JPH04317311A - Laminated ceramic capacitor - Google Patents

Laminated ceramic capacitor

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Publication number
JPH04317311A
JPH04317311A JP10967891A JP10967891A JPH04317311A JP H04317311 A JPH04317311 A JP H04317311A JP 10967891 A JP10967891 A JP 10967891A JP 10967891 A JP10967891 A JP 10967891A JP H04317311 A JPH04317311 A JP H04317311A
Authority
JP
Japan
Prior art keywords
copper
ceramic capacitor
lead
earth metal
metal oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP10967891A
Other languages
Japanese (ja)
Inventor
Shinichi Sato
真一 佐藤
Kentaro Sawamura
沢村 建太郎
Keigo Hirakata
平形 圭吾
Fumio Uchikoba
文男 内木場
Yoshio Kosaka
小坂 嘉男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP10967891A priority Critical patent/JPH04317311A/en
Publication of JPH04317311A publication Critical patent/JPH04317311A/en
Withdrawn legal-status Critical Current

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  • Ceramic Capacitors (AREA)

Abstract

PURPOSE:To provide a copper group inside electrode material for a plumbum group composite perovskite type laminated ceramic capacitor which is so improved as to provide an excellent quality laminated capacitor in which electrode cutting is not produced at a high coating rate and electrostatic capacitance is greater due to a greater occupation area and the like, and the plumbum group composite perovskite type laminated ceramic capacitor with employment thereof. CONSTITUTION:An electrode material includes an alkali earth metal oxide or a compound producing the alkali earth metal oxide at 0.01 to 10wt.% with respect to copper of a main component in terms of the alkali earth metal oxide. Further, a laminated ceramic capacitor has an inside electrode comprising the electrode material and plumbum group composite perovskite is used as a dielectric.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、高被覆率で電極切れを
生じることがなく大きな占有面積により静電容量の大き
い等、優れた品質の積層コンデンサを与えるように改良
された鉛系複合ペロブスカイト型積層セラミックコンデ
ンサ用銅系内部電極及びそれを有する鉛系複合ペロブス
カイト型積層セラミックコンデンサに関するものである
[Industrial Application Field] The present invention is a lead-based composite perovskite that has been improved to provide a multilayer capacitor of excellent quality, such as high coverage, no electrode breakage, and large capacitance due to a large footprint. The present invention relates to a copper-based internal electrode for a multilayer ceramic capacitor and a lead-based composite perovskite multilayer ceramic capacitor having the same.

【0002】0002

【従来の技術】鉛系複合ペロブスカイト、例えばPb(
Mg1/3Nb2/3)O3‐PbTiO3の焼結体は
、バイアス特性、高誘電特性のような電気的性質が優れ
ているため、圧電素子材料、コンデンサ材料などの電子
部品材料として利用されているが(特開平2−9756
号公報)、そのうちの鉛系複合ペロブスカイトを誘電体
とする積層セラミックコンデンサにおいては、内部電極
に銅系材料を用いたものが多く知られている。この銅系
材料としては、例えば銅又は銅合金(特開昭62−11
5817号公報、特開昭62−128513号公報)、
銅内部電極に鉛の酸化物とNb、Ta及びWの中から選
ばれた少なくとも1種の酸化物と銅の酸化物を含有させ
たもの(特開昭62−115817号公報)などが知ら
れている。
[Prior Art] Lead-based composite perovskites, such as Pb(
Sintered bodies of Mg1/3Nb2/3)O3-PbTiO3 have excellent electrical properties such as bias characteristics and high dielectric properties, so they are used as materials for electronic components such as piezoelectric element materials and capacitor materials. (Unexamined Japanese Patent Publication No. 2-9756
Among them, many multilayer ceramic capacitors using lead-based composite perovskite as a dielectric material are known to use copper-based materials for internal electrodes. Examples of this copper-based material include copper or copper alloy (Japanese Unexamined Patent Publication No. 62-11
5817, JP-A-62-128513),
A copper internal electrode containing a lead oxide, at least one oxide selected from Nb, Ta, and W, and a copper oxide (Japanese Patent Application Laid-Open No. 115817/1983) is known. ing.

【0003】ところで、この鉛系複合ペロブスカイトを
誘電体とし、銅系材料を内部電極として積層コンデンサ
を製造する場合、焼成工程に先立って、セラミックスの
成形の際に加えられたバインダーをバーンアウトする脱
バインダー処理が必要になる。その際、一般的な銅を内
部電極に用いた場合、脱バインダーだけをとると酸化雰
囲気が有効であるが、この酸化雰囲気中では銅は極めて
酸化しやすいため、バーンアウトの際、銅酸化物を生じ
、これが誘電体中に拡散し、品質劣化の原因になるし、
また、このような不都合を避けるために、銅の酸化しな
い還元雰囲気中でバーンアウトを行うと、バインダーの
分解が不十分になり残留炭素発生の原因となる。さらに
、焼成時も銅が酸化しないように還元性雰囲気が用いら
れるが、その際残留炭素の影響で揮散した酸化鉛が還元
されて金属鉛となり、さらにはそれが銅との共存下に低
融点の別の内部電極を形成し、その結果焼成時に内部電
極が融解して一部電極切れを起こし、電極の誘電体を被
覆する占有率が低減するなど多くの問題があった。
By the way, when manufacturing a multilayer capacitor using this lead-based composite perovskite as a dielectric and a copper-based material as an internal electrode, prior to the firing process, a removal process is performed to burn out the binder added during ceramic molding. Binder processing is required. At that time, when general copper is used for the internal electrodes, an oxidizing atmosphere is effective if only the binder is removed, but copper is extremely easy to oxidize in this oxidizing atmosphere, so during burnout, copper oxide , which diffuses into the dielectric material and causes quality deterioration.
Furthermore, in order to avoid such inconveniences, if burnout is performed in a reducing atmosphere that does not oxidize copper, the decomposition of the binder will be insufficient, resulting in generation of residual carbon. Furthermore, during firing, a reducing atmosphere is used to prevent copper from oxidizing, but at this time, the lead oxide that volatilizes due to the influence of residual carbon is reduced to metallic lead, which furthermore has a low melting point in coexistence with copper. As a result, the internal electrode melts during firing, causing some electrode breakage, resulting in a reduction in the coverage of the dielectric material of the electrode, and many other problems.

【0004】このような問題を解決するため、これまで
内部電極の原料として銅の代わりに銅酸化物を用い、空
気中でバーンアウトした後、還元処理して銅電極を形成
する方法が多数提案されている(特開昭62−2033
21号公報、特開昭63−15407号公報、特開昭6
3−15408号公報、特開昭63−250809号公
報、特開昭63−254714号公報、特開昭63−2
65411号公報、特開昭64−89311号公報)。
In order to solve these problems, many methods have been proposed in which copper oxide is used instead of copper as a raw material for internal electrodes, burnout is performed in air, and then reduction treatment is performed to form copper electrodes. (Japanese Unexamined Patent Application Publication No. 62-2033)
No. 21, JP-A-63-15407, JP-A-6
3-15408, JP 63-250809, JP 63-254714, JP 63-2
65411, JP-A-64-89311).

【0005】これらの方法は、バーンアウトを完全に行
うという点では極めて有力な方法であるが、還元処理の
際に内部電極の収縮を伴い、誘電体との接触不良をもた
らし、これにより静電容量のバラツキを生じるという欠
点がある。
Although these methods are extremely effective in achieving complete burnout, they are accompanied by shrinkage of the internal electrodes during the reduction process, resulting in poor contact with the dielectric material, which leads to static electricity This has the disadvantage of causing variations in capacity.

【0006】他方、内部電極に銅合金を用い、銅酸化物
の拡酸を低減する方法も提案されているが(特開昭62
−210611号公報)、銅合金は比抵抗が大きく、銅
本来の好ましい低比抵抗という特性をそこなう上に、コ
スト高になるのを免れないという欠点がある。
On the other hand, a method has also been proposed in which copper alloy is used for the internal electrodes to reduce the oxidation of copper oxide (Japanese Unexamined Patent Application Publication No. 1983-1982).
210611), copper alloys have a large specific resistance, which impairs copper's desirable characteristic of low specific resistance, and also has the disadvantage of inevitably increasing costs.

【0007】また、前記したような酸化銅の誘電体中へ
の拡散を防止するために、内部電極内に鉛系誘電体材料
を含有させ、選択的に銅酸化物をトラップする方法が提
案されているが(特開平2−62023号公報)、これ
は焼成時の雰囲気制御を十分に管理すれば銅酸化物は発
生せず、従って酸化銅の誘電体中への拡散も防止できる
ため特に含有させる必要はない。
[0007] Furthermore, in order to prevent copper oxide from diffusing into the dielectric as described above, a method has been proposed in which a lead-based dielectric material is contained in the internal electrode to selectively trap copper oxide. (Japanese Unexamined Patent Publication No. 2-62023), this is because if the atmosphere during firing is properly controlled, copper oxide will not be generated, and therefore the diffusion of copper oxide into the dielectric can be prevented. There's no need to do it.

【0008】[0008]

【発明が解決しようとする課題】本発明は、鉛系複合ペ
ロブスカイトを誘電体とし、銅を内部電極とする積層セ
ラミックコンデンサを製造する際に、従来方法で伴う、
残留炭素による比誘電率の低下、酸化銅の拡散による短
寿命化、内部電極の収縮による静電容量のバラツキなど
の欠点を克服し、さらに高被覆率で電極切れを生じるこ
とがなく、大きな占有面積により静電容量の大きいなど
の優れた品質の積層コンデンサを与えることができる銅
系内部電極材料及び該内部電極を有する鉛系複合ペロブ
スカイト型積層セラミックコンデンサを得ることを目的
としてなされたものである。
Problems to be Solved by the Invention The present invention provides a method for manufacturing a multilayer ceramic capacitor using a lead-based composite perovskite as a dielectric and copper as an internal electrode.
It overcomes the drawbacks such as a decrease in dielectric constant due to residual carbon, a short life due to diffusion of copper oxide, and variations in capacitance due to shrinkage of internal electrodes, and also has a high coverage ratio without causing electrode breakage, allowing for a large occupancy. This was done with the aim of obtaining a copper-based internal electrode material that can provide a multilayer capacitor of excellent quality such as a large capacitance due to area, and a lead-based composite perovskite multilayer ceramic capacitor having the internal electrode. .

【0009】[0009]

【課題を解決するための手段】本発明者らは、前記した
好ましい特徴を有する積層セラミックコンデンサを開発
すべく、特にその銅系内部電極の物性改善について種々
研究を重ねた結果、これに酸化物生成の標準自由エネル
ギーが低いもの、すなわち酸化物の形で安定な化合物や
該酸化物自体を内部電極に含有させれば酸化鉛の安定化
が計れることに着目し、種々検討の結果、誘電体中に残
留炭素が300ppm程度含まれていても所定量のアル
カリ土類金属酸化物を含有させた銅系内部電極が所定コ
ンデンサに組み込まれた場合に該電極に銅酸化物が残留
されず、かつ揮散した酸化鉛も金属鉛に還元されないこ
とを見出し、この知見に基づいて本発明をなすに至った
[Means for Solving the Problems] In order to develop a multilayer ceramic capacitor having the above-mentioned preferable characteristics, the present inventors have conducted various studies on improving the physical properties of the copper-based internal electrodes, and as a result, they have found that Focusing on the fact that lead oxide can be stabilized by including a compound with a low standard free energy of formation, that is, a stable compound in the form of an oxide, or the oxide itself in the internal electrode, after various studies, the dielectric material When a copper-based internal electrode containing a predetermined amount of alkaline earth metal oxide is incorporated into a predetermined capacitor, no copper oxide remains in the electrode, even if the carbon contains about 300 ppm of residual carbon, and It was discovered that volatilized lead oxide was not reduced to metallic lead, and the present invention was developed based on this finding.

【0010】すなわち、本発明は、主成分の銅に対し、
アルカリ土類金属酸化物又はアルカリ土類金属酸化物を
生成しうる化合物をアルカリ土類金属酸化物換算で0.
01〜10重量%含有して成ることを特徴とする鉛系複
合ペロブスカイト型積層セラミックコンデンサ用銅系内
部電極材料及びこの材料からなる銅系内部電極を有し、
鉛系複合ペロブスカイトを誘電体とすることを特徴とす
る積層セラミックコンデンサを提供するものである。
[0010] That is, in the present invention, for copper as the main component,
An alkaline earth metal oxide or a compound capable of producing an alkaline earth metal oxide has an alkaline earth metal oxide equivalent of 0.
A copper-based internal electrode material for a lead-based composite perovskite type multilayer ceramic capacitor characterized by containing 01 to 10% by weight, and a copper-based internal electrode made of this material,
The present invention provides a multilayer ceramic capacitor characterized by using a lead-based composite perovskite as a dielectric.

【0011】本発明の内部電極材料においては、銅を主
成分とし、これに対しアルカリ土類金属酸化物又はそれ
を生成しうる化合物(以下、アルカリ土類酸化物等とい
う)を前記した範囲で含有させることが必要である。
In the internal electrode material of the present invention, copper is the main component, and an alkaline earth metal oxide or a compound capable of producing it (hereinafter referred to as an alkaline earth oxide, etc.) is contained within the above-mentioned range. It is necessary to contain it.

【0012】このアルカリ土類酸化物等の銅に対する割
合が0.01%よりも少ないと所期の効果が十分得られ
ないし、また10%よりも多くなると内部電極の抵抗値
が増大し、銅が有する比抵抗の小さい優れた特性をそこ
なう原因となる。
If the ratio of alkaline earth oxides, etc. to copper is less than 0.01%, the desired effect cannot be obtained sufficiently, and if it exceeds 10%, the resistance value of the internal electrode increases, and copper This may cause damage to the excellent characteristics of low resistivity that the metal has.

【0013】本発明は、上記電極材料からなる内部電極
を有し、鉛系複合ペロブスカイトを誘電体とする積層セ
ラミックコンデンサも包含する。
The present invention also includes a multilayer ceramic capacitor having internal electrodes made of the above-mentioned electrode material and using a lead-based composite perovskite as a dielectric.

【0014】この積層セラミックコンデンサ用誘電体と
して用いる鉛系複合ペロブスカイトは、基本的には、式
Pb(Mg1/3Nb2/3)O3‐PbTiO3の組
成を有するものを挙げることができるが、これ以外にそ
の組成のAサイトの成分中のPb原子の一部にCa原子
を導入したもの、Bサイトの成分中にNi、W、Fe、
Mg、Nb、Mnを平均原子価が四価になるように組合
せたものなど、あるいはこれらに加えてさらにアルカリ
土類金属の酸化物、酸化銅、ケイ酸鉛などを含有させた
ものも用いることができる。
[0014] The lead-based composite perovskite used as the dielectric for the multilayer ceramic capacitor basically has the composition of the formula Pb(Mg1/3Nb2/3)O3-PbTiO3, but other than this, In the composition, Ca atoms are introduced into some of the Pb atoms in the A site component, Ni, W, Fe, etc. in the B site component,
A combination of Mg, Nb, and Mn so that the average valence is tetravalent, etc., or a material containing an alkaline earth metal oxide, copper oxide, lead silicate, etc. in addition to these may also be used. Can be done.

【0015】本発明の積層セラミックコンデンサを製造
するには、例えば誘電体材料である鉛系複合ペロブスカ
イトを構成する金属の酸化物、例えばPbO、MgO、
Nb2O3、TiO2、CaO、PbSiO3などの所
要の酸化物、あるいは焼成によりこれらの酸化物を生成
しうる化合物を粉粒状で、最終的に所望の組成が得られ
る割合で混合し、仮焼し、この仮焼物を粉砕後所望の形
状に成形し、乾燥したのち、非酸化性雰囲気中でバーン
アウトを行ってバインダーを除去し、次いで最後に酸素
分圧を制御した非酸化性雰囲気中で焼成することにより
製造される。この焼成の際、焼成体に外部電極として市
販の銅ペーストを塗布し窒素のような不活性雰囲気中で
焼付け、また外部電極を同時焼成することも可能である
To manufacture the multilayer ceramic capacitor of the present invention, metal oxides such as PbO, MgO,
Necessary oxides such as Nb2O3, TiO2, CaO, and PbSiO3, or compounds that can produce these oxides when fired, are mixed in powder or granule form at a ratio that will give the final desired composition, and calcined. After pulverizing the calcined product, it is molded into the desired shape, dried, burnout is performed in a non-oxidizing atmosphere to remove the binder, and then finally fired in a non-oxidizing atmosphere with controlled oxygen partial pressure. Manufactured by. During this firing, it is also possible to coat the fired body with a commercially available copper paste as an external electrode and bake it in an inert atmosphere such as nitrogen, or to simultaneously fire the external electrode.

【0016】上記成形は、例えばアクリル酸(エステル
)系バインダーのようなバインダーを加えるなどして行
われ、また、非酸化性雰囲気としては、窒素、アルゴン
のような不活性雰囲気又は一酸化炭素、水素のような還
元作用を有する気体を含む還元性雰囲気が用いられ、中
でも水素含有雰囲気が好ましい。最後の焼成処理におい
ては酸素分圧が10−4〜10−12気圧、好ましくは
10−6〜10−10気圧の範囲に制御される。焼成温
度は、通常900〜1000℃、好ましくは920〜9
50℃の範囲で選ばれる。
The above molding is carried out by adding a binder such as an acrylic acid (ester) binder, and the non-oxidizing atmosphere is an inert atmosphere such as nitrogen or argon, or carbon monoxide, A reducing atmosphere containing a gas having a reducing action such as hydrogen is used, and a hydrogen-containing atmosphere is preferred. In the final firing treatment, the oxygen partial pressure is controlled within the range of 10-4 to 10-12 atm, preferably 10-6 to 10-10 atm. The firing temperature is usually 900-1000°C, preferably 920-900°C.
The temperature is selected within the range of 50°C.

【0017】酸素分圧が10−12気圧よりも低い条件
下で900℃よりも高い温度で焼成すると、酸素の放出
量が多くなり生成するセラミックコンデンサ中に酸素空
位を生じる結果、絶縁抵抗の経時的低下の原因となり、
十分な信頼性が確保できなくなる。
[0017] When firing at a temperature higher than 900°C under conditions where the oxygen partial pressure is lower than 10-12 atmospheres, a large amount of oxygen is released and oxygen vacancies are created in the resulting ceramic capacitor, resulting in a decrease in insulation resistance over time. cause a decline in
Sufficient reliability cannot be ensured.

【0018】前記非酸化性雰囲気が用いられるのは、内
部電極の主成分の銅の酸化を伴わないバーンアウトを行
う必要があるからである。還元作用を有する気体として
は、水素以外に例えば一酸化炭素、炭化水素なども知ら
れているが、これらはいずれも有機物の燃焼の際に発生
する気体と同じものであるため、これらを含む雰囲気下
ではバインダーの分解反応が阻害され、残留炭素が増大
する。
The non-oxidizing atmosphere is used because it is necessary to perform burnout without oxidizing copper, which is the main component of the internal electrodes. In addition to hydrogen, carbon monoxide and hydrocarbons are also known as gases that have a reducing effect, but since these are the same gases that are generated when organic matter is burned, an atmosphere containing them is Under these conditions, the decomposition reaction of the binder is inhibited and residual carbon increases.

【0019】前記水素含有雰囲気は通常窒素などの不活
性ガスや水蒸気を含み、それにより水素濃度は適当に希
釈され、通常0.01〜1000ppm、好ましくは5
0〜200ppmの濃度に調整される。このようにする
と、水素濃度が低くなりすぎて還元作用が著しく小さく
なり、銅の酸化防止等が不完全になり、銅の一部に酸化
を生じ、焼成時に酸化銅の拡散が進行する結果電極が部
分的に消失し、静電容量の不足をきたしたり、また、水
素濃度が高くなりすぎて鉛系誘電体材料が鉛にまで還元
され、絶縁抵抗が低下してコンデンサとしての機能を示
さなくなったりすることがない。
The hydrogen-containing atmosphere usually contains an inert gas such as nitrogen and water vapor, so that the hydrogen concentration is appropriately diluted, usually 0.01 to 1000 ppm, preferably 5.
The concentration is adjusted to 0 to 200 ppm. If this is done, the hydrogen concentration will become too low and the reducing action will be significantly reduced, making the prevention of copper oxidation incomplete, causing some oxidation of the copper, and as a result of the progress of diffusion of copper oxide during firing, the electrode Partially disappears, resulting in a lack of capacitance, or hydrogen concentration becomes too high, reducing the lead-based dielectric material to lead, reducing insulation resistance and no longer functioning as a capacitor. There is nothing to do.

【0020】前記水蒸気は、水素と水との間の化学平衡
により、水素濃度が増大したときの酸素分圧の変化を抑
制し、かつバインダー中に含まれる炭化水素やバーンア
ウトにより生成する残留炭素の除去を促進する作用があ
る。例えば炭化水素及び炭素は以下に示す反応式に従っ
て水蒸気と反応し、気体となって系外に発散する。
[0020] The water vapor suppresses the change in oxygen partial pressure when the hydrogen concentration increases due to the chemical equilibrium between hydrogen and water, and suppresses the change in oxygen partial pressure when the hydrogen concentration increases, and also suppresses the residual carbon generated by hydrocarbons contained in the binder and burnout. It has the effect of promoting the removal of. For example, hydrocarbons and carbon react with water vapor according to the reaction formula shown below, become a gas, and diffuse out of the system.

【化1】[Chemical formula 1]

【0021】ところで、鉛系ペロブスカイトについて、
熱天秤によりその熱的挙動を観察すると、水素の存在下
で重量減少を起し、金属鉛を析出するが、この現象は、
2重量%以上の重量減少のときにのみ認められ、それよ
りも少ない重量減少のときには認められない。そして、
この重量減少は可逆的であり、酸素分圧を増大させる元
の重量に戻り、また重量減少した状態においては残留炭
素が著しく少なくなっている。
By the way, regarding lead-based perovskite,
Observing its thermal behavior using a thermobalance, it shows that it loses weight in the presence of hydrogen and precipitates metallic lead, but this phenomenon is
It is recognized only when the weight decreases by 2% by weight or more, and not when the weight decrease is less than that. and,
This weight loss is reversible, returning to the original weight increasing the oxygen partial pressure, and with significantly less carbon remaining in the reduced weight state.

【0022】このような現象は、アルミナ、チタン酸バ
リウムなどの酸化物においては認められず、全く鉛系複
合ペロブスカイトに特有のものであるが、残留炭素の存
在においては、容易に還元が行われるため、その量を銅
を内部電極とする場合では100ppm以下に抑制する
ことが必要であったが、本発明の銅系内部電極を用いる
とこの量が300ppmと増えてもこのような不都合は
生じなかった。
[0022] Such a phenomenon is not observed in oxides such as alumina and barium titanate, and is completely unique to lead-based composite perovskites, but reduction occurs easily in the presence of residual carbon. Therefore, when using copper as the internal electrode, it was necessary to suppress the amount to 100 ppm or less, but when using the copper-based internal electrode of the present invention, even if this amount increases to 300 ppm, such inconvenience does not occur. There wasn't.

【0023】[0023]

【発明の効果】本発明によれば、高被覆率で電極切れを
生じることがなく大きな占有面積により大きい静電容量
を可能とする電極材料、及びそれを内部電極とする優れ
た品質の積層コンデンサが提供される。
Effects of the Invention According to the present invention, there is provided an electrode material that has a high coverage rate, does not cause electrode breakage, and enables a large capacitance due to a large occupied area, and an excellent quality multilayer capacitor using the material as an internal electrode. is provided.

【0024】[0024]

【実施例】次に、実施例により本発明をさらに詳細に説
明する。 実施例1〜16、比較例1〜5 鉛系誘電体材料よりメタクリル酸系バインダーを用いて
シートを形成させ、寸法3.2×1.6×1.0mm、
厚み15μm、誘電体層数10層の種々の銅系内部電極
を有する積層セラミックコンデンサを作製した。この作
製方法は、次のようにして行った。
[Examples] Next, the present invention will be explained in more detail with reference to Examples. Examples 1 to 16, Comparative Examples 1 to 5 Sheets were formed using a methacrylic acid binder from a lead-based dielectric material, and had dimensions of 3.2 x 1.6 x 1.0 mm.
Multilayer ceramic capacitors having a thickness of 15 μm and various copper-based internal electrodes having 10 dielectric layers were manufactured. This manufacturing method was performed as follows.

【0025】金属銅粉に表1に示した各種アルカリ土類
金属酸化物の所要量を加えて調製したペーストを上記シ
ートに印刷し、種々の内部電極を形成した。得られた各
種成形体を窒素気流中、600℃でバーンアウトしたの
ち、窒素‐水素‐水系の雰囲気下(酸素分圧logPO
2=−8.5)、950℃で2時間焼成した。このよう
にして得た焼結体をバレル研摩し、内部電極を端部に露
出させたのち、それに外部電極を付設した。このように
して得た試料の電気特性試験を、静電容量(20℃、m
F)及びtanδ(20℃×10−4)について、1V
の交流電圧を印加し、1KHzの周波数で測定すること
により行った。その結果を表1に示す。
A paste prepared by adding the required amounts of various alkaline earth metal oxides shown in Table 1 to metallic copper powder was printed on the above sheet to form various internal electrodes. The various molded bodies obtained were burned out at 600°C in a nitrogen stream, and then under a nitrogen-hydrogen-water atmosphere (oxygen partial pressure log PO
2=-8.5) and baked at 950°C for 2 hours. The sintered body thus obtained was barrel-polished to expose the internal electrodes at the ends, and then external electrodes were attached thereto. The electrical property test of the sample thus obtained was performed using capacitance (20°C, m
F) and tan δ (20°C x 10-4), 1V
The measurement was carried out by applying an alternating current voltage of 1 KHz and measuring at a frequency of 1 KHz. The results are shown in Table 1.

【表1】[Table 1]

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】  主成分の銅に対し、アルカリ土類金属
酸化物又はアルカリ土類金属酸化物を生成しうる化合物
をアルカリ土類金属酸化物換算で0.01〜10重量%
含有して成ることを特徴とする鉛系複合ペロブスカイト
型積層セラミックコンデンサ用銅系内部電極材料。
Claim 1: 0.01 to 10% by weight of an alkaline earth metal oxide or a compound capable of producing an alkaline earth metal oxide based on the main component copper, calculated as an alkaline earth metal oxide.
A copper-based internal electrode material for a lead-based composite perovskite type multilayer ceramic capacitor, characterized by containing:
【請求項2】  鉛系複合ペロブスカイトを誘電体とし
、請求項1記載の材料からなる銅系内部電極を有するこ
とを特徴とする積層セラミックコンデンサ。
2. A multilayer ceramic capacitor comprising a lead-based composite perovskite as a dielectric and copper-based internal electrodes made of the material according to claim 1.
JP10967891A 1991-04-16 1991-04-16 Laminated ceramic capacitor Withdrawn JPH04317311A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10967891A JPH04317311A (en) 1991-04-16 1991-04-16 Laminated ceramic capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10967891A JPH04317311A (en) 1991-04-16 1991-04-16 Laminated ceramic capacitor

Publications (1)

Publication Number Publication Date
JPH04317311A true JPH04317311A (en) 1992-11-09

Family

ID=14516411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10967891A Withdrawn JPH04317311A (en) 1991-04-16 1991-04-16 Laminated ceramic capacitor

Country Status (1)

Country Link
JP (1) JPH04317311A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004266261A (en) * 2003-02-12 2004-09-24 Denso Corp Laminated piezoelectric element and its manufacturing method
JP2006196717A (en) * 2005-01-14 2006-07-27 Nec Tokin Corp Laminated piezoelectric ceramics element, and manufacturing method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004266261A (en) * 2003-02-12 2004-09-24 Denso Corp Laminated piezoelectric element and its manufacturing method
JP4590868B2 (en) * 2003-02-12 2010-12-01 株式会社デンソー Multilayer piezoelectric element and method for manufacturing the same
JP2006196717A (en) * 2005-01-14 2006-07-27 Nec Tokin Corp Laminated piezoelectric ceramics element, and manufacturing method thereof

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