JPH04308038A - Parts accompanied with rolling or sliding - Google Patents

Abstract

PURPOSE:To provide parts accompanied with rolling or sliding, improved in accuracy and wear resistance by irradiating a material to be worked with energy beam, quench-hardening and forming the quench-hardened surface as compressive stress range after giving the optimum surface hardness to this material to be worked. CONSTITUTION:By irradiating the part for raceway surface or sliding surface in the material 1 to be worked with the high energy beam 2, this part is quench- hardened, and then, this quench-hardening treating surface 3 is formed as compressive stress range.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention relates to parts that roll or slide, and in particular to accuracy and wear resistance of parts that roll or slide used in rolling bearings, sliding bearings, rolling guides, sliding guides, etc. Regarding improvement.

0002

[Prior Art] Conventionally, rolling or sliding parts used in rolling bearings, sliding bearings, rolling guides, sliding guides, etc., such as spherical bearings for pivot bearings, cages for rolling bearings, rolling guides and sliding guides, etc. For parts that have curved surfaces and roll or slide, such as guide surfaces, etc., cut out a material blank, apply plastic working to the blank, press work into the desired curved shape, and then heat treat the blank. The whole or surface of the blank is hardened to impart wear resistance, and curved parts and mounting standards are used to solve problems such as deformation of the blank surface, poor surface roughness, and black discoloration of the surface caused by the heat treatment. It is manufactured by cutting and lapping the surface, etc.

[0003] Furthermore, when a desired portion of the blank is hardened using a high-energy beam such as a laser beam as the heat treatment, problems such as deformation of the blank, poor surface roughness, and black discoloration of the surface may occur. To solve this problem, we manufacture the product by grinding or lapping the curved surface and the mounting reference surface.

0004

[Problems to be Solved by the Invention] However, in order to perform grinding or lapping on curved surfaces or attachment reference surfaces as in the above method, it is necessary to use a special jig and perform the process one by one over a long period of time. It is time-consuming because it requires
Since productivity cannot be improved, there is a problem in that it causes an increase in costs.

Therefore, as disclosed in JP-A-58-39728 and JP-A-61-92734, after hardening the workpiece by irradiating it with a high-energy beam such as a laser beam, There is a conventional example of applying molding processing (plastic processing).

However, in the conventional examples disclosed in JP-A-58-39728 and JP-A-61-92734, after partially hardening the workpiece with a high-energy beam, Since the hardened part undergoes plastic deformation, and there is no teaching regarding plastic deformation of the hardened part, it can be applied as a member for parts such as bearings and guides that require appropriate surface hardness (for example, HRC58 or higher). It wasn't.

[0007] Therefore, the present invention aims to solve such problems, and the workpiece is quenched and hardened by irradiating the workpiece with a high-energy beam to obtain the optimum surface hardness for the workpiece. The purpose of the present invention is to provide a rolling or sliding component that prevents the occurrence of cracks and improves accuracy and wear resistance by molding the quench-hardened surface into a compressive stress region.

[0008]

[Means for Solving the Problem] In order to achieve this object, the present invention irradiates a desired portion of a workpiece with an energy beam to harden it by quenching, and then molds the workpiece into a desired shape. In a part that involves rolling or sliding, the workpiece is irradiated with an energy beam from the raceway surface or the sliding surface to quench and harden this part, and then the quench-hardened surface is used as a compressive stress area. The present invention provides a part that rolls or slides and is made of a molded member.

[0009]

[Operation] To easily quench and harden the desired part of the material,
It is effective to irradiate the desired portion with an energy beam, particularly a high energy beam. In order to give parts that roll or slide sufficiently wear resistance to withstand severe use, quench hardening treatment or the like is applied to the raceway or sliding surface of the part (or other parts that roll or slide). It is important to have the optimum surface hardness for the contact surfaces (contact surfaces that come into contact with parts).

[0010] Therefore, at the stage of the material of the part that rolls or slides, the desired part is quenched and hardened by irradiating an energy beam to give the part the necessary surface hardness, and then molded into the desired shape. I tried to do that.

Generally, when the material is bent during molding, tensile stress is generated on the outside (convex side) of the bend, and compressive stress is generated on the opposite concave side. Focusing on these two stresses, during the molding process, the quenched and hardened surface of the material (workpiece) is molded into the desired shape as a compressive stress area (hardened area on the concave side, non-hardened area on the convex side). do. In other words, the hardened area and the unhardened area coexist in the thickness direction of the material, and the unhardened area with low surface hardness takes on plastic deformation, thereby alleviating tensile stress and later forming the track. Since residual compressive stress is applied to the concave side that becomes the surface or sliding surface, it is possible to provide a rolling or sliding component with high precision and improved wear resistance.

0012

Embodiments Next, embodiments of the present invention will be described with reference to the drawings. (First Example) First, as a first example, a spherical bearing of a pivot bearing is manufactured as a rolling or sliding component according to the present invention.

FIG. 1 is a partial sectional view showing the manufacturing process of a spherical bearing for a pivot bearing, and FIG. 2 is a sectional view of a pivot bearing using the spherical bearing shown in FIG. Figure 1 (1)
In the process shown in , the workpiece 1 is S55 with a plate thickness of 2 mm.
I cut out C.

Next, in the step shown in FIG. 1(2), FIG.
The central part of the plate material 1 cut out in the step shown in (1),
That is, when molded into the spherical bearing 11 of the pivot bearing,
The portion that becomes the raceway surface (the portion that rolls into contact with the shaft 12) is irradiated with a YAG laser as a high-energy beam 2 to harden and harden it. The hardening method at this time is to use the apparatus shown in FIG. With the diameter expanded, the rotary table 21 and the X-Y table 22 are moved so that the high-energy beam 2 is irradiated spirally onto the workpiece 1, thereby obtaining a hardened portion 3. At this time, in order to improve hardenability, a cooling pad 20 was used to improve the heat diffusion rate. The conditions for high energy beam 2 are shown in Table 1.
Shown below. Further, FIG. 4 shows the relationship between the depth from the surface of the hardened portion 3 and the hardness. In addition, FIG. 3 shows the high energy beam 2
FIG. 2 is a schematic diagram showing a quench hardening process.

Since the high-energy beam 2 is irradiated onto the flat workpiece 1, it is easy to set the irradiation position and irradiation conditions. Note that no softened portion, which was a concern, was observed in the overlapped portion of the high-energy beam 2.

[0016]

[Table 1] Next, in the step shown in FIG. 1(3), the hardened surface side of the workpiece 1 having the hardened portion 3 obtained in the step shown in FIG. 1(2) is ground. This grinding process is performed by appropriately setting the surface hardness and hardening depth of the hardened portion 3 to optimal values, with reference to the hardness distribution shown in FIG. After that, if you want to further improve the surface condition, lapping is performed. in this way,
Since grinding and lapping are performed on the flat workpiece 1, desired plate thickness dimensions and surface conditions (surface roughness, etc.) can be obtained continuously and easily in a short time.

[0017] In this way, since the plate thickness is finished to a predetermined dimension, even if the workpiece 1 is deformed such as warp due to the quench hardening treatment, it will not adversely affect the subsequent press working process.

Next, in the step shown in FIG.
The hardened surface side of the workpiece 1 obtained in the step shown in (3) is the concave side (
The spherical bearing 11 of the pivot bearing shown in FIG. 1 (5) was obtained by pressing so that the spherical bearing 11 was formed on the raceway surface side). This spherical receiver 1
1. Since the unhardened part with low surface hardness takes charge of plastic deformation, tensile stress is alleviated, and the part that will become the raceway surface by later press processing is given optimal surface hardness and residual compressive stress. As a result, dimensional accuracy and wear resistance can be improved.

[0019] When performing the press working, the workpiece 1
Even if the deformability of the hardened portion 3 is worse than the deformability of the surrounding non-hardened portion, by reducing the thickness of the hardened layer, plastic deformation can occur following the deformation of the surrounding non-hardened portion. There is no problem because it is possible. In addition, even if the boundary between the hardened portion 3 and the non-hardened portion may cause slight discontinuity in the surface shape on the boundary surface after plastic deformation due to a sudden change in plastic deformability, it should be noted that during product design and If this is taken into consideration when designing the mold, there will be no problem.

[0020] The spherical receiver 11 obtained through the above process can maintain good surface roughness even after being subjected to surface finishing such as grinding or lapping, and then subjected to plastic processing such as press working. , it is possible to immediately form the final product shape without the need for finishing processing after plastic working. As a result, the spherical bearing 11 with high precision and excellent wear resistance can be mass-produced efficiently. (Second Embodiment) Next, as a second embodiment of the present invention,
Inner and outer rails (innerway and outerway) of a linear slide are manufactured as components that roll or slide according to the present invention.

FIG. 5(1) is a conceptual diagram of a linear slide (rolling guide), and FIG. 5(2) is a conceptual diagram of A- in FIG. 5(1).
It is an A sectional view. As shown in FIG. 5, in this linear slide, a ball 30 held by a plastic retainer 33 is located between a movable innerway 31 and a fixed outerway 32, and at both ends of the innerway 31 and outerway 32, It has a structure in which a plastic cap 34 is provided to prevent it from coming out.

Using the same workpiece 1 as in the first embodiment, the innerway 31 and outerway 32 of the linear slide are
As the high energy beam 2, Y
It is quenched and hardened by irradiation with AG laser. This hardening method uses the apparatus shown in FIG. 6, and after setting the workpiece 1 on the X-Y table 22, as in the first embodiment, the focus of the high-energy beam 2 is placed on the workpiece 1. The diameter of the high-energy beam 2 is expanded by moving the high-energy beam 2, and the X-Y table 22 is moved so that the high-energy beam 2 is irradiated onto a portion that will become the orbital surface, thereby obtaining a hardened portion 3. At this time as well, in order to improve the hardenability, a pad was applied as in the first embodiment to improve the heat diffusion rate. Table 2 shows the conditions for this high energy beam 2 (YAG laser). still,
FIG. 6 is a schematic diagram showing the quench hardening process using the high-energy beam 2.

[0023]

[Table 2] Thereafter, the same grinding and lapping as in the first example were performed, followed by pressing to obtain an innerway 31 and an outerway 32 with improved precision and wear resistance.

The innerway 31 and outerway 32 obtained through the above steps maintain good surface roughness even after being subjected to surface finishing processing such as grinding or lapping, and then plastic processing such as pressing. Therefore, the final product shape can be created immediately without the need for finishing processing after plastic working. As a result, the inner way 31 and the outer way 32 with high precision and excellent wear resistance can be mass-produced efficiently. (Third Example) Next, as a third example according to the present invention,
A cage for a rolling bearing is manufactured as a component that involves rolling or sliding according to the present invention.

FIG. 7(1) is a plan view of the corrugated retainer.
(2) is a partial side view, and FIG. 7(3) is a conceptual diagram of a rolling bearing using a corrugated cage. As workpiece 1,
A disk-shaped SUS420J2 plate with a thickness of 0.4 mm that can be hardened by quenching or melt-hardened by rapid heating and rapid cooling is used, and the portion where the corrugated retainer 35 contacts the balls 30 when the bearing is rotated as in the previous embodiment. (orbital surface) is irradiated with a high-energy beam 2 to perform a quenching hardening process. Table 3 shows the conditions of the electron beam used as the high-energy beam 2 at this time. Further, the relationship between the depth from the surface of the hardened portion 3 and the hardness is shown in FIG. Thereafter, the disc-shaped plate material is subjected to grinding and lapping, and barrel processing is performed as necessary. Next, the workpiece 1 is press-worked to produce a corrugated retainer 35 for a rolling bearing.

[0026]

[Table 3] Since the corrugated retainer 35 has a hardened contact portion with the balls 30, it has the effect of preventing wear of the corrugated retainer 35. Therefore, it can also be used, for example, as a retainer for bearings used in semiconductor manufacturing equipment, etc., which are used under severe conditions such as high temperatures and vacuum. That is, the lubrication of bearings used in semiconductor manufacturing equipment and the like is often dry or non-lubricated, or a solid lubricant is used, and the lubrication conditions are more likely to cause wear than oil lubrication. Particularly, bearings for semiconductor manufacturing equipment are required to minimize the wear of the retainer because dust generation is a problem. For this reason,
A cage using the member according to the present invention is also effective as a cage for bearings used in semiconductor manufacturing equipment and the like.

Stainless steel is often used as a material for the inner and outer rings, balls, and cages of bearings used in semiconductor manufacturing equipment, etc., but in the case of the present invention, it is particularly preferable to use martensitic stainless steel. be. Also,
When using other types of stainless steel, this can be achieved by irradiating the desired location on the surface with a high-energy beam, melting the surface by rapid heating, and then rapidly cooling to harden the surface. (Fourth Example) Next, as a fourth example according to the present invention,
An outer ring of a needle bearing is manufactured as a component that rolls or slides according to the present invention.

FIG. 9 is a sectional view of the needle bearing. As the workpiece 1, an S55C material with a plate thickness of 1 mm is used, and after punching this into a disk shape, barrel processing is performed to remove burrs. Next, using this disk-shaped blank 1A, the outer ring 3
6 (i.e., the part where the outer ring 36 contacts the needles 38 (rolling elements) when the bearing is rotated) is irradiated with the high energy beam 2 to perform a quench hardening process, resulting in the hardened part shown in FIG. 10. A disk-shaped blank 1A having 3 was obtained. Next, the hardened side is subjected to surface finishing by grinding and lapping, and then one end face is bent at a substantially right angle while being processed into a cylindrical shape using the drawing method shown in FIG. Next, the needle 38 and the retainer 33 are assembled, and then the other end face is bent at a substantially right angle. The above-mentioned quench hardening treatment can be performed only on the desired portions, and the quench hardening treatment can be omitted on the portions to be bent at almost right angles (plastic working) as described above, making processing easier. I can do it. In this way, a cylindrical outer ring 36 shown in FIG. 12 was obtained.

The needle bearing using this outer ring 36 is as follows:
Since the needle 38 always rotates while rolling on and in contact with the hardened portion 3 of the outer ring 36, there is little wear. In addition, an inexpensive needle bearing can be provided.

Furthermore, by forming the hardened portion 3 on the end face needle side as described above, wear can be prevented even if the outer ring 36 comes into contact with the needle end face or the retainer 33. In addition, when the thickness (wall thickness) of the outer ring 36 is thin, for example, 1 mm or less, as in the case of a shell type bearing with a cage shown in FIG. 13, the back side of the hardened portion 3 may be Can be hardened to the surface. In this case, it is preferable to perform a tempering treatment so that the surface hardness of the back surface becomes Hv300-400. After this, surface finishing processing is performed, and then press processing is performed. The tempering treatment prevents cracking during press working, and when the bearing is completed, the hardened portion 3 is also formed on the outer diameter portion of the outer ring 36, so galling is less likely to occur when the bearing is assembled into the housing. It's advantageous. Furthermore, Figure 13 (1)
13(2) shows an open type, and FIG. 13(2) shows one end closed type. (Fifth Example) Next, as a fifth example according to the present invention,
An outer ring of a thin ball bearing is created as a part involving rolling or sliding according to the present invention.

[0031] As the workpiece 1, S5 with a plate thickness of 0.5 mm is used.
5C, and a disk-shaped blank 1A as in the fourth embodiment.
After manufacturing, the part that becomes the raceway surface of the outer ring 36 (i.e., the part where the outer ring 36 contacts the balls 30 when the bearing is rotated) is irradiated with a high-energy beam 2 to perform a quenching hardening process, as shown in FIG. 14. A disk-shaped blank 1A having a hardened portion 3 was obtained. Next, the surface hardness of the hardened portion 3 is Hv4.
A tempering process is performed so that it becomes 00 to 500. Then,
After surface finishing is performed by grinding and lapping the hardened side, pressing (drawing) similar to the fourth embodiment is performed. At this time, by performing the tempering treatment, the deformability of the disc-shaped blank 1A increases and processing becomes easier.
Even if the disk-shaped blank 1A is hardened into a ring shape as shown in FIG. 14, the cylindrical outer ring 36 shown in FIG. 15 can be obtained without cracking.

FIG. 16 is a product sectional view of a thin ball bearing using this outer ring 36. Since this thin ball bearing supports light loads such as office machines and rotates radially, the raceway surface of the outer ring 36 is A surface hardness of 400 to 500 Hv is sufficient. The tempering treatment was performed so that the raceway surface of the outer ring 36 had a desired hardness according to the relationship between the tempering conditions (temperature, time) and Vickers hardness shown in FIG. 17.

The thin ball bearing using this outer ring 36 has less wear because the balls 30 always rotate on and in contact with the hardened portion 3 of the outer ring 36. In addition, an inexpensive thin ball bearing can be provided.

In this embodiment, a case has been described in which the part of the material that will become the raceway surface is quenched and hardened by irradiating the energy beam, but the part that will become the sliding surface of the material, for example,
It is of course possible to obtain parts with similar hardness by quenching and hardening the sliding surfaces of the inner and outer rings of a sliding bearing, the sliding surfaces of a sliding guide rail, and the like.

[0035] As the workpieces, S55C, S
Not limited to US420J2, etc., but other high carbon chromium bearing steels,
Of course, stainless steel or the like can be used. Further, the high energy beam of this embodiment is not limited to an electron beam or a YAG laser, but other beams such as a CO2 laser may also be used.

[0036]

[Effects of the Invention] As explained above, according to the present invention,
An energy beam is irradiated from the side that will become the raceway surface or sliding surface of the workpiece to quench and harden this part, and then the quenched and hardened surface is molded as a compressive stress area, resulting in a non-hardened surface with low surface hardness. The region undergoes plastic deformation, thereby relieving tensile stress, and residual compressive stress is applied to the concave side, which will later become a raceway surface or sliding surface. As a result, it is possible to provide a highly accurate and inexpensive rolling or sliding component that has sufficient wear resistance to withstand severe use.

[Brief explanation of drawings]

FIG. 1 is a partial cross-sectional view showing the manufacturing process of a component that rolls or slides according to a first embodiment.

FIG. 2 is a sectional view of the pivot bearing according to the first embodiment.

FIG. 3 is a schematic diagram showing a quench hardening process using a high-energy beam according to the first embodiment.

FIG. 4 is a diagram showing the relationship between the depth from the surface of the hardened portion and the hardness according to the first example.

FIG. 5 is a schematic diagram of a linear slide according to a second embodiment.

FIG. 6 is a schematic diagram showing a quench hardening process using a high-energy beam according to a second embodiment.

FIG. 7 is a plan view, a side view, and a schematic diagram of a cage according to a third embodiment.

FIG. 8 is a diagram showing the relationship between the depth from the surface of the hardened portion and the hardness according to the third example.

FIG. 9 is a sectional view of a needle bearing according to a fourth embodiment.

FIG. 10 is a plan view showing a disk-shaped blank having a hardened portion according to a fourth embodiment.

FIG. 11 is a schematic diagram showing a drawing method according to a fourth embodiment.

FIG. 12 is a side view showing an outer ring according to a fourth embodiment.

FIG. 13 is a sectional view of a shell-type bearing with a cage according to a fourth embodiment.

FIG. 14 is a plan view showing a disk-shaped blank having a hardened portion according to a fifth embodiment.

FIG. 15 is a side view showing an outer ring according to a fifth embodiment.

FIG. 16 is a product sectional view of a thin ball bearing according to a fifth embodiment.

[Figure 17] Tempering conditions (temperature, time) according to the fifth example
It is a figure showing the relationship between and Vickers hardness.

[Explanation of symbols]

1 Workpiece 2 High energy beam 3. Hardened part 11 Spherical receiver 31 Innaway 32 Outway 35 Wave type retainer 36 Outer ring

Claims (1)

[Claims] 1. A part that rolls or slides and is formed by quenching and hardening a desired part of the workpiece by irradiating the workpiece with an energy beam and then molding the workpiece into a desired shape. An energy beam is irradiated from the side that becomes the raceway surface or sliding surface to quench and harden this part, and then the quenched and hardened surface is formed into a compressive stress area. Accompanying parts.