JPH0441699U - - Google Patents
Info
- Publication number
- JPH0441699U JPH0441699U JP8167490U JP8167490U JPH0441699U JP H0441699 U JPH0441699 U JP H0441699U JP 8167490 U JP8167490 U JP 8167490U JP 8167490 U JP8167490 U JP 8167490U JP H0441699 U JPH0441699 U JP H0441699U
- Authority
- JP
- Japan
- Prior art keywords
- inner container
- impurity removal
- gas
- inlet
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012535 impurity Substances 0.000 claims description 6
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8167490U JPH0441699U (fr) | 1990-08-02 | 1990-08-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8167490U JPH0441699U (fr) | 1990-08-02 | 1990-08-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0441699U true JPH0441699U (fr) | 1992-04-08 |
Family
ID=31627821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8167490U Pending JPH0441699U (fr) | 1990-08-02 | 1990-08-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441699U (fr) |
-
1990
- 1990-08-02 JP JP8167490U patent/JPH0441699U/ja active Pending