JPH04366201A - Carrier equipment - Google Patents

Abstract

PURPOSE:To move a truck handily and quickly to another carrier course, regarding a carrier equipment for moving the truck running on the carrier course, to the other carrier course. CONSTITUTION:One-side walls 4a, 5a to be vertically set on stations 4, 5 are moved by movable means 7, 8, and are made even. Then, a truck to be stopped at the station 4 with the side wall 4a made even, of a carrier course 2 is moved by a moving means 9 formed with an actuator 13 having three-way degrees of freedom with an arm 14, to the station 5 with the side wall 5a made even, of a carrier course 3.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a conveying device for moving a cart running on a conveying path to another conveying path.

[0002] In recent years, conveyance paths have been laid or constructed in factories for automation and labor saving, and carts have been run on the conveyance paths. In this case, a plurality of conveyance paths may be provided above and below, and it is necessary to move the cart freely between the conveyance paths with steps.

0003

2. Description of the Related Art FIG. 5 shows a configuration diagram of a conventional conveying device. In FIG. 5, the conveyor device 50 has conveyor rails 51 laid three-dimensionally intersectingly in a factory or the like, which can be separated at a stop station 52, and each conveyor rail 51
stop stations 52 are arranged at the same position above and below. A cart 53 runs on each of these transport rails 51.

On the other hand, when moving the cart 53 from one transport rail 51 to another transport rail 51, a moving mechanism means 54 is used. The moving mechanism means 54 is a vertical drive unit 5
5 and a holding section 56. The vertical drive section 55 is
The movable plate 57 is moved up and down by a rotating shaft 58 using a shaft 59 as a guide. Further, the holding section 56 is placed and fixed on the end of the movable plate 57, and is provided with an actuator 61 rotated by a motor 60. In this case, the actuator 61 is provided with a stator 62, a secondary conductor 63 is provided at the bottom of the truck 53, and the stator 62 and the secondary conductor 63 move the truck 53.
Configure the linear motor to be stopped. Although two holding parts 56 are shown in FIG. 5 for convenience of explanation, it is actually one holding part 56, and the stop station 52 (which is moved together with the cart 53) held by the upper holding part 56 is This shows the case where the actuator 61 is rotated by lowering it.

[0005] Such a conveyance device 50 moves the entire stop station 52 where the cart 53 is stopped to the holding unit 5 along with the rails.
Hold at 6 and lower. And the actuator 61
By rotating it by 90 degrees, for example, it is moved to the position of the stop station 52 of the conveyor rail 51 installed below.

[0006]

[Problems to be Solved by the Invention] However, as described above, the carriage 53 must be moved for each rail, which slows down the processing speed and also causes the position of the stop station 52 of each conveyance path 51 to be vertical (vertical). If the cart 53 is not placed above or directly below, there is a problem in that it is difficult to move the cart 53.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a conveyance device that moves a cart to another conveyance path simply and at high speed.

[0008]

[Means for Solving the Problems] FIG. 1 shows a diagram of the basic configuration of the present invention. In FIG. 1, a conveyance device 1 is provided with stop areas 4 and 5 at predetermined positions of conveyance paths 2 and 3 that three-dimensionally intersect (may be installed in parallel), respectively.
A trolley 6 runs on top. One of the side walls 4a, 5a standing in the stop areas 4, 5 is rotatable, and movable means 7, 8 flatten the side walls 4a, 5a.

Further, a moving means 9 is provided between the conveyance paths 2 and 3, and the moving means 9 moves a cart that is stopped in the stopping area 4 where the side wall 4a is flattened, and a cart which is stopped at the stopping area 4 where the side wall 4b is flattened. Move to stop area 5.

0010

[Operation] As shown in FIG. 1, one side wall 4a, 5a of the stop area 4, 5 is flattened by the movable means 7, 8. A cart 6 is stopped in a stop area 4 of the transport path 2, and when moving the cart 6 to the transport path 3, the side walls 4a and 5a of the stop areas 4 and 5 are flattened, and the moving means 9 moves from the side wall 4a portion. Lift up the trolley 6. Then, the stop area 5 of the conveyance path 3
The cart 6 is rotated to the position shown in FIG.
It moves it up.

[0011] This makes it possible to easily and quickly move the cart 6 between the transport paths 2 and 3 having different heights.

0012

Embodiment FIG. 2 shows a configuration diagram of an embodiment of the present invention. In the conveyance device 1 shown in FIG. 2, a stop area 4 (5) is provided in a plurality of conveyance paths (3) laid down in a semiconductor manufacturing factory, for example, and one side wall 4a (5a) that stands up is connected to a shaft 1.
0, and is rotated by movable means 7 (8) (described later).

On the transport path 2 (3), a cart 6 carrying, for example, a semiconductor wafer travels, and stops at a station 4 (5), which is a stopping area, or starts. Therefore, the station 4 (5) is provided with a stator 11 constituting a linear motor, and a secondary conductor 12 is provided at the bottom of the truck 6. That is, the trolley 6 receives a starting force from this linear motor, travels along the conveyance path 2 (3) by inertia, and is stopped at the next station as necessary.

On the other hand, a moving means 9 is provided near the station 4 (5). The moving means 9 has three types: rotation and vertical movement.
An actuator 13 having a degree of freedom in the direction is erected,
A horizontally movable arm 14 is attached to its tip.

FIG. 3 shows a diagram for explaining the movable means of the present invention. Figure 3(A) is a side view, and Figure 3(A) is a side view.
(B) is a top view. In FIGS. 3(A) and (B),
The movable means 7 (8) is provided with a cam 15 on a shaft 10 passing through the side wall 4a (5a).
A cam 16 that meshes with the cam 16 is rotated by a motor 17. That is, by driving the motor 17, the cams 16, 15
The side wall 4a (5a) is made flat or erected via the side wall 4a (5a). In this embodiment, the cams 15 and 16 are used to transmit the rotation, but the rotation may be transmitted using a belt or a carrier roller.

Next, FIG. 4 shows a diagram for explaining the operation of the present invention. First, the side walls 4a and 5a of the stations 4 and 5 of the transport paths 2 and 3, which have different heights, are flattened by the movable means 7 and 8. Therefore, arm 1 of actuator 13
4 is raised to the height of the bottom of the truck 6 stopped at the station 4, and the arm 14 is inserted into the bottom of the truck 6 by horizontal movement to lift the truck 6. Then, the arm 14 is moved horizontally and pulled out from the station 4, and the actuator 13 is rotated so as to be located above the conveyance path 3.

Subsequently, the arm 14 is lowered by the actuator 13 to the height of the flattened side wall 5a of the station 5, and the arm 14 is moved horizontally to position the carriage 6 on the stator 11. Therefore, the arm 14 is pulled out, the side wall 5a is erected by the movable means 8, and the stator 11
The trolley 6 is made to travel by energizing it.

[0018] In this manner, when moving the carriage 6 to another conveyance path 3 having a different height, only the carriage 6 is moved, which makes it lightweight and allows the conveyance path to be changed easily and quickly. In addition, it is possible to perform not only transport paths with different heights, but also branching and lateral shifting of parallel transport paths, making it possible to move carts between complex transport lines easily and quickly. .

[0019]

As described above, according to the present invention, one of the side walls standing in the stop area is flattened, and the cart is conveyed from the flat side wall, so that only when the heights of the conveyance paths are different. Even when the carts are arranged side by side, the carts can be moved easily and quickly.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing the principle configuration of the present invention.

FIG. 2 is a configuration diagram of an embodiment of the present invention.

FIG. 3 is a diagram for explaining the movable means of the present invention.

FIG. 4 is a diagram for explaining the operation of the present invention.

FIG. 5 is a configuration diagram of a conventional conveyance device.

[Explanation of symbols]

1 Conveyance device 2,3 Conveyance path 4,5 Stop area 4a, 5a side wall 6 Trolley 7, 8 Movable means 9. Means of transportation

Claims (1)

[Claims] [Claim 1] Stop areas (4, 5
), and a cart (6) runs on a plurality of conveyance paths (2, 3) that are arranged in parallel or intersect three-dimensionally.
), in which one of the side walls (4a, 5a) erected in the stop area (4, 5) is
movable means (7, 8) for movable and flattening, and the trolley (6) stopping at the stop area (4) where the side wall (4a) of the predetermined conveyance path (2) is flattened; The stop area (where the side wall (5a) of the other conveyance path (3) is flattened)
5) A conveying device characterized by having a moving means (9) for moving the device.