JPH0431369A - Apparatus for producing ceramic substrate - Google Patents
Apparatus for producing ceramic substrateInfo
- Publication number
- JPH0431369A JPH0431369A JP2135907A JP13590790A JPH0431369A JP H0431369 A JPH0431369 A JP H0431369A JP 2135907 A JP2135907 A JP 2135907A JP 13590790 A JP13590790 A JP 13590790A JP H0431369 A JPH0431369 A JP H0431369A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- ceramic substrate
- grooves
- burning
- binder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 42
- 239000000758 substrate Substances 0.000 title claims abstract description 31
- 239000011521 glass Substances 0.000 claims abstract description 7
- 239000010453 quartz Substances 0.000 claims abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000012780 transparent material Substances 0.000 claims abstract description 5
- 238000004519 manufacturing process Methods 0.000 claims description 17
- 239000011230 binding agent Substances 0.000 abstract description 11
- 230000032798 delamination Effects 0.000 abstract description 7
- 238000009826 distribution Methods 0.000 abstract description 4
- 238000010304 firing Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Furnace Charging Or Discharging (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、セラミック基板の製造装置に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an apparatus for manufacturing a ceramic substrate.
従来の技術
以下図面を参照しながら従来技術のセラミック基板の製
造装置について説明する。BACKGROUND OF THE INVENTION A conventional ceramic substrate manufacturing apparatus will be described below with reference to the drawings.
第４図は従来のセラミック基板の製造装置を示すもので
ある。第４図において、１４は箱型焼成炉である５、１
５はヒーター、１了はセラミック板、１９はセラミック
スペーサ−棒で、以上のように構成されたセラミックセ
ッターを用いて、セラεツク基板を製造する。FIG. 4 shows a conventional ceramic substrate manufacturing apparatus. In Fig. 4, 14 is a box-shaped firing furnace 5, 1
5 is a heater, 1 is a ceramic plate, and 19 is a ceramic spacer rod. Using the ceramic setter constructed as described above, a ceramic substrate is manufactured.
マスセラミック基板１７をセラミックセッター上に載せ
、上記セラミックセッターを多重させ箱型焼成炉に設置
し昇温し、脱バインダー又は焼成をする。The mass ceramic substrate 17 is placed on a ceramic setter, and the ceramic setters are stacked and placed in a box-shaped firing furnace to raise the temperature and remove the binder or fire.
発明が解決しようとする課題
しかしながら上記の従来構成では、ヒーターの嘉射熱を
しゃ断するので、セッター内の温度はセンサーにて制御
されているセッター外温度に一致せず、所定の温度が得
られなかった。その結果、脱バインダー不足や、焼成時
の温度分布が生じ脱バインダー又は焼成後に多層基板に
おいて、層間剥離及びクラックが発生するという欠点を
有ｌ−でいた。Problems to be Solved by the Invention However, in the conventional configuration described above, since the radiation heat of the heater is cut off, the temperature inside the setter does not match the temperature outside the setter, which is controlled by a sensor, and a predetermined temperature cannot be obtained. There wasn't. As a result, there have been disadvantages such as insufficient binder removal and temperature distribution during firing, resulting in delamination and cracking in the multilayer substrate after binder removal or firing.
本発明は上記従来の問題点を解決するもので、ヒーター
の輻射熱を１−７や断すること無く、セラミック基板を
脱バインダー又は焼成でき層間剥離及びクランクが無い
信頼性の高いセラミック基板を提供することを目的とす
る。The present invention solves the above-mentioned conventional problems, and provides a highly reliable ceramic substrate that can be binder-removed or fired without cutting off the radiant heat of the heater, and is free from delamination and cranking. The purpose is to
課題を解決するだめの手段
この目的を達成するために本発明のセラミック基板の製
造設備は、溝を設けた支柱もしくは、板等からなり、セ
ラミック又はガラス等の透明な材料で構成されている。Means for Solving the Problems In order to achieve this object, the ceramic substrate manufacturing equipment of the present invention consists of columns or plates provided with grooves, and is constructed of a transparent material such as ceramic or glass.
作用
本発明は上記設備によって、セラミック基板の脱バイン
ダー又は焼成をヒーターからの輻射熱を妨げることなく
、上記セラミック基板を均一に昇温することができ、不
完全な脱バインダーによる層間剥離がなく、不均一な熱
分布による収縮率のバラツキの少ない高品質のセラミッ
ク基板を得ることができる。Effect of the present invention With the above-mentioned equipment, the temperature of the ceramic substrate can be raised uniformly without interfering with the radiant heat from the heater during binder removal or firing of the ceramic substrate, and there is no delamination due to incomplete binder removal, and there is no problem. A high quality ceramic substrate with less variation in shrinkage rate due to uniform heat distribution can be obtained.
実施例
以下本発明の一実施例について第１図を参照しながら説
明する。EXAMPLE An example of the present invention will be described below with reference to FIG.
１１Ｌは石英を主成分とする耐熱ガラスでできた基板の
製造設備であり、セラミック基板を置くだめの溝２ａ〜
２ｘを有する。11L is a manufacturing equipment for substrates made of heat-resistant glass whose main component is quartz, and there are grooves 2a to 11 for placing ceramic substrates.
It has 2x.
この製造設備１１Ｌを使用する場合は溝２ａ〜２ｘにセ
ラミック板４を保持し、その上にセラミック基板５を配
置し、この後、ヒーター６を有する焼成炉内７に設置す
ることができるっ
以上のように構成されたセラミック基板の製造設備につ
いて、以下使用方法を説明するっまず、セラミック基板
６をのせたセラミック板を製造設備１ａに保持させる。When using this manufacturing equipment 11L, it is possible to hold the ceramic plate 4 in the grooves 2a to 2x, place the ceramic substrate 5 thereon, and then install it in the firing furnace 7 having the heater 6. The method of using the ceramic substrate manufacturing equipment configured as above will be described below.First, a ceramic plate on which a ceramic substrate 6 is mounted is held in the manufacturing equipment 1a.
次に製造設備１ａを焼成炉内に設置して、脱バインダー
又は焼成させる。Next, the manufacturing equipment 1a is installed in a firing furnace, and the binder is removed or fired.
以上のように本実施例によれば、溝を設けた支柱もしく
は板からなるランクを石英を主成分とする耐熱ガラスで
構成することにより、箱型焼成炉内のヒーター６の輻射
熱を妨げることなくセラミック多層基板の脱バインダー
又は焼成ができ、層間剥離、クラックの無い良質なセラ
ばツク多層基板の作製ができる。As described above, according to this embodiment, by constructing the ranks made of grooved columns or plates with heat-resistant glass mainly composed of quartz, the radiant heat of the heater 6 in the box-shaped firing furnace is not obstructed. It is possible to remove the binder or sinter the ceramic multilayer substrate, and to produce a high quality ceramic multilayer substrate without delamination or cracks.
第２図は他の実施例の製造設備であり、第１図の実施例
と同様に溝３ａ〜３１にセラεツク板４を保持しその上
にセラミック基板６を配置するととにより同様の効果を
得ることができる。FIG. 2 shows the manufacturing equipment of another embodiment. Similar to the embodiment of FIG. can be obtained.
発明の効果
以」二のように本発明は、溝を設けた支柱もしくば、板
等からなり、セラミック又はガラス等の透明の材料で構
成することにより、セラミック基板の脱バインダー又は
焼成を均一な熱分布の中で行え、層間剥離やクラックを
無くすることができる優れたセラミック基板の製造装置
を実現できるものである。Effects of the Invention As described in 2., the present invention makes it possible to uniformly remove the binder or sinter the ceramic substrate by constructing the pillar or plate with grooves and using a transparent material such as ceramic or glass. This makes it possible to realize an excellent ceramic substrate manufacturing apparatus that can be manufactured under heat distribution and eliminates delamination and cracks.
第１図ム、Ｂは本発明の一実施例におけるセラミック基
板の製造装置の斜視図、第２図は上記実施例において、
焼成炉内に設置した断面図、第３図および第４図は従来
のセラばツク基板の製造装置の断面図である。
１ａ 、 １ｂ−−−−製造設備、２ａ 〜２Ｘ、３ｅ
Ｌ 〜３１・・・・・溝、４・・・・・・セラミック板
、６−＝ヒータ、７・・・・・・焼成炉。
代理人の氏名 弁理士 粟 野 重 孝 ほか１名１１
１ 図
掻−製葭奴傷
ＱｃＬ〜’２ｘ−−二算
（Ｖ３２
３シ〜３ｉ
ｔ危鼓傳
１＝：う乏Ｅ−ノつ７Ｊ→】ｉミ
を大１．′ノー！１；林
し−９Figures 1 and 1B are perspective views of a ceramic substrate manufacturing apparatus in an embodiment of the present invention, and Figure 2 is a perspective view of a ceramic substrate manufacturing apparatus in an embodiment of the present invention.
3 and 4 are cross-sectional views of a conventional ceramic board manufacturing apparatus. 1a, 1b----manufacturing equipment, 2a to 2X, 3e
L ~31...groove, 4...ceramic plate, 6-=heater, 7...firing furnace. Name of agent: Patent attorney Shigetaka Awano and 1 other person11
1 Figure cut-SeikokukiQcL~'2x--Two calculations (V32 3shi~3i t crisis 1=: Ugashi E-notsu 7J→]i Mi 1.'No! 1; Hayashi Shi-9
Claims (2)
ットできる溝を複数有するセラミック基板製造装置。(1) A ceramic substrate manufacturing device made of a transparent material and having multiple grooves into which a ceramic setter can be set.
を用いたことを特徴とする請求項１記載のセラミック基
板製造装置。(2) The ceramic substrate manufacturing apparatus according to claim 1, wherein heat-resistant glass containing quartz as a main component is used as the transparent material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2135907A JPH0431369A (en) | 1990-05-25 | 1990-05-25 | Apparatus for producing ceramic substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2135907A JPH0431369A (en) | 1990-05-25 | 1990-05-25 | Apparatus for producing ceramic substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0431369A true JPH0431369A (en) | 1992-02-03 |
Family
ID=15162620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2135907A Pending JPH0431369A (en) | 1990-05-25 | 1990-05-25 | Apparatus for producing ceramic substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0431369A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021509758A (en) * | 2018-04-18 | 2021-04-01 | エルジー・ケム・リミテッド | Firing cartridge |
-
1990
- 1990-05-25 JP JP2135907A patent/JPH0431369A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021509758A (en) * | 2018-04-18 | 2021-04-01 | エルジー・ケム・リミテッド | Firing cartridge |
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