JPH0438046U - - Google Patents
Info
- Publication number
- JPH0438046U JPH0438046U JP7917290U JP7917290U JPH0438046U JP H0438046 U JPH0438046 U JP H0438046U JP 7917290 U JP7917290 U JP 7917290U JP 7917290 U JP7917290 U JP 7917290U JP H0438046 U JPH0438046 U JP H0438046U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- supply
- turntable
- intermediate chamber
- constant temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims 1
- 238000000638 solvent extraction Methods 0.000 claims 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7917290U JPH0546273Y2 (en:Method) | 1990-07-25 | 1990-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7917290U JPH0546273Y2 (en:Method) | 1990-07-25 | 1990-07-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0438046U true JPH0438046U (en:Method) | 1992-03-31 |
| JPH0546273Y2 JPH0546273Y2 (en:Method) | 1993-12-03 |
Family
ID=31623099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7917290U Expired - Lifetime JPH0546273Y2 (en:Method) | 1990-07-25 | 1990-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0546273Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014062765A (ja) * | 2012-09-20 | 2014-04-10 | Ueno Seiki Co Ltd | 部品検査装置 |
-
1990
- 1990-07-25 JP JP7917290U patent/JPH0546273Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014062765A (ja) * | 2012-09-20 | 2014-04-10 | Ueno Seiki Co Ltd | 部品検査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0546273Y2 (en:Method) | 1993-12-03 |