JPH0440848Y2 - - Google Patents
Info
- Publication number
- JPH0440848Y2 JPH0440848Y2 JP1987111118U JP11111887U JPH0440848Y2 JP H0440848 Y2 JPH0440848 Y2 JP H0440848Y2 JP 1987111118 U JP1987111118 U JP 1987111118U JP 11111887 U JP11111887 U JP 11111887U JP H0440848 Y2 JPH0440848 Y2 JP H0440848Y2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- top ring
- pressing
- polishing
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 25
- 239000012530 fluid Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 18
- 230000000694 effects Effects 0.000 description 3
- 239000004744 fabric Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 229920004943 Delrin® Polymers 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000002649 leather substitute Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987111118U JPH0440848Y2 (US20050075337A1-20050407-C00081.png) | 1987-07-20 | 1987-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987111118U JPH0440848Y2 (US20050075337A1-20050407-C00081.png) | 1987-07-20 | 1987-07-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6416260U JPS6416260U (US20050075337A1-20050407-C00081.png) | 1989-01-26 |
| JPH0440848Y2 true JPH0440848Y2 (US20050075337A1-20050407-C00081.png) | 1992-09-25 |
Family
ID=31348886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987111118U Expired JPH0440848Y2 (US20050075337A1-20050407-C00081.png) | 1987-07-20 | 1987-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0440848Y2 (US20050075337A1-20050407-C00081.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2612012B2 (ja) * | 1987-11-16 | 1997-05-21 | 三菱マテリアル株式会社 | 研磨装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57194874A (en) * | 1981-05-27 | 1982-11-30 | Hitachi Ltd | Lapping device |
| JPS63150156A (ja) * | 1986-12-16 | 1988-06-22 | Naoetsu Denshi Kogyo Kk | ウエハ−研摩装置 |
-
1987
- 1987-07-20 JP JP1987111118U patent/JPH0440848Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57194874A (en) * | 1981-05-27 | 1982-11-30 | Hitachi Ltd | Lapping device |
| JPS63150156A (ja) * | 1986-12-16 | 1988-06-22 | Naoetsu Denshi Kogyo Kk | ウエハ−研摩装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6416260U (US20050075337A1-20050407-C00081.png) | 1989-01-26 |
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