JPH0430461U - - Google Patents
Info
- Publication number
- JPH0430461U JPH0430461U JP7152590U JP7152590U JPH0430461U JP H0430461 U JPH0430461 U JP H0430461U JP 7152590 U JP7152590 U JP 7152590U JP 7152590 U JP7152590 U JP 7152590U JP H0430461 U JPH0430461 U JP H0430461U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- filter
- drain
- partition wall
- gas outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7152590U JPH0430461U (et) | 1990-07-06 | 1990-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7152590U JPH0430461U (et) | 1990-07-06 | 1990-07-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0430461U true JPH0430461U (et) | 1992-03-11 |
Family
ID=31608634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7152590U Pending JPH0430461U (et) | 1990-07-06 | 1990-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0430461U (et) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005238081A (ja) * | 2004-02-25 | 2005-09-08 | Horiba Ltd | スクラバ |
-
1990
- 1990-07-06 JP JP7152590U patent/JPH0430461U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005238081A (ja) * | 2004-02-25 | 2005-09-08 | Horiba Ltd | スクラバ |