JPH0438884A - Detector for laser oscillation output - Google Patents
Detector for laser oscillation outputInfo
- Publication number
- JPH0438884A JPH0438884A JP14601190A JP14601190A JPH0438884A JP H0438884 A JPH0438884 A JP H0438884A JP 14601190 A JP14601190 A JP 14601190A JP 14601190 A JP14601190 A JP 14601190A JP H0438884 A JPH0438884 A JP H0438884A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- light
- laser medium
- signal
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 title claims abstract description 13
- 238000001514 detection method Methods 0.000 claims abstract description 27
- 239000013307 optical fiber Substances 0.000 claims abstract description 14
- 238000006243 chemical reaction Methods 0.000 claims description 21
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000005259 measurement Methods 0.000 abstract description 8
- 230000000694 effects Effects 0.000 description 4
- 238000009429 electrical wiring Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、レーザ装置において、レーザ発振出力検出の
測定信頼性向上に適用して有効な技術に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a technique that is effective when applied to improving the measurement reliability of laser oscillation output detection in a laser device.
最近、 レーザ装置が高出力・高い集光性等の利ζから
光源装置として応用され始めている。特に従来の加工・
切断・溶接などの分野から、半導体製造プロセスにおけ
るフォトリングラフィ用光瀞として用いることも検討さ
れている。Recently, laser devices have begun to be applied as light source devices due to their advantages such as high output and high light focusing ability. Especially conventional processing
It is also being considered for use as a light source for photolithography in semiconductor manufacturing processes in fields such as cutting and welding.
ところで、前記フォトリソグラフィ光源として用いた場
合には、いわゆるウェハの歩留りを一定に維持するため
に、露光条件を均一化する必要があり、そのためにはレ
ーザ出力の光エネルギーが常に安定していることが要二
札される。By the way, when used as the photolithography light source, it is necessary to equalize the exposure conditions in order to maintain a constant wafer yield, and for this purpose, the optical energy of the laser output must be always stable. requires two bills.
そのため、この種の用途に用いられるレーザ装置では、
射出されるレーザ光を常にモニタして、このモニタ結果
に基づいてレーザ装置をフィードバック制御するための
測定・制御機構を備えているものが一般的である。Therefore, in laser equipment used for this type of application,
Generally, the laser device is equipped with a measurement and control mechanism for constantly monitoring the emitted laser light and performing feedback control of the laser device based on the monitoring results.
以下、この種の従来技術における具体例を第２図を用い
て説明する。A specific example of this type of prior art will be described below with reference to FIG. 2.
すなわち、レーザ媒質１におけるレーザ光３の射出口２
からのレーザ光路上には、ビームスプリッタ４が配置さ
れて、射出されたレーザ光３の一部を被検出光として取
り出していた 前記ビームスプリッタ４によって分岐さ
れたレーザ光は、適当な透過率を備えたＮＤフィルタ８
を介して光電変換素子１０であるフォトダイオードに入
光される。That is, the exit port 2 of the laser beam 3 in the laser medium 1
A beam splitter 4 is disposed on the laser beam path from which a part of the emitted laser beam 3 is taken out as detection target light.The laser beam split by the beam splitter 4 has an appropriate transmittance. Equipped with ND filter 8
The light enters the photodiode, which is the photoelectric conversion element 10, through the light.
前記光電変換素子１０で光電変換された検出信号（戴
電気配線１４を通じて駆動・検出部１１に伝えら汰 こ
こでＡ／Ｄ変換等の信号処理が行われ測定信号として制
御部１２に入力される。The detection signal (detection signal) photoelectrically converted by the photoelectric conversion element 10
The signal is transmitted to the drive/detection unit 11 through the electric wiring 14, where signal processing such as A/D conversion is performed, and the signal is input to the control unit 12 as a measurement signal.
制御部１２では、前記測定信号に基づいて制御信号を発
生させて、この制御信号によって前記レーザ媒質１の出
力制御を行っている。The control unit 12 generates a control signal based on the measurement signal, and controls the output of the laser medium 1 using this control signal.
しかし 前述した方法では光電変換素子１０としてのフ
ォトダイオードがレーザ媒質１の極く近傍に配置される
ため、下記のような難截があったすなわち、このような
レーザ装置に用いられるレーザ媒質１は、一般には、ガ
ス中における高電圧放電やロンド状の光学結晶・色素溶
液に対して光輝度のフラッシュランプ光を照射して得ら
れる。However, in the method described above, since the photodiode as the photoelectric conversion element 10 is placed very close to the laser medium 1, there are the following difficulties: The laser medium 1 used in such a laser device is Generally, it is obtained by high-voltage discharge in a gas or by irradiating a rond-shaped optical crystal/dye solution with bright flash lamp light.
ここでガス中における高電圧放電およびフラッシュラン
プの点灯はともに強い電磁的な雑音を発生することが多
い。したがって、光電変換素子１０の電気配線１４はこ
のような雑音の存在する場の中にさらされることになる
。Both high voltage discharge in gas and lighting of flash lamps often generate strong electromagnetic noise. Therefore, the electrical wiring 14 of the photoelectric conversion element 10 is exposed to a field containing such noise.
この結果、光電変換素子１０から駆動・検出部１１に至
る電気配４１１４上で電磁誘導による雑音パルスが発生
し 本来の光電変換素子１０がらの出力電圧が変動し
正確なレーザ発振出力の検出が困難となっていた
本発明は、前記課題に鑑みてなされたものであり、その
目的は、レーザ媒質等からの電磁的な雑音に左右される
ことなく、レーザ発振出力の正確な測定を可能にし、強
いては安定的なレーザ発振が可能なレーザ装置を実現す
ることにある。As a result, noise pulses due to electromagnetic induction are generated on the electrical wiring 4114 from the photoelectric conversion element 10 to the drive/detection section 11, and the original output voltage of the photoelectric conversion element 10 fluctuates.
The present invention was made in view of the above problem, in which accurate detection of laser oscillation output has become difficult, and its purpose is to detect laser oscillation without being affected by electromagnetic noise from the laser medium etc. The object of the present invention is to realize a laser device that enables accurate measurement of output and, ultimately, stable laser oscillation.
本発明は、レーザ媒質の近傍に配置された受光部と、受
光部に一端が接続されてレーザ媒質からの検出光を伝え
る光ファイバと、光ファイバの他端に接続された放光部
と、放光部に対向して配置された光電変換素子と、光を
変換素子からの検出信号に基づいて前記レーザ光の発振
出力を算出し前記レーザ媒質への制御信号を発生する主
制御部とで構成したレーザ発振出力検出装置を要旨とす
る。The present invention includes a light receiving section disposed near a laser medium, an optical fiber having one end connected to the light receiving section and transmitting detection light from the laser medium, and a light emitting section connected to the other end of the optical fiber. A photoelectric conversion element disposed opposite to the light emitting part, and a main control part that calculates the oscillation output of the laser beam based on the detection signal from the light conversion element and generates a control signal to the laser medium. The gist of this paper is the constructed laser oscillation output detection device.
二こで、 レーザ媒質としては、エキシマレーザ、炭酸
ガスレーザ、銅蒸気レーザ、色素レーザ、ＹＡＧレーザ
、アレキサントレイトレーザ等のパルス発振するレーザ
装置のみならずヘリウム−ネオンレーザ、アルゴンイオ
ンレーザ等の連続発振するレーザでもよい。In this case, laser media include not only pulsed laser devices such as excimer lasers, carbon dioxide lasers, copper vapor lasers, dye lasers, YAG lasers, and alexantrite lasers, but also continuous lasers such as helium-neon lasers and argon ion lasers. It may also be a laser that oscillates.
また、光ファイバの両端に接続される受光部および放光
部には光学レンズを装着して入光効率または出光効率を
高めたものでもよい。Furthermore, optical lenses may be attached to the light receiving section and the light emitting section connected to both ends of the optical fiber to improve light input efficiency or light output efficiency.
光電変換素子と１戴 たとえばフォトダイオード等の素
子であり、受光光量に対応した電気信号を発生する光電
効果を有する素子であればよい。The photoelectric conversion element may be an element such as a photodiode, as long as it has a photoelectric effect and generates an electric signal corresponding to the amount of light received.
前記した手段によれば、レーザ媒質近傍に配置された受
光部で受けた検出光を光状態のまま光ファイバによって
導く。そして、前記レーザ媒質の電磁的雑音の影響を受
けない位置に設けられた放光部から出光させて、この光
を光電変換素子で受ける。According to the above-mentioned means, the detection light received by the light receiving section disposed near the laser medium is guided in its optical state through the optical fiber. Then, light is emitted from a light emitting section provided at a position not affected by electromagnetic noise of the laser medium, and this light is received by a photoelectric conversion element.
このように、本発明では光ファイバを用いることにより
、レーザ媒質と光電変換素子との間の距離をとり、フォ
トダイオードを駆動・検出部に近接して配置することに
よりレーザ媒質からの電磁的雑音の影響を抑止すること
ができる。しかも、光を変換素子から駆動・検出部まで
の電気配線も大幅に短縮することができる。As described above, in the present invention, by using an optical fiber, the distance between the laser medium and the photoelectric conversion element is maintained, and the electromagnetic noise from the laser medium is reduced by arranging the photodiode close to the drive/detection section. The effects of this can be suppressed. Furthermore, the electrical wiring from the light conversion element to the drive/detection section can be significantly shortened.
この結果、光電変換素子の出力信号に混入する雑音信号
のレベルを低下させ、雑音に阻害されない信号検出が可
能となり、このような検出結果に基づいた確実なレーザ
装置の制御が可能となる。As a result, the level of noise signals mixed in the output signal of the photoelectric conversion element is reduced, signal detection that is not hindered by noise becomes possible, and reliable control of the laser device based on such detection results becomes possible.
以下、本発明の実施例を図を用いて説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図において、レーザ媒質１の射出口２より射出され
たレーザ光３は、ビームスプリッタ４でその一部が分岐
さ法 分岐光は受光部５に入光される。前記レーザ光３
は、受光部５に接続された光ファイバ６を通じて所定距
離１の位置にある放光部７まで導かれる。ここで所定比
Ｎ！１は、前記レーザ媒質１そのものが有する出力規格
等によって決定することが望ましい。In FIG. 1, a laser beam 3 emitted from an exit port 2 of a laser medium 1 is partially split by a beam splitter 4, and the split light enters a light receiving section 5. The laser beam 3
is guided through an optical fiber 6 connected to a light receiving section 5 to a light emitting section 7 located at a predetermined distance 1. Here, the predetermined ratio N! 1 is preferably determined based on the output standard of the laser medium 1 itself.
前記放光部７の対向位置には、ＮＤフィルタ８を介して
光電変換素子１０としてのフォトダイオードが配置され
ている。フォトダイオードでは、前記放光部７からの光
強度によって高力電圧が変化する。A photodiode as a photoelectric conversion element 10 is arranged at a position opposite to the light emitting section 7 with an ND filter 8 interposed therebetween. In the photodiode, the high voltage changes depending on the light intensity from the light emitting section 7.
駆動・検出部１１では、前記フォトダイオードからの電
圧信号に対してＡ／Ｄ変換等の信号処理を施して制御部
１２に出力する。The drive/detection section 11 performs signal processing such as A/D conversion on the voltage signal from the photodiode and outputs it to the control section 12 .
制御部１２は、マイクロプロセッサおよびメモリ等で構
成されており、駆動・検出部１１がらの測定信号に基づ
いて所定の演算処理を行い、レーザ媒質１に対する制御
信号を生成する。この制御信号は制御線Ｉ３を通じてレ
ーザ媒質ｌあるいは図示しないレーザ制御機構に送出さ
粗 レーザ媒質１から射出されるレーザ光の強度を制御
する。The control section 12 is composed of a microprocessor, a memory, etc., and performs predetermined arithmetic processing based on the measurement signal from the drive/detection section 11 to generate a control signal for the laser medium 1. This control signal is sent to the laser medium 1 or a laser control mechanism (not shown) through the control line I3, and controls the intensity of the laser beam emitted from the coarse laser medium 1.
このときの制御信号の生成方法としては、あらかじめサ
ンプリングによって得られた、光強度と対になる理想的
な制御パラメータをメモリに格納しておき、駆動・検出
部１１からの信号に対応してこれらの制御パラメータを
順次変更していく方法が埜げられる。In order to generate the control signal at this time, ideal control parameters paired with the light intensity obtained through sampling are stored in the memory in advance, and these are generated in response to the signal from the drive/detection section 11. The method of sequentially changing control parameters is being criticized.
このとき本実施例で代 光ファイバ６により、レーザ媒
質ｌと光電変換素子１ｏとの間の距離を十分にとること
ができるため、光を変換素子１゜を駆動・検出部１１に
近接して配置することができる。このため、レーザ媒質
１で発生する電磁的雑音の影響を最小限に抑止すること
ができる。しかも、光電変換素子１ｏから駆動・検出部
１１までの電気配線１４も大幅に短縮することができる
。At this time, in this embodiment, since the optical fiber 6 allows a sufficient distance between the laser medium l and the photoelectric conversion element 1o, the light can be transferred by moving the conversion element 1° close to the drive/detection unit 11. can be placed. Therefore, the influence of electromagnetic noise generated in the laser medium 1 can be suppressed to a minimum. Furthermore, the electrical wiring 14 from the photoelectric conversion element 1o to the drive/detection section 11 can also be significantly shortened.
この結果、光電変換素子１０の出力信号に混入する雑音
信号のレベルを低下させ、雑音に阻害されない信号検出
が可能となっており、制御部１２において的確な制御信
号を生成することができる。As a result, the level of noise signals mixed in the output signal of the photoelectric conversion element 10 is reduced, signal detection that is not hindered by noise is possible, and accurate control signals can be generated in the control section 12.
本発明によれば、雑音に阻害されない信号検出が可能と
なる結果 確実なレーザ装置の制御により安定したレー
ザ出力を得ることができる。According to the present invention, it is possible to detect a signal that is not disturbed by noise, and as a result, stable laser output can be obtained through reliable control of the laser device.
第１図は本発明の一実施例であり、レーザ発振出力検圧
装置の構成を示すブロンク恐 第２図は従来技術におけ
る装置構成を示すブロック図である。
１ レーザ媒質、 ３ レーザ九
５ 受光部 ６・光ファイバ、７ 放光部
１０ 光を変換素子（フォトダイオード）、１２ 制御
部FIG. 1 is an embodiment of the present invention, and FIG. 2 is a block diagram showing the configuration of a laser oscillation output pressure detection device. FIG. 2 is a block diagram showing the configuration of a conventional device. 1 Laser medium, 3 Laser 95 Light receiving section 6 Optical fiber, 7 Light emitting section 10 Light converting element (photodiode), 12 Control section
Claims (1)
ーを測定するレーザ発振出力検出装置であって、 レーザ媒質の近傍に配置された受光部と、 この受光部に一端が接続されてレーザ媒質からの検出光
を伝える光ファイバと、 光ファイバの他端に接続された放光部と、 この放光部に対向して配置された光電変換素子と、 光電変換素子からの検出信号に基づいて前記レーザ光の
発振出力を算出し前記レーザ媒質への制御信号を発生す
る主制御部とからなるレーザ発振出力検出装置。(1) A laser oscillation output detection device that measures the optical energy of a laser beam emitted from a laser medium, which includes a light receiving section placed near the laser medium, and one end of which is connected to the light receiving section and is connected to the laser medium. an optical fiber that transmits the detection light of the optical fiber; a light emitting section connected to the other end of the optical fiber; a photoelectric conversion element disposed opposite to the light emitting section; A laser oscillation output detection device comprising a main control section that calculates an oscillation output of a laser beam and generates a control signal to the laser medium.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14601190A JPH0438884A (en) | 1990-06-04 | 1990-06-04 | Detector for laser oscillation output |
| CA 2059134 CA2059134A1 (en) | 1990-04-16 | 1991-04-16 | Laser device |
| PCT/JP1991/000495 WO1991016745A1 (en) | 1990-04-16 | 1991-04-16 | Laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14601190A JPH0438884A (en) | 1990-06-04 | 1990-06-04 | Detector for laser oscillation output |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0438884A true JPH0438884A (en) | 1992-02-10 |
Family
ID=15398077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14601190A Pending JPH0438884A (en) | 1990-04-16 | 1990-06-04 | Detector for laser oscillation output |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438884A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6027159A (en) * | 1996-09-26 | 2000-02-22 | Daimlerchrysler Ag | Motor vehicle having a body support structure |
-
1990
- 1990-06-04 JP JP14601190A patent/JPH0438884A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6027159A (en) * | 1996-09-26 | 2000-02-22 | Daimlerchrysler Ag | Motor vehicle having a body support structure |
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