JPH04309849A - Pinhole inspection device - Google Patents

Pinhole inspection device

Info

Publication number
JPH04309849A
JPH04309849A JP10196891A JP10196891A JPH04309849A JP H04309849 A JPH04309849 A JP H04309849A JP 10196891 A JP10196891 A JP 10196891A JP 10196891 A JP10196891 A JP 10196891A JP H04309849 A JPH04309849 A JP H04309849A
Authority
JP
Japan
Prior art keywords
screen
image
inspection
pinhole
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10196891A
Other languages
Japanese (ja)
Inventor
Takakazu Fujii
藤井 孝和
Kiyoshi Miyamoto
宮本 潔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Priority to JP10196891A priority Critical patent/JPH04309849A/en
Publication of JPH04309849A publication Critical patent/JPH04309849A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To perform the inspection for pinholes in a short time without using a plurality of image pick-up devices. CONSTITUTION:A pinhole inspection device consists of a surface light source 1, screen 2, and an image pick-up device 3. The surface light source 1 irradiates a test object 4 from the back, and when pinholes exist on the test object 4, a magnified light image is formed on the screen 2 by the transmission light through the pinhole. The image pick-up device 3 is arranged at the upper position of the screen 2, and a dark screen 8 is arranged between the screen 2 and the image pick-up device 3. The light image on the screen 2 is image-picked- up by the image pick-up device 3, and an image signal is outputted into an image processing device.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】この発明は、例えば紙,ゴム板,
プラスチック板,金属板,セラミック板のようなシート
状物につき、微細なピンホールの有無を検査するのに用
いられるピンホール検査装置に関する。
[Industrial Application Field] This invention is applicable to paper, rubber plates, etc.
The present invention relates to a pinhole inspection device used to inspect sheet-like objects such as plastic plates, metal plates, and ceramic plates for the presence or absence of minute pinholes.

【0002】0002

【従来の技術】従来のその種ピンホール検査装置は、図
4に示す如く、撮像装置20と面光源21とから成るも
ので、撮像装置20の下方に検査位置を設定し、その検
査位置へ透明支持板22上に支持された検査対象23を
導入している。前記面光源21は、拡散板24とランプ
光源25とから成り、ランプ光源25からの光を拡散板
24で拡散して、その拡散光により検査対象23を背後
より照明している。
2. Description of the Related Art A conventional pinhole inspection device of this type is composed of an imaging device 20 and a surface light source 21, as shown in FIG. An inspection object 23 supported on a transparent support plate 22 is introduced. The surface light source 21 is composed of a diffusion plate 24 and a lamp light source 25, and the light from the lamp light source 25 is diffused by the diffusion plate 24, and the inspection object 23 is illuminated from behind by the diffused light.

【0003】0003

【発明が解決しようとする課題】通常、直径が10μ程
度のピンホールを検査するには、前記撮像装置20の観
測視野を1mm×1mm程度に設定する必要がある。例
えば一辺が30cmの正方形状の検査対象23であれば
、1画面の検査に要する時間を0.1秒とすると、検査
対象23を全面検査するのに300×300×0.1=
0.5時間という多大の検査時間がかかる。この検査時
間を短縮するには複数台の撮像装置を用意する必要があ
り、これでは設備費用が高価となって、到底実用に耐え
ないものとなる。
[Problems to be Solved by the Invention] Normally, in order to inspect a pinhole with a diameter of about 10 μm, it is necessary to set the observation field of the imaging device 20 to about 1 mm×1 mm. For example, if the inspection object 23 is square-shaped with a side of 30 cm, and the time required to inspect one screen is 0.1 seconds, it takes 300 x 300 x 0.1 =
The test takes a long time of 0.5 hours. In order to shorten this inspection time, it is necessary to prepare a plurality of imaging devices, which increases the equipment cost and makes it completely impractical.

【0004】この発明は、上記問題に着目してなされた
もので、複数台の撮像装置を用いることなく、ピンホー
ルの検査時間を短縮できるピンホール検査装置を提供す
ることを目的とする。
The present invention has been made in view of the above problem, and an object of the present invention is to provide a pinhole inspection device that can shorten pinhole inspection time without using a plurality of imaging devices.

【0005】[0005]

【課題を解決するための手段】この発明にかかるピンホ
ール検査装置は、面光源とスクリーンと撮像装置とから
成る。前記面光源上には、検査対象を導入して検査する
ための検査位置を設定し、前記面光源に対し前記検査位
置を挟んでスクリーンを対向配置すると共に、前記スク
リーンに向けて前記撮像装置を配置して観測視野を設定
する。
[Means for Solving the Problems] A pinhole inspection device according to the present invention includes a surface light source, a screen, and an imaging device. An inspection position for introducing and inspecting an object to be inspected is set on the surface light source, a screen is placed opposite to the surface light source across the inspection position, and the imaging device is directed toward the screen. Place it and set the observation field.

【0006】[0006]

【作用】検査対象にピンホールが存在すると、面光源か
らの光がピンホールを通過し、その通過光による光像が
スクリーン上に生成される。撮像装置はこの光像を観測
視野内に置いて撮像するが、前記光像はピンホールの形
状より拡大されているので、撮像装置の観測視野を大き
く設定でき、その分検査時間を短縮できる。
[Operation] When a pinhole exists in the object to be inspected, light from a surface light source passes through the pinhole, and an optical image is generated on the screen by the passing light. The imaging device places this optical image within the observation field and images it, but since the optical image is enlarged compared to the shape of the pinhole, the observation field of the imaging device can be set to a large size, and the inspection time can be shortened accordingly.

【0007】[0007]

【実施例】図1は、この発明の一実施例にかかるピンホ
ール検査装置の概略構成を示すもので、面光源1とスク
リーン2と撮像装置3とで構成される。前記面光源1上
にはシート状の検査対象4を検査するための検査位置が
設定され、この検査位置へ透明支持板5上に支持された
検査対象4が導かれる。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a schematic configuration of a pinhole inspection apparatus according to an embodiment of the present invention, which is composed of a surface light source 1, a screen 2, and an imaging device 3. An inspection position for inspecting a sheet-shaped inspection object 4 is set on the surface light source 1, and the inspection object 4 supported on a transparent support plate 5 is guided to this inspection position.

【0008】前記面光源1は、拡散板6とランプ光源7
とから成り、ランプ光源7からの光を拡散板6で拡散し
て、その拡散光により検査対象4を背後より照明する。
The surface light source 1 includes a diffuser plate 6 and a lamp light source 7.
The light from the lamp light source 7 is diffused by the diffuser plate 6, and the inspection object 4 is illuminated from behind by the diffused light.

【0009】前記面光源1に対し前記検査位置を挟みか
つ検査位置と適当な距離隔ててスクリーン2が平行に対
向配置され、前記スクリーン2上には前記撮像装置3を
下方に向けて配置して後記する透過光像を含む観測視野
を設定する。
A screen 2 is arranged parallel to and opposite the surface light source 1 across the inspection position and at an appropriate distance from the inspection position, and the image pickup device 3 is arranged on the screen 2 facing downward. Set the observation field including the transmitted light image described later.

【0010】前記撮像装置3は、スクリーン2上の透過
光像を撮像するためのもので、撮像装置3は前記透過光
像を撮像してその画像信号を図示しない画像処理装置へ
出力する。この画像処理装置は入力画像を2値化し、そ
の2値画像を処理してピンホールの有無を判別する。
The imaging device 3 is for capturing a transmitted light image on the screen 2. The imaging device 3 captures the transmitted light image and outputs the image signal to an image processing device (not shown). This image processing device binarizes an input image, processes the binary image, and determines the presence or absence of a pinhole.

【0011】前記撮像装置3とスクリーン2との間には
スクリーン2を取り巻くように暗幕8が一周配置され、
この暗幕8により外乱光がスクリーン2上に照射される
のを阻止している。前記スクリーン2として拡散板のよ
うな半透光性板材が用いてあるが、前記撮像装置3をス
クリーン2の下方に位置させてスクリーン2上の反射光
像を撮像する場合は、非透光性のものであってもよい。 この場合は、前記暗幕8を設けることが容易でないから
、周囲環境を暗くする必要がある。
A blackout curtain 8 is arranged around the screen 2 between the image pickup device 3 and the screen 2,
This blackout curtain 8 prevents ambient light from being irradiated onto the screen 2. A semi-translucent plate material such as a diffuser plate is used as the screen 2, but when the imaging device 3 is positioned below the screen 2 to capture a reflected light image on the screen 2, a non-translucent plate material is used. It may be of. In this case, since it is not easy to provide the blackout curtain 8, it is necessary to darken the surrounding environment.

【0012】上記構成のピンホール検査装置において、
いま検査対象4を透明支持板5上に支持して検査位置へ
導き、面光源1による背後照明下で撮像装置3により撮
像動作を行う。
[0012] In the pinhole inspection device having the above configuration,
Now, the inspection object 4 is supported on the transparent support plate 5 and guided to the inspection position, and an imaging operation is performed by the imaging device 3 under back illumination by the surface light source 1.

【0013】もし検査対象4にピンホールが存在すると
、面光源1を発した光は、図2に示すように、検査対象
4のピンホール13を通過してスクリーン2の下面に照
射され、その照射光の一部がスクリーン2を透過してス
クリーン2の上面に透過光像9を生成する。この場合に
検査対象4とスクリーン2との間には適当な距離が存在
するから、前記透過光像9は拡大されてピンホール13
の外形より大きな外形となる。
If a pinhole exists in the inspection object 4, the light emitted from the surface light source 1 passes through the pinhole 13 of the inspection object 4 and illuminates the lower surface of the screen 2, as shown in FIG. A portion of the irradiated light passes through the screen 2 and generates a transmitted light image 9 on the upper surface of the screen 2. In this case, since there is an appropriate distance between the inspection object 4 and the screen 2, the transmitted light image 9 is enlarged and the pinhole 13
The outer shape is larger than that of .

【0014】この透過光像9が撮像装置3により撮像さ
れて、その濃淡画像が画像処理装置に取り込まれると、
画像処理装置は濃淡画像を2値化して、図3に示すよう
な2値画像10を生成する。
When this transmitted light image 9 is captured by the imaging device 3 and its gray scale image is taken into the image processing device,
The image processing device binarizes the grayscale image to generate a binary image 10 as shown in FIG.

【0015】図3において、11は前記透過光像9の画
像部分である白画素領域を、12は透過光像9の周囲領
域の画像部分である黒画素領域を、それぞれ示すもので
、画像処理装置は前記白画素領域を構成する白画素数を
計数し、その計数値が所定のしきい値を越えるとき、前
記白画素領域11はピンホール13の透過光像9である
と判断する。
In FIG. 3, reference numeral 11 indicates a white pixel area which is the image part of the transmitted light image 9, and 12 indicates a black pixel area which is the image part of the surrounding area of the transmitted light image 9. The device counts the number of white pixels constituting the white pixel area, and when the counted value exceeds a predetermined threshold value, determines that the white pixel area 11 is the transmitted light image 9 of the pinhole 13.

【0016】いま仮にピンホール13の直径が10μで
ある仮定し、透過光像9の直径が100μに拡大された
場合では、撮像装置3の観測視野を10mm×10mm
程度に設定し得る。この場合に一辺が30cmの正方形
状の検査対象4であれば、1画面の検査に要する時間を
0.1秒とすると、検査対象4を全面検査するのに90
秒の時間でよく、検査時間は従来のものと比較して1/
100となる。
Assuming now that the diameter of the pinhole 13 is 10μ, and the diameter of the transmitted light image 9 is expanded to 100μ, the observation field of the imaging device 3 will be 10mm x 10mm.
It can be set to a certain degree. In this case, if the inspection object 4 is a square with a side of 30 cm, and the time required to inspect one screen is 0.1 seconds, it will take 90 minutes to inspect the entire surface of the inspection object 4.
The inspection time is only 1/2 seconds compared to conventional methods.
It becomes 100.

【0017】[0017]

【発明の効果】この発明は上記の如く、面光源上に検査
対象を導入して検査するための検査位置を設定し、前記
面光源に対し前記検査位置を挟んでスクリーンを対向配
置すると共に、前記スクリーンに向けて前記撮像装置を
配置して観測視野を設定するようにしたから、スクリー
ン上に検査対象が有するピンホールの外形を拡大して写
すことができる。このため撮像装置の観測視野を大きく
設定することが可能となり、複数台の撮像装置を用いる
ことなく、ピンホールを短時間で検査でき、ピンホール
の検査時間を大幅に短縮できるという効果を奏する。
Effects of the Invention As described above, the present invention sets an inspection position for introducing and inspecting an object onto a surface light source, and arranges a screen opposite to the surface light source across the inspection position. Since the observation field is set by arranging the imaging device facing the screen, it is possible to enlarge and photograph the outline of the pinhole that the inspection object has on the screen. Therefore, it is possible to set a large observation field of the imaging device, and pinholes can be inspected in a short time without using a plurality of imaging devices, resulting in the effect that the pinhole inspection time can be significantly shortened.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】この発明の一実施例にかかるピンホール検査装
置の概略構成を示す断面図である。
FIG. 1 is a sectional view showing a schematic configuration of a pinhole inspection device according to an embodiment of the present invention.

【図2】面光源からの光がピンホールを通過する状況を
示す断面図である。
FIG. 2 is a cross-sectional view showing a situation in which light from a surface light source passes through a pinhole.

【図3】透過光像の2値画像を示す説明図である。FIG. 3 is an explanatory diagram showing a binary image of a transmitted light image.

【図4】従来例の概略構成を示す断面図である。FIG. 4 is a sectional view showing a schematic configuration of a conventional example.

【符号の説明】[Explanation of symbols]

1    面光源 2    スクリーン 3    撮像装置 1         Surface light source 2 Screen 3 Imaging device

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  検査対象におるけピンホールの有無を
検査するためのピンホール検査装置であって、面光源と
スクリーンと撮像装置とから成り、前記面光源上には、
検査対象を導入して検査するための検査位置を設定し、
前記面光源に対し前記検査位置を挟んでスクリーンを対
向配置すると共に、前記スクリーンに向けて前記撮像装
置を配置して観測視野が設定されて成るピンホール検査
装置。
1. A pinhole inspection device for inspecting the presence or absence of pinholes in an object to be inspected, comprising a surface light source, a screen, and an imaging device, and on the surface light source:
Set the inspection position for introducing and inspecting the inspection target,
A pinhole inspection device, wherein a screen is disposed opposite to the surface light source with the inspection position in between, and the imaging device is disposed facing the screen to set an observation field.
JP10196891A 1991-04-05 1991-04-05 Pinhole inspection device Pending JPH04309849A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10196891A JPH04309849A (en) 1991-04-05 1991-04-05 Pinhole inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10196891A JPH04309849A (en) 1991-04-05 1991-04-05 Pinhole inspection device

Publications (1)

Publication Number Publication Date
JPH04309849A true JPH04309849A (en) 1992-11-02

Family

ID=14314672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10196891A Pending JPH04309849A (en) 1991-04-05 1991-04-05 Pinhole inspection device

Country Status (1)

Country Link
JP (1) JPH04309849A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001035084A1 (en) * 1998-05-12 2001-05-17 Hamamatsu Photonics K.K. Optical inspection apparatus
CN110132980A (en) * 2019-05-13 2019-08-16 无锡先导智能装备股份有限公司 Battery testing system, battery manufacturing equipment and battery detection method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001035084A1 (en) * 1998-05-12 2001-05-17 Hamamatsu Photonics K.K. Optical inspection apparatus
EP1231461A1 (en) * 1999-11-11 2002-08-14 Hamamatsu Photonics K.K. Optical inspection apparatus
EP1231461A4 (en) * 1999-11-11 2004-04-21 Hamamatsu Photonics Kk Optical inspection apparatus
US6891612B1 (en) 1999-11-11 2005-05-10 Hamamatsu Photonics K.K. Optical inspection device that detects holes in an object to be inspected
CN100356165C (en) * 1999-11-11 2007-12-19 浜松光子学株式会社 Optical isnpection apparatus
CN110132980A (en) * 2019-05-13 2019-08-16 无锡先导智能装备股份有限公司 Battery testing system, battery manufacturing equipment and battery detection method

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