JPH0432303U - - Google Patents
Info
- Publication number
- JPH0432303U JPH0432303U JP7394190U JP7394190U JPH0432303U JP H0432303 U JPH0432303 U JP H0432303U JP 7394190 U JP7394190 U JP 7394190U JP 7394190 U JP7394190 U JP 7394190U JP H0432303 U JPH0432303 U JP H0432303U
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- flow regulating
- drive device
- chamber
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Fluid-Pressure Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990073941U JP2546404Y2 (ja) | 1990-07-13 | 1990-07-13 | ウエハー移動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990073941U JP2546404Y2 (ja) | 1990-07-13 | 1990-07-13 | ウエハー移動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0432303U true JPH0432303U (me) | 1992-03-16 |
| JP2546404Y2 JP2546404Y2 (ja) | 1997-09-03 |
Family
ID=31613196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990073941U Expired - Fee Related JP2546404Y2 (ja) | 1990-07-13 | 1990-07-13 | ウエハー移動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2546404Y2 (me) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4516005Y1 (me) * | 1965-12-20 | 1970-07-03 | ||
| JPS4976193U (me) * | 1972-10-20 | 1974-07-02 |
-
1990
- 1990-07-13 JP JP1990073941U patent/JP2546404Y2/ja not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4516005Y1 (me) * | 1965-12-20 | 1970-07-03 | ||
| JPS4976193U (me) * | 1972-10-20 | 1974-07-02 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2546404Y2 (ja) | 1997-09-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |