JPH0434258B2 - - Google Patents
Info
- Publication number
- JPH0434258B2 JPH0434258B2 JP582085A JP582085A JPH0434258B2 JP H0434258 B2 JPH0434258 B2 JP H0434258B2 JP 582085 A JP582085 A JP 582085A JP 582085 A JP582085 A JP 582085A JP H0434258 B2 JPH0434258 B2 JP H0434258B2
- Authority
- JP
- Japan
- Prior art keywords
- tio
- concentration
- ozone
- tube
- tube wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 14
- 239000010453 quartz Substances 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 description 13
- 238000000576 coating method Methods 0.000 description 13
- 239000007788 liquid Substances 0.000 description 11
- 239000010936 titanium Substances 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052724 xenon Inorganic materials 0.000 description 4
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910021486 amorphous silicon dioxide Inorganic materials 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- -1 acetic acid Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- JMXKSZRRTHPKDL-UHFFFAOYSA-N titanium ethoxide Chemical compound [Ti+4].CC[O-].CC[O-].CC[O-].CC[O-] JMXKSZRRTHPKDL-UHFFFAOYSA-N 0.000 description 1
Description
【発明の詳細な説明】
本発明は放電灯の石英製管球に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a quartz bulb for a discharge lamp.
キセノンランプや水銀ランプに代表される放電
灯では波長が200nm以下の紫外線を放射するもの
が多いが、この波長の紫外線は空気中の酸素と反
応してオゾンを生成する。しかしオゾンは人体に
有害な物質であり、洗浄や殺菌などのためにオゾ
ンを積極的に利用する場合を除いては、オゾンの
生成は避けなければならない。即ち、波長が
200nm以下の紫外線が照射されないようにしなけ
ればならない。このために、波長が200nm以下の
紫外線を通過させないオゾンフリーの石英ガラス
にて放電灯の管球が形成される。このオゾンフリ
ーの石英ガラスは、TiO2をドープしてTiなどが
分散したものが使用される。Tiの分散が均一で
なく局部的に偏在したものにて、例えばキセノン
ランプを製作すると、このことを主要原因の１つ
として発生する紫外線により管壁内表面層に引張
り応力が発生する。このため、ランプを長時間点
灯できない。なかには数時間の点灯で歪が発生
し、100時間余の点灯で破損した例もある。従つ
て、少なくともTiが均一に分散した高品質のも
のを使用しなければならないが、これを均一に分
散させるにはTiO2とSiO2とを高温度で長時間か
けて溶融する必要があり、その製造に非常に手間
がかかり、また高価格なものとなつていた。 Many discharge lamps, such as xenon lamps and mercury lamps, emit ultraviolet light with a wavelength of 200 nm or less, and this wavelength of ultraviolet light reacts with oxygen in the air to produce ozone. However, ozone is a substance harmful to the human body, and its production must be avoided unless it is actively used for purposes such as cleaning or sterilization. That is, the wavelength
It must be ensured that ultraviolet rays of 200 nm or less are not irradiated. For this purpose, the bulb of the discharge lamp is made of ozone-free quartz glass that does not allow the passage of ultraviolet light with a wavelength of 200 nm or less. This ozone-free quartz glass is doped with TiO 2 and dispersed with Ti. If, for example, a xenon lamp is manufactured using a product in which Ti is not uniformly distributed but is locally unevenly distributed, one of the main causes of this is that tensile stress is generated in the inner surface layer of the tube wall due to the generated ultraviolet rays. Therefore, the lamp cannot be lit for a long time. In some cases, distortion occurs after a few hours of lighting, and there are cases of damage after being lit for over 100 hours. Therefore, it is necessary to use a high-quality material in which at least Ti is uniformly dispersed, but in order to disperse TiO2 uniformly, it is necessary to melt TiO 2 and SiO 2 at high temperature for a long time. It took a lot of time to manufacture, and it was also expensive.
そこで本発明は、簡単に製造できて耐久性があ
り、かつ波長200nm以下の紫外線を完全に透過さ
せないオゾンフリーの放電灯の石英製管球を提供
することを目的とし、その構成は、石英管型の内
表面より1μｍないし内表面より10μｍの範囲にお
けるTi濃度がTiO2に換算して0.5％〜７％であ
り、かつ全体の平均濃度と管壁厚さの積が3.7％
μｍ〜42％μｍであることを特徴とする。 Therefore, an object of the present invention is to provide a quartz tube for an ozone-free discharge lamp that is easy to manufacture, durable, and does not completely transmit ultraviolet light with a wavelength of 200 nm or less. The Ti concentration in the range of 1 μm from the inner surface of the mold to 10 μm from the inner surface is 0.5% to 7% in terms of TiO 2 , and the product of the overall average concentration and the tube wall thickness is 3.7%.
It is characterized by having a diameter of μm to 42% μm.
放電灯管球の管壁厚さは２〜５mm程度であり、
従来のオゾンフリー石英は管壁全体に亘つて
100ppm程度のTiO2が分散したものであるが、製
造工程上、偏在が生じ易いものである。これに対
し本発明は上記の構成から理解されるように、内
面の極く限られた部分に高濃度のTiO2を分散さ
せ、他の大部分の管壁にはTiO2を分散させない。
従つて、これにより管壁全体から見ると偏在の問
題が生じないことを見い出して本発明を完成した
ものである。 The tube wall thickness of a discharge lamp bulb is approximately 2 to 5 mm.
Conventional ozone-free quartz covers the entire tube wall.
Although approximately 100 ppm of TiO 2 is dispersed, uneven distribution tends to occur due to the manufacturing process. On the other hand, as understood from the above structure, the present invention disperses TiO 2 at a high concentration in a very limited portion of the inner surface, and does not disperse TiO 2 in most of the other tube wall.
Therefore, the present invention was completed by discovering that this eliminates the problem of uneven distribution when viewed from the entire tube wall.
ここで、TiO2が高濃度で分散される範囲を内
面から1μｍないし内面から10μｍとしたのは、1μ
ｍ以下の薄い範囲にオゾンフリーの条件を満足さ
せるTiO2を分散させるのは困難であり、逆に10μ
ｍ以上の深いところにも高濃度のTiO2を分散さ
せるのが困難であり、そして10μｍ以上では狭い
範囲と言えども偏在の問題が生じるからである。 Here, the range in which TiO 2 is dispersed at a high concentration is 1 μm from the inner surface or 10 μm from the inner surface.
It is difficult to disperse TiO 2 that satisfies ozone-free conditions in a thin range of 10μ or less.
This is because it is difficult to disperse TiO 2 at a high concentration even in a depth of 10 μm or more, and at a depth of 10 μm or more, the problem of uneven distribution occurs even in a narrow range.
次に、TiO2の濃度は、オゾンフリーとしての
性能と上記の狭い範囲内に高濃度のTiO2を効率
よく分散させる製造技術上から定まるものであ
る。ここで、全体の平均濃度と管壁厚さの積が
3.7％μｍ〜42％μｍであれば、紫外線の透過特
性は第１図に示す通りとなり、波長200nm以下の
紫外線を完全に吸収することができる。これに対
し3.7％μｍ以下ではオゾンフリーの条件を満足
できず、逆に、42％μｍ以上では吸収される紫外
線が長波長側に移つてしまう。次に、管壁内面か
ら狭い範囲内のTiO2濃度を0.5％〜７％と定める
のは、この値であれば効率よく分散させることが
可能であるとともにオゾンフリーの条件を満足で
きるからである。即ち、0.5％以下ではオゾンフ
リーの条件を満すのが困難であり、逆に７％以上
の高濃度のTiO2を効率よく分散させるのは困難
であり、かつ無駄である。 Next, the concentration of TiO 2 is determined based on the ozone-free performance and the production technology to efficiently disperse high-concentration TiO 2 within the above narrow range. Here, the product of the overall average concentration and the tube wall thickness is
If it is 3.7% μm to 42% μm, the ultraviolet ray transmission characteristics will be as shown in FIG. 1, and ultraviolet rays with a wavelength of 200 nm or less can be completely absorbed. On the other hand, if it is less than 3.7% μm, the ozone-free condition cannot be satisfied, and conversely, if it is more than 42% μm, the absorbed ultraviolet rays will shift to the longer wavelength side. Next, the TiO 2 concentration within a narrow range from the inner surface of the tube wall is set at 0.5% to 7% because this value allows for efficient dispersion and satisfies the ozone-free conditions. . That is, if TiO 2 is less than 0.5%, it is difficult to satisfy the ozone-free condition, and conversely, it is difficult and wasteful to efficiently disperse TiO 2 at a high concentration of 7% or more.
次に、本発明の石英製管球が簡単で効率よく製
造できることを説明するために一，二の製造例を
ついて述べる。 Next, in order to explain that the quartz tube of the present invention can be easily and efficiently manufactured, one or two manufacturing examples will be described.
管壁の内表面から極く浅い部分に高濃度の
TiO2を分散させるには、内表面からTiO2を拡散
する方法やTiO2が高濃度のTiO2−SiO2ガラス層
を内表面に焼付ける方法などが可能である。 A high concentration of
To disperse TiO 2 , it is possible to diffuse TiO 2 from the inner surface or to bake a TiO 2 -SiO 2 glass layer with a high concentration of TiO 2 on the inner surface.
まず、TiO2を内表面から拡散する方法を説明
すると、コート液Ｌの溶質にチタンテトラエトキ
シド（Ti（OC2H5）4）を使用し、溶媒はエタノー
ルを主として酢酸等のカルボン酸などを添加し、
濃度をTiO2に換算して30ｇ／程度とする。こ
のコート液Ｌを石英製管球１の内面に塗布するに
は、第２図に示すように、容器Ｖ内のコート液Ｌ
に管球１の開口を入れ、他方の開口より図示略の
減圧装置で管球１内を減圧するとコート液Ｌが上
昇する。そして速度を制御しながらコート液Ｌを
降下させると所定厚さに塗布される。このコート
液Ｌが塗布されたものを自然乾燥の後に、約150
℃の温度で10分間、予備熱処理し、更に、250℃
以上の温度で10分間、熱処理する。この操作によ
り、内表面に0.1〜1μｍの膜が形成されるが、必
要に応じて以上の操作を繰返す。 First, to explain the method of diffusing TiO 2 from the inner surface, titanium tetraethoxide (Ti(OC 2 H 5 ) 4 ) is used as the solute of coating liquid L, and the solvent is mainly ethanol, a carboxylic acid such as acetic acid, etc. Add
The concentration is approximately 30 g/TiO 2 . In order to apply this coating liquid L to the inner surface of the quartz tube 1, as shown in FIG.
When the opening of the tube 1 is inserted into the opening of the tube 1 and the pressure inside the tube 1 is reduced from the other opening using a pressure reducing device (not shown), the coating liquid L rises. When the coating liquid L is lowered while controlling the speed, it is applied to a predetermined thickness. After naturally drying the item coated with this coating liquid L,
Preheat treatment for 10 minutes at a temperature of ℃ and further heat treatment at 250℃
Heat-treat at the above temperature for 10 minutes. By this operation, a film of 0.1 to 1 μm is formed on the inner surface, and the above operation is repeated as necessary.
次に焼き込みによつてTiO2を石英の管壁内に
拡散させるが、これは酸水素バーナーにより1720
℃以上、好ましくは1800℃以上の温度で加熱す
る。しかしこの操作は、管球１の封体球形部を酸
水素バーナーにより形成するときに同時に進行す
るので、拡散のための装置と工程を新たに準備す
る必要がない。拡散結果の一例を第３図に示す
が、内表面が5μｍ程度まではTiO2の濃度は３％
程度であり、10μｍの深さではほとんど拡散して
いない。この拡散濃度と深さは、コート液Ｌの濃
度と塗布厚さ、及び焼き込みの温度と時間などに
よつて変化させることができる。 Next, TiO 2 is diffused into the quartz tube wall by burning, which is heated to 1720°C using an oxyhydrogen burner.
Heating is carried out at a temperature of 1800°C or higher, preferably 1800°C or higher. However, since this operation proceeds at the same time as the spherical envelope of the tube 1 is formed using an oxyhydrogen burner, there is no need to prepare a new device and process for diffusion. An example of the diffusion results is shown in Figure 3, where the concentration of TiO 2 is 3% up to about 5 μm on the inner surface.
There is almost no diffusion at a depth of 10 μm. The diffusion concentration and depth can be changed depending on the concentration and coating thickness of the coating liquid L, the burning temperature and time, and the like.
以上の操作により拡散が完了するが、コート液
の塗布は簡単であり、コート液の塗布層の熱処理
は低温で短時間で完了する。更に、焼き込みによ
るTiO2の拡散を、封体球形部の形成時に同時に
行うことができるので、以上の操作は非常に簡単
であり、かつ効率的である。 Diffusion is completed by the above operations, but the application of the coating liquid is simple, and the heat treatment of the coated layer of the coating liquid is completed at a low temperature in a short time. Furthermore, the diffusion of TiO 2 by burning can be performed at the same time as the spherical envelope is formed, so the above operation is very simple and efficient.
次に、TiO2が高濃度の非晶質のSiO2層を内表
面に焼付ける方法を説明する。 Next, we will explain how to bake an amorphous SiO 2 layer with a high concentration of TiO 2 on the inner surface.
コート液としてチタンのアルコレートと珪素の
アルコレートの混合液を調製するがチタン濃度は
TiO2／（SiO2＋TiO2）が１〜７％となるように
する。このコート液の管球内面への塗布は第２図
に示すものと同じ方法で行われる。このコート液
が塗布されたものを自然乾燥の後に、約150℃で
乾燥する。必要に応じて以上の操作を繰返して
1μｍないし10μｍの所定の厚さにする。そして、
500℃以上、好ましくは800℃以上で熱処理すると
非晶質のSiO2層が焼付けられるが、この層には
本発明で要求されるTiO2が分散されている。以
上の方法も、前述の拡散させる方法と同様に簡単
であり、効率的であることが理解される。 A mixed solution of titanium alcoholate and silicon alcoholate is prepared as a coating solution, but the titanium concentration is
TiO 2 /(SiO 2 +TiO 2 ) is set to 1 to 7%. The coating liquid is applied to the inner surface of the tube in the same manner as shown in FIG. After the coating liquid has been applied, it is air-dried and then dried at approximately 150°C. Repeat the above operations as necessary.
The thickness is set to a predetermined thickness of 1 μm to 10 μm. and,
Heat treatment at 500° C. or higher, preferably 800° C. or higher bakes an amorphous SiO 2 layer, in which TiO 2 required by the present invention is dispersed. It is understood that the above method is also simple and efficient like the above-mentioned diffusion method.
而して、上記の方法で製造された石英製管球を
用いてキセノンランプを組立てて点灯したが、点
灯後1000時間経過しても、破損しないのは勿論の
こと、管球に歪も生じず、耐久性が十分大きいこ
とが認められた。そして紫外線の透過特性は第１
図に示す通りであるので、波長200nm以下の紫外
線は吸収され、外部に透過しない。従つて、オゾ
ンフリー石英としての性能を満すことができる。 A xenon lamp was assembled and lit using a quartz tube manufactured by the method described above, but even after 1000 hours had elapsed, the tube did not break, and the tube was distorted. It was confirmed that the durability was sufficiently high. And the transmission characteristics of ultraviolet rays are the first
As shown in the figure, ultraviolet light with a wavelength of 200 nm or less is absorbed and not transmitted to the outside. Therefore, the performance as ozone-free quartz can be satisfied.
なお、放電灯はキセノンランプに限られるもの
ではなく、希ガス放電灯、水銀などの金属蒸気放
電灯、更には閃光放電灯など各種の放電灯に利用
できることは当然である。 Note that the discharge lamp is not limited to xenon lamps, and it goes without saying that various discharge lamps can be used, such as rare gas discharge lamps, metal vapor discharge lamps such as mercury, and even flash discharge lamps.
以上説明した様に、本発明は、石英管壁の内表
面より1μｍないし内表面より10μｍの範囲におけ
るTi濃度がTiO2に換算して0.5％〜７％であり、
かつ、全体の平均濃度と管壁厚さの積が3.7％μ
ｍ〜42％μｍであることを特徴とするので、本発
明に従えば、簡単に製造できて耐久性があり、か
つ波長200nm以下の紫外線を完全に吸収するオゾ
ンフリーの放電灯の石英製管球とすることができ
る。 As explained above, in the present invention, the Ti concentration in the range of 1 μm from the inner surface of the quartz tube wall to 10 μm from the inner surface is 0.5% to 7% in terms of TiO 2 ,
And the product of the overall average concentration and tube wall thickness is 3.7%μ
According to the present invention, the quartz tube of an ozone-free discharge lamp is easily manufactured, durable, and completely absorbs ultraviolet rays having a wavelength of 200 nm or less. It can be a ball.
第１図は紫外線透過特性曲線図、第２図は製造
工程の説明図、第３図はTiO2濃度特性曲線図で
ある。
１……管球、Ｌ……コート液、Ｖ……容器。
FIG. 1 is an ultraviolet transmission characteristic curve diagram, FIG. 2 is an explanatory diagram of the manufacturing process, and FIG. 3 is a TiO 2 concentration characteristic curve diagram. 1...tube, L...coating liquid, V...container.
Claims (1)
り10μｍの範囲におけるTi濃度がTiO2に換算して
0.5％〜７％であり、かつ、全体の平均濃度と管
壁厚さの積が3.7％μｍ〜42％μｍであることを
特徴とする放電灯の石英製管球。1 The Ti concentration in the range of 1 μm from the inner surface of the quartz tube wall to 10 μm from the inner surface is converted to TiO 2
A quartz tube for a discharge lamp, characterized in that the concentration is 0.5% to 7%, and the product of the overall average concentration and the tube wall thickness is 3.7% μm to 42% μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP582085A JPS61165942A (en) | 1985-01-18 | 1985-01-18 | Quartz tubular bulb for discharge lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP582085A JPS61165942A (en) | 1985-01-18 | 1985-01-18 | Quartz tubular bulb for discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61165942A JPS61165942A (en) | 1986-07-26 |
| JPH0434258B2 true JPH0434258B2 (en) | 1992-06-05 |
Family
ID=11621713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP582085A Granted JPS61165942A (en) | 1985-01-18 | 1985-01-18 | Quartz tubular bulb for discharge lamp |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61165942A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2786224B2 (en) * | 1989-01-23 | 1998-08-13 | アネルバ株式会社 | Thin film production apparatus and method |
| US5569979A (en) * | 1992-02-28 | 1996-10-29 | General Electric Company | UV absorbing fused quartz and its use for lamp envelopes |
| TW226472B (en) * | 1992-06-01 | 1994-07-11 | Gen Electric |
-
1985
- 1985-01-18 JP JP582085A patent/JPS61165942A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61165942A (en) | 1986-07-26 |
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