JPH0438033U - - Google Patents
Info
- Publication number
- JPH0438033U JPH0438033U JP7931890U JP7931890U JPH0438033U JP H0438033 U JPH0438033 U JP H0438033U JP 7931890 U JP7931890 U JP 7931890U JP 7931890 U JP7931890 U JP 7931890U JP H0438033 U JPH0438033 U JP H0438033U
- Authority
- JP
- Japan
- Prior art keywords
- mark position
- detection device
- position detection
- mark
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7931890U JPH0438033U (cs) | 1990-07-27 | 1990-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7931890U JPH0438033U (cs) | 1990-07-27 | 1990-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0438033U true JPH0438033U (cs) | 1992-03-31 |
Family
ID=31623368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7931890U Pending JPH0438033U (cs) | 1990-07-27 | 1990-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438033U (cs) |
-
1990
- 1990-07-27 JP JP7931890U patent/JPH0438033U/ja active Pending
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