JPH04314374A - Narrow band laser device - Google Patents

Narrow band laser device

Info

Publication number
JPH04314374A
JPH04314374A JP10845491A JP10845491A JPH04314374A JP H04314374 A JPH04314374 A JP H04314374A JP 10845491 A JP10845491 A JP 10845491A JP 10845491 A JP10845491 A JP 10845491A JP H04314374 A JPH04314374 A JP H04314374A
Authority
JP
Japan
Prior art keywords
diffraction grating
surface
gas
air flow
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10845491A
Inventor
Yukio Kobayashi
Masahiko Kowaka
Osamu Wakabayashi
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority to JP10845491A priority Critical patent/JPH04314374A/en
Publication of JPH04314374A publication Critical patent/JPH04314374A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To reduce fluctuation of beam profile and to acquire laser light of stable output by providing an air flow generating means which makes gas flow to a reflection surface of a diffraction grating.
CONSTITUTION: Air flow is made to occur in a reflection surface of a diffraction grating 30 by blowing gas against the diffraction grating 30 by a fan 40. Thereby, a surface of the diffraction grating 30 is cooled and gas in an area near a surface of the diffraction grating 30 is forcibly moved to prevent gas in an area near a surface of the diffraction grating 30 from being heated by the diffraction grating 30. Since air flow is generated forcibly in a surface of the diffraction grating 30, gas is not heated by heat of the diffraction grating 30 and does not generate natural convection. Thereby, it is possible to prevent beam profile from fluctuating.
COPYRIGHT: (C)1992,JPO&Japio
JP10845491A 1991-04-12 1991-04-12 Narrow band laser device Pending JPH04314374A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10845491A JPH04314374A (en) 1991-04-12 1991-04-12 Narrow band laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10845491A JPH04314374A (en) 1991-04-12 1991-04-12 Narrow band laser device

Publications (1)

Publication Number Publication Date
JPH04314374A true JPH04314374A (en) 1992-11-05

Family

ID=14485189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10845491A Pending JPH04314374A (en) 1991-04-12 1991-04-12 Narrow band laser device

Country Status (1)

Country Link
JP (1) JPH04314374A (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001018923A1 (en) * 1999-09-03 2001-03-15 Cymer, Inc. High power gas discharge laser with line narrowing unit
WO2001041268A1 (en) 1999-11-30 2001-06-07 Cymer, Inc. High power gas discharge laser with helium purged line narrowing unit
US6496528B2 (en) 1999-09-03 2002-12-17 Cymer, Inc. Line narrowing unit with flexural grating mount
US6504860B2 (en) 2001-01-29 2003-01-07 Cymer, Inc. Purge monitoring system for gas discharge laser
US6539042B2 (en) 1999-11-30 2003-03-25 Cymer, Inc. Ultra pure component purge system for gas discharge laser
US6738410B2 (en) 1999-12-22 2004-05-18 Cymer, Inc. Line narrowed laser with bidirection beam expansion
US6785319B1 (en) 1999-01-06 2004-08-31 Komatsu Ltd. Ultraviolet laser device
US6795474B2 (en) 2000-11-17 2004-09-21 Cymer, Inc. Gas discharge laser with improved beam path
US6839372B2 (en) 2000-11-17 2005-01-04 Cymer, Inc. Gas discharge ultraviolet laser with enclosed beam path with added oxidizer
JP2007067123A (en) * 2005-08-31 2007-03-15 National Institute Of Advanced Industrial & Technology Laser pulse compressor
KR100767301B1 (en) * 1999-11-30 2007-10-17 사이머 인코포레이티드 High power gas discharge laser with helium purged line narrowing unit
US7321607B2 (en) 2005-11-01 2008-01-22 Cymer, Inc. External optics and chamber support system
US8379687B2 (en) 2005-06-30 2013-02-19 Cymer, Inc. Gas discharge laser line narrowing module

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6785319B1 (en) 1999-01-06 2004-08-31 Komatsu Ltd. Ultraviolet laser device
US6735236B2 (en) * 1999-09-03 2004-05-11 Cymer, Inc. High power gas discharge laser with line narrowing unit
US6496528B2 (en) 1999-09-03 2002-12-17 Cymer, Inc. Line narrowing unit with flexural grating mount
WO2001018923A1 (en) * 1999-09-03 2001-03-15 Cymer, Inc. High power gas discharge laser with line narrowing unit
US6539042B2 (en) 1999-11-30 2003-03-25 Cymer, Inc. Ultra pure component purge system for gas discharge laser
KR100767301B1 (en) * 1999-11-30 2007-10-17 사이머 인코포레이티드 High power gas discharge laser with helium purged line narrowing unit
US7277466B2 (en) 1999-11-30 2007-10-02 Cymer, Inc. High power gas discharge laser with helium purged line narrowing unit
US6778584B1 (en) 1999-11-30 2004-08-17 Cymer, Inc. High power gas discharge laser with helium purged line narrowing unit
WO2001041268A1 (en) 1999-11-30 2001-06-07 Cymer, Inc. High power gas discharge laser with helium purged line narrowing unit
US6738410B2 (en) 1999-12-22 2004-05-18 Cymer, Inc. Line narrowed laser with bidirection beam expansion
US6795474B2 (en) 2000-11-17 2004-09-21 Cymer, Inc. Gas discharge laser with improved beam path
US6839372B2 (en) 2000-11-17 2005-01-04 Cymer, Inc. Gas discharge ultraviolet laser with enclosed beam path with added oxidizer
US6504860B2 (en) 2001-01-29 2003-01-07 Cymer, Inc. Purge monitoring system for gas discharge laser
EP1407521A4 (en) * 2001-06-29 2005-11-23 Cymer Inc Line narrowing unit with flexural grating mount
EP1407521A1 (en) * 2001-06-29 2004-04-14 Cymer, Inc. Line narrowing unit with flexural grating mount
US8379687B2 (en) 2005-06-30 2013-02-19 Cymer, Inc. Gas discharge laser line narrowing module
JP2007067123A (en) * 2005-08-31 2007-03-15 National Institute Of Advanced Industrial & Technology Laser pulse compressor
US7321607B2 (en) 2005-11-01 2008-01-22 Cymer, Inc. External optics and chamber support system

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