JPH0432303U - - Google Patents

Info

Publication number
JPH0432303U
JPH0432303U JP7394190U JP7394190U JPH0432303U JP H0432303 U JPH0432303 U JP H0432303U JP 7394190 U JP7394190 U JP 7394190U JP 7394190 U JP7394190 U JP 7394190U JP H0432303 U JPH0432303 U JP H0432303U
Authority
JP
Japan
Prior art keywords
cylinder
flow regulating
drive device
chamber
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7394190U
Other languages
English (en)
Japanese (ja)
Other versions
JP2546404Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990073941U priority Critical patent/JP2546404Y2/ja
Publication of JPH0432303U publication Critical patent/JPH0432303U/ja
Application granted granted Critical
Publication of JP2546404Y2 publication Critical patent/JP2546404Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Fluid-Pressure Circuits (AREA)
JP1990073941U 1990-07-13 1990-07-13 ウエハー移動装置 Expired - Fee Related JP2546404Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990073941U JP2546404Y2 (ja) 1990-07-13 1990-07-13 ウエハー移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990073941U JP2546404Y2 (ja) 1990-07-13 1990-07-13 ウエハー移動装置

Publications (2)

Publication Number Publication Date
JPH0432303U true JPH0432303U (cs) 1992-03-16
JP2546404Y2 JP2546404Y2 (ja) 1997-09-03

Family

ID=31613196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990073941U Expired - Fee Related JP2546404Y2 (ja) 1990-07-13 1990-07-13 ウエハー移動装置

Country Status (1)

Country Link
JP (1) JP2546404Y2 (cs)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4516005Y1 (cs) * 1965-12-20 1970-07-03
JPS4976193U (cs) * 1972-10-20 1974-07-02

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4516005Y1 (cs) * 1965-12-20 1970-07-03
JPS4976193U (cs) * 1972-10-20 1974-07-02

Also Published As

Publication number Publication date
JP2546404Y2 (ja) 1997-09-03

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees