JPH0438033U - - Google Patents

Info

Publication number
JPH0438033U
JPH0438033U JP7931890U JP7931890U JPH0438033U JP H0438033 U JPH0438033 U JP H0438033U JP 7931890 U JP7931890 U JP 7931890U JP 7931890 U JP7931890 U JP 7931890U JP H0438033 U JPH0438033 U JP H0438033U
Authority
JP
Japan
Prior art keywords
mark position
detection device
position detection
mark
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7931890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7931890U priority Critical patent/JPH0438033U/ja
Publication of JPH0438033U publication Critical patent/JPH0438033U/ja
Pending legal-status Critical Current

Links

JP7931890U 1990-07-27 1990-07-27 Pending JPH0438033U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7931890U JPH0438033U (enrdf_load_stackoverflow) 1990-07-27 1990-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7931890U JPH0438033U (enrdf_load_stackoverflow) 1990-07-27 1990-07-27

Publications (1)

Publication Number Publication Date
JPH0438033U true JPH0438033U (enrdf_load_stackoverflow) 1992-03-31

Family

ID=31623368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7931890U Pending JPH0438033U (enrdf_load_stackoverflow) 1990-07-27 1990-07-27

Country Status (1)

Country Link
JP (1) JPH0438033U (enrdf_load_stackoverflow)

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