JPH0437682Y2 - - Google Patents
Info
- Publication number
- JPH0437682Y2 JPH0437682Y2 JP1987199764U JP19976487U JPH0437682Y2 JP H0437682 Y2 JPH0437682 Y2 JP H0437682Y2 JP 1987199764 U JP1987199764 U JP 1987199764U JP 19976487 U JP19976487 U JP 19976487U JP H0437682 Y2 JPH0437682 Y2 JP H0437682Y2
- Authority
- JP
- Japan
- Prior art keywords
- cutting
- groove
- tool
- angle
- pitch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005520 cutting process Methods 0.000 claims description 22
- 238000003754 machining Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000007774 longterm Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
Description
【考案の詳細な説明】
〔産業上の利用分野〕
本考案は溝ローラ、例えばワイヤ式切断装置に
おいてワイヤを巻回する溝ローラを形成する溝加
工用工具に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a groove machining tool for forming a groove roller, for example a groove roller around which a wire is wound in a wire cutting device.
上記ワイヤ式切断装置は例えば第6図及び第7
図に示す構造のものがある。この切断装置50は
3本のローラ51,52,53を備え、それぞれ
のローラには所定ピツチを以て多数の環状溝51
a,52a,53aを形成し、ワイヤSをこれに
巻回して高速走行させ、高硬度脆性材料例えばシ
リコン単結晶Wをウエハー状に同時に多数枚切断
するようにしたものである。この場合、各ローラ
の環状溝のピツチは例えば1mm程度ときわめて小
さくし、しかも各ローラのピツチ誤差は、切断す
るウエハーの厚さに不同を生ずる。このためピツ
チはきわめて精度を要求される(例えば0.005
mm)。しかも切断効率向上のため環状溝の数は多
く、従つて加工に際し能率並びに精度向上の一つ
の手段として櫛刃形のいわゆる総形バイトが用い
られている。
The above wire type cutting device is illustrated in FIGS. 6 and 7, for example.
There is a structure shown in the figure. This cutting device 50 is equipped with three rollers 51, 52, 53, and each roller has a large number of annular grooves 51 with a predetermined pitch.
A, 52a, 53a are formed, and a wire S is wound around these and run at high speed to simultaneously cut a large number of wafers of a highly hard and brittle material such as silicon single crystal W. In this case, the pitch of the annular grooves of each roller is extremely small, for example, about 1 mm, and the pitch error of each roller causes a difference in the thickness of the wafer to be cut. For this reason, pitch accuracy is required to be extremely accurate (for example, 0.005
mm). Moreover, the number of annular grooves is large in order to improve cutting efficiency, and therefore, a comb-shaped cutting tool is used as a means of improving efficiency and accuracy during machining.
上記総形バイトは、先端の凹凸は同心円状に形
成されるもので、各溝毎に独立して加工されるも
ので、加工に手数を要するとともに、加工に際し
摩耗し研ぎ直しを繰り返す必要があるが、研削に
限度があり、寿命が短い等の問題がある。特に上
記の如く、例えばピツチ1mm程度で多数の同心円
状溝を上記の精度でそれぞれ刻設することは極め
て困難である。
The above-mentioned full-form cutting tool has a concentrically shaped unevenness at the tip, and each groove is machined independently, which is time-consuming and requires repeated sharpening due to wear during processing. However, there are problems such as limited grinding and short life. In particular, as described above, it is extremely difficult to individually form a large number of concentric grooves with a pitch of about 1 mm, for example, with the above-mentioned precision.
本考案はかかる点に鑑み、製作容易かつ長期の
使用を可能とすることを目的とするもので、その
特徴とするところは円筒形本体の外周に所定ピツ
チと角度を有する螺溝を形成し、半径方向の切込
み面とこれと直交する逃げ面とにより略L形とし
た切欠部を長手方向に沿つて切欠して全長に亘り
櫛刃を形成し、かつ切込み面は本体中心と刃先と
を結ぶ線に対し所定のすくい角を形成するように
したものてある。
In view of the above, the present invention aims to facilitate manufacture and enable long-term use.The present invention is characterized by forming a spiral groove with a predetermined pitch and angle on the outer periphery of the cylindrical body. A notch section formed into an approximately L shape by a radial cut surface and a flank surface orthogonal thereto is cut along the longitudinal direction to form a comb blade over the entire length, and the cut surface connects the center of the main body and the cutting edge. It is designed to form a predetermined rake angle with respect to the line.
櫛刃は螺溝を形成しこれに切込み面を切込むこ
とにより形成される。従つてピツチ精度は向上す
る。また摩耗に際しては本体は円筒形であり研ぎ
直し可能回数は増加し長期に使用することができ
る。
The comb blade is formed by forming a spiral groove and cutting a cut surface into the spiral groove. Therefore, pitch accuracy is improved. Furthermore, in the event of wear, the main body is cylindrical, which increases the number of times it can be resharpened, allowing for long-term use.
第1図乃至第2図は本考案の実施例を示す。溝
加工工具1は工具鋼等を以てする円筒状の本体2
の外周に螺溝3を刻設し、かつ全長に亘つて切欠
部4を形成してなる。この螺溝3は所定ピツチP
と角度αとを有するもので、この螺溝3は本体2
を熱処理により所要の硬度とした後、ねじ研磨機
により研削仕上げを行ない精密に形成する。この
螺溝3は例えばピツチ0.9〜1.5mm、角度45〜60度
に仕上げられる。
1 and 2 show an embodiment of the present invention. Grooving tool 1 has a cylindrical body 2 made of tool steel or the like.
A spiral groove 3 is carved on the outer periphery, and a notch 4 is formed over the entire length. This screw groove 3 has a predetermined pitch P.
and an angle α, and this screw groove 3 has a main body 2
After heat-treating it to the required hardness, it is finished by grinding with a screw grinder to form it precisely. This screw groove 3 is finished with a pitch of 0.9 to 1.5 mm and an angle of 45 to 60 degrees, for example.
切欠部4は半径方向の切込み面5とこれと直交
する逃げ面6とにより略L形に切欠したもので、
切込面5により櫛刃7を形成し、かつ切込面5は
本体中心と刃先とを結ぶ線に対し角度即ちすくい
角βを形成する。 The cutout portion 4 is a substantially L-shaped cutout formed by a radial cut surface 5 and a flank surface 6 perpendicular to the cut surface 5.
The cut surface 5 forms a comb blade 7, and the cut surface 5 forms an angle, that is, a rake angle β, with respect to a line connecting the center of the body and the cutting edge.
図中8は本体内孔2aに設けたキー溝である。 8 in the figure is a keyway provided in the main body internal hole 2a.
第3図乃至第5図は本考案の溝加工工具の使用
要領を示すもので、この工具1を把持する取付用
ホルダ10は本体内孔2aを貫通する支軸11と
この支軸11を支持するブラケツト12とを備え
る。支軸11と工具1とはキー13により固着し
て工具1の回動を阻止し、支軸11はブラケツト
12に対しクランプ部材14により回動を阻止さ
れる。 3 to 5 show how to use the grooving tool of the present invention, in which a mounting holder 10 for gripping the tool 1 supports a support shaft 11 passing through a hole 2a in the main body and a support shaft 11 for supporting the support shaft 11. A bracket 12 is provided. The support shaft 11 and the tool 1 are fixed together by a key 13 to prevent rotation of the tool 1, and the support shaft 11 is prevented from rotating relative to the bracket 12 by a clamp member 14.
切削に当たつては第4図に示す如く工具1の中
心が被切削物Wの中心より数mm(5〜6mm)高く
し、刃先7aは被切削物Wの中心に合わせること
が好ましい。 During cutting, it is preferable that the center of the tool 1 be several mm (5 to 6 mm) higher than the center of the object W to be cut, as shown in FIG. 4, and the cutting edge 7a should be aligned with the center of the object W to be cut.
なお刃先が摩耗したときは、外周に沿つて所定
のすくい角βを保持しつつ研削する。第5図は多
数回研削した状態を示す説明図である。図中鎖線
は順次研削した要領を示すものである。 Note that when the cutting edge is worn out, it is ground along the outer periphery while maintaining a predetermined rake angle β. FIG. 5 is an explanatory diagram showing a state in which the material has been ground many times. The dashed lines in the figure indicate the procedure for sequential grinding.
本考案によるときは、円筒形本体の外周に所定
ピツチと角度を有する螺溝を刻設し、半径方向の
切込み面とこれと直交する逃げ面とにより略L字
状とした切欠部を本体長手方向に沿つて切欠して
全長に亘つて櫛刃を形成するようにしたから、螺
溝は連続して形成するため、従来の外周の凹凸を
同心円状に形成した櫛刃形切削工具に比しピツチ
精度は極めて正確に、かつ長尺の櫛刃を形成する
ことができる。また切削に当たつては、切込み面
には本体中心と刃先とを結ぶ線に対し所定のすく
い角を形成し、かつ該切込み面は長手方向に沿つ
て形成したから、円形の溝ローラ素材に対し平行
に位置して加工することができ、素材全長に亘つ
て均一に櫛刃を形成することができる。また刃先
の摩耗に際しても本体外周に螺溝が形成されてい
る故所定のすくい角を以て研削することにより常
に同一形状の櫛刃を得ることができ使用期間の延
長を計ることができる効果を有する。
According to the present invention, a spiral groove having a predetermined pitch and angle is carved on the outer periphery of the cylindrical body, and a cutout portion that is approximately L-shaped with a radial cut surface and a relief surface perpendicular to this is formed along the length of the body. Since the comb blades are formed along the entire length by cutting along the direction, the spiral grooves are formed continuously, compared to conventional comb blade-shaped cutting tools in which the irregularities on the outer periphery are formed concentrically. The pitch accuracy is extremely accurate and long comb blades can be formed. In addition, when cutting, a predetermined rake angle was formed on the cut surface with respect to the line connecting the center of the main body and the cutting edge, and the cut surface was formed along the longitudinal direction, so that the circular grooved roller material could be cut. On the other hand, the comb blades can be processed while being positioned parallel to each other, and comb blades can be formed uniformly over the entire length of the material. In addition, even when the cutting edge wears out, since a spiral groove is formed on the outer periphery of the main body, a comb blade of the same shape can always be obtained by grinding with a predetermined rake angle, which has the effect of extending the period of use.
第1図乃至第2図は本考案の実施例に関し、第
1図は一部切欠した正面図、第2図は第1図にお
ける左側面図、第3図は上記工具を取付用ホルダ
に取り付けた状態を示す平面図、第4図は切削要
領の説明図、第5図は研ぎ直し要領を示す説明
図、第6図及び第7図はワイヤ式切断装置に関
し、第6図は概略説明図、第7図は側面図であ
る。
1は溝加工工具、2は円筒形本体、3は螺溝、
4は切断部、7は櫛刃、βはすくい角である。
Figures 1 and 2 relate to an embodiment of the present invention, with Figure 1 being a partially cutaway front view, Figure 2 being a left side view of Figure 1, and Figure 3 showing the above tool being attached to a mounting holder. FIG. 4 is an explanatory diagram of the cutting procedure, FIG. 5 is an explanatory diagram of the resharpening procedure, FIGS. 6 and 7 are related to the wire cutting device, and FIG. 6 is a schematic explanatory diagram. , FIG. 7 is a side view. 1 is a groove processing tool, 2 is a cylindrical body, 3 is a screw groove,
4 is a cutting portion, 7 is a comb blade, and β is a rake angle.
Claims (1)
螺溝を形成し、半径方向の切込み面とこれと直交
する逃げ面とにより略L形とした切欠部を長手方
向に沿つて切欠して全長に亘り櫛刃を形成し、か
つ切込み面は本体中心と刃先とを結ぶ線に対し所
定のすくい角を形成することを特長とする溝ロー
ラの溝加工用工具。 A spiral groove with a predetermined pitch and angle is formed on the outer periphery of the cylindrical body, and a notch is formed into a substantially L shape by a radial notch surface and a relief surface perpendicular to this, and is cut out along the longitudinal direction to extend the entire length. A groove machining tool for a groove roller, which is characterized by forming a comb blade and having a cutting surface forming a predetermined rake angle with respect to a line connecting the center of the body and the cutting edge.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987199764U JPH0437682Y2 (en) | 1987-12-28 | 1987-12-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987199764U JPH0437682Y2 (en) | 1987-12-28 | 1987-12-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01101703U JPH01101703U (en) | 1989-07-10 |
JPH0437682Y2 true JPH0437682Y2 (en) | 1992-09-04 |
Family
ID=31490204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987199764U Expired JPH0437682Y2 (en) | 1987-12-28 | 1987-12-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0437682Y2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5761403A (en) * | 1980-09-30 | 1982-04-13 | Okumura Eng:Kk | Cutting tool |
-
1987
- 1987-12-28 JP JP1987199764U patent/JPH0437682Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5761403A (en) * | 1980-09-30 | 1982-04-13 | Okumura Eng:Kk | Cutting tool |
Also Published As
Publication number | Publication date |
---|---|
JPH01101703U (en) | 1989-07-10 |
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