JPH04321599A - Production of oxide superconducting article - Google Patents
Production of oxide superconducting articleInfo
- Publication number
- JPH04321599A JPH04321599A JP3117826A JP11782691A JPH04321599A JP H04321599 A JPH04321599 A JP H04321599A JP 3117826 A JP3117826 A JP 3117826A JP 11782691 A JP11782691 A JP 11782691A JP H04321599 A JPH04321599 A JP H04321599A
- Authority
- JP
- Japan
- Prior art keywords
- target
- vacuum chamber
- oxide superconducting
- base material
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000000463 material Substances 0.000 claims abstract description 34
- 238000000034 method Methods 0.000 claims abstract description 13
- 239000002245 particle Substances 0.000 claims abstract description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 22
- 229910052760 oxygen Inorganic materials 0.000 claims description 22
- 239000001301 oxygen Substances 0.000 claims description 22
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 7
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 4
- 239000001569 carbon dioxide Substances 0.000 claims description 4
- 230000003213 activating effect Effects 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 1
- 239000002887 superconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 26
- 238000010438 heat treatment Methods 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 230000001678 irradiating effect Effects 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】この発明は、酸化物超電導物品の
製造方法、特に、優れた超電導特性を有する酸化物超電
導物品の製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a method for manufacturing oxide superconducting articles, and more particularly to a method for manufacturing oxide superconducting articles having excellent superconducting properties.
【０００２】0002
【従来の技術】従来、基板とこの基板の表面上に形成さ
れた Ｙ１Ｂａ２Ｃｕ３Ｏｘ 等の酸化物超電導物質の
被膜とからなる酸化物超電導物品を製造する方法の一つ
を、図面を参照しながら説明する。図２は、従来の、酸
化物超電導物品の製造方法を示す概略断面図である。図
２において、１は、真空チャンバーである。真空チャン
バー１内は、１０−２から１０−１Ｔｏｒｒの酸素分圧
に維持されており、このような雰囲気になるように、真
空チャンバー１に対して酸素の供給および排気が行われ
る。２は、真空チャンバー１内に設置された Ｙ１Ｂａ
２Ｃｕ３Ｏｘ 等の酸化物超電導物質のターゲットであ
り、ターゲット２の表面全体に亘って後述するレーザー
が均一に照射されるように、定速度で一方向に回転して
いる。３は、真空チャンバー１内に、ターゲット２と対
向して設置されたシリコン（Ｓｉ）等の基板であり、ヒ
ーター４により６００ から７００℃の温度に加熱され
ている。そして、５は、真空チャンバー１の透過窓１Ａ
からターゲット２に向けてレーザーを照射するためのレ
ーザー光源である。BACKGROUND OF THE INVENTION One of the conventional methods for manufacturing an oxide superconducting article consisting of a substrate and a film of an oxide superconducting material such as Y1Ba2Cu3Ox formed on the surface of the substrate will be explained with reference to the drawings. . FIG. 2 is a schematic cross-sectional view showing a conventional method for manufacturing an oxide superconducting article. In FIG. 2, 1 is a vacuum chamber. The interior of the vacuum chamber 1 is maintained at an oxygen partial pressure of 10 -2 to 10 -1 Torr, and oxygen is supplied to and exhausted from the vacuum chamber 1 to maintain such an atmosphere. 2 is Y1Ba installed in the vacuum chamber 1
The target is made of an oxide superconducting material such as 2Cu3Ox, and is rotated in one direction at a constant speed so that the entire surface of the target 2 is uniformly irradiated with the laser described below. Reference numeral 3 denotes a substrate made of silicon (Si) or the like that is placed in the vacuum chamber 1 facing the target 2, and is heated to a temperature of 600 to 700° C. by a heater 4. 5 is a transmission window 1A of the vacuum chamber 1.
This is a laser light source for irradiating a laser toward the target 2 from the target.
【０００３】真空チャンバー１内を上述した酸素分圧に
維持し、ヒーター４により上述した温度範囲内に基板３
を加熱し、そして、レーザー光源５からレーザーをター
ゲット２に照射する。これによって、基板３の表面上に
Ｙ１Ｂａ２Ｃｕ３Ｏｘ 等の酸化物超電導物質の被膜
が形成される。The inside of the vacuum chamber 1 is maintained at the above-mentioned oxygen partial pressure, and the substrate 3 is heated within the above-mentioned temperature range using the heater 4.
is heated, and the target 2 is irradiated with laser from the laser light source 5. As a result, a film of oxide superconducting material such as Y1Ba2Cu3Ox is formed on the surface of the substrate 3.
【０００４】上述したようにして、基板とこの基板上に
形成された Ｙ１Ｂａ２Ｃｕ３Ｏｘ 等の酸化物超電導
物質の被膜とからなる超電導物品が製造されるが、この
従来方法は、以下のような問題を有している。即ち、■
真空チャンバー１内を上述した酸素分圧に維持し且
つヒーター４により上述した温度範囲内に基板３を加熱
する理由は、基板３上に超電導被膜を形成した後、被膜
の結晶化を図り且つ酸素欠損を補うために施す熱処理を
行うことなく、優れた超電導特性を被膜に付与すること
にあるが、基板３を６００ から７００ ℃の高温に加
熱すると、基板３のシリコンが被膜中に拡散して、被膜
の超電導特性が劣化する。■ 真空チャンバー１内の
酸素分圧が１０−２から１０−１Ｔｏｒｒと大きいと、
ターゲット２からの蒸発粒子が酸素分子と衝突し易く、
その平均自由行程が短くなるので、ターゲット２からの
蒸発粒子の運動エネルギーが低下する。この結果、被膜
の結晶化が低下し且つ被膜の緻密性が低下して、被膜の
超電導特性が劣化する。[0004] As described above, a superconducting article consisting of a substrate and a film of an oxide superconducting material such as Y1Ba2Cu3Ox formed on the substrate is manufactured, but this conventional method has the following problems. are doing. That is, ■
The reason why the inside of the vacuum chamber 1 is maintained at the above-mentioned oxygen partial pressure and the substrate 3 is heated within the above-mentioned temperature range by the heater 4 is that after forming a superconducting film on the substrate 3, the film is crystallized and oxygen is heated. The purpose is to impart excellent superconducting properties to the film without performing heat treatment to compensate for defects, but when the substrate 3 is heated to a high temperature of 600 to 700 °C, the silicon in the substrate 3 diffuses into the film. , the superconducting properties of the coating deteriorate. ■ If the oxygen partial pressure inside the vacuum chamber 1 is as high as 10-2 to 10-1 Torr,
Evaporated particles from target 2 easily collide with oxygen molecules,
Since the mean free path becomes shorter, the kinetic energy of the evaporated particles from the target 2 decreases. As a result, the crystallization of the coating decreases and the denseness of the coating decreases, resulting in deterioration of the superconducting properties of the coating.
【０００５】従って、この発明の目的は、真空チャンバ
ー内の酸素分圧を大きくすることなく、且つ、基材の加
熱温度を高くすることなく、優れた特性を有する超電導
被膜が形成された超電導物品を製造することにある。[0005] Therefore, an object of the present invention is to provide a superconducting article in which a superconducting film having excellent properties is formed without increasing the oxygen partial pressure in a vacuum chamber and without increasing the heating temperature of the base material. The purpose is to manufacture.
【０００６】[0006]
【課題を解決するための手段】第１発明は、酸素を含有
する真空チャンバー内に酸化物超電導物質のターゲット
を設置し、前記真空チャンバー内に前記ターゲットと相
対して基材を設置し、そして、前記ターゲットに向けて
レーザーを照射して、前記ターゲットを蒸発させ、これ
によって生じた前記ターゲットの蒸発粒子を、前記基材
の表面上に付着させ、かくして、前記基材と前記基材の
表面上に形成された前記酸化物超電導物質の被膜とから
なる酸化物超電導物品を製造する方法において、前記真
空チャンバー内に設けたコイルに高周波電流を通電して
、前記真空チャンバー内の雰囲気ガスを活性化すること
に特徴を有し、第２発明は、上記第１発明において、前
記基材に向けて２００ｎｍ 未満の真空紫外域の波長の
光線を照射することに特徴を有し、そして、第３発明は
、上記第１または第２発明において、前記真空チャンバ
ー内に、二酸化炭素ＮＯ２ 、オゾンＯ３等の分解し易
いガスを導入することに特徴を有するものである。[Means for Solving the Problems] A first invention provides a target made of an oxide superconducting material placed in a vacuum chamber containing oxygen, a base material placed opposite to the target in the vacuum chamber, and , irradiate the target with a laser to evaporate the target, thereby causing evaporated particles of the target to adhere to the surface of the base material, and thus, the surface of the base material and the base material In the method for manufacturing an oxide superconducting article comprising a coating of the oxide superconducting material formed on the oxide superconducting material, a high-frequency current is passed through a coil provided in the vacuum chamber to activate the atmospheric gas in the vacuum chamber. A second invention is characterized in that in the first invention, a light beam having a wavelength in the vacuum ultraviolet region of less than 200 nm is irradiated toward the base material, The invention is characterized in that in the first or second invention, a gas that is easily decomposed, such as carbon dioxide NO2 or ozone O3, is introduced into the vacuum chamber.
【０００７】次に、この発明の、超電導物品の製造方法
の一実施態様を、図面を参照しながら説明する。図１は
、この発明の、超電導物品の製造方法の一実施態様を示
す概略平面図である。図１において、６は、真空チャン
バーである。真空チャンバー６内は、１０−２を超える
酸素分圧に維持されており、このような雰囲気になるよ
うに、真空チャンバー６に対して酸素の供給および排気
が行われる。７は、真空チャンバー６内に設置された
Ｙ１Ｂａ２Ｃｕ３Ｏｘ 等の酸化物超電導物質のターゲ
ットであり、ターゲット７の表面全体に亘って後述する
レーザーが均一に照射されるように、定速度で一方向に
回転している。
８は、真空チャンバー６内に、ターゲット７と対向して
設置されたセラミック等の基板であり、ヒーター９によ
り６００ ℃未満の温度に加熱されている。１０は、真
空チャンバー６の透過窓６Ａからターゲット７に向けて
レーザーを照射するためのレーザー光源である。そして
、１１は、ターゲットの上方に設けたコイルであり、高
周波電源１２から高周波電流が通電される。Next, one embodiment of the method for manufacturing a superconducting article according to the present invention will be described with reference to the drawings. FIG. 1 is a schematic plan view showing one embodiment of the method for manufacturing a superconducting article according to the present invention. In FIG. 1, 6 is a vacuum chamber. The inside of the vacuum chamber 6 is maintained at an oxygen partial pressure exceeding 10 −2 , and oxygen is supplied to and exhausted from the vacuum chamber 6 to create such an atmosphere. 7 was installed in the vacuum chamber 6
The target is made of an oxide superconducting material such as Y1Ba2Cu3Ox, and is rotated in one direction at a constant speed so that the entire surface of the target 7 is uniformly irradiated with a laser beam, which will be described later. Reference numeral 8 denotes a substrate made of ceramic or the like that is placed in the vacuum chamber 6 facing the target 7, and is heated to a temperature of less than 600° C. by a heater 9. Reference numeral 10 denotes a laser light source for irradiating a laser beam from the transmission window 6A of the vacuum chamber 6 toward the target 7. Reference numeral 11 denotes a coil provided above the target, to which a high frequency current is supplied from a high frequency power source 12.
【０００８】真空チャンバー６内を上述した酸素分圧に
維持し、ヒーター９により上述した温度範囲内に基板８
を加熱し、そして、レーザー光源１０からレーザーをタ
ーゲット７に照射するとともに、コイル１１に、例えば
、１３．５６ＭＨｚの高周波電流を通電する。これによ
って、以下のような効果が生じる。即ち、■ 真空チ
ャンバー６内の酸素分子が活性化されて酸素分子が励起
状態になる。
■ ターゲット７からの蒸発粒子が活性化される。■
基板８の表面が活性化される。これらの結果、真空
チャンバー６内の酸素分圧を大きくすることなく、且つ
、基板８の加熱温度を高くすることなく、基板８の表面
上には、優れた特性を有する Ｙ１Ｂａ２Ｃｕ３Ｏｘ
等の酸化物超電導物質の被膜が形成される。The inside of the vacuum chamber 6 is maintained at the above-mentioned oxygen partial pressure, and the substrate 8 is heated within the above-mentioned temperature range using the heater 9.
Then, the target 7 is irradiated with laser from the laser light source 10, and a high frequency current of, for example, 13.56 MHz is applied to the coil 11. This produces the following effects. That is, (1) the oxygen molecules in the vacuum chamber 6 are activated and become excited; ■ Evaporated particles from target 7 are activated. ■
The surface of substrate 8 is activated. As a result, Y1Ba2Cu3Ox having excellent properties can be formed on the surface of the substrate 8 without increasing the oxygen partial pressure in the vacuum chamber 6 and without increasing the heating temperature of the substrate 8.
A film of oxide superconducting material such as the following is formed.
【０００９】上述したように、コイル１１に高周波電流
を通電して、真空チャンバー６内の酸素分子を活性化す
る以外に、図１に示すように、光源１３から基板８に向
けて２００ｎｍ未満の真空紫外域の波長の光線を照射し
たり、あるいは、真空チャンバー６内に、酸素以外に二
酸化炭素ＮＯ２ またはオゾンＯ３等の分解し易いガス
を導入することによって、上述した効果が更に顕著に現
れるので、更に優れた特性を有するＹ１Ｂａ２Ｃｕ３Ｏ
ｘ 等の酸化物超電導物質の被膜を形成することができ
る。As described above, in addition to applying high frequency current to the coil 11 to activate oxygen molecules in the vacuum chamber 6, as shown in FIG. The above-mentioned effects can be made more pronounced by irradiating light with a wavelength in the vacuum ultraviolet region or by introducing into the vacuum chamber 6 a gas that is easily decomposed, such as carbon dioxide NO2 or ozone O3, in addition to oxygen. , Y1Ba2Cu3O with even better properties
A film of an oxide superconducting material such as x can be formed.
【００１０】0010
【実施例】次に、この発明を実施例によって更に詳細に
説明する。図１に示すように、真空チャンバー６内に、
Ｙ１Ｂａ２Ｃｕ３Ｏｘ の酸化物超電導物質のターゲ
ット７とＭｇＯ の単結晶の基板８とを対向して設置し
、ターゲット７を連続的に一方向に回転させ、基板８を
ヒーター９により加熱しながら、真空チャンバー６の透
過窓６Ａから２Ｊ／パルスの出力のエキシマレーザーＫ
ｒＦ（波長：２４８ｎｍ）をターゲット７に照射し、タ
ーゲット７の上方部にコイル１１を設置し、コイル１１
に１３．５６ＭＨｚの高周波電流を通電し、そして、基
板８に向けて１６０ｎｍの波長の光線を連続的に照射し
た。そして、真空チャンバー６内の酸素分圧を１０−１
Ｔｏｒｒに調整し、基板８の加熱温度を４００ から７
００ ℃の範囲内で段階的に変化させ、各加熱温度にお
いて、コイル１１に高周波電流を通電した場合および高
周波電流を通電し且つ光照射を行った場合における臨界
温度（Ｔｃ）を、高周波電流を通電および光照射をしな
かった場合とあわせて測定した。この結果を表１に示す
。EXAMPLES Next, the present invention will be explained in more detail by way of examples. As shown in FIG. 1, in the vacuum chamber 6,
A target 7 made of an oxide superconducting material such as Y1Ba2Cu3Ox and a substrate 8 made of a single crystal MgO2 are placed facing each other, and while the target 7 is continuously rotated in one direction and the substrate 8 is heated by a heater 9, the vacuum chamber 6 is heated. excimer laser K with an output of 2 J/pulse from the transmission window 6A of
The target 7 is irradiated with rF (wavelength: 248 nm), the coil 11 is installed above the target 7, and the coil 11
A high frequency current of 13.56 MHz was applied to the substrate 8, and a light beam with a wavelength of 160 nm was continuously irradiated onto the substrate 8. Then, the oxygen partial pressure in the vacuum chamber 6 is set to 10-1
Adjust the heating temperature of the substrate 8 to 400 to 7 Torr.
At each heating temperature, the critical temperature (Tc) is determined when high-frequency current is applied to the coil 11 and when both high-frequency current and light irradiation are performed. Measurements were taken in addition to cases in which electricity was not applied and light was not irradiated. The results are shown in Table 1.
【００１１】次に、基板８の加熱温度を６００ ℃に調
整し、真空チャンバー６内の酸素分圧を１０−４から１
０−１Ｔｏｒｒの範囲内で段階的に変化させ、各酸素分
圧において、コイル１１に高周波電流を通電した場合お
よび高周波電流を通電し且つ光照射を行った場合におけ
る臨界温度（Ｔｃ）を、高周波電流を通電および光照射
をしなかった場合とあわせて測定した。この結果を表２
に示す。Next, the heating temperature of the substrate 8 is adjusted to 600° C., and the oxygen partial pressure in the vacuum chamber 6 is increased from 10 −4 to 1
The critical temperature (Tc) is determined by changing stepwise within the range of 0-1 Torr, and at each oxygen partial pressure, when a high-frequency current is applied to the coil 11, and when a high-frequency current is applied and light irradiation is performed, the critical temperature (Tc) is Measurements were made in addition to cases in which no current was applied and no light was irradiated. This result is shown in Table 2.
Shown below.
【００１２】0012
【００１３】[0013]
【００１４】表１および表２から明らかなように、真空
チャンバー６内の雰囲気ガスを高周波電流により励起す
ることによって、真空チャンバー内の酸素分圧を大きく
することなく、且つ、基材の加熱温度を高くすることな
く、優れた特性を有する超電導被膜が形成された超電導
物品を製造できることがわかる。そして、この効果は、
光源１３から基板８に向けて２００ ｎｍ未満の真空紫
外域の波長の光線を照射することによって更に向上する
ことがわかる。As is clear from Tables 1 and 2, by exciting the atmospheric gas in the vacuum chamber 6 with a high frequency current, the heating temperature of the substrate can be reduced without increasing the oxygen partial pressure in the vacuum chamber. It can be seen that a superconducting article on which a superconducting film having excellent properties is formed can be manufactured without increasing the temperature. And this effect is
It can be seen that further improvement can be achieved by irradiating the substrate 8 with a light beam having a wavelength in the vacuum ultraviolet region of less than 200 nm from the light source 13.
【００１５】以上説明したように、この発明によれば、
真空チャンバー内の酸化物超電導物質のターゲットにレ
ーザーを照射して、基材とこの表面上に形成された酸化
物超電導物質の被膜とからなる酸化物超電導物品を製造
する方法において、レーザーの照射とともに、真空チャ
ンバー内のガスを高周波コイルによって活性化すること
によって、また、基材に波長が２００ｎｍ 以下の光線
を照射することによって、更に、真空チャンバー内に二
酸化炭素やオゾンを導入することによって、真空チャン
バー内の酸素分圧を大きくすることなく、且つ、基材の
加熱温度を高くすることなく、優れた特性を有する超電
導被膜が形成された超電導物品を製造できるといった有
用な効果がもたらされる。As explained above, according to the present invention,
In a method for manufacturing an oxide superconducting article consisting of a base material and a coating of oxide superconducting material formed on the surface of the base material by irradiating a target of oxide superconducting material in a vacuum chamber with a laser, the method includes: , by activating the gas in the vacuum chamber with a high-frequency coil, by irradiating the substrate with light beams with a wavelength of 200 nm or less, and by introducing carbon dioxide or ozone into the vacuum chamber. Useful effects such as being able to manufacture a superconducting article on which a superconducting film having excellent properties is formed can be brought about without increasing the oxygen partial pressure in the chamber and without increasing the heating temperature of the base material.
【図１】この発明の、酸化物超電導物品の製造方法の一
実施態様を示す概略断面図である。FIG. 1 is a schematic cross-sectional view showing one embodiment of the method for manufacturing an oxide superconducting article of the present invention.
【図２】従来の、酸化物超電導物品の製造方法を示す概
略断面図である。FIG. 2 is a schematic cross-sectional view showing a conventional method for manufacturing an oxide superconducting article.
１、６：真空チャンバー、 １Ａ：透過窓、 ２、７：ターゲット、 ３、８：基板、 ４、９：ヒーター、 ５、１０：レーザー光源、 １１：コイル、 １２：電源、 １３：真空紫外域の光線用光源。 1, 6: Vacuum chamber, 1A: Transparent window, 2, 7: Target, 3, 8: Substrate, 4, 9: Heater, 5, 10: laser light source, 11: Coil, 12: Power supply, 13: Light source for vacuum ultraviolet light.
Claims (3)
化物超電導物質のターゲットを設置し、前記真空チャン
バー内に前記ターゲットと相対して基材を設置し、そし
て、前記ターゲットに向けてレーザーを照射して、前記
ターゲットを蒸発させ、これによって生じた前記ターゲ
ットの蒸発粒子を、前記基材の表面上に付着させ、かく
して、前記基材と前記基材の表面上に形成された前記酸
化物超電導物質の被膜とからなる酸化物超電導物品を製
造する方法において、前記真空チャンバー内に設けたコ
イルに高周波電流を通電し、かくして、前記真空チャン
バー内の雰囲気ガスを活性化することを特徴とする、酸
化物超電導物品の製造方法。1. A target made of an oxide superconducting material is placed in a vacuum chamber containing oxygen, a base material is placed in the vacuum chamber facing the target, and a laser is irradiated toward the target. The target is evaporated, and the resulting evaporated particles of the target are deposited on the surface of the base material, and thus the oxide superconductor formed on the base material and the surface of the base material A method for manufacturing an oxide superconducting article comprising a film of a substance, characterized in that a high frequency current is applied to a coil provided in the vacuum chamber, thereby activating the atmospheric gas in the vacuum chamber. A method for manufacturing an oxide superconducting article.
真空紫外域の波長の光線を照射することを特徴とする、
請求項１記載の方法。2. A light beam having a wavelength in the vacuum ultraviolet region of less than 200 nm is irradiated toward the base material,
The method according to claim 1.
ＮＯ２ 、オゾンＯ３等の分解し易いガスを導入するこ
とを特徴とする、請求項１または２記載の酸化物超電導
物品の製造方法。3. The method for manufacturing an oxide superconducting article according to claim 1, wherein a gas that easily decomposes, such as carbon dioxide NO2 or ozone O3, is introduced into the vacuum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3117826A JPH04321599A (en) | 1991-04-23 | 1991-04-23 | Production of oxide superconducting article |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3117826A JPH04321599A (en) | 1991-04-23 | 1991-04-23 | Production of oxide superconducting article |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04321599A true JPH04321599A (en) | 1992-11-11 |
Family
ID=14721202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3117826A Pending JPH04321599A (en) | 1991-04-23 | 1991-04-23 | Production of oxide superconducting article |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04321599A (en) |
-
1991
- 1991-04-23 JP JP3117826A patent/JPH04321599A/en active Pending
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