JPH043008B2 - - Google Patents
Info
- Publication number
- JPH043008B2 JPH043008B2 JP31522287A JP31522287A JPH043008B2 JP H043008 B2 JPH043008 B2 JP H043008B2 JP 31522287 A JP31522287 A JP 31522287A JP 31522287 A JP31522287 A JP 31522287A JP H043008 B2 JPH043008 B2 JP H043008B2
- Authority
- JP
- Japan
- Prior art keywords
- continuous magnetic
- layer
- continuous
- base material
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010410 layer Substances 0.000 claims description 48
- 239000000463 material Substances 0.000 claims description 22
- 239000010409 thin film Substances 0.000 claims description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 16
- 229910052799 carbon Inorganic materials 0.000 claims description 16
- 238000004544 sputter deposition Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 10
- 239000011241 protective layer Substances 0.000 claims description 10
- 229910052731 fluorine Inorganic materials 0.000 claims description 9
- 239000011737 fluorine Substances 0.000 claims description 9
- 239000000696 magnetic material Substances 0.000 claims description 9
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- -1 fluorine ions Chemical class 0.000 claims description 3
- 238000004334 fluoridation Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 15
- 229910052786 argon Inorganic materials 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- PRPAGESBURMWTI-UHFFFAOYSA-N [C].[F] Chemical compound [C].[F] PRPAGESBURMWTI-UHFFFAOYSA-N 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 150000001485 argon Chemical class 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、フロツピーデイスク、ビデオ・オー
デイオの録音テープ等記録用媒体として幅広く使
用されている連続磁性媒体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a continuous magnetic medium that is widely used as a recording medium such as a floppy disk or a video/audio recording tape.
近年、磁気記録の高密度の要求に伴い磁性層が
磁性材料のみによつて形成される連続磁性媒体の
研究が盛んに行われている。連続磁性媒体は、真
空蒸着法、スパツタ法もしくはメツキ法によつて
製造されている。この連続磁性媒体は、磁性層が
連続薄膜であるため、長手方向の磁気記録は勿
論、垂直記録方式において特に記録密度の飛躍的
向上が期待されている。また、各磁気テープ又は
デイスク状磁気記録媒体等、種々の製品形態への
応用開発が進められている。
In recent years, with the demand for high density magnetic recording, research has been actively conducted on continuous magnetic media in which the magnetic layer is formed only of magnetic materials. Continuous magnetic media are manufactured by vacuum evaporation, sputtering, or plating. Since the magnetic layer of this continuous magnetic medium is a continuous thin film, it is expected to dramatically improve the recording density not only in the longitudinal direction but also in the perpendicular recording method. In addition, development of applications to various product forms such as magnetic tapes or disk-shaped magnetic recording media is underway.
殊に、長尺状の連続薄膜磁性媒体の連続磁性層
はスパツタ装置内において次のように形成され
る。即ち、耐熱基材を対称的な位置に設けられて
いる一対の位置決め用のリング、サブストホルダ
ー間を通して複数のガイドロールによりＳ字形に
搬送する。この基材は、上記リング、サブストホ
ルダー間通過の際に、リング側に設けられたター
ゲツトからリングの孔を経て基材表面に磁性材料
を折出させることにより、両面に連続的な磁性層
を形成されている。 In particular, a continuous magnetic layer of an elongated continuous thin film magnetic medium is formed in a sputtering apparatus as follows. That is, the heat-resistant substrate is conveyed in an S-shape by a plurality of guide rolls through a pair of positioning rings and substrate holders provided at symmetrical positions. When this base material passes between the ring and the substrate holder, a continuous magnetic layer is formed on both sides by depositing magnetic material from a target provided on the ring side through a hole in the ring and onto the surface of the base material. It is formed.
しかしながら、上述のような連続磁性媒体は、
塗布型の磁性媒体と異なり、磁性層中に結合剤、
潤滑剤等を全く含有しないので可撓性、潤滑性に
乏しく耐久性に問題を有している。このため、第
４図のような連続磁性媒体面３２上に弗素系潤滑
剤、シリコーンオイル、高級脂肪酸及びその誘導
体等を単独もしくは複合させた形で塗布すること
により皮膜３３を形成したり、あるいは第５図の
ように、非晶質の炭素もしくはSiox（ｘ＝１〜２）
で表わされる化合物等の保護層５３を連続磁性層
５２の表面上に形成する試みが行われているが、
いずれも十分な耐久性を得るには至つていない。
However, continuous magnetic media as mentioned above
Unlike coated magnetic media, the magnetic layer contains a binder,
Since it does not contain any lubricant or the like, it has poor flexibility and lubricity, and has problems with durability. For this purpose, a film 33 is formed on the continuous magnetic medium surface 32 as shown in FIG. As shown in Figure 5, amorphous carbon or Sio x (x=1~2)
Attempts have been made to form a protective layer 53 such as a compound represented by on the surface of the continuous magnetic layer 52;
In either case, sufficient durability has not been achieved.
本発明は、上記欠点に鑑みてなされており、耐
熱基材上の連続磁性層の表面に弗素炭素薄膜から
なる保護層を形成して、十分な耐久性を有する連
続磁性媒体の製造方法を提供することを目的とす
る。 The present invention has been made in view of the above drawbacks, and provides a method for manufacturing a continuous magnetic medium having sufficient durability by forming a protective layer made of a fluorocarbon thin film on the surface of a continuous magnetic layer on a heat-resistant base material. The purpose is to
本発明によれば、耐熱基材上にスパツタ法によ
り、磁性材料のみによる連続磁性層を形成し、次
に上記連続磁性層上にスパツタ法により炭素層を
形成し、続いてこの炭素層に弗素イオンを照射す
ることにより弗素化して、弗化炭素薄膜からなる
保護層を形成することを特徴とする連続磁性媒体
の製造方法が得られる。
According to the present invention, a continuous magnetic layer made of only magnetic material is formed on a heat-resistant base material by a sputtering method, a carbon layer is then formed on the continuous magnetic layer by a sputtering method, and then a fluorine-containing layer is added to the carbon layer. A method for manufacturing a continuous magnetic medium is obtained, which is characterized in that a protective layer made of a fluorocarbon thin film is formed by fluorination by ion irradiation.
ここで、本発明において、弗素炭素薄膜は化学
式（CxＦ）o（ｘは１から２までの数、ｎは自然
数）で表わされる。 Here, in the present invention, the fluorine carbon thin film is represented by the chemical formula (C x F) o (x is a number from 1 to 2, n is a natural number).
本発明の作用について述べる。 The operation of the present invention will be described.
低圧アルゴン雰囲気中で、高電圧印加してグロ
ー放電等の放電を行うと、アルゴンプラズマを発
生する。アルゴンプラズマは、ターゲツトに衝突
し、ターゲツトから高速粒子をはじき出す。高速
粒子は、耐熱基材表面に衝突し、基材表面に薄膜
を形成する。この時に陰極のターゲツトを磁性体
とした場合、耐熱基材面垂直に、磁気異方性を有
する磁性材料からなる連続磁性層が形成する。更
に、陰極ターゲツトをカーボンとして、連続磁性
層上に薄膜状の炭素層を形成する。次に、真空容
器内において、弗素ガスをイオンガンによつて弗
素イオンを炭素層に照射し、炭素層は弗化炭素薄
膜が生成することにより保護層が得られる。 Argon plasma is generated when a discharge such as glow discharge is performed by applying a high voltage in a low-pressure argon atmosphere. The argon plasma impinges on the target, ejecting high-velocity particles from the target. The high-velocity particles collide with the heat-resistant substrate surface and form a thin film on the substrate surface. If the target of the cathode is a magnetic material at this time, a continuous magnetic layer made of a magnetic material having magnetic anisotropy is formed perpendicular to the surface of the heat-resistant substrate. Furthermore, using carbon as a cathode target, a thin carbon layer is formed on the continuous magnetic layer. Next, in the vacuum container, the carbon layer is irradiated with fluorine ions using a fluorine gas ion gun, and a fluorocarbon thin film is formed on the carbon layer, thereby providing a protective layer.
このようにして得られた連続磁性媒体は、連続
磁性層が弗化炭素薄膜の保護層で被れているた
め、耐久性が極めて大きい。 The continuous magnetic medium thus obtained has extremely high durability because the continuous magnetic layer is covered with a protective layer of a fluorocarbon thin film.
ここで、連続磁性層の磁性材料としてはCo・
Crの他に、Co・Cr、Ni・Feの二層導体及び
Ni・Ｐ・Co等が使用できる。 Here, the magnetic material of the continuous magnetic layer is Co.
In addition to Cr, Co/Cr, Ni/Fe double layer conductors and
Ni, P, Co, etc. can be used.
また、耐熱基材としては、厚さ50μｍ程度のポ
リイミドを使用できるがこれに限定されない。 Further, as the heat-resistant base material, polyimide having a thickness of about 50 μm can be used, but the material is not limited thereto.
上記の連続磁性層及び炭素層のスパツタ法によ
る形成は同一容器内においても可能である。 The continuous magnetic layer and carbon layer described above can be formed by sputtering even in the same container.
〔実施例〕
本発明の実施例について図面を参照しながら説
明する。[Example] An example of the present invention will be described with reference to the drawings.
第１図ａは、本発明に係る連続磁性媒体の磁性
薄膜形成方法の一例を示す模式図である。 FIG. 1a is a schematic diagram showing an example of a method for forming a magnetic thin film of a continuous magnetic medium according to the present invention.
この図において、耐熱基材１はポリアミド製で
ホルダー１１に設けられている。基材１、ホルダ
ー１１、及びCo・Crターゲツト１０は真空容器
１２内にあり、この真空容器１２には、真空ポン
プ１３に連結する排気管及びアルゴンガス導入管
１４が設けられている。真空容器１２内を低圧ア
ルゴンガス雰囲気中１５で、耐熱基材上にスパツ
タ法により、耐熱基材１両面に0.2μｍの厚さ
Co・Cr薄膜の連続磁性層２が形成される。 In this figure, a heat-resistant base material 1 is made of polyamide and is provided on a holder 11. The base material 1, the holder 11, and the Co/Cr target 10 are placed in a vacuum container 12, and the vacuum container 12 is provided with an exhaust pipe connected to a vacuum pump 13 and an argon gas introduction pipe 14. Inside the vacuum container 12 in a low-pressure argon gas atmosphere 15, a layer of 0.2 μm thick was deposited on both sides of the heat-resistant base material 1 by sputtering on the heat-resistant base material.
A continuous magnetic layer 2 of Co/Cr thin film is formed.
即ち、ホルダー１１とターゲツト１０間に高電
圧を印加し、容器内でグロー放電を発生させアル
ゴンプラズマを発生させる。このアルゴンプラズ
マは、Co・Crターゲツト１０からCo・Cr粒子１
０ａをたたき出し、たたき出されたCo・Cr粒子
１０ａは耐熱基材１表面に衝突して、その運動エ
ネルギを失つて基材面に析出し、Co・Cr薄膜を
連続的に形成する。 That is, a high voltage is applied between the holder 11 and the target 10, and a glow discharge is generated within the container to generate argon plasma. This argon plasma is applied from the Co/Cr target 10 to the Co/Cr particle 1.
The Co.Cr particles 10a collide with the surface of the heat-resistant base material 1, lose their kinetic energy, and precipitate on the surface of the base material, forming a continuous Co.Cr thin film.
第１図ｂは、本発明に係る連続磁性媒体の炭素
薄膜形成方法の一例を示す模式図である。 FIG. 1b is a schematic diagram showing an example of a method for forming a carbon thin film of a continuous magnetic medium according to the present invention.
この図において、Co・Cr薄膜の連続磁性層２
が形成された耐熱基材１はホルダー１７に設けら
れている。 In this figure, a continuous magnetic layer 2 of Co/Cr thin film is shown.
The heat-resistant base material 1 on which is formed is provided in a holder 17.
カーボン(C)ターゲツト１６、磁性層付き基材１
及びホルダー１７は真空容器１８内にあり、この
真空容器１８に真空ポンプ１９に連結する排出管
及びアルゴンガス導入管１４が設けられている。
低圧アルゴンガス雰囲気中２１で、上記の連続磁
性層が形成された基材はスパツタ法により、両面
の連続磁性層２のうえに200Aの厚さの薄膜状の
炭素層４を形成する。 Carbon (C) target 16, base material with magnetic layer 1
The holder 17 is located in a vacuum container 18, and the vacuum container 18 is provided with an exhaust pipe connected to a vacuum pump 19 and an argon gas introduction pipe 14.
A thin carbon layer 4 having a thickness of 200 A is formed on the continuous magnetic layer 2 on both sides of the base material on which the continuous magnetic layer is formed by sputtering in a low-pressure argon gas atmosphere 21 .
第１図ｃは、本発明に係る連続磁性媒体の弗化
炭素薄膜形成方法の一例を示す模式図である。連
続磁性層２としてCo・Cr薄膜の連続磁性層２が
形成され、続いて炭素層４が形成された耐熱基材
１は、真空容器４１内にあり、この真空容器は導
入管４３より導入された弗素ガス４２に満たされ
ており、イオンガン４３の照射方向の基板ホルダ
ー４４に設けられている。 FIG. 1c is a schematic diagram showing an example of a method for forming a fluorocarbon thin film of a continuous magnetic medium according to the present invention. The heat-resistant base material 1, on which the continuous magnetic layer 2 of a Co/Cr thin film is formed as the continuous magnetic layer 2, and then the carbon layer 4 is formed, is placed in a vacuum container 41, and this vacuum container is introduced through an introduction pipe 43. The substrate holder 44 is provided in the irradiation direction of the ion gun 43 and is filled with fluorine gas 42 .
さらに、真空容器４１には真空ポンプ４６に連
結する排出管が設けられている。イオンガン４３
により、弗素ガスは、弗素イオン（F+）となり
基板に向い、炭素層４面に衝突して反応し弗素炭
素の膜（第２図の３）を形成する。得られた連続
磁性体は第２図示の構造を有する。 Further, the vacuum container 41 is provided with a discharge pipe connected to a vacuum pump 46. ion gun 43
As a result, the fluorine gas turns into fluorine ions (F + ), which are directed toward the substrate, collide with the four surfaces of the carbon layer, and react to form a fluorine carbon film (3 in FIG. 2). The obtained continuous magnetic material has the structure shown in the second figure.
第３図は、実施例に係る連続磁性媒体の耐久性
の試験結果を示す。この図において、曲線２９
は、本発明の実施例に係る連続磁性媒体のパス回
数と再生出力とのパス回数０の出力を１としたと
きの相対値を示す。この曲線２９から明らかな様
に実施例に係る連続磁性媒体の出力は、２×107
パス回数においても、ほとんど低下しないことが
わかる。この耐久性試験は次のように行われた。 FIG. 3 shows the durability test results of the continuous magnetic medium according to the example. In this figure, curve 29
represents the relative value of the number of passes and reproduction output of the continuous magnetic medium according to the embodiment of the present invention, with the output when the number of passes is 0 being 1. As is clear from this curve 29, the output of the continuous magnetic medium according to the example is 2×10 7
It can be seen that the number of passes also hardly decreases. This durability test was conducted as follows.
市販の両面用フロツピーデイスクドライバーに
セツト記録密度10〔KFRPI〕で、相対速度1.0
〔ｍ／ｓ〕でパスウエアテストを行つた。 Set to a commercially available double-sided floppy disk driver with a recording density of 10 [KFRPI] and a relative speed of 1.0.
A passware test was conducted at [m/s].
比較の為に第４図、第５図で示される従来の連
続磁性媒体の試験の結果を、第３図の曲線３５、
曲線３６によつて各々示す。ここで、第４図の連
続磁性媒体においては、耐熱基材３１面上の
Co・Cr薄膜の連続磁性層３２は実施例と同様に
スパツタ法により形成され、更に形成された連続
磁性層３２上に弗素系潤滑剤（商標はクライトツ
クス デユポン(株)製）をスピンコートにより製造
されている。また第５図のような連続磁性媒体に
おいて、耐熱基材４１面上のCo・Cr薄膜の連続
磁性層４２は実施例と同様にスパツタ法により形
成され、更に形成された連続磁性層４２上に
200AのSiO2皮膜からなる保護層４３として形成
されている。 For comparison, the test results of conventional continuous magnetic media shown in FIGS. 4 and 5 are shown as curve 35 in FIG.
Each is shown by curve 36. Here, in the continuous magnetic medium shown in FIG. 4, the
The continuous magnetic layer 32 of Co/Cr thin film is formed by the sputtering method in the same manner as in the embodiment, and a fluorine-based lubricant (trademark is manufactured by Krytx Dupont Co., Ltd.) is further manufactured by spin coating on the formed continuous magnetic layer 32. has been done. In addition, in the continuous magnetic medium shown in FIG. 5, the continuous magnetic layer 42 of the Co/Cr thin film on the surface of the heat-resistant base material 41 is formed by the sputtering method as in the embodiment, and the continuous magnetic layer 42 is further formed on the formed continuous magnetic layer 42.
The protective layer 43 is formed of a 200A SiO 2 film.
以上述べたように、本発明によれば、耐熱基材
上の連続磁性層の表面に弗化炭素薄膜からなる保
護層を形成することにより、十分に耐久性を有す
る連続磁性媒体が得られる。
As described above, according to the present invention, a continuous magnetic medium having sufficient durability can be obtained by forming a protective layer made of a fluorocarbon thin film on the surface of a continuous magnetic layer on a heat-resistant base material.
第１図ａ，ｂ及びｃは、本発明の実施例に係る
連続磁性媒体の製造方法を工程順に示した図、第
２図は、本発明の実施例に係る連続磁性媒体の断
面図、第３図は、本発明の実施例に係る連続磁性
媒体の耐久性を示す図、第４図は、従来の連続磁
性媒体の一例を示す断面図、第５図は、従来の連
続磁性媒体の他の一例を示す断面図である。図中
１は耐熱基材、２は連続磁性層、３は保護層、４
は炭素層、１０はCo・Crターゲツト、１１及び
１７はホルダー、１６はＣターゲツト、１２，１
８及び４１は真空容器、４２は弗素ガス、４３は
イオンガン、４５は弗素イオン、４６はポンプ、
３１は耐熱基材、３２は連続磁性層、３３は皮
膜、５１は耐熱基材、５２は連続磁性層、５３は
保護層である。
1a, b, and c are diagrams illustrating a method for manufacturing a continuous magnetic medium according to an embodiment of the present invention in order of steps; FIG. 2 is a sectional view of a continuous magnetic medium according to an embodiment of the present invention; 3 is a diagram showing the durability of a continuous magnetic medium according to an embodiment of the present invention, FIG. 4 is a sectional view showing an example of a conventional continuous magnetic medium, and FIG. 5 is a diagram showing durability of a continuous magnetic medium according to an example of the present invention. It is a sectional view showing an example. In the figure, 1 is a heat-resistant base material, 2 is a continuous magnetic layer, 3 is a protective layer, and 4
is a carbon layer, 10 is a Co/Cr target, 11 and 17 are holders, 16 is a C target, 12,1
8 and 41 are vacuum containers, 42 is fluorine gas, 43 is an ion gun, 45 is a fluorine ion, 46 is a pump,
31 is a heat-resistant base material, 32 is a continuous magnetic layer, 33 is a film, 51 is a heat-resistant base material, 52 is a continuous magnetic layer, and 53 is a protective layer.
Claims (1)
からなる連続磁性層を形成し、次に上記連続磁性
層上にスパツタ法により炭素層を形成し、続いて
上記炭素層に弗素イオンを照射することにより弗
素化して弗化炭素薄膜からなる保護層を形成する
ことを特徴とする連続磁性媒体の製造方法。 ２ 上記磁性材料はCo・Cr、Ni・Fe、Ni・Ｐ・
Coのグループから選択された少なくとも１種か
らなることを特徴とする特許請求の範囲第１項記
載の連続磁性媒体の製造方法。[Claims] 1. A continuous magnetic layer made of only magnetic material is formed on a heat-resistant base material by a sputtering method, a carbon layer is then formed on the continuous magnetic layer by a sputtering method, and then a carbon layer is formed on the carbon layer by a sputtering method. 1. A method for manufacturing a continuous magnetic medium, comprising forming a protective layer made of a fluorocarbon thin film by fluoridation by irradiating with fluorine ions. 2 The above magnetic materials are Co・Cr, Ni・Fe, Ni・P・
The method for manufacturing a continuous magnetic medium according to claim 1, characterized in that the continuous magnetic medium is made of at least one member selected from the group of Co.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31522287A JPH01158621A (en) | 1987-12-15 | 1987-12-15 | Production of continuous magnetic medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31522287A JPH01158621A (en) | 1987-12-15 | 1987-12-15 | Production of continuous magnetic medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01158621A JPH01158621A (en) | 1989-06-21 |
| JPH043008B2 true JPH043008B2 (en) | 1992-01-21 |
Family
ID=18062866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31522287A Granted JPH01158621A (en) | 1987-12-15 | 1987-12-15 | Production of continuous magnetic medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01158621A (en) |
-
1987
- 1987-12-15 JP JP31522287A patent/JPH01158621A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01158621A (en) | 1989-06-21 |
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