JPH04337114A - Damping mechanism - Google Patents

Damping mechanism

Info

Publication number
JPH04337114A
JPH04337114A JP3110364A JP11036491A JPH04337114A JP H04337114 A JPH04337114 A JP H04337114A JP 3110364 A JP3110364 A JP 3110364A JP 11036491 A JP11036491 A JP 11036491A JP H04337114 A JPH04337114 A JP H04337114A
Authority
JP
Japan
Prior art keywords
magnetic bearing
fixed
radial
damper
damping mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3110364A
Other languages
Japanese (ja)
Inventor
Yoichi Kanemitsu
金光 陽一
Yuji Shirao
白尾 祐司
Kazuki Sato
一樹 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP3110364A priority Critical patent/JPH04337114A/en
Publication of JPH04337114A publication Critical patent/JPH04337114A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/04Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406Magnetic bearings
    • F16C32/0408Passive magnetic bearings
    • F16C32/0423Passive magnetic bearings with permanent magnets on both parts repelling each other
    • F16C32/0425Passive magnetic bearings with permanent magnets on both parts repelling each other for radial load mainly
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/04Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406Magnetic bearings
    • F16C32/044Active magnetic bearings
    • F16C32/0474Active magnetic bearings for rotary movement
    • F16C32/0476Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings
    • F16C32/0478Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings with permanent magnets to support radial load

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE:To effectively damp vibration in the radial direction by constituting a damping mechanism, mounted to a passive magnetic bearing of a magnetic bearing, in such a manner that fixed and movable members are connected to each other through a lamination type damper in which a damping material of plate-shaped rubber or the like and a metal are alternately laminated into a plurality of layers. CONSTITUTION:A rotor 2 is supported to a fixed part 1 by passive magnetic bearings 10, 10a in lower and upper parts and also an active type magnetic bearing 20 for controlling a position in the axial line direction of the rotor 2 is provided in a top part of this fixed part 1. A damping mechanism 30 against vibration in the radial direction is provided in the passive magnetic bearing 10 in the lower part. In the magnetic bearing thus obtained, a lamination rubber type damper 40 is interposed between movable and fixed members 32, 31, relating to an axial direction Z, to fix upper and lower surfaces of this damper 40 to the movable and fixed members 32, 31. This lamination rubber type damper 40 is constituted by respectively laminating three annular rubber plates 41 and metal plates 42 by adhesion or vulcanization so that axial diametric directional rigidity of the damper is made larger than radial directional rigidity.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、磁気軸受に発生する半
径方向の振動を減衰するための減衰機構に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a damping mechanism for damping radial vibrations occurring in a magnetic bearing.

【0002】0002

【従来の技術】かかる磁気軸受を備えた回転機械につい
て図4を参照して説明する。
2. Description of the Related Art A rotating machine equipped with such a magnetic bearing will be explained with reference to FIG.

【0003】固定体1には、ロータ2が下部及び上部の
受動磁気軸受10、10aにより半径方向の並進運動と
傾き運動とを安定化するように支持されている。また、
ロータ2の頂部には、ロータ2の軸線方向の位置を制御
するための能動磁気軸受20が設けられている。更に、
下部の受動磁気軸受10には、半径方向の振動に対する
減衰機構30が設けられている。なお、図中の符号3は
非常用軸受である。
A rotor 2 is supported on the fixed body 1 by lower and upper passive magnetic bearings 10, 10a so as to stabilize translational movement and tilting movement in the radial direction. Also,
An active magnetic bearing 20 for controlling the axial position of the rotor 2 is provided at the top of the rotor 2 . Furthermore,
The lower passive magnetic bearing 10 is provided with a damping mechanism 30 for radial vibration. In addition, the code|symbol 3 in a figure is an emergency bearing.

【0004】下部の受動磁気軸受10を例に説明すると
、固定体1側には、図示の例では4個の相互に磁極が異
なる環状の永久磁石からなる固定体側永久磁石11が設
けられている。ロータ2側には、前記永久磁石11と同
様な永久磁石12が、中立位置から偏寄量ΔZ(図1)
だけ軸方向上方に偏寄して設けられている。したがって
、永久磁石11、12の反撥力により、ロータ2を上方
に付勢する軸線方向力FZが発生する。
[0004] Taking the lower passive magnetic bearing 10 as an example, the fixed body side permanent magnet 11 is provided on the fixed body 1 side, which in the illustrated example is composed of four annular permanent magnets with mutually different magnetic poles. . On the rotor 2 side, a permanent magnet 12 similar to the permanent magnet 11 is provided with a deviation amount ΔZ (FIG. 1) from the neutral position.
This is offset upward in the axial direction. Therefore, the repulsive force of the permanent magnets 11 and 12 generates an axial force FZ that urges the rotor 2 upward.

【0005】能動磁気軸受20は、固定体1に設けられ
た電磁石21と、ロータ2に設けられた磁性体23とか
らなっており、電磁石21が磁性体23を下方へ引き付
けることにより前記軸方向力に対抗する。従って、コイ
ル22への電流の制御により軸線方向力FZを補償する
ことが出来る。なお、図4で示すような磁気軸受装置は
「1軸制御形」と呼ばれている。
The active magnetic bearing 20 consists of an electromagnet 21 provided on the fixed body 1 and a magnetic body 23 provided on the rotor 2. The electromagnet 21 attracts the magnetic body 23 downward, thereby moving the magnetic body 23 in the axial direction. resist force. Therefore, the axial force FZ can be compensated by controlling the current to the coil 22. Note that the magnetic bearing device shown in FIG. 4 is called a "single-axis control type."

【0006】[0006]

【発明が解決しようとする課題】上記の1軸制御形磁気
軸受においては、半径方向の運動については永久磁石の
磁気的な力により安定化しているが、永久磁石はロータ
2の半径方向Rにおける振動を減衰する作用を奏するも
のではない。従って、ロータ2の共振等により半径方向
に異常な振動が発生してもそれを抑制することが出来ず
、ロータ2が固定体1と接触してしまう恐れがある。
[Problems to be Solved by the Invention] In the above-mentioned single-axis control type magnetic bearing, the radial motion is stabilized by the magnetic force of the permanent magnets, but the permanent magnets are stabilized by the magnetic force of the permanent magnets. It does not have the effect of damping vibrations. Therefore, even if abnormal vibration occurs in the radial direction due to resonance of the rotor 2, it cannot be suppressed, and the rotor 2 may come into contact with the fixed body 1.

【0007】従って、1軸制御形磁気軸受によって支持
されたロータ及び/又は回転軸が安定に高速回転するこ
と保証するため、性能の良いラジアルダンパを設ける必
要がある。ここで、性能の良いラジアルダンパとは、半
径方向Rの振動の減衰が良好であり、しかも軸方向或い
はスラスト方向には変位しない性質を有するものである
[0007] Therefore, in order to ensure that the rotor and/or rotating shaft supported by the single-axis controlled magnetic bearing rotate stably and at high speed, it is necessary to provide a radial damper with good performance. Here, a radial damper with good performance is one that has good damping of vibrations in the radial direction R and has the property of not being displaced in the axial direction or thrust direction.

【0008】しかし、従来のメカニカルダンパは構造が
複雑で組立性が悪いものであった。また、渦電流ダンパ
を用いたものもあるが、低周波の振動に対する減衰特性
が悪い等の欠点があった。
However, conventional mechanical dampers have complicated structures and are difficult to assemble. There are also some that use eddy current dampers, but they have drawbacks such as poor damping characteristics against low frequency vibrations.

【0009】本発明は、上記した従来技術の問題点に鑑
みて提案されたもので、回転体の半径方向の振動を効果
的に減衰させる磁気軸受の構造の単純な減衰機構を提供
することを目的としている。
The present invention was proposed in view of the problems of the prior art described above, and aims to provide a simple damping mechanism for the structure of a magnetic bearing that effectively damps the radial vibration of a rotating body. The purpose is

【0010】0010

【課題を解決するための手段】本発明の減衰機構は、対
象物の特定方向の振動を減衰せしめる減衰機構において
、減衰機構は少なくとも1つの受動磁気軸受に取り付け
られており、該減衰機構は固定体に固着されている固定
部材と、軸線方向には固定されているが半径方向には移
動可能である可動部材とを含み、板状のゴム等の減衰材
及び金属を交互に複数積層した積層形ダンパを介して固
定部材と可動部材とを接続している。
[Means for Solving the Problems] The damping mechanism of the present invention is a damping mechanism that damps vibrations of an object in a specific direction, and the damping mechanism is attached to at least one passive magnetic bearing, and the damping mechanism is fixed to a fixed direction. It includes a fixed member that is fixed to the body, and a movable member that is fixed in the axial direction but movable in the radial direction, and is made by alternately laminating multiple layers of damping material such as plate-shaped rubber and metal. The fixed member and the movable member are connected via a shaped damper.

【0011】ここで本発明の減衰機構は、例えば、回転
体の半径方向の並進運動を安定化する受動磁気軸受と、
回転体の軸線方向の運動を安定化する能動磁気軸受とを
備えている磁気軸受に発生する半径方向の振動を減衰す
るための減衰機構として用いられるのが好ましい。
Here, the damping mechanism of the present invention includes, for example, a passive magnetic bearing that stabilizes the radial translational movement of the rotating body;
Preferably, the present invention is used as a damping mechanism for damping radial vibrations occurring in a magnetic bearing including an active magnetic bearing that stabilizes the axial movement of a rotating body.

【0012】本発明の実施に際して、前記積層ゴム形ダ
ンパの可動部材と接続される層はゴムであり、可動部材
との接続は接着或いは加硫により一体化されるのが好適
である。また、積層ゴム形ダンパの固定部材と接続され
る層は金属であり、固定部材との接続は金属対金属の接
続方式であれば特に限定を意図するものではない。
In carrying out the present invention, it is preferable that the layer of the laminated rubber type damper connected to the movable member is made of rubber, and that the connection with the movable member is integrated by adhesion or vulcanization. Further, the layer of the laminated rubber type damper connected to the fixing member is metal, and the connection with the fixing member is not particularly limited as long as it is a metal-to-metal connection method.

【0013】なお、前記積層ゴム形ダンパは各層同士を
離隔する方向の強度が比較的弱いので、減衰機構の固定
部材と可動部材との間に介装されるのみならず、回転機
械の固定体と減衰機構の可動部材との間に介装するのが
好ましい。
Note that the laminated rubber damper has relatively low strength in the direction separating the layers, so it is not only installed between the fixed member and the movable member of the damping mechanism, but also used as a fixed member of the rotating machine. It is preferable to interpose it between the movable member of the damping mechanism and the movable member of the damping mechanism.

【0014】[0014]

【作用】上記のように構成された本発明の減衰機構にお
いては、積層ゴム形ダンパは半径方向剛性に比較して軸
方向剛性が非常に大きい。そのため、減衰機構の可動部
材と固定部材との相対位置は、半径方向については容易
に変位するが、軸方向についてはほとんど変位しない。
[Operation] In the damping mechanism of the present invention constructed as described above, the laminated rubber damper has much greater axial rigidity than radial rigidity. Therefore, the relative positions of the movable member and the fixed member of the damping mechanism are easily displaced in the radial direction, but hardly displaced in the axial direction.

【0015】また、ゴムから成る複数の層を有している
ため、半径方向の変位に対して弾性的な反撥力が作用し
て、効果的な減衰作用を発揮する。すなわち、回転体に
半径方向振動が発生すると、積層ゴム形ダンパは半径方
向にのみ変形し、且つゴム層で半径方向復元力を発生し
て該半径方向振動を減衰する。そして、共振点では最大
に変形し、最大の半径方向復元力を発生して、半径方向
振動を効果的に減衰するのである。
Furthermore, since it has a plurality of layers made of rubber, an elastic repulsive force acts against displacement in the radial direction, thereby exerting an effective damping effect. That is, when radial vibration occurs in the rotating body, the laminated rubber damper deforms only in the radial direction, and generates a radial restoring force in the rubber layer to damp the radial vibration. Then, at the resonance point, it deforms to the maximum and generates the maximum radial restoring force, effectively damping radial vibration.

【0016】[0016]

【実施例】以下図1〜図3を参照して本発明の実施例を
説明する。
Embodiments An embodiment of the present invention will be described below with reference to FIGS. 1 to 3.

【0017】図1において、軸方向Zに関して可動部材
32と固定部材31と間には積層ゴム形ダンパ40が介
装されており、その上面及び下面は可動部材32、固定
部材31に固着されている。
In FIG. 1, a laminated rubber damper 40 is interposed between the movable member 32 and the fixed member 31 in the axial direction Z, and its upper and lower surfaces are fixed to the movable member 32 and the fixed member 31. There is.

【0018】この積層ゴム形ダンパ40は図2、図3に
おいて詳細に示されている。
The laminated rubber damper 40 is shown in detail in FIGS. 2 and 3.

【0019】図2において、積層ゴム形ダンパ40はそ
れぞれ3個の環状のゴム板41と金属板42とを接着或
いは加硫により積層して形成されている。なお、環状の
ゴム板41と金属板42の個数或いは層の数は3個に限
定されるものではない。
In FIG. 2, each laminated rubber damper 40 is formed by laminating three annular rubber plates 41 and three metal plates 42 by bonding or vulcanizing. Note that the number of annular rubber plates 41 and metal plates 42 or the number of layers is not limited to three.

【0020】この積層ゴム形ダンパ40は、半径方向剛
性に比較して軸方向剛性が極めて大きくなっている。従
って、軸方向Zの力FZによっては殆ど変形しない。こ
れに対して、半径方向振動に起因する半径方向の力Fr
については、図3で示すように変形する。図示の実施例
では、図2の長方形断面Aが、図3で示す長方形断面A
1に変形する。この変形の結果、積層ゴム形ダンパ40
のゴム板或いはゴム層41…の弾性により半径方向復元
力が発生し、該復元力により半径方向振動は減衰される
のである。
This laminated rubber type damper 40 has extremely high rigidity in the axial direction compared to the rigidity in the radial direction. Therefore, it is hardly deformed by the force FZ in the axial direction Z. In contrast, the radial force Fr due to radial vibration
is modified as shown in FIG. In the illustrated embodiment, the rectangular cross-section A of FIG. 2 is replaced by the rectangular cross-section A of FIG.
Transforms into 1. As a result of this deformation, the laminated rubber damper 40
A restoring force in the radial direction is generated due to the elasticity of the rubber plate or the rubber layer 41, and the radial vibration is attenuated by the restoring force.

【0021】ここで、弾性による反撥力は変形量に比例
するので、振動による半径方向の変位或いは変形が大き
ければ大きいほど、前記半径方向復元力も大きくなり、
減衰作用が向上する。従って、特に共振点においてこの
半径方向復元力が最大になって、半径方向振動を効果的
に減衰するのである。
Here, since the repulsive force due to elasticity is proportional to the amount of deformation, the greater the radial displacement or deformation due to vibration, the greater the radial restoring force.
Damping effect is improved. Therefore, this radial restoring force is at its maximum especially at the resonance point, effectively damping radial vibrations.

【0022】なお、図1において積層ゴム形ダンパ40
は可動部材32と固定部材31との間に介装されている
が、可動部材32とその上方の固定体1の部分との間に
介装しても良い。
Note that in FIG. 1, the laminated rubber damper 40
is interposed between the movable member 32 and the fixed member 31, but it may also be interposed between the movable member 32 and the portion of the fixed body 1 above it.

【0023】[0023]

【発明の効果】本発明は、以上説明したように構成され
ているので、回転体に半径方向振動が発生すると、積層
ゴム形ダンパは半径方向にのみ変形し、且つゴム層で半
径方向復元力を発生して該半径方向振動を減衰する。特
に、共振点では最大に変形し最大の半径方向復元力を発
生して、半径方向振動を効果的に減衰するのである。
Effects of the Invention Since the present invention is constructed as described above, when radial vibration occurs in the rotating body, the laminated rubber damper deforms only in the radial direction, and the rubber layer reduces the radial restoring force. is generated to damp the radial vibration. In particular, at the resonance point, it deforms to the maximum and generates the maximum radial restoring force, effectively damping radial vibration.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】本発明の一実施例を示す構成図。FIG. 1 is a configuration diagram showing an embodiment of the present invention.

【図2】積層ゴム形ダンパを示す半径方向断面図。FIG. 2 is a radial cross-sectional view showing a laminated rubber damper.

【図3】積層ゴム形ダンパの変形状態を示す半径方向断
面図。
FIG. 3 is a radial cross-sectional view showing a deformed state of the laminated rubber damper.

【図4】本発明が実施される磁気軸受装置を備えた回転
機械を示す側断面図。
FIG. 4 is a side sectional view showing a rotating machine equipped with a magnetic bearing device in which the present invention is implemented.

【符号の説明】 1・・・固定体 2・・・ロータ 10、10a・・・受動磁気軸受 11、12・・・永久磁石 20・・・能動磁気軸受 30・・・減衰機構 31・・・固定部材 32・・・可動部材 40・・・積層ゴム形ダンパ 41・・・ゴム板 42・・・金属板 FZ・・・軸方向力 ΔZ・・・偏寄量[Explanation of symbols] 1...Fixed body 2...Rotor 10, 10a...Passive magnetic bearing 11, 12...Permanent magnet 20... Active magnetic bearing 30... Damping mechanism 31...Fixing member 32...Movable member 40...Laminated rubber damper 41...Rubber plate 42...Metal plate FZ...Axial force ΔZ... bias amount

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  対象物の特定方向の振動を減衰せしめ
る減衰機構において、減衰機構は少なくとも1つの受動
磁気軸受に取り付けられており、該減衰機構は固定体に
固着されている固定部材と、軸線方向には固定されてい
るが半径方向には移動可能である可動部材とを含み、板
状のゴム等の減衰材及び金属を交互に複数積層した積層
形ダンパを介して固定部材と可動部材とを接続したこと
を特徴とする磁気軸受の減衰機構。
Claims: 1. A damping mechanism for damping vibrations of an object in a specific direction, the damping mechanism being attached to at least one passive magnetic bearing, and the damping mechanism having a fixed member fixed to a fixed body and an axis The fixed member and the movable member are fixed in one direction but movable in the radial direction. A magnetic bearing damping mechanism characterized by connecting.
JP3110364A 1991-05-15 1991-05-15 Damping mechanism Pending JPH04337114A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3110364A JPH04337114A (en) 1991-05-15 1991-05-15 Damping mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3110364A JPH04337114A (en) 1991-05-15 1991-05-15 Damping mechanism

Publications (1)

Publication Number Publication Date
JPH04337114A true JPH04337114A (en) 1992-11-25

Family

ID=14533920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3110364A Pending JPH04337114A (en) 1991-05-15 1991-05-15 Damping mechanism

Country Status (1)

Country Link
JP (1) JPH04337114A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2759820A1 (en) * 1997-02-20 1998-08-21 Gec Alsthom Moteurs Sa METHOD FOR REDUCING THE NOISE OF A ROTATING ELECTRIC MACHINE, DEVICE FOR HANGING A STATOR OF A ROTATING ELECTRIC MACHINE TO IMPLEMENT THE METHOD, ROTATING ELECTRIC MACHINE PROVIDED WITH SUCH A DEVICE
GB2621343A (en) * 2022-08-09 2024-02-14 Leybold Gmbh Vacuum pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2759820A1 (en) * 1997-02-20 1998-08-21 Gec Alsthom Moteurs Sa METHOD FOR REDUCING THE NOISE OF A ROTATING ELECTRIC MACHINE, DEVICE FOR HANGING A STATOR OF A ROTATING ELECTRIC MACHINE TO IMPLEMENT THE METHOD, ROTATING ELECTRIC MACHINE PROVIDED WITH SUCH A DEVICE
EP0860932A1 (en) * 1997-02-20 1998-08-26 Gec Alsthom Moteurs Sa Device and method for suspending the stator of a rotary electric machine
GB2621343A (en) * 2022-08-09 2024-02-14 Leybold Gmbh Vacuum pump

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