JPH0430740U - - Google Patents
Info
- Publication number
- JPH0430740U JPH0430740U JP7246190U JP7246190U JPH0430740U JP H0430740 U JPH0430740 U JP H0430740U JP 7246190 U JP7246190 U JP 7246190U JP 7246190 U JP7246190 U JP 7246190U JP H0430740 U JPH0430740 U JP H0430740U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- side plates
- plates
- center
- retaining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7246190U JP2504119Y2 (ja) | 1990-07-06 | 1990-07-06 | ウェ―ハキャリア |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7246190U JP2504119Y2 (ja) | 1990-07-06 | 1990-07-06 | ウェ―ハキャリア |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0430740U true JPH0430740U (en, 2012) | 1992-03-12 |
| JP2504119Y2 JP2504119Y2 (ja) | 1996-07-10 |
Family
ID=31610417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7246190U Expired - Lifetime JP2504119Y2 (ja) | 1990-07-06 | 1990-07-06 | ウェ―ハキャリア |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2504119Y2 (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003086667A (ja) * | 2001-09-12 | 2003-03-20 | Takatori Corp | 薄厚ウェーハ用カセット及び吸着ハンド |
-
1990
- 1990-07-06 JP JP7246190U patent/JP2504119Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003086667A (ja) * | 2001-09-12 | 2003-03-20 | Takatori Corp | 薄厚ウェーハ用カセット及び吸着ハンド |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2504119Y2 (ja) | 1996-07-10 |