JPH043385Y2 - - Google Patents

Description

[Detailed description of the invention] The present invention relates to a surface analysis device, particularly a coaxial cylindrical energy analyzer (Cylindrical Mirror
Analyzer: Hereinafter referred to as CMA. ).

By irradiating a sample with primary charged particles from an ion source placed on the axis of the CMA, and analyzing the energy of the ions scattered by elastic collisions with the sample using the CMA, the composition of the sample surface can be determined. be able to. However, this type of analysis method only provides information on the atomic arrangement in one dimension;
Therefore, information about the two-dimensional or three-dimensional structure of the sample surface cannot be obtained.

In the present invention, a primary charged particle beam generation means is arranged on the axis of a coaxial cylindrical energy analyzer, and the charged particles scattered from the sample are analyzed by irradiating the sample with the charged particle beam from the generation means. A surface analysis device configured to perform energy analysis using a device, comprising a plurality of detectors for detecting charged particles of the same energy passing through an exit slit of the analyzer according to the direction of exit from the slit. The present invention provides a surface analysis device configured as shown in FIG.

An embodiment of the present invention will be described below in detail with reference to the accompanying drawings.

In the figure, 1 is a CMA, and an ion gun 2, a converging lens 3, and an ion scanning means 4 are arranged on the axis of the CMA 1. Ions generated from the ion gun 2 are narrowly focused by a converging lens 3 onto a sample 5 placed on the axis of the CMA 1, and are further deflected by an ion scanning means. When the sample 5 is irradiated with ions, the ions scattered from the sample 5 are CMA
1, and ions with a specific energy pass through a slit 6 arranged on the axis on the exit side of the CMA 1. The ions passing through the slit 6 are detected by a plurality of ion detectors 7 arranged in a ring shape.
a, 7b, ...7n... (only 7a and 7n are shown)
detected by.

In the configuration as described above, when a minute region of the sample 5 is irradiated with ions from the ion gun 2, scattered ions are obtained from the region. The energy of the scattered ions differs depending on the element in the micro region of the sample,
Furthermore, the three-dimensional structure of the sample surface is determined from the direction of ion scattering. As a result, in the present invention, ions with a specific scattering angle are guided into the CMA 1, and only analyzed ions with a specific energy are taken out through the slit 6. ion detector 7
a,...7n..., the large number of signals from these detectors provides information not only about the composition of the surface portion of the sample 5, but also information about the scattering direction of the ions, that is, the sample surface. Information regarding the two-dimensional and three-dimensional structures of can be obtained. Therefore, sweep the voltage applied to CMA1,
By sequentially detecting ions with different energies passing through the slit 6 by a large number of detectors 7a...7n...and processing a large number of obtained detection signals, various analyzes of the sample surface can be performed. . Furthermore, by changing the irradiation point of the primary ions on the sample using the scanning means 4, surface analysis can be performed over a wide range of the sample.

[Brief explanation of the drawing]

The accompanying drawing is a block diagram showing one embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...CMA, 2...Ion gun, 3...Converging lens, 4...Ion scanning means, 5...Sample, 6...
...Slit, 7...Ion detector.

Claims (1)

[Scope of utility model registration request] A primary charged particle beam generation means is arranged on the axis of a coaxial cylindrical energy analyzer, and the sample is irradiated with the charged particle beam from the generation means, and the charged particles generated due to elastic collision with the sample are transferred to the analyzer. In a surface analysis device configured to perform energy analysis by
A surface analysis device comprising a plurality of detectors for detecting charged particles of the same energy passing through an exit slit of the analyzer according to the exit direction from the slit.