JPH04309858A - Carbon dioxide gas detection sensor - Google Patents
Carbon dioxide gas detection sensorInfo
- Publication number
- JPH04309858A JPH04309858A JP3074950A JP7495091A JPH04309858A JP H04309858 A JPH04309858 A JP H04309858A JP 3074950 A JP3074950 A JP 3074950A JP 7495091 A JP7495091 A JP 7495091A JP H04309858 A JPH04309858 A JP H04309858A
- Authority
- JP
- Japan
- Prior art keywords
- carbon dioxide
- detection sensor
- metal carbonate
- dioxide gas
- gas detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title claims abstract description 66
- 238000001514 detection method Methods 0.000 title claims abstract description 37
- 239000001569 carbon dioxide Substances 0.000 title claims abstract description 33
- 229910002092 carbon dioxide Inorganic materials 0.000 title claims abstract description 33
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims abstract description 9
- -1 alkaline-earth metal carbonate Chemical class 0.000 claims abstract description 9
- 229910000288 alkali metal carbonate Inorganic materials 0.000 claims abstract description 7
- 150000008041 alkali metal carbonates Chemical class 0.000 claims abstract description 7
- 239000000203 mixture Substances 0.000 claims abstract description 5
- 239000010416 ion conductor Substances 0.000 claims description 15
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 claims description 10
- 229910000019 calcium carbonate Inorganic materials 0.000 claims description 3
- 229910000018 strontium carbonate Inorganic materials 0.000 claims description 3
- 150000004649 carbonic acid derivatives Chemical class 0.000 claims description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims 1
- 239000011575 calcium Substances 0.000 claims 1
- 229910052744 lithium Inorganic materials 0.000 claims 1
- 229910052700 potassium Inorganic materials 0.000 claims 1
- 239000011591 potassium Substances 0.000 claims 1
- 229910052708 sodium Inorganic materials 0.000 claims 1
- 239000011734 sodium Substances 0.000 claims 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 abstract 2
- 239000007789 gas Substances 0.000 description 18
- 239000008188 pellet Substances 0.000 description 12
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 239000000758 substrate Substances 0.000 description 6
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 4
- 229910000029 sodium carbonate Inorganic materials 0.000 description 4
- 239000007784 solid electrolyte Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 229910000510 noble metal Inorganic materials 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 2
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 description 2
- 229910052808 lithium carbonate Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 229910000027 potassium carbonate Inorganic materials 0.000 description 2
- 239000011540 sensing material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、固体電解質型の炭酸ガ
スセンサに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid electrolyte type carbon dioxide sensor.
【０００２】0002
【従来の技術】現在開発されている固体電解質型のセン
サは、イオン伝導体からなる固体電解質板体の両面に電
極を設けて構成されているのが普通である。こうした固
体電解質型の炭酸ガスセンサとしては、例えば炭酸カリ
ウムをプレス成形したのち焼成したペレット状のイオン
伝導体の両側面に金電極を設けて検知電極と基準電極と
した素子を用いた炭酸ガスセンサＸがある（第１回化学
センサ国際会議講演予稿集３５３頁、１９８３年９月）
。2. Description of the Related Art Solid electrolyte sensors currently being developed are generally constructed by providing electrodes on both sides of a solid electrolyte plate made of an ion conductor. An example of such a solid electrolyte type carbon dioxide sensor is the carbon dioxide sensor Yes (Proceedings of the 1st International Conference on Chemical Sensors, page 353, September 1983)
.
【０００３】このセンサにおいては、被測定ガスに接す
る検知電極と基準電極との間の電位差を測定することに
よりガス中の炭酸ガス濃度を検出できるようになってい
る。しかし、被測定ガスに含まれる水分によって起電力
特性が変化し、湿度による誤差の補正が必要であるため
に実用的でないという欠点がある。[0003] In this sensor, the concentration of carbon dioxide in the gas can be detected by measuring the potential difference between a detection electrode in contact with the gas to be measured and a reference electrode. However, the electromotive force characteristics change depending on the moisture contained in the gas to be measured, and it is necessary to correct errors due to humidity, which makes it impractical.
【０００４】0004
【発明が解決しようとする課題】本発明は、上記の従来
技術における問題点を解消して、湿度特性が改良された
高信頼性の炭酸ガス検知センサを提供することを目的と
している。SUMMARY OF THE INVENTION It is an object of the present invention to solve the problems in the prior art described above and to provide a highly reliable carbon dioxide detection sensor with improved humidity characteristics.
【０００５】[0005]
【課題を解決するための手段】上記の目的を達成するた
め、本発明の炭酸ガス検知センサは、イオン伝導体を挟
んで２個の電極を対設しそれぞれの電極と接触するガス
の濃度の差に対応する電気信号を出力するガスセンサに
おいて、該イオン伝導体としてアルカリ金属炭酸塩１モ
ルに対してアルカリ土類金属炭酸塩が１モルを超える混
合物から形成されたものを用いた。[Means for Solving the Problems] In order to achieve the above object, the carbon dioxide gas detection sensor of the present invention has two electrodes arranged opposite to each other with an ion conductor in between, and the concentration of gas in contact with each electrode is controlled. In a gas sensor that outputs an electrical signal corresponding to a difference, an ion conductor formed from a mixture of more than 1 mole of alkaline earth metal carbonate to 1 mole of alkali metal carbonate was used.
【０００６】本発明の炭酸ガス検知センサのイオン伝導
体に用いられるアルカリ土類金属炭酸塩は、好ましくは
炭酸カルシウム、炭酸ストロンチウム、炭酸バリウムか
ら選ばれたものであり、またアルカリ金属炭酸塩は、炭
酸リチウム、炭酸ナトリウム、炭酸カリウムから選ばれ
た一つ以上の炭酸塩であることが好ましい。The alkaline earth metal carbonate used in the ion conductor of the carbon dioxide detection sensor of the present invention is preferably selected from calcium carbonate, strontium carbonate, and barium carbonate; Preferably, the carbonate is one or more carbonates selected from lithium carbonate, sodium carbonate, and potassium carbonate.
【０００７】これらの中から選ばれたアルカリ土類金属
炭酸塩とアルカリ金属炭酸塩とは、それぞれ粉末状で均
一に混合したのちプレスしてペレット状などに成形し、
更に必要に応じて熱処理するなどして固溶体としてもよ
い。この際の配合割合は材料の組合せによっても多少異
なるが、アルカリ金属炭酸塩１モルに対してアルカリ土
類金属炭酸塩が１モルを超えるように配合するのがよい
。[0007] The alkaline earth metal carbonate and the alkali metal carbonate selected from these are each mixed uniformly in powder form, and then pressed to form a pellet or the like.
Furthermore, if necessary, heat treatment may be performed to form a solid solution. Although the blending ratio at this time varies somewhat depending on the combination of materials, it is preferable to blend the alkaline earth metal carbonate so that the amount of the alkaline earth metal carbonate exceeds 1 mole per 1 mole of the alkali metal carbonate.
【０００８】このようなイオン伝導体を用いて組み立て
られた本発明の炭酸ガス検知センサの構造を図１に示す
。図において、１は検知素子であり、２は検知電極であ
る。この検知電極２は、電極部２ａをイオン性の検知材
料層２ｂで被覆したものである。３は検知素子を構成す
るイオン伝導体ペレット、４は基準電極である。ここで
電極部２ａおよび基準電極４は、例えば白金、パラジウ
ム、ロジウム、ルテニウム、イリジウム、金、銀等の貴
金属などを真空蒸着やスパッタリング、あるいは貴金属
などを導電材とする導電ペーストなどを印刷するなどの
適宜の方法によってペレット３またはペレット３を載せ
る基板６の面などに対向するように設けることができる
。FIG. 1 shows the structure of a carbon dioxide detection sensor of the present invention assembled using such an ion conductor. In the figure, 1 is a sensing element and 2 is a sensing electrode. This sensing electrode 2 has an electrode portion 2a covered with an ionic sensing material layer 2b. 3 is an ion conductor pellet constituting the detection element, and 4 is a reference electrode. Here, the electrode portion 2a and the reference electrode 4 are formed by vacuum deposition or sputtering of noble metals such as platinum, palladium, rhodium, ruthenium, iridium, gold, and silver, or by printing a conductive paste using noble metals as a conductive material. It can be provided so as to face the pellet 3 or the surface of the substrate 6 on which the pellet 3 is placed by an appropriate method.
【０００９】このように構成された検知素子１は、一方
の面上にヒータ７を設けたセラミック基板６の他方の面
に融着したのち基準電極４の周りをカバー５で封止して
形成されている。なお、ヒータ７は例えば白金、パラジ
ウム、ロジウム、ルテニウム、イリジウム、金、銀等の
貴金属などの電気抵抗膜を真空蒸着やスパッタリング、
あるいはメッキなどの方法によってセラミック基板６の
面上に形成するか、またはこれら貴金属などを導電材と
する導電塗料を印刷するなどの方法によってセラミック
基板６の面に電気抵抗膜を形成することによって設ける
ことができる。The sensing element 1 constructed as described above is formed by fusion bonding to the other surface of a ceramic substrate 6 on which a heater 7 is provided on one surface, and then sealing the reference electrode 4 with a cover 5. has been done. The heater 7 is formed by vacuum evaporation, sputtering,
Alternatively, it is provided by forming an electrically resistive film on the surface of the ceramic substrate 6 by a method such as plating, or by printing a conductive paint using these noble metals as a conductive material. be able to.
【００１０】0010
【作用】本発明の炭酸ガス検知センサは、ヒータに通電
して加熱した状態で被測定ガスを接触させると、ガス中
の炭酸ガスの濃度に対応した起電力が両電極間に出力さ
れる。本発明の炭酸ガス検知センサは、少量のアルカリ
金属炭酸塩と大量のアルカリ土類金属炭酸塩との混合物
から形成されたイオン伝導体を使用しているために、特
別に高温度でなくても良好な検知出力特性を有しており
、湿度による測定誤差はごく僅かである。[Operation] In the carbon dioxide detection sensor of the present invention, when a gas to be measured is brought into contact with the heater in a heated state, an electromotive force corresponding to the concentration of carbon dioxide in the gas is output between both electrodes. Since the carbon dioxide gas detection sensor of the present invention uses an ionic conductor formed from a mixture of a small amount of alkali metal carbonate and a large amount of alkaline earth metal carbonate, it does not require a particularly high temperature. It has good detection output characteristics, and measurement errors due to humidity are very small.
【００１１】[0011]
【実施例】〔実施例１〕炭酸ナトリウムと炭酸バリウム
とをモル比で１：１．１となるよう混合し、１０Ｋｇ／
ｃｍ２ の圧力でプレス成形して３ｍｍ×３ｍｍ×０．
５ｍｍのイオン伝導体ペレットとした。一方、裏面に白
金をスパッタすることにより発熱抵抗線を形成してヒー
タとした４ｍｍ×３ｍｍ×０．３ｍｍのアルミナ系セラ
ミック基板の上面に、更に白金をスパッタすることによ
り長辺に沿って両側に幅０．５ｍｍの電極を設けたもの
を用意した。[Example] [Example 1] Sodium carbonate and barium carbonate were mixed at a molar ratio of 1:1.1, and 10 kg/
Press molded at a pressure of cm2 to 3mm x 3mm x 0.
It was made into a 5 mm ion conductor pellet. On the other hand, platinum was sputtered on the back surface to form heat-generating resistance wires on the top surface of the 4 mm x 3 mm x 0.3 mm alumina ceramic substrate used as a heater, and platinum was further sputtered on both sides along the long sides. A sample provided with electrodes having a width of 0.5 mm was prepared.
【００１２】次に４フッ化エチレン樹脂の台座に貫通し
て設けたヒータ用ピンと電極端子用ピンに対して、基板
のヒータ端末と電極とをそれぞれ引出し線で結合するこ
とにより、台座に基板を固定した。続いて、基板の上面
にイオン伝導体ペレットを載せたのちヒータに通電して
ペレットを融着固定し、更に白金電極の一方を設けたペ
レット部分の周りにアルミナ系無機耐熱塗料を塗布して
雰囲気ガスに対するシールを行い、これを基準電極とし
た。[0012] Next, the heater terminal and the electrode of the board are connected to the heater pin and electrode terminal pin provided through the base made of tetrafluoroethylene resin with lead wires, thereby attaching the board to the base. Fixed. Next, after placing an ion conductor pellet on the top surface of the substrate, the heater is energized to fuse and fix the pellet, and an alumina-based inorganic heat-resistant paint is applied around the pellet part where one side of the platinum electrode is provided, and the atmosphere is It was sealed against gas and used as a reference electrode.
【００１３】このようにして図１のように組み立てた炭
酸ガス検知センサＡを、図２の測定装置のチャンバ９に
組み込み、ヒータ７によって所定の温度に加熱し、次に
流量計１０、１１、１２を介して所定のガス濃度となる
よう空気、酸素、炭酸ガスを混合し、また水槽１３を通
過させて所定の湿度に調整したうえ、チャンバ９に供給
した。こうして検知電極２と基準電極４との間の起電力
を電圧計８で測定した。なお、１４は外気遮断用の水槽
、１５は排気口である。The carbon dioxide detection sensor A thus assembled as shown in FIG. 1 is assembled into the chamber 9 of the measuring device shown in FIG. Air, oxygen, and carbon dioxide gas were mixed to a predetermined gas concentration through a water tank 12, and after being adjusted to a predetermined humidity by passing through a water tank 13, the mixture was supplied to a chamber 9. In this way, the electromotive force between the sensing electrode 2 and the reference electrode 4 was measured with the voltmeter 8. Note that 14 is a water tank for blocking outside air, and 15 is an exhaust port.
【００１４】こうして素子温度を５５０℃として、湿り
空気中及び乾燥空気中の炭酸ガスの濃度２００〜５００
０ｐｐｍ に対する検知出力特性を測定し、その結果を
図３に示した。この結果を見ると、本発明の炭酸ガス検
知センサＡは湿度５０％の空気中でも乾燥空気中とほぼ
同一の検知出力特性を有し、湿度の影響をごく僅かしか
受けないことがわかる。[0014] Thus, when the element temperature is set at 550°C, the concentration of carbon dioxide in humid air and dry air is 200 to 500°C.
The detection output characteristics for 0 ppm were measured, and the results are shown in FIG. Looking at the results, it can be seen that the carbon dioxide detection sensor A of the present invention has almost the same detection output characteristics even in air with a humidity of 50% as in dry air, and is only slightly affected by humidity.
【００１５】〔比較例１〕炭酸ナトリウムと炭酸バリウ
ムとをモル比で１：０．８となるよう混合した他は実施
例１と全く同様にして炭酸ガス検知センサａを得た。こ
の炭酸ガス検知センサａについて実施例１と全く同様に
して検知出力特性を測定し、その結果を図４に示したが
、測定誤差が大きいことがわかる。[Comparative Example 1] A carbon dioxide gas detection sensor a was obtained in the same manner as in Example 1 except that sodium carbonate and barium carbonate were mixed at a molar ratio of 1:0.8. The detection output characteristics of this carbon dioxide detection sensor a were measured in exactly the same manner as in Example 1, and the results are shown in FIG. 4, and it can be seen that the measurement error was large.
【００１６】〔実施例２ないし４〕炭酸リチウムと炭酸
カルシウムとをモル比で１：１．１となるよう混合して
作成したイオン伝導体ペレットを用いたほかは実施例１
と同様にして、炭酸ガス検知センサＢを組み立てた。[Examples 2 to 4] Example 1 except that ion conductor pellets prepared by mixing lithium carbonate and calcium carbonate at a molar ratio of 1:1.1 were used.
Carbon dioxide gas detection sensor B was assembled in the same manner.
【００１７】また同様にして炭酸ナトリウムと炭酸スト
ロンチウムとをモル比で１：１．１となるよう混合して
作成したイオン伝導体ペレット、及び炭酸カリウムと炭
酸バリウムとをモル比で１：１．１となるよう混合して
作成したイオン伝導体ペレットを用いて上記と同様にし
て炭酸ガス検知センサＣ及びＤを組み立てた。これらの
炭酸ガス検知センサは、いずれも優れた耐湿特性を有し
ていることがわかった。Similarly, ion conductor pellets were prepared by mixing sodium carbonate and strontium carbonate in a molar ratio of 1:1.1, and potassium carbonate and barium carbonate were mixed in a molar ratio of 1:1. Carbon dioxide gas detection sensors C and D were assembled in the same manner as described above using ion conductor pellets prepared by mixing 1. It was found that all of these carbon dioxide gas detection sensors have excellent moisture resistance characteristics.
【００１８】[0018]
【発明の効果】以上のように、本発明の炭酸ガス検知セ
ンサは検知出力特性が湿度の影響を受け難いという特長
があるほか、比較的に低温度で精度の良い検知ができ、
更には効率よく素子を加熱することができるために消費
電力が少なくて済み、従って長寿命であり、また構造が
簡単で製造が容易であるという利点もある。[Effects of the Invention] As described above, the carbon dioxide detection sensor of the present invention has the feature that the detection output characteristics are not easily affected by humidity, and also allows for highly accurate detection at relatively low temperatures.
Furthermore, since the element can be heated efficiently, power consumption is low, and therefore the device has a long life, and has the advantage of being simple in structure and easy to manufacture.
【図１】本発明の炭酸ガス検知センサの構成図である。FIG. 1 is a configuration diagram of a carbon dioxide detection sensor of the present invention.
【図２】炭酸ガス検知センサの検知出力特性測定装置の
構成図である。FIG. 2 is a configuration diagram of a detection output characteristic measuring device of a carbon dioxide detection sensor.
【図３】本発明の実施例１である炭酸ガス検知センサＡ
の湿り空気中および乾燥空気中における炭酸ガス濃度に
対する検知出力特性図である。FIG. 3: Carbon dioxide gas detection sensor A, which is Embodiment 1 of the present invention.
FIG. 3 is a detection output characteristic diagram for carbon dioxide concentration in humid air and dry air.
【図４】比較例１の炭酸ガス検知センサａの湿り空気中
および乾燥空気中における炭酸ガス濃度に対する検知出
力特性図である。FIG. 4 is a detection output characteristic diagram of the carbon dioxide gas detection sensor a of Comparative Example 1 with respect to carbon dioxide concentration in humid air and dry air.
１ 検知素子２
検知電極２ａ
電極部
２ｂ 検知材料層３
イオン伝導体ペレット４
基準電極５
カバー６ セラミッ
ク基板７ ヒータ８
電圧計９
チャンバ１０，１１，１２ 流量計1 Detection element 2
Detection electrode 2a
Electrode part 2b Sensing material layer 3
Ion conductor pellet 4
Reference electrode 5
Cover 6 Ceramic substrate 7 Heater 8
Voltmeter 9
Chamber 10, 11, 12 flow meter
Claims (3)
設しそれぞれの電極と接触するガスの濃度の差に対応す
る電気信号を出力するガスセンサにおいて、該イオン伝
導体としてアルカリ金属炭酸塩１モルに対してアルカリ
土類金属炭酸塩が１モルを超える混合物から形成された
ものを用いたことを特徴とする炭酸ガス検知センサ。Claim 1: A gas sensor in which two electrodes are disposed opposite to each other with an ionic conductor in between, and output an electrical signal corresponding to a difference in concentration of gas in contact with each electrode, wherein the ionic conductor is an alkali metal carbonate. A carbon dioxide gas detection sensor characterized in that it is formed from a mixture of more than 1 mole of alkaline earth metal carbonate per mole.
、ストロンチウム又はバリウムの炭酸塩のいずれかであ
ることを特徴とする請求項１記載の炭酸ガス検知センサ
。2. The carbon dioxide gas detection sensor according to claim 1, wherein the alkaline earth metal carbonate is one of calcium, strontium, or barium carbonate.
リウム又はカリウムのいずれか一つ以上の炭酸塩である
ことを特徴とする請求項１又は２記載の炭酸ガス検知セ
ンサ。3. The carbon dioxide detection sensor according to claim 1, wherein the alkali metal carbonate is one or more carbonates of lithium, sodium, or potassium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3074950A JP2525517B2 (en) | 1991-04-08 | 1991-04-08 | Carbon dioxide detection sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3074950A JP2525517B2 (en) | 1991-04-08 | 1991-04-08 | Carbon dioxide detection sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04309858A true JPH04309858A (en) | 1992-11-02 |
| JP2525517B2 JP2525517B2 (en) | 1996-08-21 |
Family
ID=13562117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3074950A Expired - Lifetime JP2525517B2 (en) | 1991-04-08 | 1991-04-08 | Carbon dioxide detection sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2525517B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006504973A (en) * | 2002-11-01 | 2006-02-09 | ハネウェル・インターナショナル・インコーポレーテッド | Gas sensor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04213049A (en) * | 1990-10-23 | 1992-08-04 | Yazaki Corp | Carbon-dioxide-gas detecting sensor |
-
1991
- 1991-04-08 JP JP3074950A patent/JP2525517B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04213049A (en) * | 1990-10-23 | 1992-08-04 | Yazaki Corp | Carbon-dioxide-gas detecting sensor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006504973A (en) * | 2002-11-01 | 2006-02-09 | ハネウェル・インターナショナル・インコーポレーテッド | Gas sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2525517B2 (en) | 1996-08-21 |
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