JPH0434216A - Bearing device of water-cooled rotary shaft - Google Patents

Abstract

PURPOSE:To improve reliability of a bearing device for a water-cooled rotary shaft of a vacuum film forming apparatus by providing both paired atmosphere guide grooves and atmosphere introduction pipes at the positions for sandwiching cooling water leading-in and leading-out grooves of a bearing housing and a seal material on both sides of each groove. CONSTITUTION:Circular atmosphere guide grooves 26, 27 are provided at the positions for sandwiching a cooling water in groove 20 and a cooling water out groove 22 on the inner peripheral face of a bearing housing 16 which supports a rotary shaft 7. Atmosphere introduction pipes 28, 29 which are communicated with the atmosphere guide grooves 26, 27 are connected to the bearing housing 16. Not only both sides of the cooling water leading-in and leading-out grooves 20, 22 but also both sides of atmosphere guide grooves 26, 27 are sealed by an O-ring 25 between the inner peripheral face of the bearing housing 16 and the outer peripheral face of the rotary shaft 7. Cooling water is supplied in the condition where atmosphere is introduced in the atmosphere guide grooves 26, 27. Even if pressure of cooling water rises abruptly, and cooling water oozes out of the cooling water leading-in groove 20, it is prevented that water oozes out of the atmosphere guide groove 26 in vacuum owing to seal structure between atmosphere and vacuum.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a bearing device for a water-cooled rotating shaft that supports a rotating shaft having a structure in which cooling water is circulated inside to cool the bearing device in a vacuum.

[Conventional technology]

Generally, an ion beam sputtering system (IBS), which is an example of a vacuum film forming system, has a structure as shown in FIG. 2, for example.

In the figure, fi+ is a cylindrical vacuum chamber in which a sputtering chamber (2) is formed, and (3) is a sputtering chamber (2).
(4) is a target holder (4) which is rotatably installed approximately in the center of the sputtering chamber (2) and holds the entire target (5); ) is a substrate holder disposed above the target holder (4) and integrally attached to the rotating shaft (7), and a film-forming substrate +8) is supported on the lower surface.

When creating a thin film, the letai ion beam (9) derived from the ion source (3) is guided to the target (5) of the target holder (4), and the collision of the ions with the target (9) causes the target (9) to Particles on the surface of the target (9) are knocked out, and by opening the shutter, these particles adhere to the surface of the substrate (8) of the substrate holder (6), and a thin film of almost the same material as the target (9) is deposited on the substrate (8). formed on top.

By the way, in the above-mentioned film forming apparatus, since the temperature of the substrate (8) becomes very high, conventionally the substrate holder (6) is
) is cooled together with the rotating shaft (7).

That is, as shown in FIG. 3, an inflow path (11) and an outflow path (12) of cooling water are formed in the axial direction at the center and outer circumference of the rotating shaft (7), respectively, and the cooling water flows through the substrate holder (6). An inlet (11) and an outlet (12) are provided in the lower and upper layers, respectively.
) are formed to communicate with the cooling water circulation paths f13+, [+4+, and the two image ring paths (+37, Q4) are communicated through a communication hole (15) in the outer periphery of the substrate holder (6).

On the other hand, the cylindrical bearing housing (16) that supports the rotating shaft (7) has bearings (Iη, (18J
is attached to the inner peripheral surface of the bearing housing discharge, and an annular cooling water introduction groove (20) that constantly communicates with the inflow path (11) of the rotating shaft (7) via the guide hole (lQlt), and an outflow path 02. ) to guide hole El+'! An annular cooling water outlet groove is recessed into the annular cooling water outlet groove, which is always in communication through the groove.
E are connected to the cooling water introduction pipe (23) and the cooling water recovery pipe, respectively.

Furthermore, the inner peripheral surface of the bearing housing 06) and the rotating shaft (7)
Both grooves between the outer peripheral surface of the wire (201#) Both sides of the wire are sealed with O-rings 4, respectively.

In such a configuration, when cooling water is supplied from the introduction pipe (23), it flows from between the introduction grooves to the rotating shaft (
7) into the inflow path (II) through the guide path, and the third
As shown by the arrows in the figure, the guide path and circulation path (13) are connected to the communication hole +I5J m circulation path (14j and the outflow path (+2j
Accordingly, the liquid flows out from the guide hole (21) through the lead-out groove @ from the recovery pipe, and the substrate (8) is cooled together with the substrate holder (6).

Note that the cooling water is normally fed at a pressure of 3 to 5 Kgf/cIIt.

[Problem to be solved by the invention]

In the prior art described above, when supporting the water-cooled rotating shaft (7) in a vacuum, the structure is such that both sides of the cooling water inlet groove (-) and outlet groove (-) are simply sealed with O+J songs). Therefore, when the water pressure suddenly increases, the pressure difference between the pressure in the vacuum and the water pressure becomes extremely large, causing the housing (16) to
There is a risk of water seeping outside, especially in vacuum equipment such as the film forming equipment mentioned above, where water may seep into the vacuum.
A serious problem arises in that the desired degree of vacuum cannot be obtained.

The present invention has been made in consideration of these problems of the conventional technology, and its purpose is to completely prevent the cooling water circulating within the rotating shaft from seeping into the vacuum. Our goal is to provide a complete range of water-cooled rotating shaft bearing devices.

[Means to solve the problem]

In order to achieve the above object, the water-cooled rotary shaft bearing device of the present invention is arranged in a vacuum.

a cylindrical bearing housing that rotatably supports a rotating shaft in which cooling water inflow and outflow channels are formed in the axial direction;
An annular cooling water introduction groove and an annular outlet groove that are recessed in the inner circumferential surface of the housing and are in constant communication with the inlet and outlet channels, respectively, and positions that sandwich the inlet groove and the outlet groove on the inner circumferential surface of the housing. two annular air guide grooves respectively recessed in the housing; and the introduction grooves respectively connected to the housing;
A cooling water introduction pipe that communicates with the outlet groove and both guide grooves.

The present invention is characterized in that it includes a cooling water recovery pipe, an air introduction pipe, and a sealing member that seals both sides of each of the grooves between the inner circumferential surface of the housing and the outer circumferential surface of the rotating shaft.

[Effect]

According to the above-mentioned configuration, the atmosphere guide groove is provided between the cooling water introduction groove and the outlet groove in the bearing housing, and the atmosphere is interposed between the positive pressure cooling water and the negative pressure vacuum. , the seal between the cooling water and the vacuum is converted into a seal between the cooling water and the atmosphere and a seal between the atmosphere and the vacuum, and the sealing performance of the sealing member is significantly improved.

Therefore, even if cooling water were to seep into the inlet or outlet grooves during rotation of the rotary shaft, the relatively easy and reliable seal between the atmosphere and the vacuum would prevent water from seeping into the vacuum. Prevented.

〔Example〕

The rotation axis (7) of the substrate holder (6) in the IBS shown in Figure 2
) will be described with reference to FIG. 1.

In Fig. 1, the same symbols as above indicate the same or equivalent parts, and the difference is that the cooling water introduction groove is in the inner circumferential surface of the bearing housing αQ that fully supports the rotating shaft (7). Annular atmosphere guide grooves (26) and (27) are recessed at positions sandwiching the cooling water outlet grooves 0) and 0), respectively, and both guide grooves (26+ and 0) are provided in the housing (16).
Atmospheric introduction vibrator anger connected to 2 parts, e29)
and connect the inner circumferential surface of the housing (16) and the outer circumferential surface of the rotating shaft (7) not only on both sides of the introduction groove and the outlet groove, but also on both sides of both the guide grooves (26) and @η. This point was also sealed with an O-ring.

Then, with the atmosphere introduced into the guide grooves e2f31 and (27) from the atmosphere introduction pipes +28+ and e291, respectively, cooling water is supplied from the introduction pipe A as in the conventional case, and the rotating shaft (7) and substrate holder (6
) and held in the substrate holder (6).
8) Perform cooling.

According to this configuration, even if the water pressure of the cooling water suddenly increases and, for example, the cooling water seeps out from the introduction groove, it will not directly leak into the vacuum, and will not be received by the atmosphere guide groove (2 (to)). In addition, the seal structure between the atmosphere and vacuum reliably prevents water from seeping into the vacuum from the guide groove (26), allowing the substrate to be removed without reducing the degree of vacuum in the sputtering chamber (2). (8) Cooling can be performed.

Note that the present invention is of course applicable not only to the vacuum film forming apparatus described above, but also to other vacuum apparatuses in which a water-cooled rotating shaft is supported in a vacuum.

〔Effect of the invention〕

Since the present invention is configured as described above, it produces the effects described below.

Atmosphere guide grooves are provided between the cooling water inlet and outlet grooves in the bearing housing, and the atmosphere is introduced into the grooves so that the atmosphere is interposed between the cooling water and the vacuum. The sealing performance is better than the conventional method of direct sealing, and even if some water leaks from the inlet and outlet grooves,
The seal between the atmosphere and the vacuum can reliably prevent water from seeping into the vacuum, and the reliability of vacuum equipment using this type of rotating shaft can be dramatically improved.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing one embodiment of a bearing device for a water-cooled rotary shaft according to the present invention, FIG. 2 is a schematic configuration diagram of an ion beam sputtering device, and FIG. 3 is a sectional view of a conventional example. (7) Rotating shaft, (11)...inflow path, (12)...
・・Outflow path, ■・・Bearing housing, (20)・・・Cooling water inlet groove, ・・・Cooling water outlet groove, (support)）・・・・Cooling water inlet pipe, n 4・・Cooling water Recovery pipe, turnip/0
Ring, (26) # (2 ka...atmosphere guide groove, 9)...atmosphere introduction pipe. 111!1

Claims (1)

[Claims] (1) A cylindrical bearing housing that is disposed in a vacuum and rotatably supports a rotating shaft in which cooling water inflow and outflow channels are formed in the axial direction; and a recess on the inner circumferential surface of the housing. an annular cooling water introduction groove and an annular cooling water outlet groove, which are provided and are in constant communication with the inlet and outlet channels, respectively; and two recessed cooling water inlet grooves and an annular coolant outlet groove, which are respectively recessed at positions sandwiching the introduction groove and the outlet groove on the inner circumferential surface of the housing. an annular air guide groove; a cooling water introduction pipe, a cooling water recovery pipe, and an air introduction pipe connected to the housing and communicating with the introduction groove, the outlet groove, and both guide grooves, respectively; the inner circumferential surface of the housing and the air introduction pipe; A bearing device for a water-cooled rotating shaft, comprising: a sealing member that seals both sides of each of the grooves between the outer circumferential surface of the rotating shaft.