JPH04345934A - Production of stamper for optical disk - Google Patents

Production of stamper for optical disk

Info

Publication number
JPH04345934A
JPH04345934A JP11866191A JP11866191A JPH04345934A JP H04345934 A JPH04345934 A JP H04345934A JP 11866191 A JP11866191 A JP 11866191A JP 11866191 A JP11866191 A JP 11866191A JP H04345934 A JPH04345934 A JP H04345934A
Authority
JP
Japan
Prior art keywords
stamper
character
characters
range
recording region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11866191A
Other languages
Japanese (ja)
Inventor
Shigeo Saito
斉藤 重夫
Hideaki Yamada
英明 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP11866191A priority Critical patent/JPH04345934A/en
Publication of JPH04345934A publication Critical patent/JPH04345934A/en
Pending legal-status Critical Current

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Landscapes

  • Moulds For Moulding Plastics Or The Like (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

PURPOSE:To facilitate the stable and mass production of the stampers having good character transferability and uniform groove characteristics by providing continuous grooves at the time of forming characters for recognition on the stampers, thereby enhancing the flowability of a resin at the time of forming optical substrates. CONSTITUTION:A resist film 2 is deposited on an optically polished glass substrate 1 and is subjected to laser cutting to form fine rugged patterns having, for example, 1.6mum inter-groove spacing and 0.1mum strength in a 6 to 118mm diameter range. This range is used as a symbol recording region. The entire surface inclusive of this range is coated with a conducting film 3 and an Ni plating layer 4 is formed by a plating method thereon, by which the stamper 5 is produced. Prescribed pulse modulation signals are recorded to the patterns of the recording region in such a manner and the characters for identification of 10 characters are constituted of the spirally continuous grooves while these grooves are arrayed on the same circumference within the range of 40 to 44mm diameter off the recording region. In addition, the beam of the light intensity varying with the character parts and the part where there are no characters is used.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、光ディスク用スタンパ
ーの製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a stamper for optical discs.

【0002】0002

【従来の技術】従来の、光ディスク用スタンパーのキャ
ラクター部分の製造方法に関しては、光ビームで形成す
る方法と、機械加工によって形成する方法の2種類があ
る。
2. Description of the Related Art There are two conventional methods for manufacturing character portions of stampers for optical discs: a method using a light beam and a method using machining.

【0003】第1の方法では、光ディスクプロセス技術
の要点(日本工業技術センター発行)の様に、光学研磨
されたガラス基板上にポジ型のフォトレジストを塗布し
、光ビームを照射(この場合、He−Cdレーザーを用
いた。)した後に現像処理を行ない、所望の凹凸パター
ンを得る方法である。
In the first method, a positive photoresist is coated on an optically polished glass substrate, and a light beam is irradiated (in this case, (He--Cd laser was used.) After that, a development process is performed to obtain a desired uneven pattern.

【0004】この場合、キャラクターの領域には、光ビ
ームを照射することによって形成されるキャラクターの
存在する部分と、光ビームを照射しないことによって形
成されるキャラクターの存在しない部分とにわかれる。
[0004] In this case, the character area is divided into a part where the character exists, which is formed by irradiating the light beam, and a part where the character does not exist, which is formed by not irradiating the light beam.

【0005】キャラクターの形成領域は、光ディスク用
スタンパーの信号記録領域以外の領域に形成される。
The character formation area is formed in an area other than the signal recording area of the optical disc stamper.

【0006】しかも、キャラクターは、所望の大きさで
、所望の間隔を保ちながら、同一円周上に形成されるこ
とになる。
[0006] Moreover, the characters are formed on the same circumference with a desired size and a desired spacing.

【0007】前記のガラス基板上に、Niの導体化膜を
形成し、さらに、電鋳メッキ法によって、約300μm
のNiメッキ層を形成していく。次に、メッキ層の所定
の厚さを確保する目的で、メッキ面の研磨を行ない、さ
らに、内径と外径を仕上げ、所望のキャラクターの存在
するスタンパ−を得ていた。
[0007] A conductive film of Ni is formed on the glass substrate, and then a film of about 300 μm is formed by electroforming plating.
A Ni plating layer is then formed. Next, the plated surface was polished to ensure a predetermined thickness of the plated layer, and the inner and outer diameters were finished to obtain a stamper with the desired character.

【0008】第2の方法では、光ディスク用スタンパー
の信号記録領域以外の領域に、切削工具(フライス、ド
リル等)を用いて、機械加工を施こすことによって、キ
ャラクターを形成する方法である。
[0008] In the second method, a character is formed by machining an area other than the signal recording area of an optical disc stamper using a cutting tool (such as a milling cutter or drill).

【0009】この場合、高速回転(5000〜1000
0rpm)している切削工具を、スタンパ−面上に押し
付けることによって加工を行ない、加工中に発生した切
粉は、キャラクター部分の加工終了後に洗浄作業によっ
て、除去する。
[0009] In this case, high speed rotation (5000~1000
Machining is performed by pressing a cutting tool running at 0 rpm onto the stamper surface, and chips generated during machining are removed by cleaning after machining of the character portion is completed.

【0010】この様にして、所望のキャラクターの存在
するスタンパ−を得ていた。
[0010] In this way, a stamper containing a desired character was obtained.

【0011】[0011]

【発明が解決しようとする課題】しかし、前述の従来技
術では、まず第1の方法では、キャラクターの領域と信
号記録領域を有する光ディスク用スタンパーで、同一円
周上にキャラクターの存在する部分と存在しない部分の
あるスタンパーを使用して、光ディスクの基板の成形加
工を行なった所、キャラクターの存在する領域に近い信
号記録領域の信号特性と、キャラクターの存在しない領
域に近い信号記録領域の信号特性には差があるというこ
とが判った。
[Problems to be Solved by the Invention] However, in the above-mentioned prior art, in the first method, an optical disc stamper having a character area and a signal recording area is used, and the area where the character exists and the area where the character exists are located on the same circumference. When molding the substrate of an optical disc using a stamper with a blank part, the signal characteristics of the signal recording area close to the area where characters exist and the signal characteristics of the signal recording area close to the area where no characters exist are different. It turned out that there is a difference.

【0012】これは、光ディスク基板の信号記録領域内
における内周部分において、グルーブの形状がキャラク
ターの存在の有無によって微妙に変化してしまうという
問題であった。
This is a problem in that the shape of the groove changes slightly depending on the presence or absence of a character in the inner peripheral portion of the signal recording area of the optical disc substrate.

【0013】第2の方法では、前述の第1の方法での問
題点以外に、機械加工を行なうことによって発生する切
粉のスタンパーへの付着によるエラーレートの悪化の問
題もあった。
In addition to the problems of the first method described above, the second method also has the problem of a worsening of the error rate due to adhesion of chips generated during machining to the stamper.

【0014】さらに、切削工具の切れ味の具合や加工の
条件等の変化によって、スタンパーへ無理な応力が加わ
ることで、スタンパーが変形するという問題もあった。
Furthermore, there is a problem in that the stamper is deformed due to unreasonable stress being applied to the stamper due to changes in the sharpness of the cutting tool, processing conditions, etc.

【0015】そこで、本発明は、この様な問題点を解決
するもので、その目的とする所は、スタンパーにキャラ
クターが存在していても、高品質の基板を成形できるス
タンパ−を提供するところにある。
SUMMARY OF THE INVENTION The present invention is intended to solve these problems, and its purpose is to provide a stamper that can form high-quality substrates even if characters are present on the stamper. It is in.

【0016】[0016]

【課題を解決するための手段】本発明の光ディスク用ス
タンパーの製造方法は、信号記録領域以外の領域に認識
用の文字パターン(以下、キャラクターという。)を付
加する場合、スパイラル状の連続した溝(以下、グルー
ブという。)で形成したことを特徴とする。
[Means for Solving the Problems] In the method for manufacturing an optical disc stamper of the present invention, when adding a character pattern for recognition (hereinafter referred to as a character) to an area other than the signal recording area, a continuous spiral groove is formed. (hereinafter referred to as groove).

【0017】さらに、前記のキャラクター部分は、光強
度の異なる光ビームを用いてグルーブを連続して形成し
たことを特徴とする。
Furthermore, the character portion is characterized in that grooves are continuously formed using light beams of different light intensities.

【0018】[0018]

【実施例】図1は、本発明におけるキャラクターの形成
状態図である。図2は、図1の部分拡大図である。図3
は、工程説明図である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a diagram showing the state of character formation according to the present invention. FIG. 2 is a partially enlarged view of FIG. 1. Figure 3
is a process explanatory diagram.

【0019】図3に示す様に、光学研磨されたガラス基
板1上に、レジスト膜2を形成し、専用のレーザー露光
装置でレーザーカッティングを行ない、溝間隔が1.6
μmで深さが0.1μmの微細な凹凸パターンを直径4
6mmから118mmの範囲に形成する。(この範囲を
信号記録領域という。)次に、導体化膜3を形成し、メ
ッキ法によりNiメッキ層4を形成しスタンパー5を得
る。
As shown in FIG. 3, a resist film 2 is formed on an optically polished glass substrate 1, and laser cutting is performed using a dedicated laser exposure device, so that the groove spacing is 1.6.
A fine uneven pattern with a depth of 0.1 μm and a diameter of 4
It is formed in the range of 6 mm to 118 mm. (This range is referred to as a signal recording area.) Next, a conductive film 3 is formed, and a Ni plating layer 4 is formed by a plating method to obtain a stamper 5.

【0020】信号記録領域における凹凸パターンは、所
定のパルス変調された信号が記録され、この場合はEF
M変調された、いわゆるCD信号を用いた。
The concavo-convex pattern in the signal recording area records a predetermined pulse-modulated signal, and in this case, the EF
A so-called CD signal modulated by M was used.

【0021】本発明におけるスタンパー識別用のキャラ
クターに関しては、前記の信号記録領域以外の直径40
mmから44mmの範囲内に形成した。この時のキャラ
クターの数は10文字とし、同一円周上に並ぶ様にした
Regarding the stamper identification character in the present invention, the diameter of the character other than the above-mentioned signal recording area is 40 mm.
It was formed within the range of 44 mm to 44 mm. The number of characters at this time was 10, and they were lined up on the same circumference.

【0022】キャラクターを形成する際の、レーザー露
光装置の送りピッチを0.8μmと1.6μmの2種を
選択し、回転方法は、線速一定のCLV方式1.4m/
sと角速度一定のCAV方式900rpmの2種を選択
し、試験を行なった。
When forming the character, two types of feed pitch of the laser exposure device, 0.8 μm and 1.6 μm, were selected, and the rotation method was a CLV method with a constant linear velocity of 1.4 m/1.
The test was conducted by selecting two types: s and CAV method with a constant angular velocity of 900 rpm.

【0023】レーザー露光装置には、光ビームが2本存
在している。しかも、光ビームの間隔を任意に調整でき
る機能を持っている。
There are two light beams in the laser exposure device. Furthermore, it has the ability to arbitrarily adjust the interval between the light beams.

【0024】本発明の第1の方式では、光ビームを2本
使用し、あらかじめ、2本の光ビームの間隔を無くし、
同一トラック上にくる様調整しておき、1本目の光ビー
ムでキャラクター部分を露光していき、2本目の光ビー
ムで1本目の光ビームの露光部分を追従させる。さらに
、1本目の光ビームの光強度と2本目の光ビームの光強
度に差を設け、露光した。(この場合、1本目>2本目
とした。)本発明の第2の方式では、使用する光ビーム
を1本とした。この場合、キャラクターを露光する光強
度に対して、適度なオフセット量をあらかじめ設けてお
く。必要なオフセット量は、キャラクター部の光強度に
対して、0.5倍程度の光強度が保持できる様に設定し
た。オフセット量の設定方法は、所望の光強度が出る様
に、レーザー露光装置に新たに回路基板を付加した。 (図4)本発明における第1の方式および、第2の方式
による結果を表1に示す。
In the first method of the present invention, two light beams are used, and the interval between the two light beams is eliminated in advance.
Adjust so that they are on the same track, expose the character part with the first light beam, and make the second light beam follow the exposed part of the first light beam. Furthermore, exposure was performed by providing a difference in the light intensity of the first light beam and the light intensity of the second light beam. (In this case, the first beam was greater than the second beam.) In the second method of the present invention, one light beam was used. In this case, an appropriate amount of offset is set in advance for the light intensity with which the character is exposed. The necessary offset amount was set so that the light intensity could be maintained at about 0.5 times the light intensity of the character part. To set the offset amount, a new circuit board was added to the laser exposure device so that the desired light intensity could be obtained. (FIG. 4) Table 1 shows the results of the first method and the second method in the present invention.

【表1】 また、キャラクターの部分におけるグルーブの形成状態
は、図1および図2のとおりとなった。
[Table 1] Further, the groove formation state in the character portion was as shown in FIGS. 1 and 2.

【0025】[0025]

【発明の効果】以上述べた様に、本発明によれば、キャ
ラクター部分を、スパイラル状の連続したグルーブで形
成し、しかも、キャラクター部分とキャラクターの無い
部分を光強度の異なる光ビームを用いてスタンパーを製
作し、光ディスク基板の製造を行なった所、信号記録領
域の内周部分の樹脂の流動性が均一になり、転写性が良
好で、しかもバラツキの無い溝特性が得られることにな
った。
[Effects of the Invention] As described above, according to the present invention, the character portion is formed by a continuous spiral groove, and the character portion and the non-character portion are formed using light beams with different light intensities. After creating a stamper and manufacturing an optical disc substrate, we were able to find that the fluidity of the resin in the inner circumference of the signal recording area was uniform, resulting in good transferability and consistent groove characteristics. .

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明のキャラクター形成状態図。FIG. 1 is a character formation state diagram of the present invention.

【図2】図1の部分拡大図。FIG. 2 is a partially enlarged view of FIG. 1.

【図3】工程説明図。FIG. 3 is a process explanatory diagram.

【図4】本発明の実施例で付加した回路図。FIG. 4 is a circuit diagram added in the embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1  ガラス基板 2  レジスト 3  導体化膜 4  メッキ層 5  スタンパー 6  キャラクター 7  グルーブ 1 Glass substrate 2 Resist 3 Conductive film 4 Plating layer 5 Stamper 6 Character 7 Groove

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】光ディスク用スタンパーの信号記録領域以
外の領域に、前記スタンパーを認識するための文字パタ
ーン(以下、キャラクターという。)を付加する場合、
スパイラル状の連続した溝(以下、グルーブという。)
で形成したことを特徴とする光ディスク用スタンパーの
製造方法。
1. When adding a character pattern (hereinafter referred to as a character) for recognizing the stamper to an area other than the signal recording area of an optical disc stamper,
A continuous spiral groove (hereinafter referred to as a groove)
A method for producing a stamper for an optical disc, characterized in that the stamper is formed by:
【請求項2】前記のキャラクター部分の形成方法におい
て、光強度の異なる光ビームを用いてグルーブを連続し
て形成したことを特徴とする光ディスク用スタンパーの
製造方法。
2. A method for producing a stamper for an optical disc, characterized in that, in the method for forming a character portion, grooves are successively formed using light beams having different light intensities.
JP11866191A 1991-05-23 1991-05-23 Production of stamper for optical disk Pending JPH04345934A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11866191A JPH04345934A (en) 1991-05-23 1991-05-23 Production of stamper for optical disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11866191A JPH04345934A (en) 1991-05-23 1991-05-23 Production of stamper for optical disk

Publications (1)

Publication Number Publication Date
JPH04345934A true JPH04345934A (en) 1992-12-01

Family

ID=14742090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11866191A Pending JPH04345934A (en) 1991-05-23 1991-05-23 Production of stamper for optical disk

Country Status (1)

Country Link
JP (1) JPH04345934A (en)

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