JPH0441562Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an electron microscope continuous photographing apparatus suitable for creating electron microscope continuous photographs.

[Prior art] In a continuous photographic device using an electron microscope, for example, a sample image at low magnification is displayed in advance on a fluorescent screen, and the displayed sample image determines the field of view (range) to be photographed and how many divisions the field of view should be divided into. After that, the sample is moved one frame and photographed sequentially to create a single linked photograph.

[Problems that the invention aims to solve] By the way, with the conventional device configured in this way, the approximate photographing range and the number of divided fields of view were determined only by the sample image displayed on the fluorescent screen, so Therefore, when creating a single stitched photo, the characteristic parts may be offset from the center of the photo, or the interesting features may become the stitched sections, resulting in poor quality. I was unable to create a good stitching photo.

The present invention has been developed in view of the above-mentioned drawbacks, and an object of the present invention is to provide an electron microscope continuous photographing device that can grasp the overall image of a continuous photograph in advance and create high-quality continuous photographs.

[Means for solving the problem] To this end, the continuous photographic device of the present invention divides a sample image obtained by an electron microscope and moves each divided image by a field of view moving means. In an electron microscope stitching photographing device that creates a single specimen image by sequentially photographing images and joining the obtained images, a display means for displaying the specimen image; The present invention is characterized by comprising means for superimposing and displaying a lattice image representing a joint portion when photographing a sample image in a superimposed manner.

[Example] Hereinafter, an example of the present invention will be described based on the drawings.

FIG. 1 is a block diagram for explaining one embodiment of the present invention. In the figure, 1 is the sample stage of the electron microscope, 2 is the sample, 3 is the electron beam, 4 is the stage control circuit that drives and controls the stage, and 5 is the image of the transmitted sample obtained by irradiating the sample 2 with the electron beam 3. 6 is a video amplifier, 7 is a cathode ray tube for displaying a transmitted sample image, 8 is a control unit composed of a computer, etc., and 9 is a condition input device such as a keyboard.

In the apparatus configured as described above, first, the observation magnification is set to a low magnification (for example, 100x) using the condition input device 9 (or the magnification adjustment knob on the electron microscope main body).
Then, the control section 8 outputs a control signal S to an electron lens system of an electron microscope (not shown) to control the electron lens system. By this control, a low magnification sample image of the sample 2 is taken by the image pickup tube 5, and the image pickup tube 5
Since the video signal is supplied to the cathode ray tube 7 via the video amplifier 6, the cathode ray tube 7 displays a low magnification transmitted sample image A as shown in FIG. Using this transmitted sample image A, the field of view for creating a stitched photograph is determined.

Next, based on the low magnification transmitted sample image A displayed on the cathode ray tube 7, it is determined how many divisions the transmitted sample image A should be divided by taking into consideration the film size, etc., and the number of divisions is determined using the condition input device 9. Enter. As a result of this operation, the control section 8 outputs a signal to the video amplifier 6 for displaying a grid image representing a joint portion when taking a joint photograph. video amplifier 6
outputs the video signal from the image pickup tube 5 and the signal for displaying the grating image from the control section 8 to the cathode ray tube 7 . Therefore, the cathode ray tube 7 has a third
As shown in the figure, a lattice image B representing a joint portion when photographing a transmitted sample image A is superimposed and displayed. Therefore, when looking at the image displayed on the cathode ray tube 7, if the lattice image B is displayed superimposed on a characteristic part, the characteristic part corresponds to the connecting part of the photograph. Move the sample so that the grating image does not overlap with the characteristic part.

In this way, after determining the field of view and the number of divisions for creating a stitched photo, the stage control circuit 4 controls the sample stage 1 based on the command from the control unit 8.
is set as a photographing starting point, and a transmitted sample image obtained by irradiating the electron beam 3 onto the sample 2 is photographed using a photographing device (not shown). Next, the stage control circuit 4 moves the sample stage 1 by one frame and images are taken sequentially. Therefore, in such an apparatus, the cathode ray tube 7 displays the transmitted sample image A as well as the grating image B.
Since the images are superimposed and displayed, it is possible to accurately grasp the overall image of the stitched photo, and since it is possible to prevent distinctive parts from colliding with the stitched parts, it is possible to create high-quality stitched photos. .

It should be noted that the above embodiments are merely illustrative, and modifications are possible. In the apparatus of the above embodiment, the grid image B is superimposed and displayed on the transmitted sample image A, but when the imaging is completed, the inside of the grid image may be displayed with the brightness changed to display the imaging end section. good.

[Effects of the invention] As detailed above, according to the invention, the sample image is displayed on the display device, and the grid image representing the joint is superimposed on the sample image. When creating a series of stitched photographs, if a characteristic part is shifted from the center of the grid image, or if a characteristic part is located in the stitched part, you can correct it by moving the sample. An electron microscope continuous photographing device capable of producing high quality continuous photographs is provided.

[Brief explanation of the drawing]

FIG. 1 is a block diagram for explaining an embodiment of the present invention, and FIGS. 2 and 3 are diagrams for explaining the present invention. DESCRIPTION OF SYMBOLS 1... Sample stage, 2... Sample, 3... Electron beam, 4... Stage control circuit, 5... Image pickup tube, 6... Video amplifier, 7... Cathode ray tube, 8...
...Control unit, 9...Condition input device.

Claims (1)

[Scope of utility model registration request] Divide the sample image obtained by an electron microscope,
In the electron microscope stitching photographing apparatus, which sequentially photographs each of the divided images by moving them by a field of view moving means, and creates a single specimen image by stitching together the obtained images. An electronic device comprising: a display means for displaying a sample image; and a means for displaying a grid image representing a connecting part when photographing is superimposed on the sample image displayed on the display means. A photographic device connected to a microscope.