JPH0430726U - - Google Patents
Info
- Publication number
- JPH0430726U JPH0430726U JP7183990U JP7183990U JPH0430726U JP H0430726 U JPH0430726 U JP H0430726U JP 7183990 U JP7183990 U JP 7183990U JP 7183990 U JP7183990 U JP 7183990U JP H0430726 U JPH0430726 U JP H0430726U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- alignment
- layer mask
- alignment measurement
- peripheral part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7183990U JP2513540Y2 (ja) | 1990-07-05 | 1990-07-05 | アライメント測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7183990U JP2513540Y2 (ja) | 1990-07-05 | 1990-07-05 | アライメント測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0430726U true JPH0430726U (OSRAM) | 1992-03-12 |
| JP2513540Y2 JP2513540Y2 (ja) | 1996-10-09 |
Family
ID=31609233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7183990U Expired - Fee Related JP2513540Y2 (ja) | 1990-07-05 | 1990-07-05 | アライメント測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2513540Y2 (OSRAM) |
-
1990
- 1990-07-05 JP JP7183990U patent/JP2513540Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2513540Y2 (ja) | 1996-10-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |