JPH0440146Y2 - - Google Patents

Info

Publication number
JPH0440146Y2
JPH0440146Y2 JP1985145144U JP14514485U JPH0440146Y2 JP H0440146 Y2 JPH0440146 Y2 JP H0440146Y2 JP 1985145144 U JP1985145144 U JP 1985145144U JP 14514485 U JP14514485 U JP 14514485U JP H0440146 Y2 JPH0440146 Y2 JP H0440146Y2
Authority
JP
Japan
Prior art keywords
duct
processing chamber
supply duct
discharge
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985145144U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6255066U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985145144U priority Critical patent/JPH0440146Y2/ja
Publication of JPS6255066U publication Critical patent/JPS6255066U/ja
Application granted granted Critical
Publication of JPH0440146Y2 publication Critical patent/JPH0440146Y2/ja
Expired legal-status Critical Current

Links

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  • Ventilation (AREA)
JP1985145144U 1985-09-25 1985-09-25 Expired JPH0440146Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985145144U JPH0440146Y2 (enExample) 1985-09-25 1985-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985145144U JPH0440146Y2 (enExample) 1985-09-25 1985-09-25

Publications (2)

Publication Number Publication Date
JPS6255066U JPS6255066U (enExample) 1987-04-06
JPH0440146Y2 true JPH0440146Y2 (enExample) 1992-09-21

Family

ID=31056411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985145144U Expired JPH0440146Y2 (enExample) 1985-09-25 1985-09-25

Country Status (1)

Country Link
JP (1) JPH0440146Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4715248U (enExample) * 1971-03-22 1972-10-23
JPS52164762U (enExample) * 1976-06-08 1977-12-14

Also Published As

Publication number Publication date
JPS6255066U (enExample) 1987-04-06

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