JPH04329184A - Optical information recording medium - Google Patents

Optical information recording medium

Info

Publication number
JPH04329184A
JPH04329184A JP3124643A JP12464391A JPH04329184A JP H04329184 A JPH04329184 A JP H04329184A JP 3124643 A JP3124643 A JP 3124643A JP 12464391 A JP12464391 A JP 12464391A JP H04329184 A JPH04329184 A JP H04329184A
Authority
JP
Japan
Prior art keywords
optical
recording layer
recording medium
layer
optical information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP3124643A
Other languages
Japanese (ja)
Inventor
Mitsuru Kobayashi
充 小林
Isao Morimoto
勲 森本
Masaru Suzuki
勝 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd filed Critical Asahi Chemical Industry Co Ltd
Priority to JP3124643A priority Critical patent/JPH04329184A/en
Publication of JPH04329184A publication Critical patent/JPH04329184A/en
Withdrawn legal-status Critical Current

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  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Abstract

PURPOSE:To obtain a phase change-type optical recording medium capable of recording and regenerating information at high speed and high packing density and deleting information rapidly with excellent repeatability properties by providing an optical recording layer consisting of a blend of a phase change recording material which changes a phase between a crystal material and an amorphous material reversibly and an inorganic dielectric on a transparent substrate. CONSTITUTION:The subject optical information recording medium consists of an optical recording layer 3 provided on a transparent substrate 1, and records and deletes information through a reversible change of an optical constant by irradiation of the optical recording layer 3 with an energy beam. The optical recording layer is composed of a blend of a phase change recording material 7 which changes reversibly between a crystal material and an amorphous material such as Sb-Te-Ge. The content of the phase change recording material 7 in the optical recording layer 3 is 20 to 80% based on the capacity of the layer 3. Thus the migration of the materials in the optical recording layer due to the repeated process of recording and deletion is significantly reduced and the reliability of repeatedly recorded data is remarkably enhanced.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は新規な光学情報記録媒体
、さらに詳しくは、光や熱などを用いて光学的に情報を
、高速、高密度に記録及び再生することができ、かつ高
速に消去しうる上、繰り返し特性の優れた光学情報記録
媒体に関するものである。
[Industrial Application Field] The present invention is a novel optical information recording medium, and more specifically, it is capable of optically recording and reproducing information at high speed and high density using light, heat, etc. The present invention relates to an optical information recording medium that is erasable and has excellent repeatability.

【0002】0002

【従来の技術】従来、レーザー光などのエネルギービー
ムの照射によって、記録層に情報の記録を行う方法につ
いては、種々の方法が知られているが、その中でも記録
層における結晶質と非結晶質との間の可逆的相変化を利
用する方法は、磁気記録体に比べて高密度記録及び高速
消去が可能である上、レーザー光のパワーを変化させる
だけで古い情報を消去しながら同時に新たな情報を記録
する、いわゆるオーバーライトが可能であるなどの利点
を有している。
[Prior Art] Conventionally, various methods have been known for recording information in a recording layer by irradiation with an energy beam such as a laser beam. The method that utilizes the reversible phase change between It has the advantage of being able to record information, so-called overwriting.

【0003】このようなオーバーライト可能な相変化型
光学情報記録媒体における記録材料としては、低融点で
かつレーザー光の吸収効率の高いIn‐Se系合金〔「
アプライド・フィジクス・レターズ(Appl.Phy
s.Lett)」第50巻、第667ページ(1987
年)〕、In‐Sb‐Te合金〔「アプライド・フィジ
クス・レターズ(Appl.Phys.Lett)」第
50巻、第16ページ(1987年)〕、Ge‐Te‐
Sb合金(特開昭62−53886号公報)などのカル
コゲン合金が主に用いられている。
As a recording material for such an overwritable phase-change optical information recording medium, an In-Se alloy ["
Applied Physics Letters (Appl.Phys.
s. Lett) Volume 50, Page 667 (1987
], In-Sb-Te alloy [Appl. Phys. Lett Vol. 50, p. 16 (1987)], Ge-Te-
Chalcogen alloys such as Sb alloy (Japanese Unexamined Patent Publication No. 62-53886) are mainly used.

【0004】これらのカルコゲン合金を記録材料として
用いた相変化型光学情報記録媒体は、光学コントラスト
や光学吸収率の増大、記録消去時の熱による基板の変形
防止、あるいは光学記録層の酸化防止などの目的で、光
学記録層と共に金属又は半金属の酸化物、炭化物、フッ
化物、硫化物、窒化物及びこれらの混合物などから成る
保護層や金属から成る反射層を順次積層した多層構造の
ものが用いられてきた。
[0004] Phase change optical information recording media using these chalcogen alloys as recording materials have various advantages such as increasing optical contrast and optical absorption, preventing deformation of the substrate due to heat during erasing records, and preventing oxidation of the optical recording layer. For the purpose of has been used.

【0005】しかしながら、このような従来の光学情報
記録媒体においては、オーバーライトによる記録・消去
を繰り返すと、この記録・消去のパターンに対応した熱
履歴から生じる非対称な熱膨張や表面エネルギー差によ
り、トラック方向に沿って、光学記録層の物質が移動す
る現象、すなわち、光学記録層が層状の連続膜として形
成されているために、記録時に記録層が溶解した際に、
機械的あるいは物理的ななんらかの力が働くと該記録層
を形成している物質が、ディスク表面に平行な方向に容
易に移動するという現象が生じるのを免れず、その結果
、オーバーライトによる記録・消去を繰り返すと、光学
記録層の物質が局部的に周囲に分散してしまい記録・消
去が不可能になるという欠点があった。
However, in such conventional optical information recording media, when recording and erasing by overwriting are repeated, asymmetric thermal expansion and surface energy differences occur due to thermal history corresponding to the recording and erasing patterns. A phenomenon in which the substance of the optical recording layer moves along the track direction, that is, when the optical recording layer is formed as a layered continuous film, when the recording layer dissolves during recording,
When some mechanical or physical force is applied, the material forming the recording layer inevitably moves in a direction parallel to the disk surface, and as a result, recording and recording due to overwriting occur. If erasing is repeated, the substance of the optical recording layer is locally dispersed to the surrounding area, making recording and erasing impossible.

【0006】[0006]

【発明が解決しようとする課題】本発明は、このような
従来の相変化型光学情報記録媒体が有する欠点を克服し
、情報を高速、高密度に記録及び再生することができ、
かつ高速に消去しうる上、オーバーライトにおける繰り
返し特性の優れた相変化型光学情報記録媒体を提供する
ことを目的としてなされたものである。
SUMMARY OF THE INVENTION The present invention overcomes the drawbacks of such conventional phase change optical information recording media, and enables information to be recorded and reproduced at high speed and high density.
The purpose of this invention is to provide a phase change optical information recording medium that can be erased at high speed and has excellent repeatability in overwriting.

【0007】[0007]

【課題を解決するための手段】本発明者らは、オーバー
ライトにおける繰り返し特性の優れた相変化型光学情報
記録媒体を開発すべく鋭意研究を重ねた結果、光学記録
層に相変化記録材料と無機誘電体との混合物を用いるこ
とにより、該光学記録層の物質移動を防止することがで
き、前記目的を達成しうることを見い出し、この知見に
基づいて本発明を完成するに至った。
[Means for Solving the Problems] As a result of intensive research to develop a phase change type optical information recording medium with excellent repetition characteristics in overwriting, the present inventors have discovered that a phase change recording material is used in the optical recording layer. It has been discovered that by using a mixture with an inorganic dielectric material, mass transfer in the optical recording layer can be prevented and the above object can be achieved, and the present invention has been completed based on this knowledge.

【0008】すなわち、本発明は透明基板上に光学記録
層を設け、該光学記録層にエネルギービームを照射する
ことにより、その光学定数を可逆的に変化させ、情報を
記録及び消去する光学情報記録媒体において、前記光学
記録層が、結晶質と非結晶質との間で可逆的に相変化す
る相変化記録材料と無機誘電体との混合物から成ること
を特徴とする光学情報記録媒体を提供するものである。
That is, the present invention provides an optical information recording method in which an optical recording layer is provided on a transparent substrate, and the optical constants of the optical recording layer are reversibly changed by irradiating the optical recording layer with an energy beam to record and erase information. Provided is an optical information recording medium, wherein the optical recording layer is made of a mixture of a phase change recording material whose phase changes reversibly between crystalline and amorphous states and an inorganic dielectric. It is something.

【0009】本発明の光学情報記録媒体においては、光
学記録層として相変化記録材料と無機誘電体との混合物
から成るものが用いられる。相変化記録材料としては、
結晶質と非結晶質との間で可逆的に相変化する材料、例
えばSb‐Te‐Ge、In‐Sb‐Te、In‐Se
‐Tl、Ge‐Te‐Sn‐Au、Sb‐Te‐Ge‐
PdなどのTe又はSeをベースとする合金が好ましく
挙げられる。
In the optical information recording medium of the present invention, an optical recording layer made of a mixture of a phase change recording material and an inorganic dielectric material is used. As a phase change recording material,
Materials that undergo a reversible phase change between crystalline and amorphous states, such as Sb-Te-Ge, In-Sb-Te, In-Se
-Tl, Ge-Te-Sn-Au, Sb-Te-Ge-
Preferably mentioned are alloys based on Te or Se, such as Pd.

【0010】また無機誘電体としては、例えばSiO2
、SiO、Ta2O5、ZrO2、BeO、MgO、A
l2O3、CaO、Sc2O3、TiO2、MnO、C
oO、NiO、ZnO、MoO2、CeO2、Sm2O
3などの金属酸化物、Si3N4、AlN、ZrNなど
の金属窒化物、ZnS、CdSなどの金属硫化物、Mg
F2などの金属フッ化物などが好ましく挙げられる。こ
れらの無機誘電体はそれぞれ単独で用いてもよいし、2
種以上を組み合わせて用いてもよく、また、所望により
ポリ塩化ビニル、ポリイミド、ポリエチレンなどの有機
材料と組み合わせて用いてもよい。
[0010] Also, as an inorganic dielectric material, for example, SiO2
, SiO, Ta2O5, ZrO2, BeO, MgO, A
l2O3, CaO, Sc2O3, TiO2, MnO, C
oO, NiO, ZnO, MoO2, CeO2, Sm2O
Metal oxides such as 3, metal nitrides such as Si3N4, AlN, ZrN, metal sulfides such as ZnS, CdS, Mg
Preferred examples include metal fluorides such as F2. Each of these inorganic dielectrics may be used alone, or two
More than one species may be used in combination, and if desired, it may be used in combination with an organic material such as polyvinyl chloride, polyimide, or polyethylene.

【0011】前記の相変化記録材料と無機誘電体との混
合物から成る光学記録層において、該記録材料の占める
体積比率(以下充てん率という)は20〜80%の範囲
にあるのが望ましい。この比率が20%未満では記録層
の記録前後の減衰係数Kの差が小さく、得られる光学情
報記録媒体の光変調度(コントラスト)が不十分となる
おそれがあるし、80%を超えると該記録材料の物質移
動を抑制することができず、本発明の目的が十分に達せ
られなくなるおそれが生じる。
In the optical recording layer made of the mixture of the phase change recording material and the inorganic dielectric, the volume ratio occupied by the recording material (hereinafter referred to as filling factor) is preferably in the range of 20 to 80%. If this ratio is less than 20%, the difference in the attenuation coefficient K of the recording layer before and after recording is small, and the resulting optical information recording medium may have insufficient optical modulation degree (contrast). There is a possibility that the object of the present invention cannot be fully achieved because the mass transfer of the recording material cannot be suppressed.

【0012】この光学記録層の形成方法については特に
制限はなく、従来薄膜の形成に慣用されている方法、例
えばスパッタリング法、真空蒸着法、CVD法、スピン
コート法などいずれの方法も用いることができるが、こ
れらの中でスパッタリング法、例えば無機誘電体及び相
変化記録材料の共スパッタリングや、それらの混合ター
ゲットによるスパッタリングなどの方法が好適である。
[0012] There are no particular restrictions on the method of forming this optical recording layer, and any method conventionally used for forming thin films, such as sputtering, vacuum evaporation, CVD, or spin coating, can be used. However, among these methods, sputtering methods, such as co-sputtering of an inorganic dielectric and a phase change recording material, or sputtering using a mixed target thereof, are preferable.

【0013】本発明の光学情報記録媒体の層構成は目的
とする用途により異なるが、透明基板上に光学記録層単
層のみを設けたものを使用することも可能である。しか
し、実際ディスクとして使用する場合、光学特性特に光
変調度(コントラスト)を大きくする必要があるために
、該光学記録層の両面に保護層を設けた構造のものが望
ましい。この場合、干渉効果や光学特性、熱特性などを
考慮して光学記録層及び保護層の膜厚を適宜決めればよ
い。
The layer structure of the optical information recording medium of the present invention differs depending on the intended use, but it is also possible to use one in which only a single optical recording layer is provided on a transparent substrate. However, when actually used as a disc, it is necessary to increase the optical properties, particularly the degree of optical modulation (contrast), so it is desirable to have a structure in which protective layers are provided on both sides of the optical recording layer. In this case, the thicknesses of the optical recording layer and the protective layer may be determined as appropriate, taking into account interference effects, optical properties, thermal properties, and the like.

【0014】さらに、光学特性を向上させる目的で最上
部に金属などの反射層を設けてもよい。この反射層の上
には、膜の保護と強化のために、例えばウレタン系、ア
クリル系、シリコーン系、ポリエステル系などの紫外線
硬化樹脂層を設けることが望ましい。
Furthermore, a reflective layer made of metal or the like may be provided on the top for the purpose of improving optical characteristics. It is desirable to provide an ultraviolet curing resin layer, such as urethane-based, acrylic-based, silicone-based, or polyester-based resin, on the reflective layer in order to protect and strengthen the film.

【0015】前記保護層の材料としては、例えばSiO
2、SiO、Ta2O5、ZrO2などの金属酸化物、
Si3N4、AlNなどの金属窒化物、ZnSなどの金
属硫化物、MgF2などの金属フツ化物及びこれらの混
合物、さらにはポリ塩化ビニル、ポリイミド、ポリエチ
レンなどの有機材料などが挙げられる。
[0015] As the material of the protective layer, for example, SiO
2. Metal oxides such as SiO, Ta2O5, ZrO2,
Examples include metal nitrides such as Si3N4 and AlN, metal sulfides such as ZnS, metal fluorides such as MgF2, and mixtures thereof, as well as organic materials such as polyvinyl chloride, polyimide, and polyethylene.

【0016】また、反射層の材料としては、例えばAl
、Cr、Ni、Au、Tiなどの金属及びこれらの合金
などが用いられる。
[0016] Also, as a material for the reflective layer, for example, Al
, Cr, Ni, Au, Ti, and alloys thereof.

【0017】本発明の光学情報記録媒体に用いられる透
明基板については特に制限はなく、従来光ディスクの基
板として慣用されているものを用いることができるが、
光学的特性が良好で機械的強度が大きく、かつ寸法安定
性に優れるなどの点から、ポリカーボネートやガラスな
どが好適である。
There are no particular restrictions on the transparent substrate used in the optical information recording medium of the present invention, and those conventionally used as substrates for optical discs can be used.
Polycarbonate, glass, and the like are preferred because they have good optical properties, high mechanical strength, and excellent dimensional stability.

【0018】図1は、本発明の光学情報記録媒体の層構
成の1例を示す断面図であって、透明基板1の上に、下
層保護層2、記録材料と無機誘電体との混合物から成る
光学記録層3、上層保護層4、反射層5及び紫外線硬化
樹脂層6が順次積層された構造を示す。
FIG. 1 is a cross-sectional view showing an example of the layer structure of the optical information recording medium of the present invention, in which a transparent substrate 1 is provided with a lower protective layer 2 made of a mixture of a recording material and an inorganic dielectric material. It shows a structure in which an optical recording layer 3, an upper protective layer 4, a reflective layer 5, and an ultraviolet curing resin layer 6 are sequentially laminated.

【0019】[0019]

【作用】光学記録層を、記録材料と無機誘電体との混合
物を用いて形成することにより、該光学記録層は大きく
分けて次の2つの形態をとる。その1つは、(1)図2
に示すように、記録材料7から成る多数のクラスター又
は微粒子状のものが無機誘電体8中に分散された形態で
ある。これは充てん率が小さい場合に多くみられる。
[Operation] By forming the optical recording layer using a mixture of a recording material and an inorganic dielectric, the optical recording layer can be roughly divided into the following two forms. One of them is (1) Figure 2
As shown in FIG. 2, a large number of clusters or fine particles of the recording material 7 are dispersed in the inorganic dielectric material 8. This often occurs when the filling rate is small.

【0020】他方は、(2)充てん率が大きい場合にみ
られるもので、図3に示すように前記とは逆で、記録材
料7中に無機誘電体8がクラスター又は微粒子状で分散
された状態である。
The other case is (2) which occurs when the filling ratio is large, and as shown in FIG. state.

【0021】これらの中間的なものとして、(3)例え
ば図4に示すようにアメーバ状に連なった記録材料7の
隙間に、無機誘電体8が充てんされた形態などもありう
る。
As an intermediate between these, (3) for example, as shown in FIG. 4, there may be a form in which the gaps between the recording materials 7 arranged in an amoeba-like manner are filled with an inorganic dielectric material 8.

【0022】前記(1)の形態においては、光学記録層
が記録材料の融点以上に加熱されても、たがいに分離独
立した微小領域でのみ融解するので記録材料の物質移動
は起こらない。また、前記(2)及び(3)の形態にお
いても、融解部分はつながってはいるが分散された、あ
るいは隙間にある無機誘電体が該記録材料の流動に対す
る抵抗として働き、記録材料の物質移動が妨げられる。
In the embodiment (1) above, even if the optical recording layer is heated to a temperature higher than the melting point of the recording material, it melts only in minute regions that are separated from each other, so that no mass transfer of the recording material occurs. Furthermore, in the above embodiments (2) and (3), although the melted portions are connected, the inorganic dielectric material that is dispersed or in the gaps acts as resistance to the flow of the recording material, causing mass transfer of the recording material. is hindered.

【0023】[0023]

【実施例】次に実施例により本発明をさらに詳細に説明
するが、本発明はこれらの例によりなんら限定されるも
のではない。
EXAMPLES Next, the present invention will be explained in more detail with reference to Examples, but the present invention is not limited to these Examples in any way.

【0024】実施例1 厚さ1.2mmのポリカーボネートディスク基板上に、
以下に示す手順で各層を形成した。使用したスパッタ装
置の概略を図5に示す。
Example 1 On a polycarbonate disk substrate with a thickness of 1.2 mm,
Each layer was formed according to the procedure shown below. FIG. 5 shows an outline of the sputtering apparatus used.

【0025】まず、ZnSから成るターゲットを用い、
RFスパッタリング法により、厚さ100nmの保護層
を形成し、次いでこの保護層の上に、相変化記録材料と
してのSb‐Te‐Ge系合金を、無機誘電体としての
ZnSを共スパッタ(両者のレート比1:1)して、厚
さ120nmの光学記録層を形成した。
First, using a target made of ZnS,
A protective layer with a thickness of 100 nm was formed by RF sputtering, and then on this protective layer, an Sb-Te-Ge alloy as a phase change recording material and ZnS as an inorganic dielectric were co-sputtered (both were sputtered). A rate ratio of 1:1) was used to form an optical recording layer with a thickness of 120 nm.

【0026】次に、この光学記録層の上に、前記と同様
にして厚さ150nmのZnSから成る保護層を形成し
たのち、この上に厚さ100nmのAl合金の反射層を
形成し、次いでその上に紫外線硬化樹脂をスピンコート
法により、5nmの厚さに塗布し、紫外線硬化させるこ
とによって本発明の光学情報記録媒体を作製した(層構
成A)。
Next, on this optical recording layer, a protective layer made of ZnS with a thickness of 150 nm was formed in the same manner as described above, and then a reflective layer of Al alloy with a thickness of 100 nm was formed on this. The optical information recording medium of the present invention was prepared by applying an ultraviolet curable resin thereon to a thickness of 5 nm by spin coating and curing it with ultraviolet rays (layer structure A).

【0027】また、比較のために、従来使用されている
光学記録層が連続構造の光学情報記録媒体を、前記と同
じ成膜装置・方法を用いて、基板側から順にZnSを1
50nm、Sb‐Te‐Ge合金を20nm、ZnSを
20nm、Al合金の反射層を100nm、紫外線硬化
樹脂層を5μmの厚さで順次積層させたものを用意した
(層構成B)。
For comparison, a conventionally used optical information recording medium having a continuous optical recording layer was coated with ZnS one by one from the substrate side using the same film forming apparatus and method as described above.
50 nm thick, a 20 nm thick Sb-Te-Ge alloy layer, a 20 nm thick ZnS layer, a 100 nm thick Al alloy reflective layer, and a 5 μm thick ultraviolet curing resin layer were prepared (layer structure B).

【0028】これらの2種の光学情報記録媒体を、静止
した状態で波長830nmのレーザー光を照射すること
により、繰り返し特性を評価した。評価は、レーザー光
の発光時間を20nsecから60μsecまでレーザ
ー光のパワーは1mWから20mWまでの範囲内で任意
に変えることにより行った。この評価結果を図6に示す
。図6におけるそれぞれの曲線のうち、上側の曲線が結
晶状態すなわち消去状態の反射率に対応し、下側の曲線
が非晶質状態すなわち記録状態の反射率に対応しており
、それぞれの反射率の差が再生信号の信号対雑音比(C
/N比)に比例する。図6から分かるように、どちらの
層構造においても、記録状態の反射率及び消去状態の反
射率ともに106回まで変化がない。
These two types of optical information recording media were repeatedly irradiated with a laser beam having a wavelength of 830 nm to evaluate their characteristics in a stationary state. The evaluation was performed by arbitrarily changing the emission time of the laser beam from 20 nsec to 60 μsec and the power of the laser beam within the range of 1 mW to 20 mW. The results of this evaluation are shown in FIG. Among the curves in FIG. 6, the upper curve corresponds to the reflectance in the crystalline state, that is, the erased state, and the lower curve corresponds to the reflectance in the amorphous state, that is, the recorded state. The difference between the two is the signal-to-noise ratio (C
/N ratio). As can be seen from FIG. 6, in both layer structures, there is no change in the reflectance in the recorded state and the reflectance in the erased state up to 106 times.

【0029】次に、直径130mm、厚さ1.2mmで
1.6μmのピッチの溝があらかじめ設けられているポ
リカーボネートディスク基板上に、同様の2種の層構成
をもつ光学情報記録媒体を作成し、これらを回転させな
がら、動的な測定を行った。線速は約7.5m/sとし
、記録周波数3.7MHz、記録パルス巾90nsec
のオーバーライトを繰り返した。記録パワー及び消去パ
ワーはそれぞれ19mW及び7mWを用いた。
Next, an optical information recording medium having a similar two-layer structure was created on a polycarbonate disk substrate on which grooves with a diameter of 130 mm, a thickness of 1.2 mm, and a pitch of 1.6 μm were previously provided. We performed dynamic measurements while rotating these. The linear velocity was approximately 7.5 m/s, the recording frequency was 3.7 MHz, and the recording pulse width was 90 nsec.
Repeated overwriting. The recording power and erasing power were 19 mW and 7 mW, respectively.

【0030】図7及び図8に、それぞれ従来構造の光学
情報記録媒体の結果及び本発明の光学情報記録媒体の結
果を示す。これらの図から分るように、従来構造の光学
情報記録媒体は繰り返し回数105回から、光学記録層
の物質移動による膜厚の変化に対応して、再生信号振幅
の低下及びノイズの増大によってC/N比(信号対雑音
比)の低下が始まるのに対し、本発明の光学情報記録媒
体は106回までC/N比の変化もなく、従来構造のも
のに比べ10倍以上繰り返し特性が向上している。
FIGS. 7 and 8 show the results of the conventional optical information recording medium and the optical information recording medium of the present invention, respectively. As can be seen from these figures, in the optical information recording medium of the conventional structure, from 105 repetitions onwards, the reproduction signal amplitude decreases and noise increases, corresponding to changes in film thickness due to mass transfer in the optical recording layer. The C/N ratio (signal-to-noise ratio) begins to decline, whereas the optical information recording medium of the present invention has no change in the C/N ratio until 106 times, and its repetition characteristics are improved by more than 10 times compared to those with a conventional structure. are doing.

【0031】実施例2 実施例1と同様な実験を記録層を変えて行った。記録層
の成膜方法は無機誘電体(ZnS)と相変化記録材料(
Sb‐Te‐Ge合金)との混合ターゲットのRFスパ
ッタリングにより行った。
Example 2 An experiment similar to Example 1 was conducted with different recording layers. The recording layer is formed using an inorganic dielectric (ZnS) and a phase change recording material (
This was done by RF sputtering of a mixed target with Sb-Te-Ge alloy).

【0032】光学情報記録媒体として、基板側から順に
ZnSを180nm、記録層(Sb‐Te‐Ge合金と
ZnSとの混合層)を160nm、ZnSを24nm、
Al合金の反射層を100nm、紫外線硬化樹脂層を5
μmの厚さに順次積層したものを用意した。この実験で
も、実施例1とほぼ同様な結果が得られた。
As an optical information recording medium, in order from the substrate side, ZnS is 180 nm thick, the recording layer (mixed layer of Sb-Te-Ge alloy and ZnS) is 160 nm thick, ZnS is 24 nm thick,
The reflective layer of Al alloy is 100 nm thick, and the ultraviolet curing resin layer is 5 nm thick.
A layer was prepared in which layers were sequentially stacked to a thickness of μm. In this experiment, almost the same results as in Example 1 were obtained.

【0033】[0033]

【発明の効果】本発明の光学情報記録媒体は、光学記録
層に相変化記録材料と無機誘電体との混合物を用いたも
のであって、記録・消去の繰り返しによる光学記録層の
物質移動が大幅に低減され、繰り返しによる記録データ
ーの信頼性が、従来構造のものに比べて著しく高い。
Effects of the Invention The optical information recording medium of the present invention uses a mixture of a phase change recording material and an inorganic dielectric material in the optical recording layer, and the material movement in the optical recording layer due to repeated recording and erasing is prevented. The reliability of recorded data is significantly higher than that of conventional structures.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】  本発明の光学情報記録媒体の層構成の1例
を示す断面図。
FIG. 1 is a cross-sectional view showing an example of the layer structure of the optical information recording medium of the present invention.

【図2】  本発明の光学情報記録媒体における光学記
録層の形態の1例を示す模式図。
FIG. 2 is a schematic diagram showing one example of the form of the optical recording layer in the optical information recording medium of the present invention.

【図3】  本発明の光学情報記録媒体における光学記
録層の形態の異なった例を示す模式図。
FIG. 3 is a schematic diagram showing different examples of the configuration of the optical recording layer in the optical information recording medium of the present invention.

【図4】  本発明の光学情報記録媒体における光学記
録層の形態の異なった例を示す模式図。
FIG. 4 is a schematic diagram showing examples of different forms of the optical recording layer in the optical information recording medium of the present invention.

【図5】  本発明の実施例で用いたスパッタ装置の説
明図。
FIG. 5 is an explanatory diagram of a sputtering apparatus used in an example of the present invention.

【図6】  実施例1における静的繰り返し特性の評価
結果を示すグラフ。
FIG. 6 is a graph showing the evaluation results of static repetition characteristics in Example 1.

【図7】  実施例1における従来構造の光学情報記録
媒体の動的繰り返し特性の評価結果を示すグラフ。
FIG. 7 is a graph showing the evaluation results of the dynamic repetition characteristics of the optical information recording medium with the conventional structure in Example 1.

【図8】  実施例1における本発明の光学情報記録媒
体の動的繰り返し特性の評価結果を示すグラフ。
FIG. 8 is a graph showing the evaluation results of the dynamic repetition characteristics of the optical information recording medium of the present invention in Example 1.

【符号の説明】[Explanation of symbols]

1  透明基板 2  下層保護層 3  光学記録層 4  上層保護層 5  反射層 6  紫外線硬化樹脂層 7  相変化記録材料 8  無機誘電体 9  基板ホルダー 10  ベルジャー 1 Transparent substrate 2 Lower protective layer 3 Optical recording layer 4 Upper protective layer 5 Reflective layer 6 Ultraviolet curing resin layer 7 Phase change recording material 8 Inorganic dielectric 9 Board holder 10 Bell jar

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】  透明基板上に光学記録層を設け、該光
学記録層にエネルギービームを照射することにより、そ
の光学定数を可逆的に変化させ、情報及び消去する光学
情報記録媒体において、前記光学記録層が結晶質と非結
晶質との間で可逆的に相変化する相変化記録材料と無機
誘電体との混合物から成ることを特徴とする光学情報記
録体。
1. An optical information recording medium in which an optical recording layer is provided on a transparent substrate, and the optical constants of the optical recording layer are reversibly changed by irradiating the optical recording layer with an energy beam to erase information. 1. An optical information recording medium, wherein the recording layer is made of a mixture of a phase change recording material whose phase changes reversibly between crystalline and amorphous states and an inorganic dielectric.
【請求項2】  光学記録層が、相変化記録材料を容量
に基づき20〜80%の割合で含有するものである請求
項1記載の光学情報記録媒体。
2. The optical information recording medium according to claim 1, wherein the optical recording layer contains a phase change recording material in a proportion of 20 to 80% based on capacity.
【請求項3】  無機誘電体がSiO2、SiO、Ta
2O5、ZrO2、BeO、MgO、Al2O3、Ca
O、SC2O3、TiO2、MnO、CoO、NiO、
ZnO、MoO2、CeO2及びSm2O3から成る金
属酸化物、Si3N4、AlN及びZrNから成る金属
窒化物、ZnS及びCdSから成る金属硫化物並びにM
gF2の金属フッ化物の中から選ばれた少なくとも1種
である請求項1又は2記載の光学情報記録媒体。
[Claim 3] The inorganic dielectric is SiO2, SiO, Ta.
2O5, ZrO2, BeO, MgO, Al2O3, Ca
O, SC2O3, TiO2, MnO, CoO, NiO,
Metal oxides consisting of ZnO, MoO2, CeO2 and Sm2O3, metal nitrides consisting of Si3N4, AlN and ZrN, metal sulfides consisting of ZnS and CdS and M
The optical information recording medium according to claim 1 or 2, wherein the optical information recording medium is at least one selected from metal fluorides of gF2.
JP3124643A 1991-04-30 1991-04-30 Optical information recording medium Withdrawn JPH04329184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3124643A JPH04329184A (en) 1991-04-30 1991-04-30 Optical information recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3124643A JPH04329184A (en) 1991-04-30 1991-04-30 Optical information recording medium

Publications (1)

Publication Number Publication Date
JPH04329184A true JPH04329184A (en) 1992-11-17

Family

ID=14890484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3124643A Withdrawn JPH04329184A (en) 1991-04-30 1991-04-30 Optical information recording medium

Country Status (1)

Country Link
JP (1) JPH04329184A (en)

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