JPH0438037U - - Google Patents
Info
- Publication number
- JPH0438037U JPH0438037U JP8037690U JP8037690U JPH0438037U JP H0438037 U JPH0438037 U JP H0438037U JP 8037690 U JP8037690 U JP 8037690U JP 8037690 U JP8037690 U JP 8037690U JP H0438037 U JPH0438037 U JP H0438037U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- wafer
- jig
- pressurizing
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 12
- 239000004744 fabric Substances 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8037690U JPH0438037U (un) | 1990-07-27 | 1990-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8037690U JPH0438037U (un) | 1990-07-27 | 1990-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0438037U true JPH0438037U (un) | 1992-03-31 |
Family
ID=31625381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8037690U Pending JPH0438037U (un) | 1990-07-27 | 1990-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438037U (un) |
-
1990
- 1990-07-27 JP JP8037690U patent/JPH0438037U/ja active Pending