JPH0441699U - - Google Patents
Info
- Publication number
- JPH0441699U JPH0441699U JP8167490U JP8167490U JPH0441699U JP H0441699 U JPH0441699 U JP H0441699U JP 8167490 U JP8167490 U JP 8167490U JP 8167490 U JP8167490 U JP 8167490U JP H0441699 U JPH0441699 U JP H0441699U
- Authority
- JP
- Japan
- Prior art keywords
- inner container
- impurity removal
- gas
- inlet
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012535 impurity Substances 0.000 claims description 6
Description
第１図は本考案に係わる不純物除去装置の一実
施例を示す縦断側面図、第２図は他の実施例を示
す縦断側面図、第３図は内側容器取出し時の状態
を示す作用説明図、第４図は第２図の矢視−
線に沿う平面図、第５図は第２図の矢視−線
に沿う横断平面図、第６図は従来の不純物除去装
置の一例を示す縦断側面図、第７図は従来の不純
物除去装置の他の例を示す縦断側面図、第８図は
内側容器取出し時の状態を示す作用説明図である
。
１……外側容器、２……内側容器、２ａ……蓋
板、３……外側容器１の不純物除去対象ガスの入
口、４……外側容器１の不純物除去対象ガスの出
口、９，９′……不純物除去部材。
Fig. 1 is a longitudinal side view showing one embodiment of the impurity removal device according to the present invention, Fig. 2 is a longitudinal side view showing another embodiment, and Fig. 3 is an explanatory view of the operation showing the state when the inner container is taken out. , Figure 4 is the arrow view of Figure 2 -
5 is a cross-sectional plan view taken along the arrow line in FIG. 2, FIG. 6 is a vertical sectional side view showing an example of a conventional impurity removal device, and FIG. 7 is a conventional impurity removal device FIG. 8 is a longitudinal side view showing another example of the present invention, and FIG. 8 is an explanatory view showing the operation when the inner container is taken out. DESCRIPTION OF SYMBOLS 1... Outer container, 2... Inner container, 2a... Lid plate, 3... Inlet for the gas to be removed from the outer container 1, 4... Outlet for the gas to be removed from the outer container 1, 9, 9' ...Impurity removal component.
Claims (1)
と、同ガスの出入口を設けた内側容器と、同内側
容器内に充填した不純物除去部材とを有し、上記
外側容器の開口部を閉じる蓋板に上記内側容器を
取付けたことを特徴とする不純物除去装置。 A lid plate that closes an opening of the outer container, comprising an outer container provided with an inlet/outlet for a gas to be removed, an inner container provided with an inlet/outlet for the gas, and an impurity removal member filled in the inner container. An impurity removal device characterized in that the above-mentioned inner container is attached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8167490U JPH0441699U (en) | 1990-08-02 | 1990-08-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8167490U JPH0441699U (en) | 1990-08-02 | 1990-08-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0441699U true JPH0441699U (en) | 1992-04-08 |
Family
ID=31627821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8167490U Pending JPH0441699U (en) | 1990-08-02 | 1990-08-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441699U (en) |
-
1990
- 1990-08-02 JP JP8167490U patent/JPH0441699U/ja active Pending