JPH0432343Y2 - - Google Patents
Info
- Publication number
- JPH0432343Y2 JPH0432343Y2 JP1984158687U JP15868784U JPH0432343Y2 JP H0432343 Y2 JPH0432343 Y2 JP H0432343Y2 JP 1984158687 U JP1984158687 U JP 1984158687U JP 15868784 U JP15868784 U JP 15868784U JP H0432343 Y2 JPH0432343 Y2 JP H0432343Y2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic card
- holder
- article
- card
- card reader
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000605 extraction Methods 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 7
- 230000003028 elevating effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
Description
【考案の詳細な説明】
産業上の利用分野
本考案は、搬送しようとする物品に対して、そ
の行先（目的地）の指示を行なう行先指示装置に
関するものである。[Detailed Description of the Invention] Industrial Application Field The present invention relates to a destination indicating device for indicating the destination of an article to be transported.
従来の技術
例えば、ウエハプロセスにおけるウエハ工程進
歩管理のために、各工程ごとにカードリーダで磁
気カードにリード、ライトを行なう必要がある。
そして従来では、リード、ライトを入手作業によ
り行なつていた。2. Description of the Related Art For example, in order to manage the progress of a wafer process in a wafer process, it is necessary to read and write to a magnetic card using a card reader for each process.
Conventionally, reading and writing were performed by acquisition operations.
考案が解決しようとする問題点
この入手による従来形成によると、手間や人件
費の問題のほかに作業者の発生する塵埃などがウ
エハに付着して該ウエハに悪影響を及ぼすことに
なる。Problems to be Solved by the Invention According to the conventional formation using this method, in addition to the problems of labor and labor costs, the dust generated by the workers adheres to the wafer and has an adverse effect on the wafer.
問題を解決するための手段
上記問題点を解決するために本考案における行
先指示装置は、物品の上面に載置自在なホルダー
に対して、上面に沿つた方向から磁気カードを差
し込み抜出し自在とし、物品支持部の上方に、昇
降および回転自在で且つ差し込み抜出し方向に移
動自在な吸着具を設け、前記物品支持部の上方側
方に、カードリーダと、このカードリーダの前方
に位置する磁気カード搬入出装置とを設けてい
る。Means for Solving the Problems In order to solve the above problems, the destination indicating device of the present invention has a holder that can be placed on the top surface of an article, and a magnetic card can be freely inserted and extracted from the top surface of the holder, A suction device that can be raised and lowered and rotated freely and movable in the insertion/extraction direction is provided above the article support part, and a card reader and a magnetic card carry-in device located in front of the card reader are provided above and to the side of the article support part. An output device is provided.
作 用
かかる構成によると、物品支持部上の物品に対
して吸着具を下降させて磁気カードを吸着し、そ
して吸着具を抜き出し方向に移動させることによ
りホルダーに対して磁気カードを抜き出し得る。
次いで吸着具を上昇させ、吸着具を回転させて磁
気カードの向きを修正させたのち差し込み方向に
移動させることにより、磁気カードを搬入出装置
の上方に位置し得る。そして吸着を解除して磁気
カードを搬入出装置に渡したのち、磁気カードを
カードリーダに搬入させることにより、リード、
ライトを行なえる。また、この逆作用により磁気
カードをホルダーにセツトし得る。Function According to this configuration, the magnetic card can be extracted from the holder by lowering the suction tool to the article on the article support part to attract the magnetic card, and then moving the suction tool in the extraction direction.
Next, the magnetic card can be positioned above the loading/unloading device by raising the suction tool, rotating the suction tool to correct the orientation of the magnetic card, and then moving it in the insertion direction. Then, after releasing the adsorption and passing the magnetic card to the loading/unloading device, the magnetic card is loaded into the card reader to read,
Can do light. Moreover, the magnetic card can be set in the holder by this reverse action.
実施例
以下に本考案の一実施例を図面に基づいて説明
する。１は物品の一例である搬送用容器で、箱状
の本体２と、この本体２の上部に開閉揺動自在に
取付けた蓋３とからなり、蓋３の上面に突片４を
矩形枠状に設けて、ここに例えば工程管理表入り
のホルダー５を載置自在としている。なお搬送用
容器１は、例えば多数のウエハを保持したウエハ
キヤリアを収納自在としているが、これは物品そ
のものにホルダー５を載置するものであつてもよ
い。前記ホルダー５は長方形平板状であつて、そ
の上面一側には、磁気カード６を他側へ移動させ
ることにより抜き出し、また一側へ移動させるこ
とにより差し込む嵌合保持部７が設けられる。８
は物品支持部で、搬送用容器１は各種のコンベヤ
や自走式搬送台車などによつて該物品支持部８に
渡される。前記物品支持部８の中央部下方には、
昇降駆動装置９に連動する昇降部材１０と、この
昇降部材１０の上面側に回転駆動装置１１を介し
て取付けたテーブル１２とが設けられる。前記物
品支持部８の側方上方には、固定部材１３に取付
けたガイド体１４に案内されて昇降自在なスライ
ド部材１５が設けられ、このスライド部材１５は
ねじ式の調整具１６により上方位置調整自在とな
る。前記スライド部材１５の前面上部から前方に
支持枠１７が連設され、この支持枠１７に左右一
対のガイドロツド１８が取付けられる。ガイドロ
ツド１８に支持される可動体１９からは昇降ガイ
ドロツド２０が垂設され、この昇降ガイドロツド
２０に案内される昇降体２１は、可動体１９側に
設けたステツピングモータ２２により昇降自在と
なる。前記可動体１９の外側において中間可動体
２３がガイドロツド１８に支持され、この中間可
動体２３は支持枠１７に設けた走行用シリンダ２
４の動作によりガイドロツド１８に案内されて移
動自在となり、また可動体１９は、中間可動体２
３に設けたスライド用シリンダ２５の動作により
ガイドロツド１８に案内されて移動自在となる。
前記昇降体２１の下部には回転装置２６が取付け
られ、その下向きの出力軸２７には吸着具２８が
取付けられる。前記スライド部材１５の前面下部
にはカードリーダ２９が取付けられ、このカード
リーダ２９の前方には、ベルト３０や駆動装置３
１などからなる磁気カード６の搬入出装置３２が
設けられる。３３はホルダーセンサーを示す。Embodiment An embodiment of the present invention will be described below based on the drawings. Reference numeral 1 denotes a transport container, which is an example of an article, and is composed of a box-shaped main body 2 and a lid 3 attached to the top of the main body 2 so as to be able to swing open and close. A holder 5 containing, for example, a process control table can be placed here. Although the transport container 1 is capable of accommodating, for example, a wafer carrier holding a large number of wafers, the holder 5 may be placed on the article itself. The holder 5 has a rectangular flat plate shape, and is provided on one side of its upper surface with a fitting holding part 7 into which the magnetic card 6 can be removed by moving it to the other side and inserted by moving it to one side. 8
1 is an article support section, and the transport container 1 is delivered to the article support section 8 by various conveyors, self-propelled carriers, or the like. Below the center of the article support section 8,
A lifting member 10 interlocked with the lifting drive device 9 and a table 12 attached to the upper surface of the lifting member 10 via a rotary drive device 11 are provided. A slide member 15 that can be raised and lowered by being guided by a guide body 14 attached to a fixed member 13 is provided above the article support section 8 on the side, and the upper position of this slide member 15 can be adjusted using a screw type adjustment tool 16. Become free. A support frame 17 is connected to the front from the upper front surface of the slide member 15, and a pair of left and right guide rods 18 are attached to this support frame 17. An elevating guide rod 20 is suspended from a movable body 19 supported by a guide rod 18, and an elevating body 21 guided by this elevating guide rod 20 can be raised and lowered by a stepping motor 22 provided on the movable body 19 side. An intermediate movable body 23 is supported by the guide rod 18 on the outside of the movable body 19, and this intermediate movable body 23 is supported by a traveling cylinder 2 provided on the support frame 17.
4, the movable body 19 is guided by the guide rod 18 and becomes movable.
It is guided by the guide rod 18 by the operation of the slide cylinder 25 provided at 3 and becomes movable.
A rotating device 26 is attached to the lower part of the elevating body 21, and a suction tool 28 is attached to its downward output shaft 27. A card reader 29 is attached to the front lower part of the slide member 15, and a belt 30 and a drive device 3 are installed in front of the card reader 29.
A loading/unloading device 32 for magnetic cards 6 such as 1 is provided. 33 indicates a holder sensor.
次に上記実施例の作用を説明する。 Next, the operation of the above embodiment will be explained.
嵌合保持部７に磁気カード６を嵌合保持されて
なるホルダー５を、その蓋３の上面に載置してな
る搬送用容器１は物品支持部８に支持される。こ
のとき吸着具２８は上昇しており、またテーブル
１２は下降している。前述したように物品支持部
８に支持させた状態で、ホルダーセンサー３３に
よるホルダー５の有無ならびに方向の検出が行な
われる。このとき方向が反対であつたときには、
先ず昇降部材１０とともにテーブル１２を上昇さ
せ、第１図仮想線に示すように搬送用容器１を持
ち上げる。次いで回転駆動装置１１によりテーブ
ル１２とともに搬送用容器１を180度回転させ、
ホルダー５、すなわち磁気カード６の向きを正し
くする。その後、テーブル１２を下降して搬送用
容器１を物品支持部８に再度支持させる。この状
態で、ステツピングモータ２２によつて吸着具２
８を下降させるが、この下降限は第４図に示すよ
うに、吸着具２８の下面２８ａが、磁気カード６
の上面６ａと嵌合保持部７の下向き面７ａとの間
の位置となる。次いで吸着具２８を作用させ、第
５図に示すように磁気カード６の吸着を行なう。
そしてスライド用シリンダ２５を収縮動させて、
可動体１９とともに吸着具２８をカードリーダ２
９から離れる側に移動させ、第６図に示すように
嵌合保持部７から磁気カード６を引き抜く。次い
でステツピングモータ２２により吸着具２８とと
もに磁気カード６を上昇させたのち、回転装置２
６により吸着具２８を回転させて磁気カード６の
向きを正しく修正する。そして走行用シリンダ２
４の作動により、中間可動体２３を介して可動体
１９をカードリーダ２９側に移動させ、磁気カー
ド６をベルト３０の上方に位置させる。次いで吸
着作用を解除することによつて、磁気カード６は
ベルト３０上に載せられる。この磁気カード６は
カードリーダ２９に搬入され、そして書き込み、
または読み取りが行なわれる。 A transport container 1 is supported by an article support section 8 and has a holder 5 with a magnetic card 6 fitted and held in a fit holding section 7 placed on the top surface of its lid 3 . At this time, the suction tool 28 is ascending and the table 12 is descending. As described above, the presence or absence of the holder 5 and its direction are detected by the holder sensor 33 while the holder 5 is supported by the article support section 8 . At this time, when the direction is opposite,
First, the table 12 is raised together with the elevating member 10, and the transport container 1 is lifted as shown by the imaginary line in FIG. Next, the transport container 1 is rotated 180 degrees together with the table 12 by the rotary drive device 11,
Correct the orientation of the holder 5, that is, the magnetic card 6. Thereafter, the table 12 is lowered and the transport container 1 is again supported by the article support section 8. In this state, the suction tool 2 is
As shown in FIG.
The position is between the upper surface 6a and the downward facing surface 7a of the fitting and holding portion 7. Next, the suction device 28 is activated to suction the magnetic card 6 as shown in FIG.
Then, the slide cylinder 25 is moved to contract,
The suction tool 28 is attached to the card reader 2 together with the movable body 19.
9 and pull out the magnetic card 6 from the fitting holding portion 7 as shown in FIG. Next, after the magnetic card 6 is raised together with the suction tool 28 by the stepping motor 22, the rotating device 2
6, the suction tool 28 is rotated to correct the orientation of the magnetic card 6. And running cylinder 2
4, the movable body 19 is moved to the card reader 29 side via the intermediate movable body 23, and the magnetic card 6 is positioned above the belt 30. The magnetic card 6 is then placed on the belt 30 by releasing the adsorption action. This magnetic card 6 is carried into the card reader 29, and written on it,
Or a read is made.
その後、磁気カード６は搬入出装置３２によつ
てカードリーダ２９から搬出され、そして前述と
は逆の作用によつて嵌合保持部７に差し込まれ
る。 Thereafter, the magnetic card 6 is carried out from the card reader 29 by the carry-in/out device 32, and then inserted into the fitting and holding part 7 by an action opposite to that described above.
考案の効果
上記構成の本考案における行先指示装置による
と、物品上のホルダーからの磁気カードの抜き出
し、磁気カードの向きの修正、カードリーダによ
るリード、ライト、ならびにホルダーへの差し込
み（戻し）を自動的に行なうことができ、したが
つて手間や人件費の問題を解決できると共に、塵
埃などの発生を極減できて特にクリーンルーム内
でのウエハ搬送などに有利に採用できる。Effects of the Invention According to the destination indicating device of the present invention having the above configuration, the magnetic card can be automatically removed from the holder on the article, the orientation of the magnetic card can be corrected, the card can be read and written by the card reader, and the card can be inserted (returned) into the holder. Therefore, the problems of labor and labor costs can be solved, and the generation of dust and the like can be minimized, making it particularly advantageous for wafer transfer within a clean room.
図面は本考案の一実施例を示し、第１図は側面
図、第２図は平面図、第３図は説明斜視図、第４
図〜第６図は作用状態を示す要部の側面図であ
る。
１……搬送用容器（物品）、３……蓋、４……
突片、５……ホルダー、６……磁気カード、７…
…嵌合保持部、８……物品支持部、１９……可動
体、２３……中間可動体、２８……吸着具、２９
……カードリーダ、３２……搬入出装置、３３…
…ホルダーセンサー。
The drawings show one embodiment of the present invention, in which Fig. 1 is a side view, Fig. 2 is a plan view, Fig. 3 is an explanatory perspective view, and Fig. 4 is a side view.
6 to 6 are side views of the main parts showing the operating state. 1... Container for transportation (article), 3... Lid, 4...
Projection piece, 5...Holder, 6...Magnetic card, 7...
...Fitting holding part, 8... Article support part, 19... Movable body, 23... Intermediate movable body, 28... Suction tool, 29
... Card reader, 32 ... Loading/unloading device, 33...
...Holder sensor.
Claims (1)
面に沿つた方向から磁気カードを差し込み抜出し
自在とし、物品支持部の上方に、昇降および回転
自在で且つ差し込み抜出し方向に移動自在な吸着
具を設け、前記物品支持部の上方側方に、カード
リーダと、このカードリーダの前方に位置する磁
気カード搬入出装置とを設けたことを特徴とする
行先指示装置。 A magnetic card can be inserted and removed from a direction along the top surface of a holder that can be freely placed on the top surface of the article, and a suction tool that can be raised and lowered and rotated and moved in the direction of insertion and extraction is provided above the article support. A destination indicating device, comprising: a card reader; and a magnetic card loading/unloading device located in front of the card reader.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984158687U JPH0432343Y2 (en) | 1984-10-19 | 1984-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984158687U JPH0432343Y2 (en) | 1984-10-19 | 1984-10-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6175426U JPS6175426U (en) | 1986-05-21 |
| JPH0432343Y2 true JPH0432343Y2 (en) | 1992-08-04 |
Family
ID=30716664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984158687U Expired JPH0432343Y2 (en) | 1984-10-19 | 1984-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0432343Y2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50158065A (en) * | 1974-06-12 | 1975-12-20 | ||
| JPS5620428U (en) * | 1979-07-25 | 1981-02-23 | ||
| JPS5631880A (en) * | 1979-08-22 | 1981-03-31 | Hitachi Ltd | Automobile body that can be magnetically recognized |
-
1984
- 1984-10-19 JP JP1984158687U patent/JPH0432343Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50158065A (en) * | 1974-06-12 | 1975-12-20 | ||
| JPS5620428U (en) * | 1979-07-25 | 1981-02-23 | ||
| JPS5631880A (en) * | 1979-08-22 | 1981-03-31 | Hitachi Ltd | Automobile body that can be magnetically recognized |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6175426U (en) | 1986-05-21 |
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