JPH0437625Y2 - - Google Patents
Info
- Publication number
- JPH0437625Y2 JPH0437625Y2 JP1988061753U JP6175388U JPH0437625Y2 JP H0437625 Y2 JPH0437625 Y2 JP H0437625Y2 JP 1988061753 U JP1988061753 U JP 1988061753U JP 6175388 U JP6175388 U JP 6175388U JP H0437625 Y2 JPH0437625 Y2 JP H0437625Y2
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- chamber
- processing
- processing chamber
- water droplets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 31
- 239000007789 gas Substances 0.000 description 19
- 230000005484 gravity Effects 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010186 staining Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000006864 oxidative decomposition reaction Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Prevention Of Fouling (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988061753U JPH0437625Y2 (ko) | 1988-05-11 | 1988-05-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988061753U JPH0437625Y2 (ko) | 1988-05-11 | 1988-05-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01167334U JPH01167334U (ko) | 1989-11-24 |
JPH0437625Y2 true JPH0437625Y2 (ko) | 1992-09-03 |
Family
ID=31287401
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988061753U Expired JPH0437625Y2 (ko) | 1988-05-11 | 1988-05-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0437625Y2 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020175315A (ja) * | 2019-04-16 | 2020-10-29 | ヤマト科学株式会社 | ドラフトチャンバおよびドラフトチャンバの風量制御方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS559119U (ko) * | 1978-06-30 | 1980-01-21 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59135133U (ja) * | 1983-02-26 | 1984-09-10 | 株式会社大氣社 | 隔離作業用キヤビネツト |
JPH0529076Y2 (ko) * | 1985-12-23 | 1993-07-26 |
-
1988
- 1988-05-11 JP JP1988061753U patent/JPH0437625Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS559119U (ko) * | 1978-06-30 | 1980-01-21 |
Also Published As
Publication number | Publication date |
---|---|
JPH01167334U (ko) | 1989-11-24 |
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