JPH0441651U - - Google Patents

Info

Publication number
JPH0441651U
JPH0441651U JP8386690U JP8386690U JPH0441651U JP H0441651 U JPH0441651 U JP H0441651U JP 8386690 U JP8386690 U JP 8386690U JP 8386690 U JP8386690 U JP 8386690U JP H0441651 U JPH0441651 U JP H0441651U
Authority
JP
Japan
Prior art keywords
light
spherical
objective lens
inspected
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8386690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8386690U priority Critical patent/JPH0441651U/ja
Publication of JPH0441651U publication Critical patent/JPH0441651U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Closed-Circuit Television Systems (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP8386690U 1990-08-07 1990-08-07 Pending JPH0441651U (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8386690U JPH0441651U (US20080293856A1-20081127-C00150.png) 1990-08-07 1990-08-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8386690U JPH0441651U (US20080293856A1-20081127-C00150.png) 1990-08-07 1990-08-07

Publications (1)

Publication Number Publication Date
JPH0441651U true JPH0441651U (US20080293856A1-20081127-C00150.png) 1992-04-08

Family

ID=31631893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8386690U Pending JPH0441651U (US20080293856A1-20081127-C00150.png) 1990-08-07 1990-08-07

Country Status (1)

Country Link
JP (1) JPH0441651U (US20080293856A1-20081127-C00150.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011107092A (ja) * 2009-11-20 2011-06-02 Kobelco Kaken:Kk 表面検査装置及び表面検査システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011107092A (ja) * 2009-11-20 2011-06-02 Kobelco Kaken:Kk 表面検査装置及び表面検査システム

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