JPH0436759U - - Google Patents

Info

Publication number
JPH0436759U
JPH0436759U JP7959090U JP7959090U JPH0436759U JP H0436759 U JPH0436759 U JP H0436759U JP 7959090 U JP7959090 U JP 7959090U JP 7959090 U JP7959090 U JP 7959090U JP H0436759 U JPH0436759 U JP H0436759U
Authority
JP
Japan
Prior art keywords
charged particle
lens barrel
particle beam
relay means
accelerating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7959090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7959090U priority Critical patent/JPH0436759U/ja
Publication of JPH0436759U publication Critical patent/JPH0436759U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP7959090U 1990-07-26 1990-07-26 Pending JPH0436759U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7959090U JPH0436759U (fr) 1990-07-26 1990-07-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7959090U JPH0436759U (fr) 1990-07-26 1990-07-26

Publications (1)

Publication Number Publication Date
JPH0436759U true JPH0436759U (fr) 1992-03-27

Family

ID=31623884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7959090U Pending JPH0436759U (fr) 1990-07-26 1990-07-26

Country Status (1)

Country Link
JP (1) JPH0436759U (fr)

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