JPH04350106A - Alloy hiper fine particle and production thereof - Google Patents
Alloy hiper fine particle and production thereofInfo
- Publication number
- JPH04350106A JPH04350106A JP3121699A JP12169991A JPH04350106A JP H04350106 A JPH04350106 A JP H04350106A JP 3121699 A JP3121699 A JP 3121699A JP 12169991 A JP12169991 A JP 12169991A JP H04350106 A JPH04350106 A JP H04350106A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- alloy
- gas
- ultrafine
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 28
- 239000000956 alloy Substances 0.000 title claims abstract description 28
- 239000010419 fine particle Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title description 9
- 229910052751 metal Inorganic materials 0.000 claims abstract description 37
- 239000002184 metal Substances 0.000 claims abstract description 35
- 239000007789 gas Substances 0.000 claims abstract description 33
- 239000002245 particle Substances 0.000 claims abstract description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000000203 mixture Substances 0.000 claims abstract description 12
- 239000011882 ultra-fine particle Substances 0.000 claims description 22
- 150000002739 metals Chemical class 0.000 claims description 19
- 238000002844 melting Methods 0.000 claims description 12
- 230000008018 melting Effects 0.000 claims description 12
- 238000009835 boiling Methods 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 16
- 229910052786 argon Inorganic materials 0.000 abstract description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 4
- 239000001307 helium Substances 0.000 abstract description 2
- 229910052734 helium Inorganic materials 0.000 abstract description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract description 2
- 239000011261 inert gas Substances 0.000 abstract description 2
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 2
- 230000008016 vaporization Effects 0.000 abstract description 2
- 229910052724 xenon Inorganic materials 0.000 abstract description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 abstract description 2
- 238000010791 quenching Methods 0.000 abstract 2
- 230000000171 quenching effect Effects 0.000 abstract 2
- 230000002829 reductive effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 18
- 239000000843 powder Substances 0.000 description 18
- 239000002994 raw material Substances 0.000 description 12
- 239000002923 metal particle Substances 0.000 description 8
- 239000010936 titanium Substances 0.000 description 8
- 238000001816 cooling Methods 0.000 description 7
- 229910000881 Cu alloy Inorganic materials 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 6
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 229910001069 Ti alloy Inorganic materials 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000010891 electric arc Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000011027 product recovery Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- IUYOGGFTLHZHEG-UHFFFAOYSA-N copper titanium Chemical compound [Ti].[Cu] IUYOGGFTLHZHEG-UHFFFAOYSA-N 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 239000013212 metal-organic material Substances 0.000 description 2
- 239000011812 mixed powder Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000001376 precipitating effect Effects 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910018507 Al—Ni Inorganic materials 0.000 description 1
- 238000004438 BET method Methods 0.000 description 1
- 229910017758 Cu-Si Inorganic materials 0.000 description 1
- 229910017931 Cu—Si Inorganic materials 0.000 description 1
- 229910004353 Ti-Cu Inorganic materials 0.000 description 1
- 229910000905 alloy phase Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Abstract
Description
【０００１】0001
【従来の技術】合金の粉末はこれ迄に種々の用途、例え
ばメタリック顔料、触媒および触媒製造原料、焼結合金
製造材料、などに用いられており、通常、目標の組成に
金属を配合し、加熱し、合金塊を製造し、その後何らか
の手段により粉砕して製造されていた。この場合合金塊
の粉砕は機械的手段によって行なわれることから粉砕限
界以上の微細な粒子を製造することが出来ず数１０μｍ
の直径を有する粒子の生成がこの方法にあっては限界で
あった。BACKGROUND OF THE INVENTION Alloy powders have been used for various purposes, such as metallic pigments, catalysts and raw materials for producing catalysts, and materials for producing sintered alloys. It was produced by heating to produce an alloy ingot, and then pulverizing it by some means. In this case, since the alloy ingot is pulverized by mechanical means, it is not possible to produce particles as fine as the pulverization limit, which is several tens of μm in size.
The limit of this method was the production of particles with a diameter of .
【０００２】金属を含む無機物質の超微粒子化の試みは
これまでに多くのものがなされ、熱分解法、ガス還元法
、沈殿法などの化学的方法の他にプラズマを用いる固体
物質の蒸発と固化による物理的な方法が行なわれている
。ところで合金の超微粒子の製造についてはこれ迄に上
記したプラズマを利用する方法や、真空蒸発法による２
種類の金属の蒸発と引き続く冷却、固化による合金の超
微粒子の製造の試みが数多くなされてはいるが、２つの
金属または３つ以上の金属の沸点、および融点が相違す
る場合には合金相を形成させることにきわめて困難性が
あり、普通は２つの金属または３つ以上の金属の夫々の
金属超微粒子の混合物が形成されまたその組成も大きく
変動してしまう欠点があった。かかる事情からこれまで
高温プラズマ法によっては沸点および融点の異なった２
つまたは３つ以上の金属の合金の超微粒子は得られなか
った。[0002] Many attempts have been made to make ultrafine particles of inorganic substances including metals, and in addition to chemical methods such as thermal decomposition, gas reduction, and precipitation, there have also been evaporation of solid substances using plasma. A physical method using solidification is used. By the way, regarding the production of ultrafine particles of alloys, there have been two methods, such as the above-mentioned method using plasma and the vacuum evaporation method.
Numerous attempts have been made to produce ultrafine particles of alloys by evaporation of different metals followed by cooling and solidification. It is extremely difficult to form such metals, and usually a mixture of ultrafine metal particles of two metals or three or more metals is formed, and the composition thereof varies greatly. For this reason, up until now, depending on the high-temperature plasma method, two
Ultrafine particles of alloys of one or more metals were not obtained.
【０００３】0003
【発明が解決しようとする課題】ところで焼結法によっ
て合金の成型物を製造しようとする場合、合金超微粒子
を焼結することにより全体が均一で欠陥のない成型物が
得られることが予想される。また金属または無機物質を
金属超微粒子をバインダーとして加熱および加圧下に接
合して成型物を製造する場合、金属または無機物質とバ
インダーである金属超微粒子との間の親和性が成型物の
強度に大きい影響を与える要素であることが知られてい
る。例えばダイヤモンド粉末に金属超微粒子をバインダ
ーとして加熱、加圧下に焼結する場合に、ダイヤモンド
粉末に濡れ性の良い金属超微粒子を用いることによって
好ましい焼結物が得られる。そしてこの場合の濡れ性の
加減変更についてはベースとなる金属に濡れ性を改良す
るための金属を合金の形で配合することによりこれを達
成することが考慮されるのである。[Problem to be solved by the invention] By the way, when trying to manufacture a molded alloy by a sintering method, it is expected that by sintering ultrafine alloy particles, a molded product that is uniform throughout and free of defects can be obtained. Ru. In addition, when manufacturing a molded product by joining metal or inorganic materials under heat and pressure using ultrafine metal particles as a binder, the strength of the molded product depends on the affinity between the metal or inorganic material and the ultrafine metal particles as a binder. It is known that this is a factor that has a large influence. For example, when diamond powder is sintered under heat and pressure using ultrafine metal particles as a binder, a preferable sintered product can be obtained by using ultrafine metal particles that have good wettability with the diamond powder. In this case, it is considered that the degree of wettability can be changed by blending a metal in the form of an alloy with the base metal to improve the wettability.
【０００４】しかしながら、従来法による２つまたはそ
れ以上の金属から金属超微粒子を製造しようとする場合
、各々の金属の沸点および融点が相違する場合について
は合金相を形成させることができず得られる金属超微粒
子は夫々の単体金属の超微粒子混合物でしかなかった。However, when attempting to produce ultrafine metal particles from two or more metals using conventional methods, if the boiling points and melting points of the respective metals are different, it is not possible to form an alloy phase. Ultrafine metal particles were nothing more than a mixture of ultrafine particles of individual metals.
【０００５】したがって合金超微粒子とその製造方法の
開発が求められていたのである。[0005]Therefore, there has been a need for the development of ultrafine alloy particles and a method for producing the same.
【０００６】[0006]
【課題を解決するための手段】本発明者らは合金超微粒
子が従来法の高温プラズマを用いる２種またはそれ以上
の金属の蒸発と、引き続く冷却による方法では得られな
い理由が、従来法にあっては高温プラズマによる金属の
蒸気が冷却工程に比較的長時間滞留し、そのため、沸点
および融点の高い金属種が先に固化析出を開始し、この
沸点および融点の高い金属の固化析出が終ったあとでよ
り低沸点および低融点の金属が固化および析出を開始す
るために、得られた金属超微粒子の組成が個々の金属の
超微粒子の混合物であって合金超微粒子ではないことに
あるとの考え方に基づき、高温プラズマ法による合金超
微粒子の製造に当り冷却速度を上げることにより合金組
成の超微粒子が得られることを確認して本発明を完成し
たのである。[Means for Solving the Problems] The present inventors have discovered the reason why ultrafine alloy particles cannot be obtained by the conventional method of evaporating two or more metals using high-temperature plasma and subsequent cooling. In some cases, the metal vapor generated by the high-temperature plasma remains in the cooling process for a relatively long time, so that the metal species with high boiling and melting points start solidifying and precipitating first, and the solidifying and precipitating metals with high boiling and melting points end. After that, metals with lower boiling points and lower melting points begin to solidify and precipitate, and this is because the composition of the obtained ultrafine metal particles is a mixture of ultrafine particles of individual metals and not ultrafine alloy particles. Based on this idea, the present invention was completed by confirming that ultrafine particles having an alloy composition can be obtained by increasing the cooling rate when producing ultrafine alloy particles using a high-temperature plasma method.
【０００７】すなわち、本発明は、高温プラズマを用い
て沸点および融点の異なる２種またはそれ以上の金属を
蒸発させ、これを冷却して合金組成の超微粒子を製造す
るに当り、プラズマ焔に水素ガスを導入してプラズマ焔
をしぼると共にこの水素ガスによってプラズマを還元性
雰囲気に置きシースガスでプラズマ焔を包囲するように
導入してプラズマ焔の温度勾配を大きくしプラズマで蒸
発した金属を急冷することを特徴とする合金組成の超微
粒子の製造方法に関する。That is, the present invention uses high-temperature plasma to evaporate two or more metals with different boiling points and melting points, and cools them to produce ultrafine particles having an alloy composition. Hydrogen is added to the plasma flame. Gas is introduced to squeeze the plasma flame, and the hydrogen gas is used to place the plasma in a reducing atmosphere, and a sheath gas is introduced so as to surround the plasma flame, increasing the temperature gradient of the plasma flame and rapidly cooling the metal evaporated by the plasma. The present invention relates to a method for producing ultrafine particles having an alloy composition characterized by:
【０００８】本発明における高温プラズマを用いて金属
を超微粒子化する方法自体は公知のものを採用すること
ができる。すなわち、高温プラズマの発生方法としては
、アーク放電によるプラズマジェットの発生、アーク放
電によるアーク溶解とそれに伴うプラズマの発生などの
アーク放電電極を用いるアーク放電によるプラズマ発生
法、高周波電極中にガスを流してこのガスを高温プラズ
マ化する方法などがあり、この高温プラズマを用いる金
属の超微粉化には具体的には高周波の印加によって高温
プラズマ化された気体流中に金属を導入してこれを気化
蒸発させる方法があり、そしてこれらの方法によって発
生したプラズマを用いて金属を蒸発させ、固化して超微
粉末を製造するに際して上記した本方法が使用可能とな
る。[0008] In the present invention, a known method can be used for making metal into ultrafine particles using high-temperature plasma. In other words, methods for generating high-temperature plasma include generation of a plasma jet by arc discharge, plasma generation by arc discharge using an arc discharge electrode such as arc melting by arc discharge and generation of plasma, and plasma generation by flowing gas through a high-frequency electrode. There are methods such as turning lever gas into high-temperature plasma. Specifically, the ultra-fine powdering of metal using this high-temperature plasma involves introducing the metal into a gas flow that has been turned into high-temperature plasma by applying high frequency waves and vaporizing it. There are evaporation methods, and the above-described method can be used to evaporate metal using plasma generated by these methods and solidify it to produce ultrafine powder.
【０００９】本発明の方法においてプラズマ焔に導入す
る水素ガス量は０．１〜１０リットル／分、好ましくは
３〜５リットル／分の範囲のものであり、またプラズマ
焔を包囲するように導入するシースガスは合金超微粒子
とは不活性の窒素、ヘリウム、アルゴン、キセノン、な
どであり、その導入量は２０〜１００リットル／分、好
ましくは４０〜７０リットル／分の範囲のものである。[0009] In the method of the present invention, the amount of hydrogen gas introduced into the plasma flame is in the range of 0.1 to 10 liters/min, preferably 3 to 5 liters/min, and the hydrogen gas is introduced so as to surround the plasma flame. The sheath gas used for the alloy ultrafine particles is inert nitrogen, helium, argon, xenon, etc., and the amount introduced is in the range of 20 to 100 liters/minute, preferably 40 to 70 liters/minute.
【００１０】本発明の方法によって合金超微粒子とされ
る金属は、２つの金属または３つ以上の金属において高
沸点、高融点のものと、低沸点、低融点のものとの沸点
差および融点差が、沸点では２００〜１０００℃、融点
では２００〜１０００℃程度の差のあるものとする。[0010] The metals made into alloy ultrafine particles by the method of the present invention have a boiling point difference and a melting point difference between two metals or three or more metals, one having a high boiling point and high melting point and the other having a low boiling point and melting point. However, there is a difference of about 200 to 1000°C in boiling point and about 200 to 1000°C in melting point.
【００１１】すなわち、このような合金系としてはＴｉ
−Ｃｕ、Ａｌ−Ｎｉ、Ｃｕ−Ｓｉなどを挙げることがで
きる。That is, as such an alloy system, Ti
-Cu, Al-Ni, Cu-Si, etc. can be mentioned.
【００１２】この方法によって粒子径が８５ｎｍ〜６５
０ｎｍの範囲のいわゆる超微粒子の合金粉末が得られる
。[0012] By this method, the particle size is 85 nm to 65 nm.
An alloy powder with so-called ultrafine particles in the range of 0 nm is obtained.
【００１３】次に本発明を具体例によって更に詳細に説
明する。
実施例 １
Ｔｉ（−３７μｍ）とＣｕ（−４４μｍ）の混合粉をア
ルゴンと水素気流を高周波加熱して得た高温プラズマ焔
中に供給してＴｉ−Ｃｕ合金の超微粒子を製造した。Next, the present invention will be explained in more detail using specific examples. Example 1 A mixed powder of Ti (-37 μm) and Cu (-44 μm) was supplied into a high-temperature plasma flame obtained by high-frequency heating of an argon and hydrogen stream to produce ultrafine particles of a Ti-Cu alloy.
【００１４】使用した装置は図１に示されたとおりの構
成を有するものである。すなわち、本装置は、図１でＡ
で示されるプラズマトーチ、Ｂで示されるシースガス導
入部、Ｃで示されるチャンバー、Ｄで示される原料粉末
供給装置、およびＥで示される製品回収部よりなる。The apparatus used had the configuration shown in FIG. In other words, this device is A in FIG.
It consists of a plasma torch indicated by , a sheath gas introduction section indicated by B, a chamber indicated by C, a raw material powder supply device indicated by D, and a product recovery section indicated by E.
【００１５】プラズマトーチＡは内径５５ｍｍ、外径７
０ｍｍ、長さ２２０ｍｍの水冷石英二重管１を主体とし
、外側に高周波発振用のコイル２が取り付けられている
。プラズマトーチの上部には噴出方向が接線方向、軸方
向および半径方向のガスの噴出口４，５，６が設けられ
、この噴出口にガスの供給源７，８，９からアルゴンガ
スおよび水素が供給される。この噴出ガスは印加された
高周波電源によってプラズマ化されプラズマトーチ内で
プラズマ焔を形成する。プラズマトーチの下部には原料
粉末供給口１０が設けられ、原料粉末供給装置Ｄから供
給される原料粉末はキャリヤーガス１１に搬送されてプ
ラズマ焔中に導入される。[0015] Plasma torch A has an inner diameter of 55 mm and an outer diameter of 7
The main body is a water-cooled quartz double tube 1 with a diameter of 0 mm and a length of 220 mm, and a coil 2 for high frequency oscillation is attached to the outside. Gas jet ports 4, 5, and 6 whose jet directions are tangential, axial, and radial are provided in the upper part of the plasma torch, and argon gas and hydrogen are supplied to these jet ports from gas supply sources 7, 8, and 9. Supplied. This ejected gas is turned into plasma by the applied high frequency power and forms a plasma flame within the plasma torch. A raw material powder supply port 10 is provided at the bottom of the plasma torch, and the raw material powder supplied from the raw material powder supply device D is conveyed by a carrier gas 11 and introduced into the plasma flame.
【００１６】シースガス導入部Ｂは環状に配置されたシ
ースガス導入口１５と、内径１２０ｍｍ、長さ２００ｍ
ｍのシースガス導入部内管１２と、その外側の冷却用の
シースガス導入部外套管１３からなり、シースガス供給
源１４からアルゴンガス等の不活性ガスが導入口１５を
経て供給される。The sheath gas introduction part B has an annularly arranged sheath gas introduction port 15, an inner diameter of 120 mm, and a length of 200 m.
It consists of an inner sheath gas introduction tube 12 and an outer jacket tube 13 for cooling the sheath gas introduction section, and an inert gas such as argon gas is supplied from a sheath gas supply source 14 through an introduction port 15.
【００１７】チャンバーＣは内径４４０ｍｍ、長さ８０
０ｍｍの管１６とその外側の冷却用の外套管１７とから
なる。このチャンバーＣの内管、外套管はともに金属製
の管、例えばステンレス鋼管であってもよい。[0017] Chamber C has an inner diameter of 440 mm and a length of 80 mm.
It consists of a 0 mm tube 16 and a cooling jacket tube 17 outside the tube 16. Both the inner tube and the outer tube of this chamber C may be metal tubes, for example, stainless steel tubes.
【００１８】製品回収部ＥはチャンバーＣの下部に着脱
可能なように取付けられ、フィルター１８を内部に装着
しうるようになっている。そしてフィルターの内側は減
圧ライン１９に連通している。The product recovery section E is detachably attached to the lower part of the chamber C, and a filter 18 can be attached therein. The inside of the filter is connected to a vacuum line 19.
【００１９】上記のような構成の装置のガス噴出口４，
５，６にアルゴンガスが８０リットル／分、水素４リッ
トル／分の流量で流され、コイル２に４ＭＨｚ、８０ｋ
ＶＡの高周波電流が印加されアルゴン、水素の高温プラ
ズマ焔が発生する。シースガス噴出口２１にアルゴンガ
スが５０リットル／分の流量で流される。原料の金属チ
タン・銅混合粉末は原料粉末供給口１０からキャリヤー
ガス Ａｒ １０リットル／分と共に６０ｇ／ｈの供給
量で高温プラズマ中に供給され、気化したチタンおよび
銅は引続くシースガス導入部ＢおよびチャンバーＤで急
激に冷却され、凝縮して生成した超微粒子のチタン・銅
合金粒子はフィルター１８上に集められる。The gas outlet 4 of the device configured as described above,
Argon gas was flowed through 5 and 6 at a flow rate of 80 liters/min and hydrogen at a flow rate of 4 liters/min, and 4MHz, 80k was flowed into coil 2.
A high-frequency VA current is applied to generate a high-temperature plasma flame of argon and hydrogen. Argon gas is flowed into the sheath gas outlet 21 at a flow rate of 50 liters/minute. The raw material metal titanium/copper mixed powder is supplied into the high-temperature plasma at a supply rate of 60 g/h along with carrier gas Ar at 10 liters/min from the raw material powder supply port 10, and the vaporized titanium and copper are supplied to the subsequent sheath gas introduction port B and The ultrafine titanium/copper alloy particles that are rapidly cooled and condensed in the chamber D are collected on the filter 18 .
【００２０】今この超微粒子の製造条件において、チタ
ン・銅合金超微粒子を製造したところ、ＢＥＴ法による
比表面積で２５．４ｍ２／ｇ、比表面積径３５ｎｍの球
形の超微粒子が得られた。更に、Ｘ線回折分析装置によ
る分析により得られた超微粒子はチタン・銅合金粒子で
あることが確認された。When titanium/copper alloy ultrafine particles were produced under these ultrafine particle production conditions, spherical ultrafine particles with a specific surface area of 25.4 m 2 /g and a specific surface diameter of 35 nm were obtained by the BET method. Furthermore, analysis using an X-ray diffraction analyzer confirmed that the obtained ultrafine particles were titanium-copper alloy particles.
【００２１】実施例 ２
実施例１に記載した装置を用いて同様の操作条件によっ
てチタン・銅合金の超微粉末を製造した。この場合に用
いた原料粉末はチタン・銅合金粉末（−７５μｍ）で、
原料粉末供給口１０からキャリヤーガス Ａｒ ５リッ
トル／分と共に１２０ｇ／ｈの供給量で高温プラズマ中
に供給した。Example 2 Ultrafine titanium-copper alloy powder was produced using the apparatus described in Example 1 under the same operating conditions. The raw material powder used in this case was titanium/copper alloy powder (-75 μm).
The raw material powder was supplied into the high-temperature plasma at a supply rate of 120 g/h along with a carrier gas Ar of 5 liters/min from the raw material powder supply port 10.
【００２２】上記製造条件で得られた超微粒子はＢＥＴ
法による比表面積で１５．２ｍ２／ｇ、比表面積径５９
ｎｍの球形粒子であった。また、Ｘ線回折分析により得
られた超微粒子はチタン・銅合金粒子であることが確認
された。The ultrafine particles obtained under the above manufacturing conditions are BET
Specific surface area by method is 15.2 m2/g, specific surface area diameter is 59
They were spherical particles of nm size. Further, the ultrafine particles obtained by X-ray diffraction analysis were confirmed to be titanium/copper alloy particles.
【図１】本発明の方法で使用する高温プラズマを用いる
超微粒子粉末の製造装置の一例を示す。FIG. 1 shows an example of an apparatus for producing ultrafine powder using high-temperature plasma used in the method of the present invention.
Ａ プラズマトーチ
Ｂ シースガス導入部
Ｃ チャンバー
Ｄ 原料粉末供給装置
Ｅ 製品回収部
１ 石英二重管
２ 高周波発振用のコイル４，５，６
ガス噴出口
７，８，９ ガス供給源
１０ 原料粉末供給口
１１ キャリヤーガス供給源１２
シースガス導入部内管１３ シースガス導
入部外套管１４ シースガス供給源
１５ シースガス導入口
１６ チャンバー内管
１７ 外套管
１８ フィルター
１９ 減圧ラインA Plasma torch B Sheath gas introduction section C Chamber D Raw material powder supply device E Product recovery section 1 Quartz double tube 2 High frequency oscillation coils 4, 5, 6
Gas outlets 7, 8, 9 Gas supply source 10 Raw material powder supply port 11 Carrier gas supply source 12
Sheath gas inlet inner tube 13 Sheath gas inlet outer tube 14 Sheath gas supply source 15 Sheath gas inlet 16 Chamber inner tube 17 Outer tube 18 Filter 19 Decompression line
Claims (2)
それ以上の金属を構成成分とする合金超微粒子。1. Ultrafine alloy particles comprising two or more metals having different boiling points and melting points.
の異なる２種またはそれ以上の金属を蒸発させ、これを
冷却して合金組成の超微粒子を製造するに当り、プラズ
マ焔に水素ガスを導入してプラズマ焔をしぼると共にこ
の水素ガスによってプラズマを還元性雰囲気に置き、シ
ースガスをプラズマ焔を包囲するように導入してプラズ
マで蒸発した金属を急冷することを特徴とする合金組成
の超微粒子を製造する方法。[Claim 2] When two or more metals having different boiling points and melting points are evaporated using high-temperature plasma and then cooled to produce ultrafine particles having an alloy composition, hydrogen gas is introduced into the plasma flame. producing ultrafine particles with an alloy composition characterized by squeezing the plasma flame, placing the plasma in a reducing atmosphere using this hydrogen gas, and introducing a sheath gas to surround the plasma flame to rapidly cool the metal evaporated by the plasma. how to.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3121699A JPH04350106A (en) | 1991-05-28 | 1991-05-28 | Alloy hiper fine particle and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3121699A JPH04350106A (en) | 1991-05-28 | 1991-05-28 | Alloy hiper fine particle and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04350106A true JPH04350106A (en) | 1992-12-04 |
Family
ID=14817695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3121699A Pending JPH04350106A (en) | 1991-05-28 | 1991-05-28 | Alloy hiper fine particle and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04350106A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996006700A2 (en) * | 1994-08-25 | 1996-03-07 | Qqc, Inc. | Nanoscale particles, and uses for same |
| US6589311B1 (en) | 1999-07-07 | 2003-07-08 | Hitachi Metals Ltd. | Sputtering target, method of making same, and high-melting metal powder material |
| JP2003530679A (en) * | 2000-04-10 | 2003-10-14 | テトロニクス リミテッド | Twin plasma torch device |
| JP2010084199A (en) * | 2008-09-30 | 2010-04-15 | Nisshin Seifun Group Inc | METHOD FOR PRODUCING FINE PARTICLE OF Ni-W-BASED ALLOY, AND METHOD FOR PRODUCING FINE PARTICLE OF Ni-W ALLOY |
| JP2011179023A (en) * | 2010-02-26 | 2011-09-15 | Japan Atomic Energy Agency | Nanoparticle manufacturing device and nanoparticle manufacturing method |
-
1991
- 1991-05-28 JP JP3121699A patent/JPH04350106A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996006700A2 (en) * | 1994-08-25 | 1996-03-07 | Qqc, Inc. | Nanoscale particles, and uses for same |
| WO1996006700A3 (en) * | 1994-08-25 | 1996-03-28 | Qqc Inc | Nanoscale particles, and uses for same |
| US6589311B1 (en) | 1999-07-07 | 2003-07-08 | Hitachi Metals Ltd. | Sputtering target, method of making same, and high-melting metal powder material |
| US6676728B2 (en) | 1999-07-07 | 2004-01-13 | Hitachi Metals, Ltd. | Sputtering target, method of making same, and high-melting metal powder material |
| JP2003530679A (en) * | 2000-04-10 | 2003-10-14 | テトロニクス リミテッド | Twin plasma torch device |
| JP2010084199A (en) * | 2008-09-30 | 2010-04-15 | Nisshin Seifun Group Inc | METHOD FOR PRODUCING FINE PARTICLE OF Ni-W-BASED ALLOY, AND METHOD FOR PRODUCING FINE PARTICLE OF Ni-W ALLOY |
| JP2011179023A (en) * | 2010-02-26 | 2011-09-15 | Japan Atomic Energy Agency | Nanoparticle manufacturing device and nanoparticle manufacturing method |
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