JPH0440848Y2 - - Google Patents

Info

Publication number
JPH0440848Y2
JPH0440848Y2 JP1987111118U JP11111887U JPH0440848Y2 JP H0440848 Y2 JPH0440848 Y2 JP H0440848Y2 JP 1987111118 U JP1987111118 U JP 1987111118U JP 11111887 U JP11111887 U JP 11111887U JP H0440848 Y2 JPH0440848 Y2 JP H0440848Y2
Authority
JP
Japan
Prior art keywords
plate
top ring
pressing
polishing
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987111118U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6416260U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987111118U priority Critical patent/JPH0440848Y2/ja
Publication of JPS6416260U publication Critical patent/JPS6416260U/ja
Application granted granted Critical
Publication of JPH0440848Y2 publication Critical patent/JPH0440848Y2/ja
Expired legal-status Critical Current

Links

JP1987111118U 1987-07-20 1987-07-20 Expired JPH0440848Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987111118U JPH0440848Y2 (enrdf_load_stackoverflow) 1987-07-20 1987-07-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987111118U JPH0440848Y2 (enrdf_load_stackoverflow) 1987-07-20 1987-07-20

Publications (2)

Publication Number Publication Date
JPS6416260U JPS6416260U (enrdf_load_stackoverflow) 1989-01-26
JPH0440848Y2 true JPH0440848Y2 (enrdf_load_stackoverflow) 1992-09-25

Family

ID=31348886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987111118U Expired JPH0440848Y2 (enrdf_load_stackoverflow) 1987-07-20 1987-07-20

Country Status (1)

Country Link
JP (1) JPH0440848Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2612012B2 (ja) * 1987-11-16 1997-05-21 三菱マテリアル株式会社 研磨装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194874A (en) * 1981-05-27 1982-11-30 Hitachi Ltd Lapping device
JPS63150156A (ja) * 1986-12-16 1988-06-22 Naoetsu Denshi Kogyo Kk ウエハ−研摩装置

Also Published As

Publication number Publication date
JPS6416260U (enrdf_load_stackoverflow) 1989-01-26

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