JPH04295815A - Stage driving mechanism - Google Patents

Abstract

PURPOSE:To offer the stage driving mechanism by which a clutch and a lock mechanism are provided easily although a biaxial handle stage is a fundamental constitution, and a stage moving operation in both the X and the Y directions can be executed by one operating part. CONSTITUTION:In the stage driving mechanism, the upper plate 1, the middle plate 2 and the lower plate 3 are provided and on one side face of the upper plate concerned 1 and said lower plate 3, respectively, stage driving guide means 4, 5 are provided, and also, two driving devices 7, 16 for driving a stage are attached independently to the middle plate 2, respectively, and said driving devices 7, 16 are installed in oscillating members 10, 14 rotated in the periphery of shafts 6, 13 provided on said middle plate 2, respectively, and also, each of said oscillating members 10, 14 can execute the turn-on/turn-off control of a transfer of driving force of said driving devices 7, 16 to said guide means 4, 5 by a cam shaft 19 provided vertically between two said shafts 6, 13.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention provides an IC,
The present invention relates to a stage drive mechanism used for inspecting specimens such as LCD panels, sensor arrays, and surface-mounted substrates.

0002

[Prior Art] Normally, this type of stage drive mechanism is composed of three plate members, an upper plate, a middle plate, and a lower plate, and the drive mechanism is composed of three plate members: an upper plate, a middle plate, and a lower plate. It has a coaxial handle for moving the stage. For example, a stage drive mechanism having the configuration shown in FIG. 7 has already been proposed in Japanese Patent Application No. 2-137944. For example, a first moving platform capable of moving linearly in the Y direction is attached to which a linear guide member extending in the Y direction is attached, and a linear guide member extending in the X direction is attached to the first moving platform. A second moving table is attached that can move linearly in the X direction. Therefore, the stage can be moved to a desired position by these two moving tables. By the way, in recent years, as the size of specimens to be observed has increased, the movement stroke of the stage itself has also become larger, for example, 10 inches, 12 inches, 14 inches.
Products with moving strokes such as inches have appeared. With a microscope that has such a large stroke, especially when the stage drive handle is located at the back right or back left, the operator must fully extend his arm to operate the stage, resulting in an extremely cramped posture. I was forced to do so. Therefore, in such cases, the mounting direction of the stage has been rotated by 180 degrees so that the handle for driving the stage is in front of the operator. However, when used with such a stage attached, in the stage drive mechanism configured as shown in FIG. Therefore, such a linear guide member is extremely difficult to operate.

On the other hand, in order to solve this problem, as shown in FIG. There is a method of preventing the linear guide member extending in the Y direction from protruding from the stage by providing a two-axis configuration and, in particular, arranging the second drive knob approximately at the center of the stage along the Y direction. In addition, in the above-mentioned industrial stage, there is a mechanism (clutch) for switching between coarse and fine stage movement, and a device (clutch) for inhibiting stage movement.
The locking mechanism) is extremely important functionally.

0004

[Problems to be Solved by the Invention] However, in such a conventional stage drive mechanism, in the case of a two-axis handle stage as described above, the drive shafts in the X direction and the Y direction are arranged at a constant interval. Therefore, it has become extremely difficult to configure and arrange the clutches and lock mechanisms for the drive systems in the X direction and the Y direction in one place. On the other hand, in the case of a coaxial handle stage, there is no such inconvenience; therefore, only one clutch and locking mechanism is provided, and it can be used in both the X and Y directions.
Although there is an advantage that the coaxial handle stage can be used in common for drive systems in each direction, such a coaxial handle stage has the above-mentioned operational problems. In view of these circumstances, the present invention has a basic configuration of a two-axis handle stage, but it is easy to install a clutch and a lock mechanism, and
, Y directions can be performed using a single operation section.

[0005]

Means for Solving the Problems Referring to FIG. 1, a stage drive mechanism according to the present invention has an upper plate, a middle plate, and a lower plate, and a stage drive mechanism is provided on one side of each of the upper plate and the lower plate. An X-rail and a Y-rail are provided as guide means for the stage, and two drive devices, an X-handle and a Y-handle, for driving the stage in the X and Y directions are independently attached to the middle plate. However, the drive device The swinging members X-wing and Y-wing are configured such that transmission of the driving force of the driving device to the guide means can be ON/OFF controlled by a camshaft installed between the two shafts.

[0006]

[Operation] In the stage drive mechanism of the present invention, under normal conditions, the tip end sides of each of the X wing and Y wing are pressed against the camshaft by the elasticity of elastic means (not shown) such as a spring. The X rail and the X friction wheel as well as the Y rail and the Y friction wheel are in frictional contact with each other on one end side of the wing and the Y wing. Therefore, in this normal state, the X handle and Y handle are in a state where they can transmit driving force to the X rail and Y rail, respectively, so by rotating these X handle and Y handle, the stage can be moved in the X and Y directions. It can be driven freely. On the other hand, by appropriately rotating the camshaft from this normal state, the X wing and the Y wing are swung to separate the X friction wheel and the Y friction wheel, which were in frictional contact with the X rail and the Y rail, respectively. This allows the stage to be freed from the normal drive control of the X and Y handles and to be freely movable. In this released state, coarse movement of the stage can be easily performed manually.

[0007]

Embodiment A first embodiment of the stage drive mechanism according to the present invention will be described below with reference to FIGS. 2 and 3. In the figure,
1 is an upper plate, 2 is a middle plate, and 3 is a lower plate. The lower plate 3 is fixed to the microscope main body side, and a stage is placed and fixed on the upper plate 1. A middle plate 2 is attached to the lower plate 3 so as to be movable in the Y direction via a linear guide member, and an upper plate 1 is also attached to the middle plate 2 so as to be movable in the X direction via a linear guide member. is attached to. Furthermore, in the figure, 4 is an X rail laid in the X direction on one side of the upper plate 1, 5 is a Y rail laid in the Y direction on one side of the lower plate 3, and 6 is a rail placed in the vicinity of the X rail 4. The bearing 7 is implanted and fixed in the middle plate 2, and the X fixed to the lower end of the rotating shaft 8 fitted inside the bearing 6.
A handle 9 is a gear fixed to the upper end of the rotating shaft 8;
0 is pivotally connected to the middle plate 2 via a bearing 6, for example,
X-wing shaped like a letter (Figure 2, hatched part)
, 11 is a gear rotatably supported at one end of the X wing so as to constantly mesh with the gear 9, and 12 has, for example, a V-groove cut on its outer periphery and is fixed to rotate together with the gear 11. and the above-mentioned X rail 4 into the V groove.
It is an X-friction ring that can be fitted into it.

On the other hand, a Y wing 14 is pivotally attached to the intermediate plate 2 via a shaft 13 at a position near the center of the intermediate plate 2, that is, inside the bearing 6 in the Y direction (FIG. 2, hatched area). ). Furthermore, in the figure, 15 is a bearing implanted and fixed to the Y wing 14, 16 is a Y handle fixed to the lower end of the rotating shaft 17 fitted on the outside of the bearing 15, and 18 is a V A Y friction member having a groove formed therein, fixed to the upper end of the rotating shaft 17 so as to rotate together with the rotating shaft 17, and allowing the Y rail 5 to fit into the V groove. It's a ring. Further, at a proper position between the bearing 6 and the bearing 15, a cam shaft 19 including, for example, a cam portion 19a having a D-cut surface and a knob portion 19b is rotatably implanted in the intermediate plate 2, Under normal conditions, X-wing 10 and Y-wing 1
4, the tip portions 10a and 14a of the cam portion 19a of the camshaft 19 are moved by the elasticity of the leaf spring 20 provided on the middle plate 2.
It is pressed against the cut surface (Figure 3).

Since the stage drive mechanism according to the present invention is constructed as described above, the X wing 10 and the Y wing 14 are able to swing around the bearing 6 and the shaft 13, respectively. The tip portions 10a and 14a of the wing 10 and the Y wing 14 are pressed against the D-cut surface of the camshaft 19 as described above. Thereby, the X friction ring 12 and the Y friction ring 1 provided on one end side of the X wing 10 and the Y wing 14, respectively,
8 makes frictional contact with the corresponding X rail 4 and Y rail 5. In such a contact state, the X friction wheel 12 is connected to the X handle 7 via the rotating shaft 8 and the gears 9, 11, so that the rotational driving force of the X handle 7 can be transmitted to the X rail 4. That is, in response to turning the X handle 7 left and right, the X friction wheel 12 is turned left and right via the gears 9 and 11, so that the X friction wheel 12 frictionally rolls on the X rail 4. , the upper plate 1 is moved forward and backward relative to the middle plate 2 in the X direction. Further, since the Y friction wheel 18 is connected to the Y handle 16 via the rotating shaft 17, the rotational driving force of the Y handle 16 can be transmitted to the Y rail 5, that is, the Y handle 16 Correspondingly, the Y friction wheel 18 is rotated to the left and right, and as the Y friction wheel 18 frictionally rolls on the Y rail 5, the middle plate 2 moves in the Y direction with respect to the lower plate 3. They are forced to advance and retreat. By rotating the X handle 7 and Y handle 16 in this way, the stage fixed to the upper plate 1 can be moved to the
It can be freely moved independently in the direction and the Y direction. By rotating the handle 7 and the Y handle 16, fine movement control of the stage can be easily and reliably performed.

On the other hand, the X wing 10 and the Y wing 14
By appropriately rotating the camshaft 19 from the state in which the tips 10a and 14a are pressed against the D-cut surface of the camshaft 19 as described above, the tips 10a
and 14a to ride over the D-cut surface of the camshaft 19, the X wing 10 and the Y wing 14 are moved so that the can be swung (clockwise and counterclockwise in FIG. 3) around the bearing 6 and shaft 13, respectively. As a result, the rotational driving force of the X handle 7 and the handle 16 cannot be transmitted to the X rail 4 and the Y rail 5, that is, the stage is
It is also freed from the above-described drive control by the Y handle 16 and can freely move in the X and Y directions orthogonal to each other. In the released state of the stage, coarse movement of the stage becomes extremely easy. By operating the knob 19b of the camshaft 19 as described above, the X handle 7 and the Y handle
Intermittent transmission of driving force using handle 16 (ON, OFF)
The state can be easily changed, and unlike the conventional example (FIG. 7), the Y rail 5 does not protrude from the lower plate 3, so it does not get in the way when operating the stage. Stage operations can be performed smoothly.

FIG. 4 shows a second embodiment of the stage drive mechanism according to the present invention. Particularly in this second embodiment, the cam portion 19a of the camshaft 19 is composed of two cam portions 19ax and 19ay that contact the tip portions 10a and 14a of the X wing 10 and Y wing 14, respectively. The cam portion 19ax has two cut surfaces that are parallel to each other, and the cam portion 19ay has two cut surfaces that are orthogonal to each other. It is formed by a directional relationship. The X handle is provided with an X friction ring, and the Y handle is provided with a Y friction ring. According to the second embodiment of the stage drive mechanism of the present invention, for example, in FIG. 4(a), the tip end 10a of the The portion 14a is not pressed against any cut surface of the cam portion 19ay, and this state corresponds to (a) in FIG. 4(b), and as shown, the rotational driving force of the X handle 7 is The Y handle 1 is in a state where it can be transmitted to the rail 4 (ON), and the Y handle 1 is
6 is in a state where it cannot be transmitted to the Y rail 5 (OFF). When the driving force of the X handle 7 and the Y handle 16 is turned ON or OFF, the camshaft 19 is rotated by 90°, 180°, and 270° from the state shown in FIG. 4(b) (a). By doing so, it is possible to selectively switch to the desired states (b), (c), and (d) in the figure.

FIG. 5 shows a third embodiment of the stage drive mechanism according to the present invention. In this third embodiment, an X pinion 21 provided in place of the X friction wheel 12 and an X rack 22 provided in place of the X rail 4 are always in mesh with each other, and a Y pinion 23 provided in place of the Y friction wheel 18 and a Y rack 24 provided in place of the Y rail 5 are always in mesh with each other. Further, the X wing 10 is pivotally connected to the middle plate 2 by a shaft 25, and its tip is molded with rubber or the like that can come into contact with the outer periphery of a rotating shaft 26 that connects the X handle 7 and the X pinion 21. A pressure contact member 27 is provided. On the other hand, the Y wing 14 is provided with a pressing member 29 made of rubber or the like that can come into contact with the outer periphery of the rotating shaft 28 connecting the Y handle 16 and the Y pinion 23. When the Y wing 14 is pressed against the cut surface of the cam portion 19a of the camshaft 19, the pressure contact members 27 and 29 are in pressure contact with the rotation shaft 26 and the rotation shaft 28, respectively. According to the third embodiment of the stage drive mechanism of the present invention, as shown in FIG. Since the rotation of the rotating shaft 28 is braked, the stage movement is locked. Also, from this locked state, by appropriately rotating the camshaft 19 so that the X wing 10 and Y wing 14 that were pressed against the cut surface go over the cut surface,
The wing 10 and the Y wing 14 are slightly swung, and the pressure contact member 27 and the pressure contact member 29 are separated from the rotation shaft 26 and the rotation shaft 28, so that the stage can be slightly moved by rotating the X handle 7 and the Y handle 16. can be controlled. In this way, by operating the camshaft 19,
Stage movement and its locked state can be easily switched. In this case, by configuring the cam portion 19a of the cam shaft 19 by two cam portions 19ax and 19ay as in the case of the second embodiment, the stage can be moved independently in the X direction and the Y direction. It can be locked.

FIGS. 6(a) and 6(b) show a fourth embodiment of the stage drive mechanism according to the present invention. In this fourth embodiment,
Similar to the first embodiment, the X friction wheel 12 is connected to the X handle 7 via the rotating shaft 8 and gears 9, 11, so that the rotational driving force of the X handle 7 is applied to the X rail 4. The Y friction wheel 18 rotatably supported by the Y wing 14 is connected to the Y handle 16 rotatably supported by the bearing 6 and, for example, a pulley 30.
, 31 and a belt 32. According to the fourth embodiment of the stage drive mechanism of the present invention, the stage is moved in the X direction by rotating the X handle 7 and in the Y direction via the belt 32 by rotating the Y handle 16. However, by providing the handle 7 and the Y handle 16 on the same axis, it is possible to prevent the Y rail 5 from protruding even though it is a coaxial handle stage, realizing this type of microscope stage with excellent operability. can do.

[0014]

Effects of the Invention As described above, according to the stage drive mechanism of the present invention, although the stage is provided with independent handles in the orthogonal movement direction of the stage, the switching of coarse and fine movement and the locking state for each movement direction can be performed using a single cam. This can be done reliably by operating the shaft, and especially when such a clutch function for driving the stage is applied to a large stage, the rail guide member, etc. does not protrude toward the observation side, and the stage operation can be performed easily and reliably. There are advantages such as In addition, since the clutch mechanism is independent of the orthogonal movement direction of the stage,
A stage drive mode in which braking is applied in one direction of movement and coarse movement is performed in the other direction is extremely suitable for inspecting sensor arrays, etc., for example. Furthermore, since the structure is simple, it is easy to assemble and adjust, and the cost is low. On the other hand, it has the advantage that it can be configured as a coaxial handle stage with a simple method.

[Brief explanation of drawings]

FIG. 1 is a conceptual diagram showing the main part configuration of a stage drive mechanism according to the present invention.

FIG. 2 is a vertical sectional view of a main part according to a first embodiment of the stage drive mechanism of the present invention.

FIG. 3 is a bottom view of essential parts of the first embodiment of the stage drive mechanism of the present invention.

FIG. 4(a) is a perspective view of essential parts of a second embodiment of the stage drive mechanism of the present invention. (b) is a diagram illustrating a switching state of drive control by a camshaft according to a second embodiment of the stage drive mechanism of the present invention.

FIG. 5 is a perspective view of main parts according to a third embodiment of the stage drive mechanism of the present invention.

FIG. 6(a) is a perspective view of a main part according to a fourth embodiment of the stage drive mechanism of the present invention. (b) is a vertical sectional view of a main part according to a fourth embodiment of the stage drive mechanism of the present invention.

FIG. 7 is a perspective view of a conventional stage drive mechanism.

FIG. 8 is a perspective view of another conventional stage drive mechanism.

[Explanation of symbols]

1 Top plate 2 Middle plate 3 Lower plate 4 X rail 5 Y rail 6 Bearing 7 X handle 8 Rotation axis 9 Gear 10 X Wing 12 X friction ring 14 Y wing 15 Bearing 16 Y handle 17 Rotation axis 18 X friction ring 19 Camshaft 20 Leaf spring

Claims (5)

[Claims] [Claim 1] A device comprising an upper plate, a middle plate, and a lower plate, and guide means for driving the stage is provided on one side of each of the upper plate and the lower plate, and a guide means for driving the stage in the orthogonal direction. In a stage drive mechanism in which two drive devices are each independently attached to the middle plate, each of the drive devices is attached to a swinging member that rotates around an axis provided on the middle plate, and , each of the swinging members turns on/off the transmission of the driving force of the drive device to the guide means by a cam shaft installed between the two shafts.
A stage drive mechanism characterized by being capable of OFF control. Claim 2: A cam formed on the camshaft,
2. The stage drive mechanism according to claim 1, wherein transmission of the drive forces of the two drive devices to the guide means is independently controlled. 3. The two drive devices are always in a state of transmitting driving force to the guide means, and are provided with swinging members that rotate around two shafts provided on the middle plate. 2. The stage drive mechanism according to claim 1, wherein a stage movable state or a stage stopped state can be selected by a cam shaft installed between two shafts. 4. A stage movable state or a stage stopped state can be independently selected by a cam formed on a cam shaft installed between the two shafts. The stage drive mechanism according to claim 3. 5. A rotatable pulley is attached to the drive shaft of one of the two drive devices, and the drive shaft of the other drive device is connected to the pulley to form a coaxial handle for stage operation. The stage drive mechanism according to any one of claims 1 to 4, characterized by: