JPH04337718A - Light source for printing and exposing - Google Patents

Light source for printing and exposing

Info

Publication number
JPH04337718A
JPH04337718A JP10995191A JP10995191A JPH04337718A JP H04337718 A JPH04337718 A JP H04337718A JP 10995191 A JP10995191 A JP 10995191A JP 10995191 A JP10995191 A JP 10995191A JP H04337718 A JPH04337718 A JP H04337718A
Authority
JP
Japan
Prior art keywords
light
straight line
lamp
angle
reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10995191A
Other languages
Japanese (ja)
Other versions
JP2930144B2 (en
Inventor
Toshiyuki Sato
佐藤敏行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP10995191A priority Critical patent/JP2930144B2/en
Publication of JPH04337718A publication Critical patent/JPH04337718A/en
Application granted granted Critical
Publication of JP2930144B2 publication Critical patent/JP2930144B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Light Sources And Details Of Projection-Printing Devices (AREA)

Abstract

PURPOSE:To miniaturize a reflector and to use the reflector in which the light quantity distribution of an irradiated surface is made uniform without making an irradiating distance long. CONSTITUTION:A light source device for exposing and printing an original plate in which a pattern in drawn on the surface of a base material constituted by applying a photosensitive material is constituted in a state where the reflector 16 reflecting a light beam emitted from a bar-like or point-state lamp 17 toward the irradiated surface 18 reflects the light beam 10, which is one of the light beams made incident on the reflector 16 and reflected to the irradiated surface 18, and which has a small angle of incidence to the reflector 16, toward the one outer peripheral part of the irradiated surface 18; and the reflector is miniaturized, and the light quantity distribution of the irradiated surface is made uniform without making the irradiating distance long.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、ICのリードフレーム
、カラーTV用シャドウマスク等を製作するのに用いら
れる焼付け露光用光源装置に関し、特に、光源からの光
を均一に分布させて照明する焼付け露光用光源装置に関
する。
[Field of Industrial Application] The present invention relates to a light source device for printing exposure used to manufacture IC lead frames, shadow masks for color TVs, etc., and particularly to a light source device for uniformly distributing light from a light source for illumination. The present invention relates to a light source device for printing exposure.

【0002】0002

【従来の技術】例えばシャドウマスクの製作に用いられ
る感光材料を塗布した基材の表面に原版の絵柄を露光し
て焼付けるための光源装置の場合、一般的に照射面積が
大きく(例えば24″×32″)、しかも良好な光量分
布が望まれるため、光源からの光を反射する反射板の形
状は、従来、断面が放物線又はこれを変形して拡散性を
持たせたものを用いることが多い。
2. Description of the Related Art In the case of a light source device for exposing and printing a pattern of an original plate onto the surface of a base material coated with a photosensitive material used for producing a shadow mask, the irradiation area is generally large (for example, 24" ×32″), and a good light intensity distribution is desired, so the shape of the reflector that reflects the light from the light source has traditionally been a parabola or a shape that has been modified to give it diffusive properties. many.

【0003】0003

【発明が解決しようとする課題】ところで、上記のよう
なシャドウマスク原版の絵柄を焼付ける際、光源装置か
らの光量分布が悪いと、焼付けられた絵柄の寸法が位置
により変化してしまい、所望の品質を得ることができな
くなる。例えば、図10に示したような断面が放物線の
反射鏡1を用いた場合、照射面3外周が暗くなるため、
良好な分布を得ることができない。この反射鏡1で分布
を良くするには、ランプ2と照射面3の距離4を長くと
る必要がある。これは、図10に示すように放物線が元
々照射面3中央への光の反射は多く(明)、外周への光
の反射は少ない(暗)性質を有するからであり、しかも
、反射板1の先端5になるほど反射鏡1に対する入射角
が大きくなり、入射角が大きい光は拡散し反射率が悪く
なるからである。
[Problems to be Solved by the Invention] By the way, when printing the pattern on the shadow mask original plate as described above, if the light intensity distribution from the light source device is poor, the dimensions of the printed pattern will change depending on the position, making it difficult to obtain the desired image. quality. For example, when using a reflector 1 with a parabolic cross section as shown in FIG. 10, the outer periphery of the irradiation surface 3 becomes dark.
It is not possible to obtain a good distribution. In order to improve the distribution with this reflecting mirror 1, it is necessary to increase the distance 4 between the lamp 2 and the irradiation surface 3. This is because, as shown in FIG. 10, a parabola originally has the property that more light is reflected to the center of the irradiation surface 3 (bright) and less light is reflected to the outer periphery (dark). This is because the angle of incidence with respect to the reflecting mirror 1 increases as the tip 5 approaches the mirror 1, and light with a large angle of incidence is diffused, resulting in poor reflectance.

【0004】このように、照射面3までの距離4を長く
すると、照度が落ち、これにあわせ露光時間を長くとら
なければならない。
[0004] As described above, when the distance 4 to the irradiation surface 3 is increased, the illumination intensity decreases, and the exposure time must be increased accordingly.

【0005】また、放物線を用いた反射板1の場合、反
射板1の大きさ6が照射面3の大きさ7とほぼ同じ大き
さにする必要があるが、光源装置の大きさ6が小さい方
が解像度(平行度)が良好であり、その大きさ6が大き
くなると、焼付けられた像がぼける特性を持っている。 すなわち、放物線を用いた場合、光源装置の大きさ6が
大きいため、像がぼけてしまう問題がある。
Furthermore, in the case of the reflector 1 using a parabola, the size 6 of the reflector 1 needs to be approximately the same as the size 7 of the irradiation surface 3, but the size 6 of the light source device is small. The resolution (parallelism) is better, and as the size 6 becomes larger, the printed image becomes blurred. That is, when a parabola is used, there is a problem that the image becomes blurred because the size 6 of the light source device is large.

【0006】光源装置のその他の問題としては、露光中
に光源装置より発光される光の中、露光に必要な光(例
えば、紫外線)以外の光(例えば、可視光、赤外線)の
反射により、照射面が加熱され、原版及び焼付けられた
基材の寸法がずれやすい問題点もあった。
Another problem with the light source device is that light (for example, visible light, infrared light) other than the light necessary for exposure (for example, ultraviolet light) is reflected in the light emitted by the light source device during exposure. There was also the problem that the irradiated surface was heated and the dimensions of the original plate and the printed substrate were likely to shift.

【0007】本発明は以上のような問題点に鑑みてなさ
れたものであり、その目的は、反射板を小型化し、しか
も、照射距離を長くすることなく、光量分布が均一にな
るような反射板を用いた焼付け露光用光源装置を提供す
ることである。
The present invention has been made in view of the above-mentioned problems, and its purpose is to miniaturize the reflector and achieve a reflection system that makes the light intensity distribution uniform without increasing the irradiation distance. An object of the present invention is to provide a light source device for printing exposure using a plate.

【0008】[0008]

【課題を解決するための手段】上記問題点を解決すべく
、反射板を小型化し、しかも、照射距離を長くすること
なく、光量分布が均一になるような反射面を有する反射
板について種々研究の結果、本発明を完成させたもので
ある。
[Means for solving the problem] In order to solve the above problems, various research has been conducted on a reflector that has a reflective surface that makes the light intensity distribution uniform without increasing the size of the reflector and without increasing the irradiation distance. As a result, the present invention has been completed.

【0009】すなわち、本発明の焼付け露光用光源装置
は、感光材料を塗布してなる基材の表面に絵柄の描かれ
た原版を露光して焼付ける光源装置において、棒状又は
点状のランプから発せられた光を照射面へ向けて反射さ
せる反射板が、反射板へ入射され照射面へ反射される光
の中、反射板への入射角の小さい光を一方の照射面の外
周部へ、反射板への入射角の大きい光を反対側の外周部
へ反射させるように構成したことを特徴とするものであ
る。
That is, the light source device for printing exposure of the present invention is a light source device for exposing and printing an original plate with a pattern drawn on the surface of a base material coated with a photosensitive material. A reflector that reflects the emitted light toward the irradiation surface directs the light that enters the reflector and is reflected back to the irradiation surface, and directs the light that has a small angle of incidence to the reflector toward the outer periphery of one of the irradiation surfaces. It is characterized in that it is configured so that light having a large angle of incidence on the reflector is reflected to the outer peripheral portion on the opposite side.

【0010】その場合、棒状ランプの軸に垂直で照射面
に垂直な断面又は点状ランプを含み照射面に垂直な断面
において、前記反射板の反射面は、ランプを通り照射面
に垂直な光軸に対して対称に構成され、反射面を表す線
は、光軸の片側で、ランプに対して照射面とは反対側の
出発点Aにおいて、ランプからの光をその光に対して所
定の角度φ1 をなして照射面の外周部へ反射する第1
直線から始まり、ランプと点Aを結ぶ直線に対して角度
θをなして第1の直線に入射する光が第1直線との交点
Bおいて、ランプからの光をその光に対して前記所定角
度φ1 に所定の角度cを加えた角度φ1 +c(ただ
し、θ≠c。cは負であってもよい。)をなして照射面
へ反射する第2直線が第1直線に続き、ランプと点Aを
結ぶ直線に対して角度2θをなして第2直線に入射する
光が第2直線との交点Cおいて、ランプからの光をその
光に対して前記角度φ1 に前記角度cを2倍した角度
を加えた角度φ1 +2cをなして照射面へ反射する第
3直線が第2直線に続き、以下、ランプと点Aを結ぶ直
線に対して角度Nθ(Nは正の整数)をなして第N直線
に入射する光が第N直線との交点Xおいて、ランプから
の光をその光に対して角度φ1 +Ncをなして照射面
へ反射する第N+1直線が第N直線に続いてなる線から
なることが望ましい。さらに、反射面を表す線が点A 
 B  C・・・・Xを滑らかな曲線でつないでなるこ
とがより望ましい。
In that case, in a cross section perpendicular to the axis of the rod-shaped lamp and perpendicular to the irradiation surface, or in a cross section including the point lamp and perpendicular to the irradiation surface, the reflective surface of the reflector plate allows light to pass through the lamp and be perpendicular to the irradiation surface. The line, which is constructed symmetrically with respect to the axis and represents the reflective surface, directs the light from the lamp to a predetermined value with respect to the light at a starting point A on one side of the optical axis and opposite to the irradiation surface with respect to the lamp. The first beam is reflected to the outer periphery of the irradiated surface at an angle φ1.
Light that starts from a straight line and enters the first straight line at an angle θ with respect to the straight line connecting the lamp and point A, at the point of intersection B with the first straight line, the light from the lamp is A second straight line that forms an angle φ1 + c (however, θ≠c; c may be negative) and reflects to the irradiation surface by adding a predetermined angle c to the angle φ1 follows the first straight line, and is connected to the lamp. When light enters a second straight line at an angle 2θ with respect to the straight line connecting point A, at an intersection point C with the second straight line, the light from the lamp is set at the angle φ1 and the angle c is 2. A third straight line that reflects to the irradiation surface by adding the multiplied angle φ1 + 2c follows the second straight line, and hereafter forms an angle Nθ (N is a positive integer) with respect to the straight line connecting the lamp and point A. At the point X where the light incident on the Nth straight line intersects with the Nth straight line, the N+1st straight line is followed by the Nth straight line, which reflects the light from the lamp to the irradiation surface at an angle φ1 +Nc with respect to the light. It is desirable that the line consists of Furthermore, the line representing the reflective surface is point A
It is more desirable to connect B C...X with a smooth curve.

【0011】なお、照射面が高温となることを嫌う場合
は、反射板表面に赤外線吸収、紫外線反射特性を有する
単層又は多層コーティングを施し、コールドミラーとす
ることが望ましい。また、反射板が高温となり耐久性が
ない場合は、空冷又は水冷機構の何れか一方又は双方を
備えていることが望ましい。
[0011] If the irradiation surface is not to be heated to high temperatures, it is desirable to form a cold mirror by applying a single layer or multilayer coating having infrared absorption and ultraviolet reflection properties to the surface of the reflector plate. Furthermore, if the reflector becomes high in temperature and lacks durability, it is desirable to provide either one or both of air cooling and water cooling mechanisms.

【0012】0012

【作用】本発明においては、棒状又は点状のランプから
発せられた光を照射面へ向けて反射させる反射板が、反
射板へ入射され照射面へ反射される光の中、反射板への
入射角の小さい光を照射面の一方の外周部へ、反射板へ
の入射角の大きい光を反対側の外周部へ反射させるよう
に構成されているので、反射板を小型にすることができ
、照射距離を長くすることなく、照射面の光量分布を均
一にすることができる。また、像のぼけ等の問題もなく
なる。
[Function] In the present invention, a reflector that reflects light emitted from a bar-shaped or dot-shaped lamp toward an irradiation surface is provided, and among the light that is incident on the reflector and reflected toward the irradiation surface, the reflector is Since the reflector is configured to reflect light with a small angle of incidence to one outer circumference of the irradiation surface and reflect light with a large angle of incidence to the reflector to the outer circumference of the opposite side, the reflector can be made smaller. , the light amount distribution on the irradiation surface can be made uniform without increasing the irradiation distance. Further, problems such as image blurring are also eliminated.

【0013】[0013]

【実施例】以下、本発明の実施例について、図面を参照
にして説明する。まず、図1を参照にして、本発明の焼
付け露光用光源装置に用いる反射板16の形状について
説明する。図1は反射板16の断面上半分を示したもの
で、断面下半分は、点光源として表されたランプ17を
通る中心線の一点鎖線に対して対称の形をしている。図
中の矢印は、ランプ17から出て反射板16で反射され
、照射面18に達する光線を示したものである。この反
射板16の反射面を表す線は点A、B、C、D、E・・
・を結んだもので、点A、B、C、D、E・・・は次の
ようにして決められている。
Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings. First, with reference to FIG. 1, the shape of the reflector 16 used in the printing exposure light source device of the present invention will be described. FIG. 1 shows the upper half of the cross section of the reflector 16, and the lower half of the cross section is symmetrical with respect to a dashed-dotted line that is the center line passing through the lamp 17, which is represented as a point light source. The arrows in the figure indicate light rays that come out of the lamp 17, are reflected by the reflector 16, and reach the irradiation surface 18. The lines representing the reflective surface of this reflective plate 16 are points A, B, C, D, E...
The points A, B, C, D, E, etc. are determined as follows.

【0014】図1、図2に示すように、最初に出発点A
を指定する。点Aの指定には任意性があるが、ランプ1
7を中心として照射面18とは反対側のランプ17に比
較的近接した点が選ばれる。次に、ランプ17から点A
に入射する光線に対して点Aから反射された光線10が
なす角度φ1 を適当に指定する。そして、ランプ17
と点Aを結ぶ直線に対して角度θをなしてランプ17を
通る直線と、角度φ1 の2等分線を法線とし点Aを通
る直線との交点をBとする。次に、ランプ17から点B
に入射する光線に対して点Bから反射された光線11が
なす角度をφ1 +cとする(ただし、θ≠c。cは負
であってもよい。)。そして、ランプ17と点Bを結ぶ
直線に対して角度θをなしてランプ17を通る直線と、
角度φ1 +cの2等分線を法線とし点Bを通る直線と
の交点をCとする。次いで、ランプ17から点Cに入射
する光線に対して点Cから反射された光線12がなす角
度をφ1 +2cとする。そして、ランプ17と点Cを
結ぶ直線に対して角度θをなしてランプ17を通る直線
と、角度φ1 +2cの2等分線を法線とし点Cを通る
直線との交点をDとする。以下、同様にして点E、F・
・・・を決める。
As shown in FIGS. 1 and 2, first the starting point A is
Specify. Although the designation of point A is arbitrary, lamp 1
A point relatively close to the lamp 17 on the opposite side of the irradiation surface 18 with reference to 7 as the center is selected. Next, from the lamp 17 to point A
The angle φ1 formed by the light ray 10 reflected from point A with respect to the light ray incident on the point A is appropriately specified. And lamp 17
Let B be the intersection of a straight line that passes through the lamp 17 at an angle θ with respect to the straight line connecting point A and a straight line that passes through point A and has the bisector of angle φ1 as the normal. Next, from the lamp 17 to point B
The angle that the light ray 11 reflected from point B makes with respect to the incident light ray is φ1 +c (however, θ≠c; c may be negative). A straight line passing through the lamp 17 at an angle θ with respect to the straight line connecting the lamp 17 and point B,
Let the bisector of the angle φ1 +c be the normal line, and let C be the intersection with the straight line passing through point B. Next, the angle formed by the light ray 12 reflected from point C with respect to the light ray incident on point C from the lamp 17 is assumed to be φ1 +2c. Then, let D be the intersection of a straight line that passes through the lamp 17 at an angle θ with respect to the straight line connecting the lamp 17 and the point C, and a straight line that passes through the point C and has the bisector of the angle φ1 +2c as the normal. Hereafter, in the same way, points E, F,
Decide...

【0015】図2で説明した方法により求められた点A
、B、C、D、E・・・を直線又は滑らかな線でつない
だ曲線が表す反射板16を用いると、図1に示すように
、ランプ17から均一に発光された光は、各々10、1
1、12、13、14・・・と反射され、それぞれの照
射面18での間隔は徐々に短く、すなわち、a>b>c
>dとなり、10の位置より11の位置が明るく、11
の位置より12の位置が明るくなることを示しているが
、光線10よりも光線11が、また光線11よりも光線
12が反射板16への入射角は大きくなり(δ3 >δ
2 >δ1 )、結果的に両者は相殺されて、丁度良好
な光量分布を得ることができる。
Point A obtained by the method explained in FIG.
, B, C, D, E, etc. are connected by a straight line or a smooth line. As shown in FIG. ,1
1, 12, 13, 14, etc., and the intervals at each irradiation surface 18 are gradually shorter, that is, a>b>c
>d, the 11th position is brighter than the 10th position, and the 11th position is brighter than the 10th position.
This shows that the position 12 is brighter than the position , but the angle of incidence of the ray 11 on the reflecting plate 16 is larger than that of the ray 10, and that of the ray 12 is larger than that of the ray 11 (δ3 > δ
2 > δ1), the two are canceled out as a result, and a just good light amount distribution can be obtained.

【0016】なお、以上のような反射板16の点A、B
、C、D、E・・・から反射される光は、ランプ17と
点Aを結んだ直線に対して、φ1 、φ1 +(c−θ
)、φ1 +2(c−θ)、φ1 +3(c−θ)、φ
1 +4(c−θ)・・・と順に一定角度だけ増加((
c−θ)が正のとき)又は減少((c−θ)が負のとき
)しながら反射されることが簡単な証明により明らかに
なる。
Note that points A and B on the reflector 16 as described above
, C, D, E... with respect to the straight line connecting the lamp 17 and point A, φ1, φ1 + (c-θ
), φ1 +2 (c-θ), φ1 +3 (c-θ), φ
1 + 4 (c - θ)... and so on, increasing by a certain angle ((
A simple proof makes clear that it is reflected while (when (c-θ) is positive) or decreased (when (c-θ) is negative).

【0017】また、このような方法によると、反射板1
6の大きさは任意に求められるため、小型化が可能であ
り、付帯装置との寸法上の制約もなく、平行度が向上す
るため、解像度も良好となる。反射板16の表面形状は
、基本的には凹凸のない鏡面を用いるが、ランプ17の
発光径が極めて小さいときは、反射板16の形状精度が
シビアに影響するため、表面に凹凸をつけてぼかすよう
にするとよい。このような凹凸は、エンボス加工又はシ
ョットピーニングによる梨地加工が好適である。
Furthermore, according to such a method, the reflector 1
Since the size of 6 can be determined arbitrarily, miniaturization is possible, there is no dimensional restriction with respect to ancillary devices, parallelism is improved, and resolution is also good. The surface shape of the reflector plate 16 is basically a mirror surface with no unevenness, but when the emission diameter of the lamp 17 is extremely small, the shape accuracy of the reflector plate 16 will be severely affected, so the surface should be made with unevenness. It is best to blur it. For such unevenness, it is suitable to perform satin finishing by embossing or shot peening.

【0018】反射板16の基材は、表面の平滑性を向上
させるためにアルミ材を用いている。また、照射面18
の温度上昇による原版及び感光基材の寸法ずれを減少す
べく、表面を赤外線を吸収し、紫外線を反射させるため
の単層又は多層コーティング処理を行うことが望ましい
。このとき、吸収された赤外線により、例えば超高圧水
銀灯5kWを用いた場合、反射板基材のアルミ材温度が
約300℃に達するため、この温度上昇による形状変形
を避けるために、例えば図3の断面図に示すように、ラ
ンプ17から比較的離れた反射板16裏面部分に空冷フ
ィン20を設け、また、ランプ17に近い部分の反射板
16基材内部にいくつかの水冷管21を設けた構造にす
ることが望ましい。水冷は、水冷管21にラジエータ(
図示せず)を介して水を循環させることにより行う。
The base material of the reflecting plate 16 is made of aluminum in order to improve the surface smoothness. In addition, the irradiation surface 18
In order to reduce dimensional deviations of the original plate and photosensitive substrate due to temperature rise, it is desirable to perform a single-layer or multilayer coating treatment on the surface to absorb infrared rays and reflect ultraviolet rays. At this time, the temperature of the aluminum material of the reflector base material reaches approximately 300°C due to the absorbed infrared rays when using, for example, a 5kW ultra-high pressure mercury lamp.In order to avoid shape deformation due to this temperature rise, for example, As shown in the cross-sectional view, air-cooling fins 20 are provided on the back surface of the reflector 16 that is relatively far from the lamp 17, and several water-cooled tubes 21 are provided inside the base material of the reflector 16 in a portion close to the lamp 17. It is desirable to have a structure. For water cooling, a radiator (
(not shown) by circulating water.

【0019】このようにして、反射板16は小型化され
るため(従来比1/8)、型成形による加工ができるよ
うになり、形状精度も±0.1mm程度と、従来の板金
加工よりも良好となる。
In this way, the reflector 16 is miniaturized (1/8 of the conventional size), so it can be processed by molding, and the shape accuracy is about ±0.1 mm, which is better than conventional sheet metal processing. will also be good.

【0020】ところで、ランプ17として棒状光源を用
いる場合、反射板16はランプ31軸方向何れの位置に
おいてそれに垂直に断面をとっても、図1のような同じ
形状をとるが、ランプ17の長い方向については、光源
が大きすぎて光量分布がコントロールできないため、図
4の水平断面図に示すように、照射面18の大きさ33
、光源装置と照射面18の距離35にあわせて、反射板
16側面に設けた反射板30のひらき量32を変えるこ
とによってある程度のコントロールができる。
By the way, when a rod-shaped light source is used as the lamp 17, the reflection plate 16 has the same shape as shown in FIG. Since the light source is too large and the light intensity distribution cannot be controlled, the size of the irradiation surface 18 is 33 as shown in the horizontal cross-sectional view of FIG.
A certain degree of control can be achieved by changing the amount of opening 32 of the reflecting plate 30 provided on the side surface of the reflecting plate 16 in accordance with the distance 35 between the light source device and the irradiation surface 18.

【0021】なお、ランプ17として点光源を用いる場
合は、反射板16は中心軸(図1、図3の一点鎖線)に
対して回転対称な形状となる。
Note that when a point light source is used as the lamp 17, the reflection plate 16 has a rotationally symmetrical shape with respect to the central axis (dotted chain line in FIGS. 1 and 3).

【0022】次に、図5〜図7に本発明により求められ
た反射板16の形状の一例及びそれを用いた光源装置に
よる照明光量の分布を示す。図5は反射板16の上半分
及びそれによる10°毎の反射光線、反射光量分布を示
す。また、図6にランプ17からの5°毎の直射光線、
直射光量分布を示す。そして、図7に各光量分布とこれ
らの和としての全光量分布を示す。この例においては、
図8に示すように、ランプ17を通り照射方向と反対の
方向をx座標、照射面に平行は方向をy座標としたとき
、スタート点(図1の点A)は、x=20mm、y=5
mm、水平線(中心線)に対する照射角度21°〜−3
0°、θ=0.1°、c=0.0645°、ランプ17
から照射面18までの距離1100mm(図5)とした
。図7から明らかなように、この例による光源装置によ
ると中心から外周にかけて極めて均一の光量分布が得ら
れることが分る。
Next, FIGS. 5 to 7 show an example of the shape of the reflecting plate 16 obtained according to the present invention and the distribution of the amount of illumination light produced by a light source device using the same. FIG. 5 shows the upper half of the reflecting plate 16, the reflected light rays reflected by it every 10 degrees, and the reflected light amount distribution. In addition, FIG. 6 shows the direct rays of light every 5 degrees from the lamp 17,
Shows the direct light amount distribution. FIG. 7 shows each light amount distribution and the total light amount distribution as the sum of these distributions. In this example,
As shown in FIG. 8, when the x coordinate is the direction opposite to the irradiation direction passing through the lamp 17, and the y coordinate is the direction parallel to the irradiation surface, the starting point (point A in FIG. 1) is x = 20 mm, y =5
mm, irradiation angle from horizontal line (center line) 21° to -3
0°, θ=0.1°, c=0.0645°, lamp 17
The distance from to the irradiation surface 18 was 1100 mm (FIG. 5). As is clear from FIG. 7, it can be seen that the light source device according to this example provides an extremely uniform light amount distribution from the center to the outer periphery.

【0023】図9は棒状のランプと以上のように構成し
た反射板を用いた光源装置の1実施例の分解斜視図で、
反射板は、ランプ48の交換を容易にするため、前側部
分50と後側部分50′とに2分割して作製し、図示の
ように、取り付け台56への取り付け時に一体化する。 着脱方法はネジどめ(図示せず)により行っているが、
市販のワンタッチ取り付け治具等を用いてもよい。さら
に、図9に示すように、ランプ48の反射板50、50
′に対する取り付け位置を正確にするため、市販の微調
テーブル51、52を用い、ランプ48を取り付け台5
6に対して上下、前後方向へ調節可能としている。加え
て、照射面18に対する光源装置全体の高さ調節ができ
るようになっている。そのためには、例えば、取り付け
台56をスライド部53により支持柱55に対して高さ
調整自在に取り付け、固定ネジ54を緩めてスライド部
53を上下に調節し、位置を決めた後にネジ54を締め
て固定するようにすればよい。照射面18に対する光源
装置全体の前後、左右への調節は、光源装置に自在キャ
スタ(図示せず)を装備し、これにより行う。なお、ラ
ンプ48は水冷用ジャケット管49内に挿通されて冷却
されるようになっている。
FIG. 9 is an exploded perspective view of one embodiment of a light source device using a rod-shaped lamp and a reflector configured as described above.
In order to facilitate replacement of the lamp 48, the reflector plate is manufactured in two parts, a front part 50 and a rear part 50', which are integrated when attached to a mounting base 56 as shown. The attachment/detachment method is done using screws (not shown).
A commercially available one-touch mounting jig or the like may be used. Further, as shown in FIG. 9, reflectors 50, 50 of the lamp 48
In order to accurately attach the lamp 48 to the mounting base 5 using commercially available fine adjustment tables 51 and 52,
6, it can be adjusted up and down and in the front and rear directions. In addition, the height of the entire light source device relative to the irradiation surface 18 can be adjusted. To do this, for example, attach the mounting base 56 to the support column 55 using the slide part 53 so that the height can be adjusted freely, loosen the fixing screw 54 to adjust the slide part 53 up and down, and after determining the position, tighten the screw 54. Just tighten it and fix it. Adjustment of the entire light source device back and forth and left and right with respect to the irradiation surface 18 is performed by equipping the light source device with swivel casters (not shown). Note that the lamp 48 is inserted into a water cooling jacket pipe 49 to be cooled.

【0024】以上のような本発明の光源装置により、■
光を効率よく照射面に反射できるため、照射面での照度
が約2倍にアップし、■光源が小さくなったため、照明
光の平行度は2倍の性能にアップし、さらに、■赤外線
吸収膜(コールドミラー)等により、照射面での温度上
昇は10℃低くなり、良好となった。
[0024] With the light source device of the present invention as described above,
Since the light can be efficiently reflected to the irradiation surface, the illuminance on the irradiation surface has been approximately doubled, ■The light source has become smaller, so the parallelism of the illumination light has been doubled, and ■Infrared absorption has been improved. Due to the film (cold mirror), etc., the temperature rise on the irradiated surface was lowered by 10°C, which was favorable.

【0025】以上、実施例に基づいて本発明の焼付け露
光用光源装置について説明してきたが、本発明はこれら
実施例に限定されず種々の変形が可能である。
Although the light source device for printing exposure of the present invention has been described above based on embodiments, the present invention is not limited to these embodiments and can be modified in various ways.

【0026】[0026]

【発明の効果】以上説明したように、本発明の焼付け露
光用光源装置によると、棒状又は点状のランプから発せ
られた光を照射面へ向けて反射させる反射板が、反射板
へ入射され照射面へ反射される光の中、反射板への入射
角の小さい光を照射面の一方の外周部へ、反射板への入
射角の大きい光を反対側の外周部へ反射させるように構
成されているので、反射板を小型にすることができ、照
射距離を長くすることなく、照射面の光量分布を均一に
することができる。また、像のぼけ等の問題もなくなる
Effects of the Invention As explained above, according to the light source device for printing exposure of the present invention, the light emitted from the bar-shaped or point-shaped lamp is reflected toward the irradiation surface by the reflecting plate. Among the light reflected to the irradiation surface, the structure is configured so that the light with a small angle of incidence on the reflection plate is reflected to one outer periphery of the irradiation surface, and the light with a large angle of incidence on the reflection plate is reflected to the outer periphery on the opposite side. Therefore, the reflector can be made smaller and the light intensity distribution on the irradiation surface can be made uniform without increasing the irradiation distance. Further, problems such as image blurring are also eliminated.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】本発明の焼付け露光用光源装置に用いる反射板
の形状を説明するための図である。
FIG. 1 is a diagram for explaining the shape of a reflecting plate used in a light source device for printing exposure according to the present invention.

【図2】図1の反射板を表す線を描くための方法を説明
するための図である。
FIG. 2 is a diagram for explaining a method for drawing a line representing the reflector in FIG. 1;

【図3】反射板の冷却構造を説明するための断面図であ
る。
FIG. 3 is a cross-sectional view for explaining a cooling structure of a reflecting plate.

【図4】ランプとして棒状光源を用いるの場合の本発明
による露光用光源装置の水平断面図である。
FIG. 4 is a horizontal sectional view of the exposure light source device according to the present invention when a rod-shaped light source is used as a lamp.

【図5】本発明により求められた反射板の一例の上半分
の形状、反射光線、反射光量分布を示す図である。
FIG. 5 is a diagram showing the shape, reflected light rays, and reflected light amount distribution of the upper half of an example of a reflector plate obtained according to the present invention.

【図6】ランプからの直射光線、直射光量分布を示す図
である。
FIG. 6 is a diagram showing direct light rays from a lamp and a direct light amount distribution.

【図7】各光量分布とこれらの和としての全光量分布を
示す図である。
FIG. 7 is a diagram showing each light amount distribution and the total light amount distribution as the sum thereof.

【図8】図5〜図7の例の反射板のパラメータを説明す
るための図である。
FIG. 8 is a diagram for explaining parameters of the reflector in the examples of FIGS. 5 to 7;

【図9】棒状のランプ用いた光源装置の1実施例の分解
斜視図である。
FIG. 9 is an exploded perspective view of one embodiment of a light source device using a rod-shaped lamp.

【図10】従来の断面が放物線の反射鏡の作用を説明す
るための図である。
FIG. 10 is a diagram for explaining the function of a conventional reflecting mirror with a parabolic cross section.

【符号の説明】[Explanation of symbols]

16…反射板、17…ランプ、18…照射面、20…空
冷フィン、21…水冷管、30…側面に設けた反射板、
48…ランプ、49…ランプ水冷用ジャケット管、50
…反射板前側部分、50′…反射板後側部分、51、5
2…微調テーブル、53…スライド部、54…固定ネジ
、55…支持柱、56…取り付け台。
16...Reflector plate, 17...Lamp, 18...Irradiation surface, 20...Air cooling fin, 21...Water cooling tube, 30...Reflector plate provided on the side,
48...Lamp, 49...Lamp water cooling jacket tube, 50
...Reflector plate front part, 50'...Reflector plate rear part, 51, 5
2...Fine adjustment table, 53...Sliding portion, 54...Fixing screw, 55...Support column, 56...Mounting base.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】  感光材料を塗布してなる基材の表面に
絵柄の描かれた原版を露光して焼付ける光源装置におい
て、棒状又は点状のランプから発せられた光を照射面へ
向けて反射させる反射板が、反射板へ入射され照射面へ
反射される光の中、反射板への入射角の小さい光を照射
面の一方の外周部へ、反射板への入射角の大きい光を反
対側の外周部へ反射させるように構成したことを特徴と
する焼付け露光用光源装置。
Claim 1: In a light source device that exposes and prints an original plate with a pattern drawn on the surface of a base material coated with a photosensitive material, light emitted from a rod-shaped or dot-shaped lamp is directed toward the irradiation surface. Among the light that is incident on the reflector and reflected to the irradiation surface, the reflector plate directs the light with a small angle of incidence to the reflector to one outer circumference of the irradiation surface, and the light with a large angle of incidence to the reflector to the outer periphery of the irradiation surface. 1. A light source device for printing exposure, characterized in that the light source device is configured to reflect light toward an outer peripheral portion on the opposite side.
【請求項2】  棒状ランプの軸に垂直で照射面に垂直
な断面又は点状ランプを含み照射面に垂直な断面におい
て、前記反射板の反射面は、ランプを通り照射面に垂直
な光軸に対して対称に構成され、反射面を表す線は、光
軸の片側で、ランプに対して照射面とは反対側の出発点
Aにおいて、ランプからの光をその光に対して所定の角
度φ1 をなして照射面の外周部へ反射する第1直線か
ら始まり、ランプと点Aを結ぶ直線に対して角度θをな
して第1の直線に入射する光が第1直線との交点Bおい
て、ランプからの光をその光に対して前記所定角度φ1
 に所定の角度cを加えた角度φ1 +c(ただし、θ
≠c。cは負であってもよい。)をなして照射面へ反射
する第2直線が第1直線に続き、ランプと点Aを結ぶ直
線に対して角度2θをなして第2直線に入射する光が第
2直線との交点Cおいて、ランプからの光をその光に対
して前記角度φ1に前記角度cを2倍した角度を加えた
角度φ1 +2cをなして照射面へ反射する第3直線が
第2直線に続き、以下、ランプと点Aを結ぶ直線に対し
て角度Nθ(Nは正の整数)をなして第N直線に入射す
る光が第N直線との交点Xおいて、ランプからの光をそ
の光に対して角度φ1 +Ncをなして照射面へ反射す
る第N+1直線が第N直線に続いてなる線からなること
を特徴とする請求項1記載の焼付け露光用光源装置。
2. In a cross section that is perpendicular to the axis of the rod-shaped lamp and perpendicular to the irradiation surface, or in a cross section that includes a point lamp and is perpendicular to the irradiation surface, the reflective surface of the reflector plate has an optical axis that passes through the lamp and is perpendicular to the irradiation surface. The line representing the reflective surface directs the light from the lamp at a predetermined angle with respect to the light at a starting point A on one side of the optical axis and opposite to the irradiation surface with respect to the lamp. Light that starts from the first straight line that forms an angle of φ1 and is reflected to the outer periphery of the irradiation surface, and that enters the first straight line at an angle θ with respect to the straight line connecting the lamp and point A, reaches the intersection point B and the first straight line. and the light from the lamp is set at the predetermined angle φ1 with respect to the light.
Angle φ1 +c (where θ
≠c. c may be negative. ) and is reflected to the irradiation surface following the first straight line, and the light incident on the second straight line makes an angle 2θ with respect to the straight line connecting the lamp and point A, and the light enters the second straight line at the intersection point C and the second straight line. A third straight line follows the second straight line and reflects the light from the lamp to the irradiation surface at an angle φ1 + 2c, which is the angle φ1 plus an angle twice the angle c. When the light that enters the Nth straight line at an angle Nθ (N is a positive integer) with the straight line connecting the lamp and point A intersects with the Nth straight line, the light from the lamp is 2. The light source device for printing exposure according to claim 1, wherein the (N+1)th straight line that reflects to the irradiation surface at an angle φ1 +Nc is a line that is continuous to the Nth straight line.
【請求項3】  前記反射面を表す線が点A  B  
C・・・・Xを滑らかな曲線でつないでなることを特徴
とする請求項2記載の焼付け露光用光源装置。
3. A line representing the reflective surface is a point A B
3. The light source device for printing exposure according to claim 2, wherein C...X are connected by a smooth curve.
【請求項4】  前記反射板表面に赤外線吸収、紫外線
反射特性を有する単層又は多層コーティングを施し、コ
ールドミラーとしたことを特徴とする請求項1から3の
何れか1項記載の焼付け露光用光源装置。
4. The printing exposure device according to claim 1, wherein a single-layer or multi-layer coating having infrared absorption and ultraviolet reflection properties is applied to the surface of the reflector to form a cold mirror. Light source device.
【請求項5】  前記反射板が空冷又は水冷機構の何れ
か一方又は双方を備えていることを特徴とする請求項1
から4の何れか1項記載の焼付け露光用光源装置。
5. Claim 1, wherein the reflecting plate is equipped with either an air cooling mechanism or a water cooling mechanism, or both.
4. The light source device for printing exposure according to any one of items 4 to 4.
JP10995191A 1991-05-15 1991-05-15 Light source device for printing exposure Expired - Lifetime JP2930144B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10995191A JP2930144B2 (en) 1991-05-15 1991-05-15 Light source device for printing exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10995191A JP2930144B2 (en) 1991-05-15 1991-05-15 Light source device for printing exposure

Publications (2)

Publication Number Publication Date
JPH04337718A true JPH04337718A (en) 1992-11-25
JP2930144B2 JP2930144B2 (en) 1999-08-03

Family

ID=14523263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10995191A Expired - Lifetime JP2930144B2 (en) 1991-05-15 1991-05-15 Light source device for printing exposure

Country Status (1)

Country Link
JP (1) JP2930144B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0730194A1 (en) * 1995-03-02 1996-09-04 Agfa-Gevaert N.V. A photographic exposure device
JP2008542987A (en) * 2005-05-25 2008-11-27 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Lighting system, shelf lighting system and wall washer lighting system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0730194A1 (en) * 1995-03-02 1996-09-04 Agfa-Gevaert N.V. A photographic exposure device
JP2008542987A (en) * 2005-05-25 2008-11-27 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Lighting system, shelf lighting system and wall washer lighting system

Also Published As

Publication number Publication date
JP2930144B2 (en) 1999-08-03

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