JPH0429354U - - Google Patents

Info

Publication number
JPH0429354U
JPH0429354U JP7082190U JP7082190U JPH0429354U JP H0429354 U JPH0429354 U JP H0429354U JP 7082190 U JP7082190 U JP 7082190U JP 7082190 U JP7082190 U JP 7082190U JP H0429354 U JPH0429354 U JP H0429354U
Authority
JP
Japan
Prior art keywords
disk
radius
buff
polishing
polishes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7082190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7082190U priority Critical patent/JPH0429354U/ja
Publication of JPH0429354U publication Critical patent/JPH0429354U/ja
Pending legal-status Critical Current

Links

JP7082190U 1990-07-03 1990-07-03 Pending JPH0429354U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7082190U JPH0429354U (fr) 1990-07-03 1990-07-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7082190U JPH0429354U (fr) 1990-07-03 1990-07-03

Publications (1)

Publication Number Publication Date
JPH0429354U true JPH0429354U (fr) 1992-03-09

Family

ID=31607307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7082190U Pending JPH0429354U (fr) 1990-07-03 1990-07-03

Country Status (1)

Country Link
JP (1) JPH0429354U (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59182058A (ja) * 1983-03-30 1984-10-16 Mitsubishi Rayon Co Ltd 平面板の研摩方法
JPS6125973U (ja) * 1984-07-23 1986-02-15 豊田合成株式会社 プラズマ処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59182058A (ja) * 1983-03-30 1984-10-16 Mitsubishi Rayon Co Ltd 平面板の研摩方法
JPS6125973U (ja) * 1984-07-23 1986-02-15 豊田合成株式会社 プラズマ処理装置

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