258Y2 (ja) 1996-12-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term