JPH04367288A - Piezoelectric actuator - Google Patents

Piezoelectric actuator

Info

Publication number
JPH04367288A
JPH04367288A JP3142846A JP14284691A JPH04367288A JP H04367288 A JPH04367288 A JP H04367288A JP 3142846 A JP3142846 A JP 3142846A JP 14284691 A JP14284691 A JP 14284691A JP H04367288 A JPH04367288 A JP H04367288A
Authority
JP
Japan
Prior art keywords
piezoelectric actuator
electrostrictive
elements
fuse
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3142846A
Other languages
Japanese (ja)
Inventor
Osamu Yamashita
修 山下
Yoshiki Inoue
芳樹 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP3142846A priority Critical patent/JPH04367288A/en
Publication of JPH04367288A publication Critical patent/JPH04367288A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To protect a piezoelectric actuator and a driving device for the actuator from an overcurrent. CONSTITUTION:A piezoelectric actuator of a structure, wherein a plurality of pieces of electrostrictive effect elements 1a to 1e of a laminated ceramic capacitor structure are bonded together in such a way that they are stacked and are electrically connected in parallel to each other, is constituted by a method wherein a protective circuit (a fuse) 3 is connected in series to a lead wire 2a connected in parallel to the elements 1a to 1e. When a working voltage is applied in error, the elements 1a to 1e can be protected from breakdown in the case a driving device for the actuator is made to drive exceeding a resonance frequency or the like.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は圧電アクチュエータに関
し、特に保護回路を有する圧電アクチュエータの構造に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric actuator, and more particularly to the structure of a piezoelectric actuator having a protection circuit.

【0002】0002

【従来の技術】電気エネルギーを機械的エネルギーに変
換する電歪効果素子を利用した圧電アクチュエータは現
在マスフロウコントローラやX−Yテーブル駆動,射出
成形機などの工業分野で使用されている。図3は従来の
圧電アクチュエータの縦断面図である。複数の圧電セラ
ミック部材と内部電極導体が交互に積層され各内部電極
が二つの外部電極のどちらかに接続しているセラミック
コンデンサ型電歪効果素子の両端のリード線を取り付け
たものを複数個(例えば5個)電歪効果素子の変位また
は力の発生軸に垂直な面どうしを金属板を間にはさみ接
着し電気的にはリード線により並列に接続し、接着せず
に残った電歪効果素子の変位または力の発生軸に垂直な
面にそれぞれ機器への取り付け用に金具を接着した圧電
アクチュエータである。
2. Description of the Related Art Piezoelectric actuators using electrostrictive elements that convert electrical energy into mechanical energy are currently used in industrial fields such as mass flow controllers, X-Y table drives, and injection molding machines. FIG. 3 is a longitudinal cross-sectional view of a conventional piezoelectric actuator. A plurality of ceramic capacitor-type electrostrictive effect elements each having lead wires attached to both ends ( For example, 5 pieces) The surfaces perpendicular to the displacement or force generation axis of the electrostrictive effect elements are glued together with a metal plate in between, and electrically connected in parallel with lead wires, and the electrostrictive effect that remains without being glued This is a piezoelectric actuator in which metal fittings are glued to the plane perpendicular to the displacement or force generation axis of the element for attachment to equipment.

【0003】0003

【発明が解決しようとする課題】上述した従来の圧電ア
クチュエータは積み重ねられたセラミックコンデンサ型
電歪効果素子それぞれから導出されたリード線が電気的
には前述のセラミックコンデンサ型の電歪効果素子どう
しを並列に接続した後に、直接外部へ出ているため、駆
動電圧を誤まって過剰に印加した場合、又は電歪効果素
子の共振周波数をこえて駆動させた場合電歪効果素子を
破損してしまうという問題点があった。
[Problems to be Solved by the Invention] In the conventional piezoelectric actuator described above, the lead wires led out from each of the stacked ceramic capacitor type electrostrictive effect elements electrically connect the ceramic capacitor type electrostrictive effect elements to each other. After connecting in parallel, the electrostrictive element is directly output to the outside, so if the drive voltage is applied incorrectly or excessively, or if the electrostrictive element is driven beyond its resonant frequency, the electrostrictive element will be damaged. There was a problem.

【0004】本発明の目的は、駆動電圧を誤って過剰に
印加した場合、又は電歪効果素子の共振周波数をこえて
駆動させた場合、又は電歪効果素子の層間の絶縁が破壊
された場合などでも電歪効果素子を保護することができ
る圧電アクチュエータを提供することにある。
[0004] The purpose of the present invention is to solve the problem when excessive driving voltage is applied by mistake, when the electrostrictive element is driven beyond the resonant frequency, or when the insulation between the layers of the electrostrictive element is broken. It is an object of the present invention to provide a piezoelectric actuator that can protect an electrostrictive element even when the electrostrictive element is protected.

【0005】[0005]

【課題を解決するための手段】本発明の圧電アクチュエ
ータは圧電セラミック部材と内部電極導体とが交互に積
層され各内部電極が2つの外部電極に交互に接続してい
るセラミックコンデンサ型電歪効果素子を複数個積み重
ねて接着し、電気的には電歪効果素子を並列に接続した
圧電アクチュエータにおいて、前記電歪効果素子と電気
的に接続された保護回路を備えている。
[Means for Solving the Problems] The piezoelectric actuator of the present invention is a ceramic capacitor type electrostrictive element in which piezoelectric ceramic members and internal electrode conductors are alternately laminated, and each internal electrode is alternately connected to two external electrodes. A piezoelectric actuator is a piezoelectric actuator in which a plurality of piezoelectric actuators are stacked and bonded together and an electrostrictive element is electrically connected in parallel, and a protection circuit is electrically connected to the electrostrictive element.

【0006】[0006]

【実施例】次に本発明について図面を参照して説明する
。図1は、本発明の一実施例の圧電アクチュエータの縦
断面である。1a〜1eは圧電セラミック部材と内部電
極導体層とを交互に積層し、一対の外部電極導体7a,
7fを有する積層セラミックコンデンサ構造の電歪効果
素子、2a,2bは電歪効果素子1a〜1eの外部電極
導体7a〜7e,7f〜7iとをそれぞれ電気的に並列
に接続する1対のリード線,2cは上述した一対のリー
ド線のどちらか一方と電歪効果素子とを電気的に直列に
接続されたヒューズ3とを接続するリード線、2d,2
eは上述の圧電アクチュエータに電力を供給する際に電
源に接続するために外部へ導出するリード線である。4
a〜4dは金属板であり5a,5bは上記電歪効果素子
と機器との取り付けを容易にするために(例えばネジ)
加工してある金具である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be explained with reference to the drawings. FIG. 1 is a longitudinal section of a piezoelectric actuator according to an embodiment of the present invention. 1a to 1e, piezoelectric ceramic members and internal electrode conductor layers are alternately laminated, and a pair of external electrode conductors 7a,
7f, a pair of lead wires 2a and 2b electrically connect the external electrode conductors 7a to 7e and 7f to 7i of the electrostrictive elements 1a to 1e in parallel, respectively; , 2c are lead wires connecting one of the above-mentioned pair of lead wires and the electrostrictive effect element to the fuse 3, which is electrically connected in series;
Reference character e is a lead wire led out to the outside for connection to a power source when power is supplied to the piezoelectric actuator described above. 4
a to 4d are metal plates, and 5a and 5b are metal plates (for example, screws) to facilitate attachment of the electrostrictive element to the equipment.
It is a processed metal fitting.

【0007】次に本発明の圧電アクチュエータの組み立
て方法を説明する。まず電歪効果素子1aと1bの変位
または力の発生軸に垂直な面どうしを金属板4aを介し
て接着し、次に電歪効果素子1bの上述の接着した面の
対象な面と電歪効果素子1cの変位または力の発生軸に
垂直な面とを金属板4bを介して接着する。同様に電歪
効果素子1d,1eを金属板4c,4dを介して接着す
る。次に電歪効果素子1aと1eの接着した面の対象な
面に機器との取り付けのために一部加工してある金具5
a,5bを接着する。次に電歪効果素子1a〜1eの外
部電極導体7a〜7e,7f〜7iにリード線2a,2
bをそれぞれ電歪効果素子1a〜1eが電気的に並列接
続となるように半田付け接続する。さらに、リード線2
aと電歪効果素子保護用のヒューズ3をリード線2cを
介して電歪効果素子と電気的には直列に半田付けにより
接続し、外部より電源を供給するためのリード線2d,
2eをヒューズ3とリード線2bにそれぞれ半田付けし
接続し、組立てを完成させる。
Next, a method for assembling the piezoelectric actuator of the present invention will be explained. First, the surfaces perpendicular to the displacement or force generation axis of the electrostrictive elements 1a and 1b are bonded to each other via the metal plate 4a, and then the symmetric surfaces of the bonded surfaces of the electrostrictive effect element 1b and the electrostrictive The effect element 1c is bonded to a surface perpendicular to the axis of displacement or force generation via a metal plate 4b. Similarly, electrostrictive elements 1d and 1e are bonded via metal plates 4c and 4d. Next, a metal fitting 5 is partially processed on the target surface of the bonded surfaces of the electrostrictive elements 1a and 1e for attachment to the equipment.
Glue a and 5b. Next, the lead wires 2a, 2 are connected to the external electrode conductors 7a to 7e, 7f to 7i of the electrostrictive elements 1a to 1e.
b are connected by soldering so that the electrostrictive effect elements 1a to 1e are electrically connected in parallel. Furthermore, lead wire 2
A and a fuse 3 for protecting the electrostrictive effect element are electrically connected in series with the electrostrictive effect element through a lead wire 2c by soldering, and a lead wire 2d for supplying power from the outside,
2e is soldered and connected to the fuse 3 and lead wire 2b, respectively, to complete the assembly.

【0008】次にその動作を説明する。本実施例に用い
るセラミックコンデンサ型電歪効果素子は容量0.5μ
F,絶縁抵抗1MΩ,耐電圧200V,最高使用電圧1
50Vの特性値をもつものである。これに溶断電流0.
3Aの特性値をもつヒューズを用いると、使用電源を誤
って接続したり、電歪効果素子の共振周波数をこえて駆
動させた場合に電歪効果素子に流れる電流が急増し、過
電流遮断用のヒューズを溶断して電歪効果素子に過電流
が流れることを防止する。
Next, its operation will be explained. The ceramic capacitor type electrostrictive effect element used in this example has a capacitance of 0.5μ.
F, insulation resistance 1MΩ, withstand voltage 200V, maximum working voltage 1
It has a characteristic value of 50V. This has a fusing current of 0.
If a fuse with a characteristic value of 3A is used, the current flowing through the electrostrictive element will rapidly increase if the power supply is connected incorrectly or the electrostrictive element is driven beyond its resonant frequency. The fuse is blown to prevent overcurrent from flowing to the electrostrictive element.

【0009】図2は本発明の他の実施例の縦断面図であ
る。電歪効果素子1a〜1eそれぞれの外部電極導体7
a〜7eそれぞれにヒューズ3を接続した後に、電歪効
果素子1a〜1dが電気的に並列接続となるようリード
線2a,2b,2d,2eを半田付け接続する。この実
施例では、重ねて接着した電歪効果素子それぞれにヒュ
ーズが接続されているので一部の電歪効果素子の層間の
絶縁が破壊された時でも、ヒューズはその部分しか溶断
されないので他の電歪効果素子は正常に動き、組み込ん
だ装置の動作に不備を来すことが少ないという利点があ
る。
FIG. 2 is a longitudinal sectional view of another embodiment of the invention. External electrode conductor 7 of each of the electrostrictive elements 1a to 1e
After connecting the fuse 3 to each of a to 7e, the lead wires 2a, 2b, 2d, and 2e are connected by soldering so that the electrostrictive elements 1a to 1d are electrically connected in parallel. In this embodiment, a fuse is connected to each of the electrostrictive elements bonded one on top of the other, so even if the insulation between the layers of some electrostrictive elements breaks down, only that part of the fuse is blown. The electrostrictive element has the advantage that it operates normally and rarely causes any defects in the operation of the device in which it is incorporated.

【0010】0010

【発明の効果】以上説明したように本発明は電歪効果素
子と保護回路を電気的に直列接続することにより次の効
果がある。 (1)電圧印加時に急に電歪効果素子の層間の絶縁が破
壊された時でも保護回路(ヒューズ)が切れることによ
り電源側の過電流による破壊を防止する働きがある。 (2)使用電圧を誤って印加したときにも保護回路(ヒ
ューズ)が切れることにより電歪効果素子を保護する働
きがある。 (3)電歪効果素子の共振周波数をこえて駆動されたと
きも保護回路(ヒューズ)が切れることにより電歪効果
素子を保護する働きがある。
As explained above, the present invention has the following effects by electrically connecting the electrostrictive element and the protection circuit in series. (1) Even if the insulation between the layers of the electrostrictive element suddenly breaks down when a voltage is applied, the protection circuit (fuse) is blown to prevent damage caused by overcurrent on the power supply side. (2) Even if the operating voltage is incorrectly applied, the protection circuit (fuse) is blown to protect the electrostrictive element. (3) Even when the electrostrictive element is driven beyond its resonant frequency, the protection circuit (fuse) is blown to protect the electrostrictive element.

【0011】なお本実施例においては保護回路にヒュー
ズを用いたが同様の機能をもつ部品に置きかえても本効
果が得られることはいうまでもない。
Although a fuse is used in the protection circuit in this embodiment, it goes without saying that the same effect can be obtained even if the fuse is replaced with a component having a similar function.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】本発明の一実施例の圧電アクチュエータの縦断
面図である。
FIG. 1 is a longitudinal sectional view of a piezoelectric actuator according to an embodiment of the present invention.

【図2】本発明の他の実施例の圧電アクチュエータの縦
断面図である。
FIG. 2 is a longitudinal sectional view of a piezoelectric actuator according to another embodiment of the present invention.

【図3】従来の金属ケース入り圧電アクチュエータの一
例の縦断面図である。
FIG. 3 is a longitudinal cross-sectional view of an example of a conventional piezoelectric actuator enclosed in a metal case.

【符号の説明】[Explanation of symbols]

1a〜1e    電歪効果素子 2a〜2e    リード線 3    ヒューズ 4a〜4d    金属板 5a,5d    金具 7a〜7j    外部電極導体 1a to 1e Electrostrictive effect element 2a-2e Lead wire 3 Fuse 4a-4d   Metal plate 5a, 5d Metal fittings 7a-7j External electrode conductor

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】  圧電セラミック部材と内部電極導体と
が交互に積層され各内部電極が二つの外部電極に交互に
接続しているセラミックコンデンサ型電歪効果素子を複
数個積み重ねて接着し、電気的には電歪効果素子を並列
に接続した圧電アクチュエータにおいて、前記電歪効果
素子と電気的に接続された保護回路を有することを特徴
とする圧電アクチュエータ。
[Claim 1] A plurality of ceramic capacitor-type electrostrictive elements in which piezoelectric ceramic members and internal electrode conductors are alternately laminated and each internal electrode is alternately connected to two external electrodes are stacked and bonded, and electrically A piezoelectric actuator comprising electrostrictive elements connected in parallel, the piezoelectric actuator comprising a protection circuit electrically connected to the electrostrictive elements.
【請求項2】  前記保護回路が積層された電歪効果素
子のそれぞれに直列に接続されていることを特徴とする
請求項1記載の圧電アクチュエータ。
2. The piezoelectric actuator according to claim 1, wherein the protection circuit is connected in series to each of the stacked electrostrictive elements.
【請求項3】  前記保護回路が電歪効果素子を並列に
接続したリード線に直列に接続されていることを特徴と
する請求項1記載の圧電アクチュエータ。
3. The piezoelectric actuator according to claim 1, wherein the protection circuit is connected in series to a lead wire to which electrostrictive elements are connected in parallel.
JP3142846A 1991-06-14 1991-06-14 Piezoelectric actuator Pending JPH04367288A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3142846A JPH04367288A (en) 1991-06-14 1991-06-14 Piezoelectric actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3142846A JPH04367288A (en) 1991-06-14 1991-06-14 Piezoelectric actuator

Publications (1)

Publication Number Publication Date
JPH04367288A true JPH04367288A (en) 1992-12-18

Family

ID=15324976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3142846A Pending JPH04367288A (en) 1991-06-14 1991-06-14 Piezoelectric actuator

Country Status (1)

Country Link
JP (1) JPH04367288A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1605527A1 (en) * 2004-06-07 2005-12-14 Delphi Technologies, Inc. Fused external electrode to a piezoelectric multilayer actuator and piezoelectric multilayer actuator incorporating the same
JP2007089355A (en) * 2005-09-26 2007-04-05 Taiheiyo Cement Corp Piezoelectric actuator with protection mechanism and protection mechanism unit
JP2013077616A (en) * 2011-09-29 2013-04-25 Taiheiyo Cement Corp Piezoelectric actuator and manufacturing method thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6433980A (en) * 1987-07-30 1989-02-03 Toyota Motor Corp Lamination type piezoelectric body
JPH02291184A (en) * 1989-04-28 1990-11-30 Oki Electric Ind Co Ltd Laminated actuator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6433980A (en) * 1987-07-30 1989-02-03 Toyota Motor Corp Lamination type piezoelectric body
JPH02291184A (en) * 1989-04-28 1990-11-30 Oki Electric Ind Co Ltd Laminated actuator

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1605527A1 (en) * 2004-06-07 2005-12-14 Delphi Technologies, Inc. Fused external electrode to a piezoelectric multilayer actuator and piezoelectric multilayer actuator incorporating the same
US7268473B2 (en) 2004-06-07 2007-09-11 Delphi Technologies, Inc. Piezoelectric actuator
JP2007089355A (en) * 2005-09-26 2007-04-05 Taiheiyo Cement Corp Piezoelectric actuator with protection mechanism and protection mechanism unit
JP4700456B2 (en) * 2005-09-26 2011-06-15 太平洋セメント株式会社 Piezoelectric actuator with protection mechanism and protection mechanism unit
JP2013077616A (en) * 2011-09-29 2013-04-25 Taiheiyo Cement Corp Piezoelectric actuator and manufacturing method thereof

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