JPH0429976Y2 - - Google Patents

Description

[Detailed description of the invention] [Field of industrial application] The present invention is a detector applied to a polishing machine equipped with a detector that detects processing conditions such as the temperature or processing amount of a workpiece being polished. Relating to damage prevention devices.

[Conventional technology]

While polishing the workpiece, a polishing machine maintains appropriate processing conditions by controlling the temperature of the workpiece at a constant level and measuring the amount of workpiece processed. In order to improve the processing accuracy of the workpiece, detectors such as a temperature sensor that detects the temperature of the workpiece and a thickness sensor that detects the amount of processing of the workpiece are provided.

That is, 1 in Fig. 2 is the lower surface plate (first surface plate);
2 is an upper surface plate (second surface plate), and polishing cloths 3 and 4 are attached to the upper surface of the lower surface plate 1 and the lower surface of the upper surface plate 2, respectively. Further, a workpiece 6 held by a carrier 5 is interposed between the lower surface plate 1 and the upper surface plate 2, and the lower surface plate 1, the upper surface plate 2, and the workpiece 6 move relative to each other. As a result, the workpiece 6 is polished.

Further, the upper surface plate 2 is provided with a through hole 7 that penetrates in the vertical direction, and a detector 8 is installed in the through hole 7 to detect the temperature of the workpiece 6 or the machining state such as the amount of machining.
has been inserted. A detection surface 8a is provided at the tip of this detector 8, and the rear end of the detector 8 is fixedly held by a holder 9. This holder 9 has screw insertion holes 10, 10, and is fastened by fastening screws 12, 12 that are inserted into the screw insertion holes 10, 10 and screwed into screw holes 11, 11 of the upper surface plate 2. , is fixed to the upper surface of the upper surface plate 2. A liner 13 is interposed between the holder 9 and the upper surface plate 2, and is adjusted so that the detection surface 8a of the detector 8 comes into contact with or approaches the workpiece 6. During normal polishing, no external force F in the direction of the arrow is applied to the detection surface 8a, or only slightly.

[Problem that the invention attempts to solve]

In the above structure, since the detector 8 is fixed, if the workpiece 6 cracks, an external force F will be applied to the detection surface 8a of the detector 8. In this case, the polishing cloth 4 does not protect the detector 8, and the detection surface 8a of the detector 8 is damaged by the fragments of the workpiece 6, making it unusable.

In particular, in the case of the detector 8 that measures the thickness of the workpiece 6, the measurement is generally made through a hole 4a provided in the polishing cloth 4, as shown in FIG. This is even more remarkable.

The present invention was developed based on the above-mentioned circumstances, and its purpose is to reliably prevent damage to a detector placed in contact with or in close proximity to a workpiece. An object of the present invention is to provide a device for preventing damage to a detector in a polishing machine.

[Means for solving problems]

In order to solve the above-mentioned problems, the present invention provides a through hole in either of the first and second surface plates that move relative to the workpiece, and the temperature of the workpiece is A detector for detecting machining conditions such as the amount of machining is inserted, the detector is held so that the detection surface is in contact with or close to the workpiece, and a holding means for holding the detector is inserted. ,
A holder that holds the detector, a support member that supports the detector movably in the axial direction of the through hole via the holder, and urges the detector supported by the support member toward the workpiece. The present invention is characterized in that it is composed of a spring that is biased by the spring, and a regulating member that regulates the movement of the detector biased by the spring in the biasing direction.

[Effect]

When the workpiece is cracked and an external force is applied to the detector, the detector is displaced in the direction of the external force and absorbs the external force.

〔Example〕

An embodiment of the present invention will be described below with reference to FIG. In FIG. 1, the same components as those shown in FIG. 2 are designated by the same reference numerals, and the explanation thereof will be omitted.

Reference numeral 21 in FIG. 1 is a holding means for holding the detector 8 so that the detection surface 8a is in contact with or close to the workpiece 6, and the rear end of the detector 8 is attached to this holding means 21. A fixed holder 22 is provided. This holder 22 is provided with screw insertion holes 23, 23.
Support screws (support members) 24, 24, which are screwed into the screw holes 11, 11 of the upper surface plate 2, are inserted through the holes 23. The support screws 24, 24 have a threaded portion 24a carved on the distal end side, a head portion 24b provided on the rear end side, and a holder guide portion provided between the threaded portion 24a and the head portion 24b. 24c, and the holder guide portion 24c guides and supports the holder 22 so as to be movable in the axial direction. Therefore, the holder 22
The detector 8 fixedly held is movable in the axial direction of the through hole 7.

In addition, the heads 24b of the support screws 24, 24,
Compression springs 25, 25 are interposed between 24b and the holder 22, and the detector 8 is biased toward the workpiece 6.

Further, the holder 22 is provided with screw holes 26, 26, into which stopper screws (regulating members) 27, 27 are screwed. These stopper screws 27, 27 restrict the movement of the detector 8 in the biasing direction by contacting the upper surface plate 2 with their tips, and apply an external force in the direction of the arrow to the detection surface 8a during normal polishing. It is adjusted so that F is not applied at all or only slightly, that is, the detection surface 8a is in contact with or close to the workpiece 6. In addition, 28,2
Numeral 8 is a lock nut for locking the stopper screws 27, 27.

According to the above configuration, even if the workpiece 6 is cracked and an external force F acts on the detection surface 8a of the detector 8, the detector 8 resists the biasing force of the compression springs 25, 25 and acts on the external force F. Since the detection surface 8a is displaced in the direction and absorbs the external force F, the detection surface 8a is not damaged by fragments of the workpiece 6.

In selecting the compression spring 25, it is necessary to consider the strength of the detection surface 8a and the stability of the detector 8 due to vibrations from the polishing machine during normal polishing. This is because the spring force of the compression spring 25 should be weak in order to prevent damage to the detection surface 8a, but if this spring force is extremely weak, the setting of the detector 8 will be impaired due to vibrations from the polishing machine during polishing. This is because it becomes stable. In this example, good results were obtained when the biasing force of the compression spring 25 was set to approximately 1 kg.

[Effect of idea]

As explained above, according to the present invention, the first and second surface plates move relative to the workpiece;
A through hole provided in either of the first and second surface plates, a detector inserted into the through hole to detect the machining state such as the temperature or the amount of machining of the workpiece, and the detector holding means for holding the detector so that the detection surface is in contact with or close to the workpiece; A support member that supports the detector so as to be movable in the axial direction of the through hole, a spring that biases the detector supported by the support member toward the workpiece, and a bias for the detector that is biased by the spring. Since it is configured with a regulating member that regulates movement in the direction, it has excellent effects such as being able to reliably prevent damage to the detector placed in contact with or close to the workpiece. play.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing one embodiment of the present invention, and FIG.
The figure is a sectional view showing a conventional example, and FIG. 3 is a sectional view showing another conventional example. DESCRIPTION OF SYMBOLS 1... First surface plate (lower surface plate), 2... Second surface plate (upper surface plate), 3, 4... Polishing cloth, 6... Workpiece, 7... Through hole, 8... ...Detector, 8a...Detection surface, 21...Holding means, 22...Holder, 24
... Support member (support screw), 25 ... Compression spring, 27 ... Regulation member (stopper screw).

Claims (1)

[Claims for Utility Model Registration] (1) First and second surface plates that move relative to the workpiece, and a through hole provided in either of the first and second surface plates; A detector is inserted into this through hole and detects the machining state such as the temperature or the amount of machining of the workpiece, and a detector is inserted into the workpiece so that the detection surface is in contact with or close to the workpiece. The holding means includes a holder that holds the detector, a support member that supports the detector movably in the axial direction of the through hole via the holder, and the support member. The present invention is characterized in that it is configured by providing a spring that biases a detector supported by the spring toward the workpiece, and a regulating member that restricts movement of the detector biased by the spring in the biasing direction. Damage prevention device for detectors in polishing machines. (2) A damage prevention device for a detector in a polishing machine according to claim 1 of the utility model registration claim, wherein the regulating member is configured to be able to adjust the position of the detection surface of the detector.