JPH0440146Y2 - - Google Patents
Info
- Publication number
- JPH0440146Y2 JPH0440146Y2 JP1985145144U JP14514485U JPH0440146Y2 JP H0440146 Y2 JPH0440146 Y2 JP H0440146Y2 JP 1985145144 U JP1985145144 U JP 1985145144U JP 14514485 U JP14514485 U JP 14514485U JP H0440146 Y2 JPH0440146 Y2 JP H0440146Y2
- Authority
- JP
- Japan
- Prior art keywords
- duct
- processing chamber
- supply duct
- discharge
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985145144U JPH0440146Y2 (cg-RX-API-DMAC7.html) | 1985-09-25 | 1985-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985145144U JPH0440146Y2 (cg-RX-API-DMAC7.html) | 1985-09-25 | 1985-09-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6255066U JPS6255066U (cg-RX-API-DMAC7.html) | 1987-04-06 |
| JPH0440146Y2 true JPH0440146Y2 (cg-RX-API-DMAC7.html) | 1992-09-21 |
Family
ID=31056411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985145144U Expired JPH0440146Y2 (cg-RX-API-DMAC7.html) | 1985-09-25 | 1985-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0440146Y2 (cg-RX-API-DMAC7.html) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4715248U (cg-RX-API-DMAC7.html) * | 1971-03-22 | 1972-10-23 | ||
| JPS52164762U (cg-RX-API-DMAC7.html) * | 1976-06-08 | 1977-12-14 |
-
1985
- 1985-09-25 JP JP1985145144U patent/JPH0440146Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6255066U (cg-RX-API-DMAC7.html) | 1987-04-06 |
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